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ELECTRICITY
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0337
characterised by the process involved to create the mask
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Patents Grants
last 30 patents
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Patent Grant
Forming low-stress silicon nitride layer through hydrogen treatment
Patent number
12,261,036
Issue date
Mar 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Che Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning method
Patent number
12,261,045
Issue date
Mar 25, 2025
Imec VZW
Victor M. Blanco
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Textile patterning for subtractively-patterned self-aligned interco...
Patent number
12,261,057
Issue date
Mar 25, 2025
Tahoe Research, LTD.
Kevin Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Embedded high-z marker material and process for alignment of multil...
Patent number
12,255,047
Issue date
Mar 18, 2025
HRL Laboratories, LLC
Christopher Bohn
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench contact structures for advanced integrated circuit structure...
Patent number
12,255,247
Issue date
Mar 18, 2025
Intel Corporation
Subhash M. Joshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for depositing layers directly adjacent uncovered vias or co...
Patent number
12,255,067
Issue date
Mar 18, 2025
Applied Materials, Inc.
John Hautala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective deposition of carbon on photoresist layer for lithography...
Patent number
12,249,509
Issue date
Mar 11, 2025
Applied Materials, Inc.
Larry Gao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Integrated circuits with capacitors
Patent number
12,243,871
Issue date
Mar 4, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Hsiao-Han Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device
Patent number
12,243,743
Issue date
Mar 4, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Susheng Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Different height cell subregions, semiconductor device having the s...
Patent number
12,243,914
Issue date
Mar 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Jung-Chan Yang
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Selective patterning of vias with hardmasks
Patent number
12,243,771
Issue date
Mar 4, 2025
Interational Business Machines Corporation
John C. Arnold
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor structure
Patent number
12,243,744
Issue date
Mar 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Chen Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of in situ ceramic coating deposition
Patent number
12,234,549
Issue date
Feb 25, 2025
Applied Materials, Inc.
Sarah Michelle Bobek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Deposition apparatus, deposition target structure, and method
Patent number
12,237,159
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chia-Hsi Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming semiconductor devices
Patent number
12,237,402
Issue date
Feb 25, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Wei Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Area selective organic material removal
Patent number
12,230,506
Issue date
Feb 18, 2025
ASM IP Holding B.V.
Mikko Ritala
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
12,225,740
Issue date
Feb 11, 2025
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reflective mask blank for EUV lithography, mask blank for EUV litho...
Patent number
12,216,397
Issue date
Feb 4, 2025
AGC Inc.
Daijiro Akagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device
Patent number
12,217,971
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard mask trimming in method for manufacturing semiconductor device
Patent number
12,217,961
Issue date
Feb 4, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Chien Kuang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making an individualization zone of an integrated circuit
Patent number
12,218,083
Issue date
Feb 4, 2025
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Nicolas Posseme
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Selective removal of an etching stop layer for improving overlay sh...
Patent number
12,211,700
Issue date
Jan 28, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Chien-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical proximity correction method and method of fabricating a sem...
Patent number
12,210,290
Issue date
Jan 28, 2025
Samsung Electronics Co., Ltd.
Pilsoo Kang
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Spacer patterning process with flat top profile
Patent number
12,211,693
Issue date
Jan 28, 2025
Applied Materials, Inc.
Chao Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ultra-high modulus and etch selectivity boron-carbon hardmask films
Patent number
12,211,694
Issue date
Jan 28, 2025
Applied Materials, Inc.
Prashant Kumar Kulshreshtha
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Patterning material including silicon-containing layer and method f...
Patent number
12,205,824
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Szu-Ping Tung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sacrificial layer for semiconductor process
Patent number
12,205,994
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Tsan-Chun Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gate structures for tuning threshold voltage
Patent number
12,205,850
Issue date
Jan 21, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Yu Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Boron concentration tunability in boron-silicon films
Patent number
12,205,818
Issue date
Jan 21, 2025
Applied Materials, Inc.
Yi Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion implantation method for reducing roughness of patterned resist...
Patent number
12,198,931
Issue date
Jan 14, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Chun-Liang Chen
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND STRUCTURES FOR IMPROVING ETCH PROFILE OF UNDERLYING LAYERS
Publication number
20250105015
Publication date
Mar 27, 2025
TOKYO ELECTRON LIMITED
Shihsheng CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Exposure method of semiconductor pattern
Publication number
20250102922
Publication date
Mar 27, 2025
UNITED MICROELECTRONICS CORP.
Shin-Hung Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL-CONTAINING HARDMASK OPENING METHODS USING BORON-AND-HALOGEN-C...
Publication number
20250095990
Publication date
Mar 20, 2025
Applied Materials, Inc.
Han Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND PLASMA PROCESSING APPARATUS
Publication number
20250095991
Publication date
Mar 20, 2025
TOKYO ELECTRON LIMITED
Koki MUKAIYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLUGS FOR INTERCONNECT LINES FOR ADVANCED INTEGRATED CIRCUIT STRUCT...
Publication number
20250098258
Publication date
Mar 20, 2025
Intel Corporation
Andrew W. YEOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF AN ARRAY OF NANOSTRUCTURES
Publication number
20250087487
Publication date
Mar 13, 2025
ALIXLABS AB
Dmitry Suyatin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TIN OXIDE MANDRELS IN PATTERNING
Publication number
20250087498
Publication date
Mar 13, 2025
LAM RESEARCH CORPORATION
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS FOR FABRICATING SEMICONDCUTOR STRUCTURES
Publication number
20250087496
Publication date
Mar 13, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
EXPOSURE MASK, SEMICONDUCTOR DEVICE USING THE EXPOSURE MASK, AND ME...
Publication number
20250085637
Publication date
Mar 13, 2025
SK HYNIX INC.
Jong Hoon KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20250087488
Publication date
Mar 13, 2025
SK HYNIX INC.
Ji Hoon KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PROCESSING A SUBSTRATE
Publication number
20250079174
Publication date
Mar 6, 2025
Tokyo Election Limited
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
Publication number
20250079179
Publication date
Mar 6, 2025
NANYA TECHNOLOGY CORPORATION
Yu Li LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING METHOD AND PLASMA PROCESSING SYSTEM
Publication number
20250079173
Publication date
Mar 6, 2025
TOKYO ELECTRON LIMITED
Daisuke YOSHIKOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20250072097
Publication date
Feb 27, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Chuan-Hui LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING ACTIVE REGION OF SEMICONDUCTOR DEVICE
Publication number
20250069888
Publication date
Feb 27, 2025
NANYA TECHNOLOGY CORPORATION
JUNG-TZU PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HETEROGENEOUS METAL LINE COMPOSITIONS FOR ADVANCED INTEGRATED CIRCU...
Publication number
20250072078
Publication date
Feb 27, 2025
Intel Corporation
Andrew W. YEOH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING ACTIVE REGION OF SEMICONDUCTOR DEVICE
Publication number
20250069889
Publication date
Feb 27, 2025
NANYA TECHNOLOGY CORPORATION
JUNG-TZU PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask and Reticle Protection with Atomic Layer Deposition (ALD)
Publication number
20250068054
Publication date
Feb 27, 2025
Nano-Master, Inc.
Birol Kuyel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SEMICONDUCTOR SUBSTRATE
Publication number
20250062120
Publication date
Feb 20, 2025
Kyocera Corporation
Takehiro NISHIMURA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND STRUCTURES FOR IMPROVING ETCH PROFILE OF UNDERLYING LAYERS
Publication number
20250062124
Publication date
Feb 20, 2025
TOKYO ELECTRON LIMITED
Yen-Tien LU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD, MANUFACTURING METHOD, AND SUBSTRATE PR...
Publication number
20250062125
Publication date
Feb 20, 2025
Semes Co., Ltd.
Gyeong Won SONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED PATTERN FORMATION POST SPACER ETCHBACK IN TIGHT PITCH...
Publication number
20250062126
Publication date
Feb 20, 2025
TESSERA LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARBON MASK DEPOSITION
Publication number
20250054760
Publication date
Feb 13, 2025
LAM RESEARCH CORPORATION
Daniela ANJOS RIGSBY
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
Publication number
20250053080
Publication date
Feb 13, 2025
LAM RESEARCH CORPORATION
Jeffrey Marks
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR APPARATUS
Publication number
20250046619
Publication date
Feb 6, 2025
Samsung Electronics Co., Ltd.
Guifu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOPED DIAMOND-LIKE CARBON
Publication number
20250046610
Publication date
Feb 6, 2025
Applied Materials, Inc.
Jialiang WANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FORMATION OF ANTIREFLECTIVE SURFACES
Publication number
20250033955
Publication date
Jan 30, 2025
Brookhaven Science Associates, LLC
Charles T. Black
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
MANUFACTURING PROCESS OF A SEMICONDUCTOR ELECTRONIC DEVICE INTEGRAT...
Publication number
20250037998
Publication date
Jan 30, 2025
STMicroelectronics International N.V.
Riccardo DEPETRO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20250029829
Publication date
Jan 23, 2025
ASM IP HOLDING B.V.
SungBae Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR ADJUSTING LINEWIDTH DUE TO PATTERN LOAD EFFECT IN SADP M...
Publication number
20250022717
Publication date
Jan 16, 2025
Shanghai Huali Integrated Circuit Corporation
Liyuan Liu
H01 - BASIC ELECTRIC ELEMENTS