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characterised by the process involved to create the mask
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0337
characterised by the process involved to create the mask
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last 30 patents
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Patent Grant
Extreme ultraviolet mask with alloy based absorbers
Patent number
12,181,797
Issue date
Dec 31, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming and patterning a layer and/or substrate
Patent number
12,183,578
Issue date
Dec 31, 2024
Applied Materials, Inc.
Takehito Koshizawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor device
Patent number
12,183,579
Issue date
Dec 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Kun-Yu Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide mandrels in patterning
Patent number
12,183,589
Issue date
Dec 31, 2024
Lam Research Corporation
Jengyi Yu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,183,580
Issue date
Dec 31, 2024
SK Hynix Inc.
Ji Hoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Mandrel structures and methods of fabricating the same in semicondu...
Patent number
12,176,212
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jen-Hong Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Different height cell subregions, and semiconductor device having t...
Patent number
12,176,394
Issue date
Dec 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jung-Chan Yang
G06 - COMPUTING CALCULATING COUNTING
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Patent Grant
Methods for fabricating semiconductor structures
Patent number
12,170,205
Issue date
Dec 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for preparing semiconductor structure and semiconductor stru...
Patent number
12,170,201
Issue date
Dec 17, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Qiang Wan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Crystal growth method and a substrate for a semiconductor device
Patent number
12,170,200
Issue date
Dec 17, 2024
Kyocera Corporation
Takehiro Nishimura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,165,923
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chuan-Hui Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing conductive lines in a circuit
Patent number
12,165,972
Issue date
Dec 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Hui Chen
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method for fabricating semiconductor device with damascene structur...
Patent number
12,159,790
Issue date
Dec 3, 2024
NANYA TECHNOLOGY CORPORATION
Wei-Chen Pan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Network type pellicle membrane and method for forming the same
Patent number
12,153,339
Issue date
Nov 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
B82 - NANO-TECHNOLOGY
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Patent Grant
Mask structure, semiconductor structure and methods for manufacturi...
Patent number
12,148,618
Issue date
Nov 19, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Penghui Xu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Structure and method to pattern pitch lines
Patent number
12,148,617
Issue date
Nov 19, 2024
International Business Machines Corporation
Chanro Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Subtractive metal etch with improved isolation for BEOL interconnec...
Patent number
12,142,562
Issue date
Nov 12, 2024
International Business Machines Corporation
Yann Mignot
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact over active gate structures for advanced integrated circuit...
Patent number
12,142,667
Issue date
Nov 12, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of forming semiconductor devices
Patent number
12,136,662
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shu-Wei Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device structure including overlay mark structure
Patent number
12,125,800
Issue date
Oct 22, 2024
NANYA TECHNOLOGY CORPORATION
Chun-Yen Wei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Formation of antireflective surfaces
Patent number
12,122,668
Issue date
Oct 22, 2024
Brookhaven Science Associates, LLC
Charles T. Black
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Method for forming pattern
Patent number
12,125,704
Issue date
Oct 22, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Qiang Wan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method for forming semiconductor structure
Patent number
12,120,869
Issue date
Oct 15, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Mengna Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
12,112,979
Issue date
Oct 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yan-Jhi Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Highly etch selective amorphous carbon film
Patent number
12,112,949
Issue date
Oct 8, 2024
Applied Materials, Inc.
Rajesh Prasad
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
12,114,496
Issue date
Oct 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Meng-Han Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Self aligned pattern formation post spacer etchback in tight pitch...
Patent number
12,106,963
Issue date
Oct 1, 2024
TESSERA LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double-patterning method to improve sidewall uniformity
Patent number
12,106,964
Issue date
Oct 1, 2024
Winbond Electronics Corp.
Chu-Chun Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiply spin-coated ultra-thick hybrid hard mask for sub 60nm MRAM...
Patent number
12,108,679
Issue date
Oct 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi Yang
G11 - INFORMATION STORAGE
Information
Patent Grant
Patterning method and overlay measurement method
Patent number
12,106,962
Issue date
Oct 1, 2024
United Microelectronics Corp.
Yi Jing Wang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
AND DOUBLE PATTERNING STRATEGY WITH PRINTED ERASABLE DUMMIFICATION
Publication number
20250006495
Publication date
Jan 2, 2025
Intel Corporation
Allen Gardiner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PRODUCING MASK DATA FOR SEMICONDUCTOR DEVICE MANUFACTURING
Publication number
20250004383
Publication date
Jan 2, 2025
Taiwan Semiconductor Manufacturing Co., Ltd.
Kenji YAMAZOE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE INCLUDING OVERLAY MARK STRUCTURE
Publication number
20250006656
Publication date
Jan 2, 2025
NANYA TECHNOLOGY CORPORATION
CHUN-YEN WEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REMOVING CONDUCTIVE MATERIAL FROM A PEDESTAL OF A SEMICONDUCTOR LID...
Publication number
20250006496
Publication date
Jan 2, 2025
ADVANCED MICRO DEVICES, INC.
CHIA CHUN MIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR REDUCING CRITICAL DIMENSION OF PATTERNS GENERATED USING...
Publication number
20240429053
Publication date
Dec 26, 2024
Silicon Laboratories Inc.
Jiye Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL ETCHING WITH REDUCED TILT ANGLE
Publication number
20240429064
Publication date
Dec 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chao-Hsuan CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTORESIST AND FORMATION METHOD THEREOF
Publication number
20240429051
Publication date
Dec 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hui-Chun LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING PATTERNS WITH DIFFERENT CRITICAL DIMENSIONS
Publication number
20240429054
Publication date
Dec 26, 2024
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Patricia PIMENTA BARROS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
Publication number
20240402596
Publication date
Dec 5, 2024
Shin-Etsu Chemical Co., Ltd.
Shohei IWAMORI
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING SEMICONDUCTOR DEVICES
Publication number
20240402594
Publication date
Dec 5, 2024
NEXPERIA B.V.
Nivasan Yogeswaran
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
REDISTRIBUTION LAYER METALLIC LAYOUT STRUCTURE AND METHOD WITH WARP...
Publication number
20240404853
Publication date
Dec 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Dian-Hau CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME
Publication number
20240395909
Publication date
Nov 28, 2024
UNITED MICROELECTRONICS CORP.
Chin-Hung Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING LIQUID, METHOD OF CLEANING SUBSTRATE, AND METHOD OF MANUFA...
Publication number
20240392218
Publication date
Nov 28, 2024
Tokyo Ohka Kogyo Co., Ltd.
Kohei SERIZAWA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
METHODS FOR FORMING EXTREME ULTRAVIOLET MASK COMPRISING MAGNETIC MA...
Publication number
20240393674
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kevin TANADY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS OF FORMING SEMICONDUCTOR DEVICES
Publication number
20240387699
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Shu-Wei Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
Publication number
20240387174
Publication date
Nov 21, 2024
Applied Materials, Inc.
Guangyan Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240387175
Publication date
Nov 21, 2024
WINBOND ELECTRONICS CORP.
Chungchen Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
Publication number
20240387190
Publication date
Nov 21, 2024
Applied Materials, Inc.
Guangyan Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
Publication number
20240381632
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Han Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMING LOW-STRESS SILICON NITRIDE LAYER THROUGH HYDROGEN TREATMENT
Publication number
20240379346
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wei-Che Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR INTEGRATED CIRCUIT DESIGN AND FABRICATION
Publication number
20240379358
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsong-Hua Ou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASK AND METHOD OF FORMING THE SAME
Publication number
20240377722
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Chiang Tu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS AND APPARATUS FOR MASK PATTERNING DEBRIS REMOVAL
Publication number
20240363348
Publication date
Oct 31, 2024
Applied Materials, Inc.
Karthik Narayanan BALAKRISHNAN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
Publication number
20240363349
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF DETECTING PHOTORESIST SCUM, METHOD OF FORMING SEMICONDUCT...
Publication number
20240363450
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Hung-Jui Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device Structure With Uniform Threshold Voltage Distr...
Publication number
20240363731
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Wei-Chih Kao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE WITH FUNNEL SHAPE SPACER AND METHODS OF FORMIN...
Publication number
20240363426
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Yu Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR METAL PATTERNING
Publication number
20240363347
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Chen LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Stealth Patterning Formation for Bonding Improvement
Publication number
20240363359
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Tsu Chung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...
Publication number
20240355630
Publication date
Oct 24, 2024
Taiwan Semiconductor Manufacturing company Ltd.
YU-CHUN SHEN
H01 - BASIC ELECTRIC ELEMENTS