characterised by the method used for supporting substrates in the reaction chamber

Industry

CPC
C23C16/458

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/458characterised by the method used for supporting substrates in the reaction chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Stage, film-forming apparatus, and film-processing apparatus
- Patent number 12,211,710
- Issue date Jan 28, 2025
- NHK Spring Co., Ltd.
- Toshihiko Hanamachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High-throughput vapor deposition apparatus and vapor deposition method
- Patent number 12,209,311
- Issue date Jan 28, 2025
- Shanghai Institute of Microsystem and Information Technology, Chinese Academy...
- Weimin Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature control of a multi-zone pedestal
- Patent number 12,209,312
- Issue date Jan 28, 2025
- Lam Research Corporation
- Ramesh Chandrasekharan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for depositing film and film deposition system
- Patent number 12,205,817
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus with an injector
- Patent number 12,195,852
- Issue date Jan 14, 2025
- ASM IP Holding B.V.
- Kornelius Haanstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 12,195,854
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Teruo Yoshino
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck and processing apparatus
- Patent number 12,198,964
- Issue date Jan 14, 2025
- Toto Ltd.
- Jun Shiraishi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Member for semiconductor manufacturing apparatus, method for manufa...
- Patent number 12,198,965
- Issue date Jan 14, 2025
- NGK Insulators, Ltd.
- Kazuhiro Nobori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for faceplate temperature control
- Patent number 12,191,169
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming compound structure with 2-dimensional structure
- Patent number 12,188,120
- Issue date Jan 7, 2025
- Seoul National University R&DB Foundation
- Jungwon Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, gas nozzle and method of manufactur...
- Patent number 12,188,124
- Issue date Jan 7, 2025
- Kokusai Electric Corporation
- Yuji Takebayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ribbon beam plasma enhanced chemical vapor deposition system for an...
- Patent number 12,191,156
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actively clamped carrier assembly for processing tools
- Patent number 12,191,186
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Benjamin B. Riordon
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Electrostatic chuck with spatially tunable RF coupling to a wafer
- Patent number 12,191,122
- Issue date Jan 7, 2025
- Lam Research Corporation
- John Drewery
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 12,191,140
- Issue date Jan 7, 2025
- Tokyo Electron Limited
- Yutaka Motoyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for physical vapor deposition and method for forming a layer
- Patent number 12,191,127
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Hsin-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer system and method of use
- Patent number 12,191,165
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Kai-Chin Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cover plate for covering the susceptor side facing the process cham...
- Patent number 12,180,590
- Issue date Dec 31, 2024
- Aixtron SE
- Benjamin David Wright
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Device and method for ensuring planarity of a semiconductor wafer d...
- Patent number 12,180,592
- Issue date Dec 31, 2024
- EPILUVAC AB
- Roger Nilsson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead for process tool
- Patent number 12,180,589
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Anthony Dip
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods to transfer substrates into and out of a spat...
- Patent number 12,183,618
- Issue date Dec 31, 2024
- Applied Materials, Inc.
- Sanjeev Baluja
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating method and film layer thereof, and coating fixture and appl...
- Patent number 12,180,582
- Issue date Dec 31, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum chamber and arrangement for atomic layer deposition
- Patent number 12,180,587
- Issue date Dec 31, 2024
- Beneq Oy
- Johannes Wesslin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatuses for forming semiconductor devices containin...
- Patent number 12,176,203
- Issue date Dec 24, 2024
- SanDisk Technologies LLC
- Fei Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Flat pocket susceptor design with improved heat transfer
- Patent number 12,170,213
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate
- Patent number 12,170,221
- Issue date Dec 17, 2024
- Jusung Engineering Co., Ltd.
- Won Woo Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support table and RF rod
- Patent number 12,170,190
- Issue date Dec 17, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 12,170,189
- Issue date Dec 17, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition systems and methods
- Patent number 12,163,227
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD system with substrate carrier and associated mechanisms for mov...
- Patent number 12,163,228
- Issue date Dec 10, 2024
- Mellanox Technologies, Ltd.
- Elad Mentovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...
- Publication number 20250038012
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING
- Publication number 20250038024
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Douglas Brian Baumgarten
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...
- Publication number 20250034709
- Publication date Jan 30, 2025
- Semsysco GmbH
- Andreas Gleissner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS IN-SITU MEASUREMENTS
- Publication number 20250034712
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Anirudhan Chandrasekaran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...
- Publication number 20250034714
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Wentao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...
- Publication number 20250034706
- Publication date Jan 30, 2025
- The Regents of the University of Michigan
- Neil P. Dasgupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIFT PINS, LIFT PIN ARRANGEMENTS AND SEMICONDUCTOR PROCESSING SYSTE...
- Publication number 20250034713
- Publication date Jan 30, 2025
- ASM IP HOLDING B.V.
- Jaehyun Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER
- Publication number 20250034707
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Mukhles SOWWAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE
- Publication number 20250034711
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Gaku WATANABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES
- Publication number 20250027198
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Feng BI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250029817
- Publication date Jan 23, 2025
- JUSUNG ENGINEERING CO., LTD.
- WOONG KYO OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20250027201
- Publication date Jan 23, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Yong JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR CLEANING SUBSTRATE PROCE...
- Publication number 20250027200
- Publication date Jan 23, 2025
- Jusung Engineering Co., Ltd.
- Won Tae CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER TRANSFER APPARATUS, VAPOR DEPOSITION SYSTEM AND METHOD OF OPE...
- Publication number 20250019831
- Publication date Jan 16, 2025
- Advanced Micro-Fabrication Equipment Inc. China
- Yong JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250022702
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Masayuki ASAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS
- Publication number 20250019832
- Publication date Jan 16, 2025
- CVD Equipment Corporation
- William S. Linss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...
- Publication number 20250019830
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Vinayakaraddy GULABAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20250022708
- Publication date Jan 16, 2025
- Kokusai Electric Corporation
- Takuya JODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND DEVICE FOR DEPOSITING A LAYER CONTAINING A GROUP FIVE EL...
- Publication number 20250019823
- Publication date Jan 16, 2025
- AIXTRON SE
- Ilio MICCOLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...
- Publication number 20250022694
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Pranav Vijay Gadre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...
- Publication number 20250019825
- Publication date Jan 16, 2025
- LAM RESEARCH CORPORATION
- Adrien LAVOIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VA...
- Publication number 20250019829
- Publication date Jan 16, 2025
- PlayNitride Display Co., Ltd.
- Yen-Lin LAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...
- Publication number 20250022745
- Publication date Jan 16, 2025
- Applied Materials, Inc.
- Qiwei LIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS
- Publication number 20250011921
- Publication date Jan 9, 2025
- SAMSUNG DISPLAY CO., LTD.
- Junggon KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...
- Publication number 20250011925
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Motomu DEGAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20250011931
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Shun MATSUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...
- Publication number 20250011918
- Publication date Jan 9, 2025
- Seoul National University R&DB Foundation
- Gyu Chul Yi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...
- Publication number 20250011933
- Publication date Jan 9, 2025
- TORAY ENGINEERING CO., LTD.
- Naoto SUGANUMA
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS
- Publication number 20250011919
- Publication date Jan 9, 2025
- The Batteries Sp. Z.O.O.
- Ayrat K. KHISAMOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250006462
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Morihito INAGAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for supporting substrates in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Stage, film-forming apparatus, and film-processing apparatus

High-throughput vapor deposition apparatus and vapor deposition method

Temperature control of a multi-zone pedestal

Method for depositing film and film deposition system

Substrate processing apparatus with an injector

Substrate processing apparatus, method of processing substrate, met...

Electrostatic chuck and processing apparatus

Member for semiconductor manufacturing apparatus, method for manufa...

Systems and methods for faceplate temperature control

Method of forming compound structure with 2-dimensional structure

Substrate processing apparatus, gas nozzle and method of manufactur...

Ribbon beam plasma enhanced chemical vapor deposition system for an...

Actively clamped carrier assembly for processing tools

Electrostatic chuck with spatially tunable RF coupling to a wafer

Method for manufacturing semiconductor device and substrate process...

Apparatus for physical vapor deposition and method for forming a layer

Wafer transfer system and method of use

Cover plate for covering the susceptor side facing the process cham...

Device and method for ensuring planarity of a semiconductor wafer d...

Showerhead for process tool

Apparatus and methods to transfer substrates into and out of a spat...

Coating method and film layer thereof, and coating fixture and appl...

Vacuum chamber and arrangement for atomic layer deposition

Methods and apparatuses for forming semiconductor devices containin...

Flat pocket susceptor design with improved heat transfer

Apparatus for processing substrate

Wafer support table and RF rod

Coating apparatus and coating method

Film deposition systems and methods

CVD system with substrate carrier and associated mechanisms for mov...

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR SUBSTRATE COOLING AND/OR HEATING USING COOL...

PREVENTION OF CONTAMINATION OF SUBSTRATES DURING GAS PURGING

DISTRIBUTION BODY FOR DISTRIBUTING A PROCESS GAS FOR TREATING A SUB...

METHODS AND APPARATUS IN-SITU MEASUREMENTS

REFLECTORS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING REFLECTORS, AND...

Two-Axis Printing for More Uniform Films in an Atmospheric-Pressure...

LIFT PINS, LIFT PIN ARRANGEMENTS AND SEMICONDUCTOR PROCESSING SYSTE...

COMBINED REDUCED PRESSURE -HIGH VACUUM PROCESSING CHAMBER

SUBSTRATE PROCESSING APPARATUS AND METHOD OF DISPOSING SUBSTRATE

SOAKING AND ESC CLAMPING SEQUENCE FOR HIGH BOW SUBSTRATES

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE SUPPORTING DEVICE AND SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING DEVICE AND METHOD FOR CLEANING SUBSTRATE PROCE...

WAFER TRANSFER APPARATUS, VAPOR DEPOSITION SYSTEM AND METHOD OF OPE...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

IMPROVEMENTS IN CHEMICAL VAPOR DEPOSITION SYSTEMS

PREVENTING DEPOSITION ON PEDESTAL IN SEMICONDUCTOR SUBSTRATE PROCES...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

METHOD AND DEVICE FOR DEPOSITING A LAYER CONTAINING A GROUP FIVE EL...

HEATER PLATES WITH DISTRIBUTED PURGE CHANNELS, RF MESHES AND GROUND...

PEDESTALS FOR MODULATING FILM PROPERTIES IN ATOMIC LAYER DEPOSITION...

SEMICONDUCTOR WAFER CARRIER STRUCTURE AND METAL-ORGANIC CHEMICAL VA...

Rotating Biasable Pedestal and Electrostatic Chuck in Semiconductor...

DEVICE AND METHOD FOR MANUFACTURING DISPLAY APPARATUS

SUBSTRATE PROCESSING APPARATUS, PROCESSING VESSEL, AND METHOD OF MA...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

AUTOMATED THIN FILM DEPOSITION SYSTEM AND THIN FILM DEPOSITION METH...

LAMINATE MANUFACTURING APPARATUS AND SELF-ASSEMBLED MONOLAYER FORMA...

PROCESSING LINE FOR DEPOSITING THIN-FILM COATINGS

SUBSTRATE PROCESSING METHOD