characterised by the method used for supporting substrates in the reaction chamber

Industry

CPC
C23C16/458

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/458characterised by the method used for supporting substrates in the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for coating a metal workpiece with graphene
- Patent number 12,359,310
- Issue date Jul 15, 2025
- Ultra Conductive Copper Company, Inc.
- Horst Jakob Adams
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanisms for supplying process gas into wafer process apparatus
- Patent number 12,359,318
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Su-Horng Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor chamber components with advanced coating techniques
- Patent number 12,362,150
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Laksheswar Kalita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming layer
- Patent number 12,362,160
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Liang Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Arrangement for measuring the surface temperature of a susceptor in...
- Patent number 12,359,319
- Issue date Jul 15, 2025
- Aixtron SE
- Peter Sebald Lauffer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and substrate processing apparatus
- Patent number 12,362,142
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Takashi Chiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for spindle mechanism monitoring and maintenance in process...
- Patent number 12,362,157
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Hsiang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas showerhead with controllable airflow distribution
- Patent number 12,351,916
- Issue date Jul 8, 2025
- PIOTECH INC.
- Zhenjie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liner and epitaxial reactor comprising same
- Patent number 12,351,940
- Issue date Jul 8, 2025
- SK SILTRON CO., LTD.
- Se Ri Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for conductance liners in semiconductor proce...
- Patent number 12,354,847
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Timothy Joseph Franklin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kits and related methods for processing chambers to facilit...
- Patent number 12,354,855
- Issue date Jul 8, 2025
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fixture and method for determining position of a target in a reacti...
- Patent number 12,354,893
- Issue date Jul 8, 2025
- ASM IP Holding B.V.
- Siyao Luan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for topography-selective depositions
- Patent number 12,347,675
- Issue date Jul 1, 2025
- ASM IP Holding B.V.
- Akiko Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heat insulator assembly and method...
- Patent number 12,344,935
- Issue date Jul 1, 2025
- Kokusai Electric Corporation
- Akihiro Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-functional shutter disk for thin film deposition chamber
- Patent number 12,344,929
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation apparatus
- Patent number 12,341,004
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yumiko Kawano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spatially tunable deposition to compensate within wafer differentia...
- Patent number 12,338,531
- Issue date Jun 24, 2025
- Lam Research Corporation
- Fayaz A. Shaikh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vapor phase growth method using reflector with changeable pattern
- Patent number 12,338,543
- Issue date Jun 24, 2025
- NUFLARE TECHNOLOGY, INC.
- Yoshitaka Ishikawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Radio frequency power return path
- Patent number 12,340,984
- Issue date Jun 24, 2025
- Applied Materials, Inc.
- Luke Bonecutter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for backside deposition of a substrate
- Patent number 12,341,053
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Ronald Nasman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tunable plasma exclusion zone in semiconductor fabrication
- Patent number 12,340,987
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Che Wei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cooled substrate support assembly for radio frequency environments
- Patent number 12,334,315
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Vijay D. Parkhe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber body feedthrough for in chamber resistive heating element
- Patent number 12,334,341
- Issue date Jun 17, 2025
- Applied Materials, Inc.
- Brian Hayes Burrows
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface treatment apparatus
- Patent number 12,331,400
- Issue date Jun 17, 2025
- Creating Nano Technologies, Inc.
- Ming-Yueh Chuang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Filter device and plasma processing apparatus
- Patent number 12,334,309
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Naohiko Okunishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated showerhead with thermal control for delivering radical a...
- Patent number 12,331,402
- Issue date Jun 17, 2025
- Lam Research Corporation
- Rachel E. Batzer
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Film forming apparatus
- Patent number 12,325,916
- Issue date Jun 10, 2025
- Samsung Electronics Co., Ltd.
- Hyunho Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for CVD deposition of n-type doped silicon carbide and epita...
- Patent number 12,325,932
- Issue date Jun 10, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reciprocating rotary CVD equipment and application method
- Patent number 12,325,917
- Issue date Jun 10, 2025
- Betone Technology Shanghai, Inc.
- Xiaoliang Jin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of conformal and gap-fill amorphous silicon thin-films
- Patent number 12,325,910
- Issue date Jun 10, 2025
- Applied Materials, Inc.
- Yihong Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING
- Publication number 20250230536
- Publication date Jul 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...
- Publication number 20250233007
- Publication date Jul 17, 2025
- ASM IP HOLDING B.V.
- Tilakraj Durgadahalli Shankaregowda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD
- Publication number 20250223701
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Takehiro FUKADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Advanced Susceptor for Reel-to-Reel Operations
- Publication number 20250223702
- Publication date Jul 10, 2025
- Albert DELANEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250223703
- Publication date Jul 10, 2025
- Kokusai Electric Corporation
- Toshiyuki KIKUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR AREA-SELECTIVE DEPOSITION
- Publication number 20250223688
- Publication date Jul 10, 2025
- ASM IP HOLDING B.V.
- Chao Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Device to Reduce Epitaxial Defects Due to Contact Stress...
- Publication number 20250218856
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Heat Insulating Structure, Method o...
- Publication number 20250215561
- Publication date Jul 3, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UNIFORM COATING OF A SURFACE
- Publication number 20250215554
- Publication date Jul 3, 2025
- Renaissance Fusion
- Francesco VOLPE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER PROCESSING APPARATUS
- Publication number 20250218852
- Publication date Jul 3, 2025
- Powerchip Semiconductor Manufacturing Corporation
- Chia Chung Hsieh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...
- Publication number 20250210343
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Marina Mariano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...
- Publication number 20250207287
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING C...
- Publication number 20250210319
- Publication date Jun 26, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD
- Publication number 20250207252
- Publication date Jun 26, 2025
- BENEQ OY
- Pekka SOININEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ADJUSTMENT METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250207259
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Kiyoshi MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20250210313
- Publication date Jun 26, 2025
- Samsung Electronics Co., Ltd.
- Sunwoo BANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Apparatus, Substrate Support, Substrate Proces...
- Publication number 20250207258
- Publication date Jun 26, 2025
- Kokusai Electric Corporation
- Arito OGAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR DEPOSITING A LAYER
- Publication number 20250201526
- Publication date Jun 19, 2025
- ASM IP HOLDING B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, MET...
- Publication number 20250201594
- Publication date Jun 19, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250198000
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250198001
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250198003
- Publication date Jun 19, 2025
- TES CO., LTD.
- Kyung-Ho JANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250201551
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Kazuyuki OKUDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR IMPROVED DEPOSITION PRODUCTS
- Publication number 20250197997
- Publication date Jun 19, 2025
- LOTUS APPLIED TECHNOLOGY
- ERIC DICKEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250188606
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR REAL-TIME OPTIMIZATION AND CONTROL OF SUBST...
- Publication number 20250188616
- Publication date Jun 12, 2025
- TATA CONSULTANCY SERVICES LIMITED
- Utkarsh Prateek Brajesh SINHA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250188597
- Publication date Jun 12, 2025
- Kokusai Electric Corporation
- Atsushi MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION DEVICE
- Publication number 20250188612
- Publication date Jun 12, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND METHOD OF CLEANING INSIDE OF CHAMBER
- Publication number 20250191896
- Publication date Jun 12, 2025
- ASM IP HOLDING B.V.
- Ryo MIYAMA
- B08 - CLEANING
Information Patent Application
HEAT SHEILD MEMBER AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250188613
- Publication date Jun 12, 2025
- TOKYO ELECTRON LIMITED
- Atsushi SHIROTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for supporting substrates in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for coating a metal workpiece with graphene

Mechanisms for supplying process gas into wafer process apparatus

Semiconductor chamber components with advanced coating techniques

Method for forming layer

Arrangement for measuring the surface temperature of a susceptor in...

Plasma processing method and substrate processing apparatus

Methods for spindle mechanism monitoring and maintenance in process...

Gas showerhead with controllable airflow distribution

Liner and epitaxial reactor comprising same

Methods and apparatus for conductance liners in semiconductor proce...

Process kits and related methods for processing chambers to facilit...

Fixture and method for determining position of a target in a reacti...

Methods and systems for topography-selective depositions

Substrate processing apparatus, heat insulator assembly and method...

Multi-functional shutter disk for thin film deposition chamber

Film formation method and film formation apparatus

Spatially tunable deposition to compensate within wafer differentia...

Vapor phase growth method using reflector with changeable pattern

Radio frequency power return path

System for backside deposition of a substrate

Tunable plasma exclusion zone in semiconductor fabrication

Cooled substrate support assembly for radio frequency environments

Chamber body feedthrough for in chamber resistive heating element

Surface treatment apparatus

Filter device and plasma processing apparatus

Integrated showerhead with thermal control for delivering radical a...

Film forming apparatus

Method for CVD deposition of n-type doped silicon carbide and epita...

Reciprocating rotary CVD equipment and application method

Deposition of conformal and gap-fill amorphous silicon thin-films

Patents Applicationslast 30 patents

DEPOSITION SYSTEM FOR HIGH ACCURACY PATTERNING

SUBSTRATE LIFT ASSEMBLY, SYSTEM INCLUDING THE ASSEMBLY, AND METHODS...

SUBSTRATE-PROCESSING APPARATUS AND SUBSTRATE-PROCESSING METHOD

Advanced Susceptor for Reel-to-Reel Operations

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHOD AND APPARATUS FOR AREA-SELECTIVE DEPOSITION

Method and Device to Reduce Epitaxial Defects Due to Contact Stress...

Substrate Processing Apparatus, Heat Insulating Structure, Method o...

UNIFORM COATING OF A SURFACE

WAFER PROCESSING APPARATUS

TEMPERATURE CONTROL MODULE FOR A FURNACE REACTOR AND METHOD OF CONT...

SUBSTRATE SUPPORTING PLATE, THIN FILM DEPOSITION APPARATUS INCLUDIN...

ELECTRODE CONFIGURATIONS AND MAGNET CONFIGURATIONS FOR PROCESSING C...

REACTION CHAMBER, ATOMIC LAYER DEPOSITION APPARATUS AND A METHOD

ADJUSTMENT METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS FOR PROCESSING A SUBSTRATE

Substrate Processing Apparatus, Substrate Support, Substrate Proces...

METHODS AND SYSTEMS FOR DEPOSITING A LAYER

MODULAR PROCESSING CHAMBERS AND RELATED HEATING CONFIGURATIONS, MET...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

METHODS AND SYSTEMS FOR IMPROVED DEPOSITION PRODUCTS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

METHODS AND SYSTEMS FOR REAL-TIME OPTIMIZATION AND CONTROL OF SUBST...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

FILM DEPOSITION DEVICE

SUBSTRATE TREATMENT APPARATUS AND METHOD OF CLEANING INSIDE OF CHAMBER

HEAT SHEILD MEMBER AND SUBSTRATE PROCESSING APPARATUS