characterised by the method used for supporting substrates in the reaction chamber

Industry

CPC
C23C16/458

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/458characterised by the method used for supporting substrates in the reaction chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Flat pocket susceptor design with improved heat transfer
- Patent number 12,170,213
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Zhepeng Cong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing substrate
- Patent number 12,170,221
- Issue date Dec 17, 2024
- Jusung Engineering Co., Ltd.
- Won Woo Jung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support table and RF rod
- Patent number 12,170,190
- Issue date Dec 17, 2024
- NGK Insulators, Ltd.
- Yutaka Unno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating apparatus and coating method
- Patent number 12,170,189
- Issue date Dec 17, 2024
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition systems and methods
- Patent number 12,163,227
- Issue date Dec 10, 2024
- ASM IP Holding B.V.
- Amir Kajbafvala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
CVD system with substrate carrier and associated mechanisms for mov...
- Patent number 12,163,228
- Issue date Dec 10, 2024
- Mellanox Technologies, Ltd.
- Elad Mentovich
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Continuous liner for use in a processing chamber
- Patent number 12,163,218
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- James D. Carducci
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Screwless semiconductor processing chambers
- Patent number 12,165,909
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Bo-Ru Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dynamic multi zone flow control for a processing system
- Patent number 12,159,785
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Daemian Raj Benjamin Raj
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,148,614
- Issue date Nov 19, 2024
- Kokusai Electric Corporation
- Takuya Joda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system and method of delivering a reactant gas
- Patent number 12,139,790
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Vishwas Kumar Pandey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Combiner and distributor for adjusting impedances or power across m...
- Patent number 12,143,087
- Issue date Nov 12, 2024
- Lam Research Corporation
- Sunil Kapoor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with seal surface
- Patent number 12,142,509
- Issue date Nov 12, 2024
- Lam Research Corporation
- Patrick G. Breiling
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In situ real-time sensing and compensation of non-uniformities in s...
- Patent number 12,142,464
- Issue date Nov 12, 2024
- Lam Research Corporation
- Changyou Jing
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,142,476
- Issue date Nov 12, 2024
- Kokusai Electric Corporation
- Masayuki Asai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck with multiple radio frequency meshes to control...
- Patent number 12,136,536
- Issue date Nov 5, 2024
- Applied Materials, Inc.
- Edward P. Hammond
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for introducing an optical lens into a turning...
- Patent number 12,129,540
- Issue date Oct 29, 2024
- Carl Zeiss Vision International GmbH
- Frank Macionczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-enhanced chemical vapor deposition coating system
- Patent number 12,129,549
- Issue date Oct 29, 2024
- Benjamin Lawrence
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum seal for electrostatic chuck
- Patent number 12,125,734
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-zone pedestal heater without vias
- Patent number 12,127,310
- Issue date Oct 22, 2024
- Watlow Electric Manufacturing Company
- Kevin Ptasienski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Floating pin, wafer carrying device and depositing apparatus
- Patent number 12,119,257
- Issue date Oct 15, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chaoqun Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method, method for manufacturing semiconductor device,...
- Patent number 12,119,219
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Hiroaki Ashizawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic levitation system, base and carrier of a magnetic levitati...
- Patent number 12,119,173
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Henning Aust
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating biasable pedestal and electrostatic chuck in semiconductor...
- Patent number 12,112,972
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process chamber and exhaust liner system therefor
- Patent number 12,110,585
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Naman Apurva
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for wafer chucking on a susceptor for ALD
- Patent number 12,112,969
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Faceplate having a curved surface
- Patent number 12,110,590
- Issue date Oct 8, 2024
- Applied Materials, Inc.
- Shailendra Srivastava
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Susceptor arrangement of a CVD reactor
- Patent number 12,110,591
- Issue date Oct 8, 2024
- Aixtron SE
- Francisco Ruda Y Witt
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 12,112,927
- Issue date Oct 8, 2024
- Picosun Oy
- Väinö Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS
- Publication number 20240417857
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Siyuan TIAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20240417855
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Ippei Yanagisawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR
- Publication number 20240417856
- Publication date Dec 19, 2024
- Point Engineering Co., Ltd.
- Bum Mo AHN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROTATING SUBSTRATE SUPPORT
- Publication number 20240420931
- Publication date Dec 19, 2024
- ASM IP HOLDING B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417848
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING METHOD
- Publication number 20240420914
- Publication date Dec 19, 2024
- Jiangsu Favored Nanotechnology Co., Ltd.
- Jian ZONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS
- Publication number 20240417847
- Publication date Dec 19, 2024
- CONTINENTAL REIFEN DEUTSCHLAND GMBH
- Andrew Grant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND
- Publication number 20240410077
- Publication date Dec 12, 2024
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Xuelun WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS
- Publication number 20240410760
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME
- Publication number 20240410054
- Publication date Dec 12, 2024
- MICO CERAMICS LTD.
- Min-Ho JI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...
- Publication number 20240410078
- Publication date Dec 12, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS
- Publication number 20240401201
- Publication date Dec 5, 2024
- GLOBALWAFERS CO., LTD.
- Chun-Chin Tu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240404795
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS
- Publication number 20240401198
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240401199
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...
- Publication number 20240404861
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- SUSHIM KOSHTI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240404802
- Publication date Dec 5, 2024
- Kokusai Electric Corporation
- Atsushi Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING
- Publication number 20240404822
- Publication date Dec 5, 2024
- LAM RESEARCH CORPORATION
- Gerald Joseph Brady
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM-FORMING APPARATUS AND MANUFACTURING METHOD
- Publication number 20240401195
- Publication date Dec 5, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takahiro SAKATSUME
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...
- Publication number 20240392435
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE...
- Publication number 20240395548
- Publication date Nov 28, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takenori WATABE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD
- Publication number 20240392437
- Publication date Nov 28, 2024
- Advanced Micro-Fabrication Equipment Inc. China
- Can XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME
- Publication number 20240392439
- Publication date Nov 28, 2024
- ASM IP HOLDING B.V.
- SungHoon Jun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...
- Publication number 20240392441
- Publication date Nov 28, 2024
- AIXTRON SE
- Jared Lee HOLZWARTH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR
- Publication number 20240384406
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sou-Chuan CHIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION...
- Publication number 20240384415
- Publication date Nov 21, 2024
- INNOSCIENCE (SUZHOU) SEMICONDUCTOR CO., LTD.
- Tinglin YOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING
- Publication number 20240387226
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Aaron Blake MILLER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL
- Publication number 20240384416
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterised by the method used for supporting substrates in the reaction chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Flat pocket susceptor design with improved heat transfer

Apparatus for processing substrate

Wafer support table and RF rod

Coating apparatus and coating method

Film deposition systems and methods

CVD system with substrate carrier and associated mechanisms for mov...

Continuous liner for use in a processing chamber

Screwless semiconductor processing chambers

Dynamic multi zone flow control for a processing system

Method of manufacturing semiconductor device, substrate processing...

Processing system and method of delivering a reactant gas

Combiner and distributor for adjusting impedances or power across m...

Electrostatic chuck with seal surface

In situ real-time sensing and compensation of non-uniformities in s...

Method of processing substrate, method of manufacturing semiconduct...

Electrostatic chuck with multiple radio frequency meshes to control...

Apparatus and method for introducing an optical lens into a turning...

Plasma-enhanced chemical vapor deposition coating system

Vacuum seal for electrostatic chuck

Multi-zone pedestal heater without vias

Floating pin, wafer carrying device and depositing apparatus

Film forming method, method for manufacturing semiconductor device,...

Magnetic levitation system, base and carrier of a magnetic levitati...

Substrate processing apparatus and method of manufacturing semicond...

Rotating biasable pedestal and electrostatic chuck in semiconductor...

Process chamber and exhaust liner system therefor

Apparatus and methods for wafer chucking on a susceptor for ALD

Faceplate having a curved surface

Susceptor arrangement of a CVD reactor

Substrate processing apparatus and method

Patents Applicationslast 30 patents

CONNECTOR FOR SUBSTRATE SUPPORT WITH EMBEDDED TEMPERATURE SENSORS

SUBSTRATE SUPPORTING APPARATUS AND SUBSTRATE PROCESSING APPARATUS

SUSCEPTOR

ROTATING SUBSTRATE SUPPORT

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

COATING METHOD

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

SYSTEMS FOR DEPOSITING COATINGS ON SURFACES AND ASSOCIATED METHODS

FORMING MESAS ON AN ELECTROSTATIC CHUCK

METHOD AND APPARATUS FOR PRODUCING NITROGEN COMPOUND

THERMAL IMAGING FOR ANALYSIS OF DEVICE FABRICATION TOOLS

SUSCEPTOR MANUFACTURING METHOD AND SUSCEPTOR MANUFACTURED BY THE SAME

IN-SITU FILM GROWTH RATE MONITORING APPARATUS, SYSTEMS, AND METHODS...

WINDOW FOR CHEMICAL VAPOR DEPOSITION SYSTEMS AND RELATED METHODS

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

SUBSTRATE-PROCESSING METHOD AND SUBSTRATE-PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

APPARATUS FOR CLAMPING A SUBSTRATE ON A MONO-POLAR ELECTROSTATIC CH...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

MODULATION OF OXIDATION PROFILE FOR SUBSTRATE PROCESSING

FILM-FORMING APPARATUS AND MANUFACTURING METHOD

CHEMICAL VAPOR DEPOSITION FURNACE WITH A CLEANING GAS SYSTEM TO PRO...

FILM-FORMING METHOD, FILM-FORMING APPARATUS, AND CRYSTALLINE OXIDE...

VAPOR DEPOSITION APPARATUS AND SUBSTRATE TREATMENT METHOD

REACTOR LID AND AN ATOMIC LAYER DEPOSITION APPARATUS USING THE SAME

CVD REACTOR WITH A SUPPORTING RING, AND SUPPORTING RING FOR A SUBST...

SEMICONDUCTOR PROCESS CHAMBER WITH IMPROVED REFLECTOR

NITRIDE-BASED WAFER CHEMICAL VAPOR DEPOSITION DEVICE AND DEPOSITION...

REMOTE PLASMA DEPOSITION WITH ELECTROSTATIC CLAMPING

SEMICONDUCTOR PROCESSING TOOL