characterised by the method used for supporting substrates in the reaction chamber

Industry

CPC
C23C16/458

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/458characterised by the method used for supporting substrates in the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for forming insulation film
- Patent number 12,241,155
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature RF connection with integral thermal choke
- Patent number 12,243,725
- Issue date Mar 4, 2025
- Lam Research Corporation
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding system for holding substrates during a processing of the su...
- Patent number 12,241,154
- Issue date Mar 4, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system including temperature controller
- Patent number 12,237,183
- Issue date Feb 25, 2025
- Samsung Electronics Co., Ltd.
- Kyoungsik Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor deposition reactor and components for reduced quartz...
- Patent number 12,234,554
- Issue date Feb 25, 2025
- ASM IP Holding B.V.
- Rutvij Naik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method
- Patent number 12,237,167
- Issue date Feb 25, 2025
- Tokyo Electron Limited
- Ken Okoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor with carrying ring for substrate handling, and use of a...
- Patent number 12,234,553
- Issue date Feb 25, 2025
- Aixtron SE
- Benjamin David Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor deposition device capable of reciprocating rotation and lifting
- Patent number 12,227,845
- Issue date Feb 18, 2025
- Betone Technology Shanghai, Inc.
- Weicong Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,228,861
- Issue date Feb 18, 2025
- Semes Co., Ltd.
- Ki Sang Eum
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition device capable of reciprocating rotation...
- Patent number 12,227,844
- Issue date Feb 18, 2025
- Betone Technology Shanghai, Inc.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting apparatus, substrate processing apparatus incl...
- Patent number 12,230,531
- Issue date Feb 18, 2025
- ASM IP Holding B.V.
- Seung Woo Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Level monitoring and active adjustment of a substrate support assembly
- Patent number 12,227,847
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- James V. Santiago
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for semiconductor processing
- Patent number 12,230,530
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,221,696
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pedestal thermal profile tuning using multiple heated zones and the...
- Patent number 12,215,420
- Issue date Feb 4, 2025
- Lam Research Corporation
- Gary B. Lind
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,217,959
- Issue date Feb 4, 2025
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stage, film-forming apparatus, and film-processing apparatus
- Patent number 12,211,710
- Issue date Jan 28, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-throughput vapor deposition apparatus and vapor deposition method
- Patent number 12,209,311
- Issue date Jan 28, 2025
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Weimin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control of a multi-zone pedestal
- Patent number 12,209,312
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing film and film deposition system
- Patent number 12,205,817
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,195,854
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and processing apparatus
- Patent number 12,198,964
- Issue date Jan 14, 2025
- Toto Ltd.
- Jun Shiraishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Member for semiconductor manufacturing apparatus, method for manufa...
- Patent number 12,198,965
- Issue date Jan 14, 2025
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of forming compound structure with 2-dimensional structure
- Patent number 12,188,120
- Issue date Jan 7, 2025
- Seoul National University R&DB Foundation
- Jungwon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, gas nozzle and method of manufactur...
- Patent number 12,188,124
- Issue date Jan 7, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for faceplate temperature control
- Patent number 12,191,169
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
- Patent number 12,191,156
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively clamped carrier assembly for processing tools
- Patent number 12,191,186
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Benjamin B. Riordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Electrostatic chuck with spatially tunable RF coupling to a wafer
- Patent number 12,191,122
- Issue date Jan 7, 2025
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...
- Publication number 20250069866
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Changyou JING
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...
- Publication number 20250070741
- Publication date Feb 27, 2025
- LAM RESEARCH CORPORATION
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COVER PLATE FOR COVERING THE SUSCEPTOR SIDE FACING THE PROCESS CHAM...
- Publication number 20250066917
- Publication date Feb 27, 2025
- AIXTRON SE
- Benjamin David WRIGHT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCREWLESS SEMICONDUCTOR PROCESSING CHAMBERS
- Publication number 20250069944
- Publication date Feb 27, 2025
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Bo-Ru CHEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH SEAL SURFACE
- Publication number 20250062150
- Publication date Feb 20, 2025
- LAM RESEARCH CORPORATION
- Patrick Girard Breiling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY
- Publication number 20250051910
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Shinichi OKI
- B08 - CLEANING
Information Patent Application
FILM DEPOSITION SYSTEMS AND METHODS
- Publication number 20250051918
- Publication date Feb 13, 2025
- ASM IP HOLDING B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250051919
- Publication date Feb 13, 2025
- TES CO., LTD.
- Shin-Myoung KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250051920
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Yudai FUKUSHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER
- Publication number 20250051921
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Alon Ganany
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...
- Publication number 20250054804
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIAMOND-LIKE CARBON GAP FILL
- Publication number 20250046599
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Jialiang WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM
- Publication number 20250043419
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Jerome Innocent
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PECVD Method and Apparatus
- Publication number 20250046604
- Publication date Feb 6, 2025
- SPTS TECHNOLOGIES LIMITED
- Giorgos ANTONIOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250043414
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Kazumi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma-Enhanced Chemical Vapor Deposition Coating System
- Publication number 20250043426
- Publication date Feb 6, 2025
- HZO, Inc.
- Daniel Pulsipher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS IN-SITU MEASUREMENTS
- Publication number 20250034712
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Anirudhan Chandrasekaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...
- Publication number 20250038012
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20250038024
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...
- Publication number 20250034714
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Wentao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
- Publication number 20250034706
- Publication date Jan 30, 2025
- The Regents of the University of Michigan
- Neil P. Dasgupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT PINS, LIFT PIN ARRANGEMENTS AND SEMICONDUCTOR PROCESSING SYSTE...
- Publication number 20250034713
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Jaehyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER
- Publication number 20250034707
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Mukhles SOWWAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE
- Publication number 20250034711
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Gaku WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES
- Publication number 20250027198
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250029817
- Publication date Jan 23, 2025
- JUSUNG ENGINEERING CO., LTD.
- WOONG KYO OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250027201
- Publication date Jan 23, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Yong JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR CLEANING SUBSTRATE PROCE...
- Publication number 20250027200
- Publication date Jan 23, 2025
- Jusung Engineering Co., Ltd.
- Won Tae CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250022702
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Masayuki ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for supporting substrates in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for forming insulation film

High temperature RF connection with integral thermal choke

Holding system for holding substrates during a processing of the su...

Semiconductor processing system including temperature controller

Semiconductor deposition reactor and components for reduced quartz...

Deposition method

CVD reactor with carrying ring for substrate handling, and use of a...

Vapor deposition device capable of reciprocating rotation and lifting

Apparatus for treating substrate

Chemical vapor deposition device capable of reciprocating rotation...

Substrate supporting apparatus, substrate processing apparatus incl...

Level monitoring and active adjustment of a substrate support assembly

Apparatus and methods for semiconductor processing

Process kits and related methods for processing chambers to facilit...

Pedestal thermal profile tuning using multiple heated zones and the...

Method of manufacturing semiconductor device, substrate processing...

Stage, film-forming apparatus, and film-processing apparatus

High-throughput vapor deposition apparatus and vapor deposition method

Temperature control of a multi-zone pedestal

Method for depositing film and film deposition system

Substrate processing apparatus with an injector

Substrate processing apparatus, method of processing substrate, met...

Electrostatic chuck and processing apparatus

Member for semiconductor manufacturing apparatus, method for manufa...

Method of forming compound structure with 2-dimensional structure

Substrate processing apparatus, gas nozzle and method of manufactur...

Systems and methods for faceplate temperature control

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Actively clamped carrier assembly for processing tools

Electrostatic chuck with spatially tunable RF coupling to a wafer

Patents Applicationslast 30 patents

IN SITU REAL-TIME SENSING AND COMPENSATION OF NON-UNIFORMITIES IN S...

COMBINER AND DISTRIBUTOR FOR ADJUSTING IMPEDANCES OR POWER ACROSS M...

COVER PLATE FOR COVERING THE SUSCEPTOR SIDE FACING THE PROCESS CHAM...

SCREWLESS SEMICONDUCTOR PROCESSING CHAMBERS

ELECTROSTATIC CHUCK WITH SEAL SURFACE

CHAMBER COMPONENT FOR IMPROVED CLEANING EFFICIENCY

FILM DEPOSITION SYSTEMS AND METHODS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

MULTIPLE-ZONE GAS BOX BLOCK SURFACE HEATER

APPARATUS AND METHODS TO TRANSFER SUBSTRATES INTO AND OUT OF A SPAT...

DIAMOND-LIKE CARBON GAP FILL

FIELD-ASSISTED THERMAL CYCLICAL VAPOR DEPOSITION OF A HZO FILM

PECVD Method and Apparatus

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

Plasma-Enhanced Chemical Vapor Deposition Coating System

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

METHODS AND APPARATUS IN-SITU MEASUREMENTS

SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...

Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...

LIFT PINS, LIFT PIN ARRANGEMENTS AND SEMICONDUCTOR PROCESSING SYSTE...

COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE

SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND METHOD FOR CLEANING SUBSTRATE PROCE...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...