characterised by the method used for supporting substrates in the reaction chamber

Industry

CPC
C23C16/458

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/458characterised by the method used for supporting substrates in the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus, elevator and method of manufacturin...
- Patent number 12,293,932
- Issue date May 6, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Using controlled gas pressure for backside wafer support
- Patent number 12,293,934
- Issue date May 6, 2025
- Applied Materials, Inc.
- Paul Steffas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tray and substrate fixing device
- Patent number 12,291,780
- Issue date May 6, 2025
- Shinko Electric Industries Co., Ltd.
- Norio Shiraiwa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system for high accuracy patterning
- Patent number 12,289,979
- Issue date Apr 29, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ping-Yin Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device to reduce epitaxial defects due to contact stress...
- Patent number 12,283,515
- Issue date Apr 22, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Sih-Jie Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heater and stage having the heater
- Patent number 12,284,731
- Issue date Apr 22, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic susceptor
- Patent number 12,280,566
- Issue date Apr 22, 2025
- MiCo Ceramics Ltd.
- Taekgon Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for susceptor deposition material removal
- Patent number 12,280,465
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Vijayabhaskara Venkatagiriyappa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield cooling assembly, reaction chamber and semiconductor process...
- Patent number 12,278,096
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alignment fixture for a reactor system
- Patent number 12,278,129
- Issue date Apr 15, 2025
- ASM IP Holding B.V.
- Surojit Ganguli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer chuck structure with holes in upper surface to improve temper...
- Patent number 12,272,585
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Ting-Jung Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate retaining apparatus, system including the apparatus, and...
- Patent number 12,270,106
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, substrate suppport and method of ma...
- Patent number 12,272,579
- Issue date Apr 8, 2025
- Kokusai Electric Corporation
- Yusaku Okajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor infiltration densification method using single-pile...
- Patent number 12,264,394
- Issue date Apr 1, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu Champagne
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 12,266,522
- Issue date Apr 1, 2025
- Kokusai Electric Corporation
- Kazuyuki Okuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film thickness uniformity improvement using edge ring and bias elec...
- Patent number 12,266,560
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Kin Pong Lo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and stage cleaning method
- Patent number 12,261,060
- Issue date Mar 25, 2025
- Tokyo Electron Limited
- Tsutomu Hiroki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems for depositing a layer
- Patent number 12,255,053
- Issue date Mar 18, 2025
- ASM IP Holding B.V.
- Daniele Piumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical devices
- Patent number 12,252,789
- Issue date Mar 18, 2025
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for manufacturing semiconductor device
- Patent number 12,252,791
- Issue date Mar 18, 2025
- Denso Corporation
- Hiroaki Fujibayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for a preheat ring in a semiconductor wafer rea...
- Patent number 12,252,806
- Issue date Mar 18, 2025
- GlobalWafers Co., Ltd.
- Chieh Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods to eliminate of deposition on wafer bevel and backside
- Patent number 12,255,054
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for performing film forming process on substrate and meth...
- Patent number 12,247,287
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate supporting assembly and substrate processing apparatus
- Patent number 12,249,536
- Issue date Mar 11, 2025
- Wonik IPS Co., Ltd.
- Hyun Jong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,247,288
- Issue date Mar 11, 2025
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming insulation film
- Patent number 12,241,155
- Issue date Mar 4, 2025
- Tokyo Electron Limited
- Nobuo Matsuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature RF connection with integral thermal choke
- Patent number 12,243,725
- Issue date Mar 4, 2025
- Lam Research Corporation
- Timothy S. Thomas
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding system for holding substrates during a processing of the su...
- Patent number 12,241,154
- Issue date Mar 4, 2025
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Max Siebert
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...
- Publication number 20250146129
- Publication date May 8, 2025
- SEMES CO., LTD.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER TRANSFER SYSTEM AND METHOD
- Publication number 20250149352
- Publication date May 8, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...
- Publication number 20250146133
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250149311
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137133
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...
- Publication number 20250137134
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Felix Rabinovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...
- Publication number 20250140597
- Publication date May 1, 2025
- LPE S.P.A.
- Silvio Preti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Susceptor Assembly for a Chemical Vapor Deposition Reactor
- Publication number 20250137135
- Publication date May 1, 2025
- Shahab KHANDAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE
- Publication number 20250137121
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Elisa K. Atosuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE
- Publication number 20250137131
- Publication date May 1, 2025
- Samsung Electronics Co., Ltd.
- Minju LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR SUSCEPTOR LEVELING
- Publication number 20250137132
- Publication date May 1, 2025
- ASM IP HOLDING B.V.
- Hannelore Azora Hemminger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KIT...
- Publication number 20250132189
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Masato ISHII
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS AND FILM FORMING METHOD
- Publication number 20250129471
- Publication date Apr 24, 2025
- Shin-Etsu Chemical Co., Ltd.
- Hiroshi HASHIGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING APPARATUS
- Publication number 20250129472
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTIPLE INPUT POST MIX SHOWERHEAD
- Publication number 20250129475
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Norman JACOBSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD AND FILM-FORMING SYSTEM
- Publication number 20250129479
- Publication date Apr 24, 2025
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUSES FOR TEMPERATURE INDEXED ALD
- Publication number 20250129473
- Publication date Apr 24, 2025
- ASM IP HOLDING B.V.
- Bert Jongbloed
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS FLOW IMPROVEMENT FOR PROCESS CHAMBER
- Publication number 20250122624
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Vishwas Kumar PANDEY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250125128
- Publication date Apr 17, 2025
- NGK Insulators, Ltd.
- Shingo AMANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME
- Publication number 20250125184
- Publication date Apr 17, 2025
- MiCo Ceramics Ltd.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC SUSCEPTOR
- Publication number 20250116002
- Publication date Apr 10, 2025
- MICO CERAMICS LTD.
- Hyosung PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING CHAMBER WITH RF RETURN PATH
- Publication number 20250118593
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Vellaichamy NAGAPPAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUC...
- Publication number 20250116001
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Allison Yau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS...
- Publication number 20250115995
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Iordan Iordanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPACT DYNAMIC LEVELING LIFT MECHANISM
- Publication number 20250115999
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Tuan Anh Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE ROTATING APPARATUS, PROCESSING SYSTEM, AND PROCESSING METHOD
- Publication number 20250116000
- Publication date Apr 10, 2025
- SANTEC HOLDINGS CORPORATION
- Noboru UEHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT SYSTEM
- Publication number 20250112068
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Klaas Boonstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION SYSTEM WITH HOT-WALL HYBRID FLOW REACTOR...
- Publication number 20250109493
- Publication date Apr 3, 2025
- VEECO INSTRUMENTS INC.
- Johannes Kaeppeler
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...
- Publication number 20250109497
- Publication date Apr 3, 2025
- SAFRAN LANDING SYSTEMS
- Matthieu CHAMPAGNE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...
- Publication number 20250109495
- Publication date Apr 3, 2025
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for supporting substrates in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus, elevator and method of manufacturin...

Using controlled gas pressure for backside wafer support

Tray and substrate fixing device

Deposition system for high accuracy patterning

Method and device to reduce epitaxial defects due to contact stress...

Heater and stage having the heater

Ceramic susceptor

Substrate processing method and substrate processing apparatus

Apparatus and methods for susceptor deposition material removal

Shield cooling assembly, reaction chamber and semiconductor process...

Alignment fixture for a reactor system

Wafer chuck structure with holes in upper surface to improve temper...

Substrate supporting plate, thin film deposition apparatus includin...

Substrate retaining apparatus, system including the apparatus, and...

Substrate processing apparatus, substrate suppport and method of ma...

Chemical vapor infiltration densification method using single-pile...

Substrate processing apparatus, method of manufacturing semiconduct...

Film thickness uniformity improvement using edge ring and bias elec...

Substrate processing apparatus and stage cleaning method

Methods and systems for depositing a layer

Nano-coating protection method for electrical devices

Apparatus for manufacturing semiconductor device

Systems and methods for a preheat ring in a semiconductor wafer rea...

Methods to eliminate of deposition on wafer bevel and backside

Apparatus for performing film forming process on substrate and meth...

Substrate supporting assembly and substrate processing apparatus

Substrate processing apparatus and method

Method for forming insulation film

High temperature RF connection with integral thermal choke

Holding system for holding substrates during a processing of the su...

Patents Applicationslast 30 patents

SEMICONDUCTOR MANUFACTURING FACILITY AND SHOWER HEAD COATING METHOD...

WAFER TRANSFER SYSTEM AND METHOD

SUBSTRATE SUPPORTING UNIT, APPARATUS FOR TREATING SUBSTRATE, AND ME...

SUBSTRATE PROCESSING APPARATUS

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

CHAMBER BODIES HAVING MACHINED UPPER WALLS, CHAMBER ARRANGEMENTS AN...

SUBSTRATE SUPPORT DEVICE FOR A REACTION CHAMBER OF AN EPITAXIAL REA...

Susceptor Assembly for a Chemical Vapor Deposition Reactor

METHOD AND SYSTEM FOR DEPOSITING METAL PHOSPHIDE

DEPOSITION APPARATUS AND METHOD OF DEPOSITING SUBSTRATE

METHODS AND APPARATUS FOR SUSCEPTOR LEVELING

LIFT PINS INCLUDING OPENING, AND RELATED COMPONENTS AND CHAMBER KIT...

FILM FORMING APPARATUS AND FILM FORMING METHOD

FILM-FORMING METHOD AND FILM-FORMING APPARATUS

MULTIPLE INPUT POST MIX SHOWERHEAD

FILM-FORMING METHOD AND FILM-FORMING SYSTEM

METHOD AND APPARATUSES FOR TEMPERATURE INDEXED ALD

GAS FLOW IMPROVEMENT FOR PROCESS CHAMBER

CERAMIC SUSCEPTOR

CERAMIC SUSCEPTOR AND METHOD OF MANUFACTURING SAME

CERAMIC SUSCEPTOR

PROCESSING CHAMBER WITH RF RETURN PATH

ARC REDUCTION AND RF CONTROL FOR ELECTROSTATIC CHUCKS IN SEMICONDUC...

MIXING BLOCKS FOR FLUID SYSTEMS, FIXTURES AND FIXTURE ARRANGEMENTS...

COMPACT DYNAMIC LEVELING LIFT MECHANISM

SUBSTRATE ROTATING APPARATUS, PROCESSING SYSTEM, AND PROCESSING METHOD

WAFER BOAT SYSTEM

CHEMICAL VAPOR DEPOSITION SYSTEM WITH HOT-WALL HYBRID FLOW REACTOR...

CHEMICAL VAPOR INFILTRATION DENSIFICATION METHOD USING SINGLE-PILE...

FURNACE TUBE FOR THIN FILM DEPOSITION, THIN FILM DEPOSITION METHOD...