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characterised by the process involved to create the mask
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H01L21/0337
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0337
characterised by the process involved to create the mask
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last 30 patents
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Patent Grant
Boron concentration tunability in boron-silicon films
Patent number
11,961,739
Issue date
Apr 16, 2024
Applied Materials, Inc.
Yi Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Via for semiconductor device connection and methods of forming the...
Patent number
11,961,800
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Hua Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
11,961,767
Issue date
Apr 16, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Directional deposition for semiconductor fabrication
Patent number
11,955,338
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Chun Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Dual metal gate structure having portions of metal gate layers in c...
Patent number
11,955,532
Issue date
Apr 9, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heterogeneous metal line compositions for advanced integrated circu...
Patent number
11,955,534
Issue date
Apr 9, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Two-stage bake photoresist with releasable quencher
Patent number
11,955,343
Issue date
Apr 9, 2024
Intel Corporation
Robert L. Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Substrate processing method and substrate processing system
Patent number
11,955,337
Issue date
Apr 9, 2024
Tokyo Electron Limited
Toru Hisamatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method for forming hardmask formation by hybrid materials in semico...
Patent number
11,948,843
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,948,798
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method of fabricating the same
Patent number
11,948,844
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Yong-Ho Jeon
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Trench contact structures for advanced integrated circuit structure...
Patent number
11,948,997
Issue date
Apr 2, 2024
Intel Corporation
Subhash M. Joshi
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for manufacturing semiconductor structure and semiconductor...
Patent number
11,942,522
Issue date
Mar 26, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yexiao Yu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Boron nitride for mask patterning
Patent number
11,935,751
Issue date
Mar 19, 2024
Applied Materials, Inc.
Siyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Pitch reduction technology using alternating spacer depositions dur...
Patent number
11,935,756
Issue date
Mar 19, 2024
Baosuo Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor patterning and resulting structures
Patent number
11,929,254
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Ming Lung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of high-density pattern forming
Patent number
11,929,255
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Chen En Wu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Semiconductor device and method for forming the same
Patent number
11,929,424
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device
Patent number
11,929,419
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chang-Yin Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of forming nanostructures utilizing self-assembled nucleic...
Patent number
11,923,197
Issue date
Mar 5, 2024
Micron Technology, Inc.
Gurtej S. Sandhu
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Double patterning method
Patent number
11,923,202
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chia-Ying Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-dimensional (2D) metal structure
Patent number
11,923,300
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Wei Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photomask pellicle and method of forming the same
Patent number
11,923,196
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company Ltd.
Yun-Yue Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and structure of middle layer removal
Patent number
11,923,199
Issue date
Mar 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Nai-Chia Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Hard mask-forming composition and method for manufacturing electron...
Patent number
11,921,425
Issue date
Mar 5, 2024
Tokyo Ohka Kogyo Co., Ltd.
Junichi Tsuchiya
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Extreme ultraviolet lithography patterning method
Patent number
11,915,931
Issue date
Feb 27, 2024
Tokyo Electron Limited
Choong-man Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching of mask materials
Patent number
11,915,932
Issue date
Feb 27, 2024
Applied Materials, Inc.
Toi Yue Becky Leung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of depositing a pre-etch protective layer
Patent number
11,915,940
Issue date
Feb 27, 2024
Applied Materials, Inc.
Zhi Gang Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,915,930
Issue date
Feb 27, 2024
SCREEN Holdings Co., Ltd.
Naoko Arima
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240128082
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Inoue NAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240128092
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuta NAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH PATTERNS HAVING COPLANAR BOTTOM...
Publication number
20240128084
Publication date
Apr 18, 2024
NANYA TECHNOLOGY CORPORATION
LIANG-PIN CHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH PATTERNS HAVING COPLANAR BOTTOM...
Publication number
20240128083
Publication date
Apr 18, 2024
NANYA TECHNOLOGY CORPORATION
LIANG-PIN Chou
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVCE
Publication number
20240128126
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Uei Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240120199
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
So Young LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR P...
Publication number
20240118627
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Jeongjin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240120329
Publication date
Apr 11, 2024
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND STRUCTURE OF CUT END WITH SELF-ALIGNED DOUBLE PATTERNING
Publication number
20240120200
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE SELECTIVE ETCHING TECHNOLOGY FOR THICK SOI DEVICES
Publication number
20240112914
Publication date
Apr 4, 2024
University of Electronic Science and Technology of China
Bo ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240112950
Publication date
Apr 4, 2024
NANYA TECHNOLOGY CORPORATION
Chia Che CHIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240112915
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Janghoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask for X-Ray Lithography and Metrology
Publication number
20240112913
Publication date
Apr 4, 2024
Anne Sakdinawat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME
Publication number
20240105751
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Lei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABR...
Publication number
20240105520
Publication date
Mar 28, 2024
Intel Corporation
Anthony ST. AMOUR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUITS WITH FINFET GATE STRUCTURES
Publication number
20240105719
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105443
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Kimihiko NAKATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20240096595
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SELF ALIGNED PATTERN FORMATION POST SPACER ETCHBACK IN TIGHT PITCH...
Publication number
20240096627
Publication date
Mar 21, 2024
TESSERA LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING MANDRELS AND SPACERS, RELATED STRUCTURES, AND S...
Publication number
20240087893
Publication date
Mar 14, 2024
ASM IP HOLDING, B.V.
Daniele Piumi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Double Patterning Method of Patterning a Substrate
Publication number
20240087892
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH DENSITY CARBON FILMS FOR PATTERNING APPLICATIONS
Publication number
20240087894
Publication date
Mar 14, 2024
Applied Materials, Inc.
Eswaranand VENKATASUBRAMANIAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
INTEGRATED CIRCUITS WITH GATE CUT FEATURES
Publication number
20240088145
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Zhi-Chang Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20240087890
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yu-Lien HUANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALTERNATING ETCH AND PASSIVATION PROCESS
Publication number
20240087904
Publication date
Mar 14, 2024
LAM RESEARCH CORPORATION
Seongjun Heo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ENLARGING CONTACT AREA AND PROCESS WINDOW FOR A CONTACT VIA
Publication number
20240087949
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Li-Zhen YU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method for Processing a Substrate
Publication number
20240087891
Publication date
Mar 14, 2024
TOKYO ELECTRON LIMITED
Eric Chih-Fang Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE AND METHOD FOR PREPARING THE SAME
Publication number
20240087895
Publication date
Mar 14, 2024
NANYA TECHNOLOGY CORPORATION
Cheng-Hsiang FAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE-END EXTENSION METHOD AND DEVICE
Publication number
20240087896
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Min HSIAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TWO-COLOR SELF-ALIGNED DOUBLE PATTERNING (SADP) TO YIELD STATIC RAN...
Publication number
20240079247
Publication date
Mar 7, 2024
TESSERA LLC
Fee Li Lie
H01 - BASIC ELECTRIC ELEMENTS