characterised by the method used for supporting substrates in the reaction chamber

Industry

CPC
C23C16/458

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/458characterised by the method used for supporting substrates in the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of processing substrate, substrate processing apparatus, met...
- Patent number 12,320,778
- Issue date Jun 3, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD reactor and method for controlling the surface temperature of t...
- Patent number 12,320,002
- Issue date Jun 3, 2025
- Aixtron SE
- Ralf Leiers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus including gas diffusion nozzle
- Patent number 12,320,003
- Issue date Jun 3, 2025
- ASM IP Holding B.V.
- Daiki Nojiri
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor with centering pin for epitaxial deposition
- Patent number 12,322,644
- Issue date Jun 3, 2025
- Veeco Instruments, Inc.
- Alexander Gurary
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and semiconductor processing met...
- Patent number 12,312,690
- Issue date May 27, 2025
- Samsung Electronics Co., Ltd.
- Minju Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bottom cover plate to reduce wafer planar nonuniformity
- Patent number 12,315,746
- Issue date May 27, 2025
- Applied Materials, Inc.
- Zubin Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rapid tuning of critical dimension non-uniformity by modulating tem...
- Patent number 12,308,264
- Issue date May 20, 2025
- Lam Research Corporation
- Ravi Kumar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor of a CVD reactor
- Patent number 12,305,282
- Issue date May 20, 2025
- Aixtron SE
- Wilhelm Josef Thomas Krücken
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metal silicon oxide and metal silicon oxynitride...
- Patent number 12,305,281
- Issue date May 20, 2025
- ASM IP Holding B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dithering or dynamic offsets for improved uniformity
- Patent number 12,305,283
- Issue date May 20, 2025
- Applied Materials, Inc.
- Joseph AuBuchon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical source vessel with dip tube
- Patent number 12,297,540
- Issue date May 13, 2025
- ASM IP Holding B.V.
- Andrew Michael Yednak
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor substrate support power transmission components
- Patent number 12,300,474
- Issue date May 13, 2025
- Applied Materials, Inc.
- Paul L. Brillhart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming system and film forming method
- Patent number 12,297,539
- Issue date May 13, 2025
- Tokyo Electron Limited
- Syuji Nozawa
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,297,536
- Issue date May 13, 2025
- Tokyo Electron Limited
- Manabu Honma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, elevator and method of manufacturin...
- Patent number 12,293,932
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Using controlled gas pressure for backside wafer support
- Patent number 12,293,934
- Issue date May 6, 2025
- Applied Materials, Inc.
- Paul Steffas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tray and substrate fixing device
- Patent number 12,291,780
- Issue date May 6, 2025
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system for high accuracy patterning
- Patent number 12,289,979
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater and stage having the heater
- Patent number 12,284,731
- Issue date Apr 22, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device to reduce epitaxial defects due to contact stress...
- Patent number 12,283,515
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic susceptor
- Patent number 12,280,566
- Issue date Apr 22, 2025
- MiCo Ceramics Ltd.
- Taekgon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for susceptor deposition material removal
- Patent number 12,280,465
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield cooling assembly, reaction chamber and semiconductor process...
- Patent number 12,278,096
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment fixture for a reactor system
- Patent number 12,278,129
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Surojit Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate retaining apparatus, system including the apparatus, and...
- Patent number 12,270,106
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate suppport and method of ma...
- Patent number 12,272,579
- Issue date Apr 8, 2025
- Kokusai Electric Corporation
- Yusaku Okajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS
- Publication number 20250179640
- Publication date Jun 5, 2025
- ADVANCED MICRO-FABRICATION EQUIPMENT INC.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20250179641
- Publication date Jun 5, 2025
- JIANGSU LEADMICRO NANO TECHNOLOGY CO., LTD.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...
- Publication number 20250179633
- Publication date Jun 5, 2025
- LAM RESEARCH CORPORATION
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RADIATION SHIELD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
- Publication number 20250179644
- Publication date Jun 5, 2025
- Samsung Electronics Co., Ltd.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR...
- Publication number 20250183070
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK APPARATUS
- Publication number 20250171901
- Publication date May 29, 2025
- Samsung Electronics Co., Ltd.
- Dongsu KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus, Cleaning Method, Method of Manufact...
- Publication number 20250171895
- Publication date May 29, 2025
- Kokusai Electric Corporation
- Yoshitomo HASHIMOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL
- Publication number 20250171902
- Publication date May 29, 2025
- LAM RESEARCH CORPORATION
- Ramesh CHANDRASEKHARAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250174466
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS FOR DIRECT DEPOSITION OF GRAPHENE OR GRAPHENE OXIDE ONTO A...
- Publication number 20250163572
- Publication date May 22, 2025
- UNIVERSITE PICARDIE JULES VERNE
- MUSTAPHA JOUIAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250163576
- Publication date May 22, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250154650
- Publication date May 15, 2025
- EUGENE TECHNOLOGY CO., LTD.
- In Soo SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Selective metal Capping with Metal Halide enhancement
- Publication number 20250157824
- Publication date May 15, 2025
- Applied Materials, Inc.
- Shumao ZHANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAYER UNIFORMITY IMPROVEMENT OF DEPOSITION-INHIBITION-DEPOSITION PR...
- Publication number 20250154652
- Publication date May 15, 2025
- LAM RESEARCH CORPORATION
- Krishna BIRRU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR EMISSIVITY-CORRECTED PYROMETRY
- Publication number 20250154655
- Publication date May 15, 2025
- AIXTRON SE
- Karsten ROJEK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-CARRIER STRUCTURE
- Publication number 20250154653
- Publication date May 15, 2025
- SGL CARBON SE
- Shane BRAUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...
- Publication number 20250146129
- Publication date May 8, 2025
- SEMES CO., LTD.
- Yeong Gyu KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER TRANSFER SYSTEM AND METHOD
- Publication number 20250149352
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Chin WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...
- Publication number 20250146133
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Yeontae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250149311
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Junho IM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137133
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...
- Publication number 20250137134
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Felix Rabinovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...
- Publication number 20250140597
- Publication date May 1, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Susceptor Assembly for a Chemical Vapor Deposition Reactor
- Publication number 20250137135
- Publication date May 1, 2025
- Shahab KHANDAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE
- Publication number 20250137121
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Elisa K. Atosuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE
- Publication number 20250137131
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Minju LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137132
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250129471
- Publication date Apr 24, 2025
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250129472
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE INPUT POST MIX SHOWERHEAD
- Publication number 20250129475
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Norman JACOBSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for supporting substrates in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of processing substrate, substrate processing apparatus, met...

CVD reactor and method for controlling the surface temperature of t...

Substrate processing apparatus including gas diffusion nozzle

Reactor with centering pin for epitaxial deposition

Semiconductor processing apparatus and semiconductor processing met...

Bottom cover plate to reduce wafer planar nonuniformity

Rapid tuning of critical dimension non-uniformity by modulating tem...

Susceptor of a CVD reactor

Method for forming metal silicon oxide and metal silicon oxynitride...

Dithering or dynamic offsets for improved uniformity

Chemical source vessel with dip tube

Semiconductor substrate support power transmission components

Film forming system and film forming method

Substrate processing apparatus and substrate processing method

Substrate processing apparatus, elevator and method of manufacturin...

Using controlled gas pressure for backside wafer support

Tray and substrate fixing device

Deposition system for high accuracy patterning

Heater and stage having the heater

Method and device to reduce epitaxial defects due to contact stress...

Ceramic susceptor

Substrate processing method and substrate processing apparatus

Apparatus and methods for susceptor deposition material removal

Shield cooling assembly, reaction chamber and semiconductor process...

Alignment fixture for a reactor system

Wafer chuck structure with holes in upper surface to improve temper...

Substrate supporting plate, thin film deposition apparatus includin...

Substrate retaining apparatus, system including the apparatus, and...

Substrate processing apparatus, substrate suppport and method of ma...

Chemical vapor infiltration densification method using single-pile...

Patents Applicationslast 30 patents

HEATING APPARATUS, CVD EQUIPMENT INCLUDING THE HEATING APPARATUS

SEMICONDUCTOR DEVICE

PEDESTAL THERMAL PROFILE TUNING USING MULTIPLE HEATED ZONES AND THE...

RADIATION SHIELD AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME

CHAMBER ARRANGEMENTS WITH UPPER AND LOWER PYROMETERS, SEMICONDUCTOR...

ELECTROSTATIC CHUCK APPARATUS

Substrate Processing Apparatus, Cleaning Method, Method of Manufact...

TEMPERATURE CONTROL OF A MULTI-ZONE PEDESTAL

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

PROCESS FOR DIRECT DEPOSITION OF GRAPHENE OR GRAPHENE OXIDE ONTO A...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

Selective metal Capping with Metal Halide enhancement

LAYER UNIFORMITY IMPROVEMENT OF DEPOSITION-INHIBITION-DEPOSITION PR...

METHOD FOR EMISSIVITY-CORRECTED PYROMETRY

SUBSTRATE-CARRIER STRUCTURE

SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...

WAFER TRANSFER SYSTEM AND METHOD

SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...

SUBSTRATE PROCESSING APPARATUS

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...

SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...

Susceptor Assembly for a Chemical Vapor Deposition Reactor

METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE

DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

MULTIPLE INPUT POST MIX SHOWERHEAD