characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Industry

CPC
H01L21/67393

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67393characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Industries

Patents Grantslast 30 patents

Information Patent Grant
Processing arrangement and method for adjusting gas flow
- Patent number 11,923,225
- Issue date Mar 5, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane diffuser for a substrate container
- Patent number 11,901,205
- Issue date Feb 13, 2024
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hermetically sealed housing with a semiconductor component and meth...
- Patent number 11,876,007
- Issue date Jan 16, 2024
- Infineon Technologies AG
- Rainer Markus Schaller
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Substrate container valve assemblies
- Patent number 11,869,787
- Issue date Jan 9, 2024
- Entegris, Inc.
- Matthew A Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air processing system for semiconductor container
- Patent number 11,854,848
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- You-Cheng Yeh
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Wafer handling chamber with moisture reduction
- Patent number 11,837,483
- Issue date Dec 5, 2023
- ASM IP Holding B.V.
- Petri Raisanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Indexable side storage pod apparatus, heated side storage pod appar...
- Patent number 11,823,933
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Patrick Pannese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber
- Patent number 11,823,923
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Semiconductor wafer storage device
- Patent number 11,764,089
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu Ju- Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and method
- Patent number 11,764,081
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jieh-Chau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system
- Patent number 11,749,555
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- Sultan Malik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,742,232
- Issue date Aug 29, 2023
- Tokyo Electron Limited
- Yoshinori Ikeda
- B08 - CLEANING
Information Patent Grant
Systems, devices, and methods for air flow optimization including a...
- Patent number 11,735,455
- Issue date Aug 22, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Equipment front end module
- Patent number 11,715,659
- Issue date Aug 1, 2023
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for storing wafer
- Patent number 11,710,651
- Issue date Jul 25, 2023
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate storage apparatus, substrate storage method, and recordin...
- Patent number 11,699,608
- Issue date Jul 11, 2023
- Tokyo Electron Limited
- Akihiro Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated nozzle cleaning system
- Patent number 11,699,609
- Issue date Jul 11, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Guan Jung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod for preventing haze contamination and reticle stocker h...
- Patent number 11,693,307
- Issue date Jul 4, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Jiyong Yoo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus
- Patent number 11,670,527
- Issue date Jun 6, 2023
- Tokyo Electron Limited
- Daisuke Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying block structure and storage device
- Patent number 11,651,982
- Issue date May 16, 2023
- Winbond Electronics Corp.
- Cheng-Gang Fu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate storage container
- Patent number 11,646,214
- Issue date May 9, 2023
- Shin-Etsu Polymer Co., Ltd.
- Osamu Ogawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for ope...
- Patent number 11,640,915
- Issue date May 2, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port operation in electronic device manufacturing apparatus, s...
- Patent number 11,637,029
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port device, gas gate and gas-providing method
- Patent number 11,631,604
- Issue date Apr 18, 2023
- NANYA TECHNOLOGY CORPORATION
- Jih-Cheng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealed substrate carriers and systems and methods for transporting...
- Patent number 11,631,605
- Issue date Apr 18, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Membrane diffuser for a substrate container
- Patent number 11,610,795
- Issue date Mar 21, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage system and purge method in storage system
- Patent number 11,608,229
- Issue date Mar 21, 2023
- Murata Machinery, Ltd.
- Tatsuo Tsubaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier deterioration detection and repair
- Patent number 11,584,019
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Environmental control material holder
- Patent number 11,581,209
- Issue date Feb 14, 2023
- Entegris, Inc.
- Jason T. Steffens
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...
- Publication number 20240096671
- Publication date Mar 21, 2024
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORTING METHOD
- Publication number 20240087933
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- YOU-CHENG YEH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FRAME CASSETTE WITH INTERNAL COVER CASES
- Publication number 20240087930
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS PURGE DEVICE AND GAS PURGING METHOD
- Publication number 20240047251
- Publication date Feb 8, 2024
- NANYA TECHNOLOGY CORPORATION
- Meng-Liang WEI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER
- Publication number 20240038554
- Publication date Feb 1, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
GAS-INLET MODULE AND GAS-INLET NOZZLE
- Publication number 20240038562
- Publication date Feb 1, 2024
- Brillian Network & Automation Integrated System Co., Ltd.
- YI-JUN GU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND METHOD
- Publication number 20240021446
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jieh-Chau HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER STORAGE CONTAINER
- Publication number 20240021454
- Publication date Jan 18, 2024
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILTER MODULE
- Publication number 20230411192
- Publication date Dec 21, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...
- Publication number 20230386877
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230377925
- Publication date Nov 23, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM FOR STORING WAFER AND SYSTEM FOR MONITORING POLLUTION OF WAFER
- Publication number 20230377921
- Publication date Nov 23, 2023
- FOXSEMICON INTEGRATED TECHNOLOGY, INC.
- CHUN-CHUNG CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER STORAGE DEVICE
- Publication number 20230377922
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu Ju- CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230352328
- Publication date Nov 2, 2023
- TOKYO ELECTRON LIMITED
- Yoshinori IKEDA
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING A NOZZLE
- Publication number 20230352327
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Guan Jung CHEN
- B08 - CLEANING
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20230317486
- Publication date Oct 5, 2023
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CONTAINER PURGE PORT ASSEMBLY
- Publication number 20230307275
- Publication date Sep 28, 2023
- Entegris, Inc.
- Matthew A. Fuller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER FOR STORING WAFER
- Publication number 20230307276
- Publication date Sep 28, 2023
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...
- Publication number 20230253228
- Publication date Aug 10, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW SUPPLY APPARATUS AND SUPPLY METHOD
- Publication number 20230207361
- Publication date Jun 29, 2023
- SEMES CO., LTD.
- Sung Ho LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER
- Publication number 20230197490
- Publication date Jun 22, 2023
- Entegris, Inc.
- Mark V. SMITH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Container Storage Facility
- Publication number 20230163006
- Publication date May 25, 2023
- DAIFUKU CO., LTD.
- Hidemoto Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...
- Publication number 20230128154
- Publication date Apr 27, 2023
- Entegris, Inc.
- Mark V. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20230119730
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Method and Substrate Processing Apparatus
- Publication number 20230118483
- Publication date Apr 20, 2023
- TOKYO ELECTRON LIMITED
- Kohei FUKUSHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230084826
- Publication date Mar 16, 2023
- WONIK IPS CO., LTD.
- Tae Dong KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230072156
- Publication date Mar 9, 2023
- WONIK IPS CO., LTD.
- Sung Ho ROH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...
- Publication number 20230073921
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
EFEM
- Publication number 20230073234
- Publication date Mar 9, 2023
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STOCKER SYSTEMS AND METHODS
- Publication number 20230062287
- Publication date Mar 2, 2023
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz Rebstock
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

characterised by the presence of atmosphere modifying elements inside or attached to the closed carrierl

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Processing arrangement and method for adjusting gas flow

Membrane diffuser for a substrate container

Hermetically sealed housing with a semiconductor component and meth...

Substrate container valve assemblies

Air processing system for semiconductor container

Wafer handling chamber with moisture reduction

Indexable side storage pod apparatus, heated side storage pod appar...

Transfer chamber

Side storage pods, electronic device processing systems, and method...

Semiconductor wafer storage device

Wafer cleaning apparatus and method

Semiconductor processing system

Substrate processing method and substrate processing apparatus

Systems, devices, and methods for air flow optimization including a...

Equipment front end module

Container for storing wafer

Substrate storage apparatus, substrate storage method, and recordin...

Automated nozzle cleaning system

Reticle pod for preventing haze contamination and reticle stocker h...

Substrate processing apparatus

Drying block structure and storage device

Substrate storage container

Side storage pods, equipment front end modules, and methods for ope...

Load port operation in electronic device manufacturing apparatus, s...

Load port device, gas gate and gas-providing method

Sealed substrate carriers and systems and methods for transporting...

Membrane diffuser for a substrate container

Storage system and purge method in storage system

Substrate carrier deterioration detection and repair

Environmental control material holder

Patents Applicationslast 30 patents

SUBSTRATE CONTAINER SYSTEMS AND METHODS OF PURGING A SUBSTRATE CONT...

WAFER TRANSPORTING METHOD

FRAME CASSETTE WITH INTERNAL COVER CASES

GAS PURGE DEVICE AND GAS PURGING METHOD

TRANSFER CHAMBER

GAS-INLET MODULE AND GAS-INLET NOZZLE

WAFER CLEANING APPARATUS AND METHOD

WAFER STORAGE CONTAINER

FILTER MODULE

SYSTEMS AND METHODS FOR AIR FLOW OPTIMIZATION IN ENVIRONMENT FOR SE...

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

SYSTEM FOR STORING WAFER AND SYSTEM FOR MONITORING POLLUTION OF WAFER

SEMICONDUCTOR WAFER STORAGE DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF CLEANING A NOZZLE

EQUIPMENT FRONT END MODULE

WAFER CONTAINER PURGE PORT ASSEMBLY

CONTAINER FOR STORING WAFER

SEALED SUBSTRATE CARRIERS AND SYSTEMS AND METHODS FOR TRANSPORTING...

FLOW SUPPLY APPARATUS AND SUPPLY METHOD

MEMBRANE DIFFUSER FOR A SUBSTRATE CONTAINER

Container Storage Facility

PURGE FLOW DISTRIBUTION SYSTEM FOR A SUBSTRATE CONTAINER AND METHOD...

Substrate Processing Method and Substrate Processing Apparatus

Substrate Processing Method and Substrate Processing Apparatus

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS

SIDE STORAGE PODS, ELECTRONIC DEVICE PROCESSING SYSTEMS, AND METHOD...

EFEM

SEMICONDUCTOR STOCKER SYSTEMS AND METHODS