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characterised by the process involved to create the mask
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ELECTRICITY
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Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0337
characterised by the process involved to create the mask
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Patents Grants
last 30 patents
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Patent Grant
Method and structure of cut end with self-aligned double patterning
Patent number
12,368,046
Issue date
Jul 22, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Manufacturing method of semiconductor structure and semiconductor s...
Patent number
12,369,296
Issue date
Jul 22, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Jun Xia
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Test structure of wafer and method of manufacturing test structure...
Patent number
12,362,242
Issue date
Jul 15, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Hongcheng Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self aligned contact scheme
Patent number
12,362,239
Issue date
Jul 15, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Yu-Lien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming thermally stable carbon film
Patent number
12,362,181
Issue date
Jul 15, 2025
Applied Materials, Inc.
Eswaranand Venkatasubramanian
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Integrated assemblies and methods of forming integrated assemblies
Patent number
12,363,895
Issue date
Jul 15, 2025
Micron Technology, Inc.
Justin B. Dorhout
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of etching metals in semiconductor devices
Patent number
12,354,881
Issue date
Jul 8, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Wei-Hao Liao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor device structure including bevel...
Patent number
12,353,129
Issue date
Jul 8, 2025
NANYA TECHNOLOGY CORPORATION
Sheng-Hui Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method for fabricating same
Patent number
12,347,685
Issue date
Jul 1, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yexiao Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method and structure for cutting dense line patterns using self-ali...
Patent number
12,347,684
Issue date
Jul 1, 2025
Yangtze Memory Technologies Co., Ltd.
Lu Ming Fan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device structure and method for preparing the same
Patent number
12,347,686
Issue date
Jul 1, 2025
NANYA TECHNOLOGY CORPORATION
Cheng-Hsiang Fan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench plug hardmask for advanced integrated circuit structure fabr...
Patent number
12,349,450
Issue date
Jul 1, 2025
Intel Corporation
Anthony St. Amour
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bottom-up fill dielectric materials for semiconductor structure fab...
Patent number
12,341,061
Issue date
Jun 24, 2025
Intel Corporation
Florian Gstrein
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for forming and using mask
Patent number
12,341,011
Issue date
Jun 24, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method of forming patterns for a semicondu...
Patent number
12,341,095
Issue date
Jun 24, 2025
SK hynix Inc.
Dae Sung Eom
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of patterning underlying structure
Patent number
12,341,007
Issue date
Jun 24, 2025
Powerchip Semiconductor Manufacturing Corporation
Yun-An Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preparation method for semiconductor structure and same
Patent number
12,341,010
Issue date
Jun 24, 2025
CHANGXIN MEMORY TECHNOLOGIES, INC.
Longyang Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and fabrication method thereof
Patent number
12,341,022
Issue date
Jun 24, 2025
Semiconductor Manufacturing International (Shanghai) Corporation
Jisong Jin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Dynamic random access memory device with active regions of differen...
Patent number
12,334,345
Issue date
Jun 17, 2025
Fujian Jinhua Integrated Circuit Co., Ltd.
Yaoguang Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pattern fidelity enhancement
Patent number
12,334,342
Issue date
Jun 17, 2025
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Tien Shen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate processing method and substrate processing system
Patent number
12,334,343
Issue date
Jun 17, 2025
Tokyo Electron Limited
Toru Hisamatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Formation of an array of nanostructures
Patent number
12,334,344
Issue date
Jun 17, 2025
ALIXLABS AB
Dmitry Suyatin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integration processes utilizing boron-doped silicon materials
Patent number
12,334,358
Issue date
Jun 17, 2025
Applied Materials, Inc.
Takehito Koshizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Metal oxide resists for EUV patterning and methods for developing t...
Patent number
12,332,568
Issue date
Jun 17, 2025
Tokyo Electron Limited
Hamed Hajibabaeinajafabadi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method of forming thereof
Patent number
12,334,400
Issue date
Jun 17, 2025
NANYA TECHNOLOGY CORPORATION
Ming Hsun Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-color self-aligned double patterning (SADP) to yield static ran...
Patent number
12,327,730
Issue date
Jun 10, 2025
Adeia Semiconductor Solutions LLC
Fee Li Lie
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-dimension self-aligned scheme with subtractive metal etch
Patent number
12,327,764
Issue date
Jun 10, 2025
Applied Materials, Inc.
Yung-chen Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Pitch scaling in microfabrication
Patent number
12,322,597
Issue date
Jun 3, 2025
Tokyo Electron Limited
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Alternating hardmasks for tight-pitch line formation
Patent number
12,322,601
Issue date
Jun 3, 2025
Adeia Semiconductor Solutions LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Etching to reduce line wiggling
Patent number
12,322,651
Issue date
Jun 3, 2025
Taiwan Semiconductor Manufacturing Company, Ltd
Kuan-Wei Huang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
TIN OXIDE AND TIN CARBIDE MATERIALS FOR SEMICONDUCTOR PATTERNING AP...
Publication number
20250226235
Publication date
Jul 10, 2025
Applied Materials, Inc.
Yung-chen LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE DEPOSITION OF CARBON ON PHOTORESIST LAYER FOR LITHOGRAPHY...
Publication number
20250226221
Publication date
Jul 10, 2025
Applied Materials, Inc.
NANCY FUNG
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20250226177
Publication date
Jul 10, 2025
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
HIGH ENERGY ATOMIC LAYER ETCH OF A CARBON CONTAINING LAYER
Publication number
20250218774
Publication date
Jul 3, 2025
LAM RESEARCH CORPORATION
Wenbing YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20250218765
Publication date
Jul 3, 2025
Taiwan Semiconductor Manufacturing company Ltd.
SHIH-WEI PENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING SEMICONDUCTOR STRUCTURE
Publication number
20250218776
Publication date
Jul 3, 2025
WINBOND ELECTRONICS CORP.
Pei-Hsiu Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MATERIALS AND METHODS FOR FORMING PATTERNED MASK ON SUBSTRATE
Publication number
20250218775
Publication date
Jul 3, 2025
TOKYO ELECTRON LIMITED
Phillip D. Hustad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20250208506
Publication date
Jun 26, 2025
Shin-Etsu Chemical Co., Ltd.
Naoki KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR MAKING EUV PATTERNABLE HARD MASKS
Publication number
20250201553
Publication date
Jun 19, 2025
LAM RESEARCH CORPORATION
Chenghao Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF MANUFACTURING LOGIC DEVICES AND MEMORY DEVICES
Publication number
20250201558
Publication date
Jun 19, 2025
Applied Materials, Inc.
Andrea Leoncini
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING PATTERNED MASK LAYER
Publication number
20250201562
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Chen CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PATTERN STRUCTURE PRESERVATION
Publication number
20250201559
Publication date
Jun 19, 2025
International Business Machines Corporation
Dario Goldfarb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FABRICATING SEMICONDUCTOR DEVICES
Publication number
20250201560
Publication date
Jun 19, 2025
Samsung Electronics Co., Ltd.
Byunghoon KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND PATTERN FORMING M...
Publication number
20250201561
Publication date
Jun 19, 2025
KIOXIA Corporation
Kazuhiro TAKAHATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENLARGING CONTACT AREA AND PROCESS WINDOW FOR A CONTACT VIA
Publication number
20250201626
Publication date
Jun 19, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Li-Zhen YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH CONTACT STRUCTURES FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE...
Publication number
20250194201
Publication date
Jun 12, 2025
Intel Corporation
Subhash M. JOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER TOTAL THICKNESS VARIATION USING MASKLESS IMPLANT
Publication number
20250191917
Publication date
Jun 12, 2025
Applied Materials, Inc.
Qintao ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FULLY SELF-ALIGNED VIAS USING A HARDMASK AND ANTISPACERS
Publication number
20250191970
Publication date
Jun 12, 2025
TOKYO ELECTRON LIMITED
David Power
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
RESIST UNDERLAYER FILM FORMATION COMPOSITION
Publication number
20250189896
Publication date
Jun 12, 2025
NISSAN CHEMICAL CORPORATION
Yuki MITSUTAKE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHODS FOR MANUFACTURING POWER SEMICONDUCTOR DEVICES AND POWER SEM...
Publication number
20250183035
Publication date
Jun 5, 2025
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Alexander Viktorovich BOLOTNIKOV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELECTIVE SILICON NITRIDE WITH TREATMENT FOR CONTACT FORMATION IN L...
Publication number
20250183036
Publication date
Jun 5, 2025
Applied Materials, Inc.
Naomi Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ASSEMBLY STRUCTURE INCLUDING A PLURALITY OF SPACERS AND METHOD OF M...
Publication number
20250174459
Publication date
May 29, 2025
NANYA TECHNOLOGY CORPORATION
PIN-YUAN SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARD MASK, SUBSTRATE PROCESSING METHOD, AND REMOVAL METHOD FOR HARD...
Publication number
20250174465
Publication date
May 29, 2025
TOKYO ELECTRON LIMITED
Xiaolong LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Selective Removal of an Etching Stop Layer for Improving Overlay Sh...
Publication number
20250167002
Publication date
May 22, 2025
Taiwan Semiconductor Manufacturing Co., LTD
Chien-Hua Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING NANOSTRUCTURES UTILIZING SELF-ASSEMBLED NUCLEIC...
Publication number
20250166993
Publication date
May 22, 2025
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
DEPOSITION PROCESS FOR PATTERNING EDGE PLACEMENT ERROR IMPROVEMENT
Publication number
20250166994
Publication date
May 22, 2025
Applied Materials, Inc.
Zhiyu HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUITS WITH CAPACITORS
Publication number
20250169163
Publication date
May 22, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsiao-Han Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING MATERIAL INCLUDING SILICON-CONTAINING LAYER AND METHOD F...
Publication number
20250167000
Publication date
May 22, 2025
Taiwan Semiconductor Manufacturing Company, Ltd.
Szu-Ping TUNG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING VERTICALLY LAYERED IONIC LIQUID CRYSTAL (ILC) S...
Publication number
20250157820
Publication date
May 15, 2025
TOKYO ELECTRON LIMITED
Dipak Aryal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD TO PATTERN A SEMICONDUCTOR SUBSTRATE USING A MULTILAYER PHOT...
Publication number
20250149335
Publication date
May 8, 2025
TOKYO ELECTRON LIMITED
Kandabara Tapily
H01 - BASIC ELECTRIC ELEMENTS