characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Industry

CPC
H01L21/67393

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67393characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Exhaust device, processing apparatus, and exhausting method
- Patent number 12,322,578
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer container purge port assembly
- Patent number 12,322,625
- Issue date Jun 3, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer storage container
- Patent number 12,322,627
- Issue date Jun 3, 2025
- Pico & Tera Co., Ltd.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer storage device
- Patent number 12,322,621
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for storing wafer
- Patent number 12,322,626
- Issue date Jun 3, 2025
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas curtain device for front opening unified pod
- Patent number 12,315,750
- Issue date May 27, 2025
- Avex-SG Technology Inc.
- Jin-Bor Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,281,389
- Issue date Apr 22, 2025
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrying device and semiconductor processing apparatus
- Patent number 12,252,776
- Issue date Mar 18, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Qing Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas filling docking tray and gas filling device
- Patent number 12,253,218
- Issue date Mar 18, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Ching-Wei Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Supporting shelf module and wafer container using same
- Patent number 12,237,190
- Issue date Feb 25, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-inlet module and gas-inlet nozzle
- Patent number 12,237,193
- Issue date Feb 25, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Yi-Jun Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow modification fixture for an equipment front end module
- Patent number 12,183,611
- Issue date Dec 31, 2024
- Entegris, Inc.
- Seong Chan Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with enhanced flow field therein
- Patent number 12,183,608
- Issue date Dec 31, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laminar gas flow filter
- Patent number 12,172,117
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Fume-removing device
- Patent number 12,176,230
- Issue date Dec 24, 2024
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer cleaning apparatus and method
- Patent number 12,165,887
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jieh-Chau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage device
- Patent number 12,159,801
- Issue date Dec 3, 2024
- Murata Machinery, Ltd.
- Kokai Jo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for wafer manufacturing process management
- Patent number 12,154,808
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Mei-Hsuan Lin
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Humidity control in semiconductor systems
- Patent number 12,148,642
- Issue date Nov 19, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for air flow optimization in environment for se...
- Patent number 12,142,507
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pod and semiconductor device
- Patent number 12,125,726
- Issue date Oct 22, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chuang Shan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module
- Patent number 12,106,989
- Issue date Oct 1, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas purge device and gas purging method
- Patent number 12,100,605
- Issue date Sep 24, 2024
- NANYA TECHNOLOGY CORPORATION
- Meng-Liang Wei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Airflow detection device and methods of use
- Patent number 12,080,575
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,065,741
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Mikio Ohno
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,054,828
- Issue date Aug 6, 2024
- Tokyo Electron Limited
- Kohei Fukushima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for thermal treatment of electronic devices
- Patent number 12,040,203
- Issue date Jul 16, 2024
- Kateeva, Inc.
- Conor F. Madigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ventilated puck
- Patent number 12,040,206
- Issue date Jul 16, 2024
- Beijing Tongmei Xtal Technology Co., Ltd.
- Wei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM
- Patent number 12,027,398
- Issue date Jul 2, 2024
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR WAFER STORAGE DEVICE
- Publication number 20250157837
- Publication date May 15, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Ju- CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PURIFYING SUBSTRATE CONTAINERS
- Publication number 20250149363
- Publication date May 8, 2025
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE
- Publication number 20250118582
- Publication date Apr 10, 2025
- Entegris, Inc.
- Seong Chan Kim
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR
- Publication number 20250100161
- Publication date Mar 27, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jen-Ti WANG
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Laminar Gas Flow Filter
- Publication number 20250065254
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou Hsu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
FUME-REMOVING DEVICE
- Publication number 20250069925
- Publication date Feb 27, 2025
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND METHOD
- Publication number 20250062140
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jieh-Chau HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR WAFER MANUFACTURING PROCESS MANAGEMENT
- Publication number 20250062147
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong Syuan FAN
- B60 - VEHICLES IN GENERAL
Information Patent Application
MODULE RETAINER
- Publication number 20250029857
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER
- Publication number 20250029858
- Publication date Jan 23, 2025
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CURTAIN DEVICE FOR FRONT OPENING UNIFIED POD
- Publication number 20250006530
- Publication date Jan 2, 2025
- AVEX-SG TECHNOLOGY INC.
- JIN-BOR CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS CURTAIN DEVICE FOR FRONT OPENING UNIFIED POD
- Publication number 20250006531
- Publication date Jan 2, 2025
- AVEX-SG TECHNOLOGY INC.
- JIN-BOR CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GUIDED DIFFUSION DEVICE BRACKETS AND METHODS FOR DIFFUSION DEVICE R...
- Publication number 20240412995
- Publication date Dec 12, 2024
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20240387221
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240387217
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Hsuan Te Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW DETECTION DEVICE AND METHODS OF USE
- Publication number 20240379391
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VENTILATED PUCK
- Publication number 20240363381
- Publication date Oct 31, 2024
- BEIJING TONGMEI XTAL TECHNOLOGY CO., LTD.
- Wei Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VALVE COVER AND SUBSTRATE CARRIER USING THE SAME
- Publication number 20240321614
- Publication date Sep 26, 2024
- Gudeng Precision Industrial Co, Ltd
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER HAVING INSTALLATION STRUCTURE FOR GAS DIFFUSER
- Publication number 20240312817
- Publication date Sep 19, 2024
- GUDENG PRECISION INDUSTRIAL CO, LTD.
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TREATMENT DEVICE
- Publication number 20240304468
- Publication date Sep 12, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PROCESSING APPARATUS
- Publication number 20240297058
- Publication date Sep 5, 2024
- Hitachi High-Tech Corporation
- Chen Pin HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT
- Publication number 20240282605
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Rupankar CHOUDHURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20240242992
- Publication date Jul 18, 2024
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW
- Publication number 20240203771
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STORING CONTAINER
- Publication number 20240162069
- Publication date May 16, 2024
- MIRAIAL CO LTD
- Tsuyoshi NAGASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240096671
- Publication date Mar 21, 2024
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORTING METHOD
- Publication number 20240087933
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- YOU-CHENG YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FRAME CASSETTE WITH INTERNAL COVER CASES
- Publication number 20240087930
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Exhaust device, processing apparatus, and exhausting method

Wafer container purge port assembly

Wafer storage container

Semiconductor wafer storage device

Container for storing wafer

Gas curtain device for front opening unified pod

Substrate processing method and substrate processing apparatus

Carrying device and semiconductor processing apparatus

Gas filling docking tray and gas filling device

Supporting shelf module and wafer container using same

Gas-inlet module and gas-inlet nozzle

Flow modification fixture for an equipment front end module

Substrate container with enhanced flow field therein

Laminar gas flow filter

Fume-removing device

System with substrate carrier deterioration detection and repair

Wafer cleaning apparatus and method

Storage device

System and method for wafer manufacturing process management

Humidity control in semiconductor systems

Systems and methods for air flow optimization in environment for se...

Mask pod and semiconductor device

Equipment front end module

Gas purge device and gas purging method

Airflow detection device and methods of use

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing method and substrate processing apparatus

Techniques for thermal treatment of electronic devices

Ventilated puck

EFEM

Patents Applicationslast 30 patents

SEMICONDUCTOR WAFER STORAGE DEVICE

METHODS AND APPARATUS FOR PURIFYING SUBSTRATE CONTAINERS

FLOW MODIFICATION FIXTURE FOR AN EQUIPMENT FRONT END MODULE

SUBSTRATE CARRIER DETERIORATION DETECTION AND REPAIR

Laminar Gas Flow Filter

FUME-REMOVING DEVICE

WAFER CLEANING APPARATUS AND METHOD

SYSTEM AND METHOD FOR WAFER MANUFACTURING PROCESS MANAGEMENT

MODULE RETAINER

METHOD AND DEVICE TO DISTRIBUTE GAS INTO A CONTAINER

GAS CURTAIN DEVICE FOR FRONT OPENING UNIFIED POD

GAS CURTAIN DEVICE FOR FRONT OPENING UNIFIED POD

EQUIPMENT FRONT END MODULE

GUIDED DIFFUSION DEVICE BRACKETS AND METHODS FOR DIFFUSION DEVICE R...

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

EQUIPMENT FRONT END MODULE

AIRFLOW DETECTION DEVICE AND METHODS OF USE

VENTILATED PUCK

VALVE COVER AND SUBSTRATE CARRIER USING THE SAME

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

SUBSTRATE CARRIER HAVING INSTALLATION STRUCTURE FOR GAS DIFFUSER

WAFER TREATMENT DEVICE

VACUUM PROCESSING APPARATUS

LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT

WAFER STORAGE CONTAINER

PROCESSING ARRANGEMENT AND METHOD FOR ADJUSTING GAS FLOW

SUBSTRATE STORING CONTAINER

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

WAFER TRANSPORTING METHOD

FRAME CASSETTE WITH INTERNAL COVER CASES