characterised by the treatment of photoresist layers

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H01L21/0273

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/0273characterised by the treatment of photoresist layers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method composition and methods thereof
- Patent number 12,211,698
- Issue date Jan 28, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Siao-Shan Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,205,833
- Issue date Jan 21, 2025
- Semes Co., Ltd.
- Sun Mi Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation method for reducing roughness of patterned resist...
- Patent number 12,198,931
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Liang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment method and substrate treatment system
- Patent number 12,197,129
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Satoru Shimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure comprising a word line with convex portions...
- Patent number 12,185,527
- Issue date Dec 31, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yachuan He
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bevel etching method
- Patent number 12,176,218
- Issue date Dec 24, 2024
- NANYA TECHNOLOGY CORPORATION
- Sheng-Hui Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-aligned patterning with colored blocking and structures result...
- Patent number 12,154,855
- Issue date Nov 26, 2024
- Intel Corporation
- Mohit K. Haran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for preparing semiconductor device structure having features...
- Patent number 12,154,788
- Issue date Nov 26, 2024
- NANYA TECHNOLOGY CORPORATION
- Kuo-Hui Su
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Staircase etch control in forming three-dimensional memory device
- Patent number 12,142,575
- Issue date Nov 12, 2024
- Yangtza Memory Technologies Co., Ltd.
- Zhenyu Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and manufacturing method thereof
- Patent number 12,142,485
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hung-Pin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Staircase structure for memory device
- Patent number 12,137,558
- Issue date Nov 5, 2024
- Yangtze Memory Technologies Co., Ltd.
- Zhenyu Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating method of etching device
- Patent number 12,131,892
- Issue date Oct 29, 2024
- NANYA TECHNOLOGY CORPORATION
- Feng-Ju Tsai
- B08 - CLEANING
Information Patent Grant
Formation of antireflective surfaces
- Patent number 12,122,668
- Issue date Oct 22, 2024
- Brookhaven Science Associates, LLC
- Charles T. Black
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for coating photoresist over a substrate
- Patent number 12,124,168
- Issue date Oct 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jing Chang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Selective liquid sliding surface and method of fabricating the same
- Patent number 12,112,941
- Issue date Oct 8, 2024
- THE INDUSTRY & ACADEMIC COOPERAPATION IN CHUNGNAM NATIONAL UNIVERSITY (IAC)
- Seong Min Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal oxycarbide resists as leave behind plugs
- Patent number 12,107,044
- Issue date Oct 1, 2024
- Intel Corporation
- Marie Krysak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of manufacturing semiconductor devices
- Patent number 12,100,596
- Issue date Sep 24, 2024
- Samsung Electronics Co., Ltd.
- Hyunki Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming semiconductor structure and semiconductor structure
- Patent number 12,094,723
- Issue date Sep 17, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Yuejiao Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacture
- Patent number 12,087,637
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chung-Chiang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoresist patterning process
- Patent number 12,085,858
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Huixiong Dai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and method of forming the same
- Patent number 12,087,578
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Hung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography method using multi-scale simulation, semiconductor devi...
- Patent number 12,072,637
- Issue date Aug 27, 2024
- Samsung Electronics Co., Ltd.
- Byunghoon Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of forming the same
- Patent number 12,050,398
- Issue date Jul 30, 2024
- Micron Technology, Inc.
- Hidenori Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective film-forming composition having acetal structure and ami...
- Patent number 12,044,968
- Issue date Jul 23, 2024
- NISSAN CHEMICAL CORPORATION
- Tokio Nishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming components without adding tabs during etching
- Patent number 12,044,965
- Issue date Jul 23, 2024
- Hutchinson Technology Incorporated
- Clark T. Olsen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor structure processing method and manufacturing method
- Patent number 12,040,175
- Issue date Jul 16, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Ning Xi
- B08 - CLEANING
Information Patent Grant
Abnormality detection device of chemical solution, liquid processin...
- Patent number 12,032,294
- Issue date Jul 9, 2024
- Tokyo Electron Limited
- Masato Hayashi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Polymer material, composition, and method of manufacturing semicond...
- Patent number 12,018,107
- Issue date Jun 25, 2024
- Kioxia Corporation
- Koji Asakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device fabrication with removal of accumulation of ma...
- Patent number 12,014,933
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Yan-Hong Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing resist layer, method of forming a pattern and m...
- Patent number 12,013,645
- Issue date Jun 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Christine Y Ouyang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
FORMATION OF ANTIREFLECTIVE SURFACES
- Publication number 20250033955
- Publication date Jan 30, 2025
- Brookhaven Science Associates, LLC
- Charles T. Black
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
STAIRCASE STRUCTURE FOR MEMORY DEVICE
- Publication number 20250031366
- Publication date Jan 23, 2025
- Yangtze Memory Technologies Co., Ltd.
- Zhenyu LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPIN-ON CARBON HARD MASK COMPOSITION WITH HIGH PLANARIZATION PERFOR...
- Publication number 20250013154
- Publication date Jan 9, 2025
- YCCHEM CO., LTD.
- Su Jin LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES A...
- Publication number 20250014900
- Publication date Jan 9, 2025
- NANYA TECHNOLOGY CORPORATION
- CHIH-TSUNG WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING UPPER PART OF SACRIFICIAL LAYER, AND SACRIFICIA...
- Publication number 20250014899
- Publication date Jan 9, 2025
- Merck Patent GmbH
- Takashi SEKITO
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PATTERNING METHODS, SEMICONDUCTOR STRUCTURES AND MEMORY
- Publication number 20250006494
- Publication date Jan 2, 2025
- Yangtze Memory Technologies Co., Ltd.
- Zijin Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR DETECTING SEMICONDUCTOR PROCESSING ERROR
- Publication number 20240421005
- Publication date Dec 19, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chen TSENG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DRY ETCHING USING PLASMA
- Publication number 20240412979
- Publication date Dec 12, 2024
- Research & Business Foundation Sungkyunkwan University
- Geun Young YEOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST PATTERNING PROCESS
- Publication number 20240393695
- Publication date Nov 28, 2024
- Applied Materials, Inc.
- Huixiong DAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE
- Publication number 20240395545
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Min-Sung Kuo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM, APPARATUS, AND METHOD FOR IMPROVING PHOTORESIST COATING OPE...
- Publication number 20240387172
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Ming CHEN
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
APPARATUS, SYSTEM AND METHOD
- Publication number 20240385525
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Po-Han Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
- Publication number 20240379374
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hung-Pin Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR COATING PHOTORESIST OVER A SUBSTRATE
- Publication number 20240377750
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jing CHANG
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ASSISTED FEATURE PLACEMENT IN SEMICONDUCTOR PATTERNING
- Publication number 20240377749
- Publication date Nov 14, 2024
- Geminatio, Inc.
- Brennan Peterson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIN-END GATE STRUCTURES AND METHOD FORMING SAME
- Publication number 20240379821
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih-Yao Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240363424
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chung-Chiang Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...
- Publication number 20240363346
- Publication date Oct 31, 2024
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOMASK STRUCTURE
- Publication number 20240345469
- Publication date Oct 17, 2024
- United Microelectronics Corp.
- Chia-Chen Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR BONDING TRANSPARENT CONDUCTOR SUBSTRATES
- Publication number 20240312951
- Publication date Sep 19, 2024
- ADEIA SEMICONDUCTOR BONDING TECHNOLOGIES INC.
- Cyprian Emeka Uzoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PRODUCING AN ETCHING MASK, METHOD OF ETCHING A STRUCTURE...
- Publication number 20240304446
- Publication date Sep 12, 2024
- JENOPTIK OPTICAL SYSTEMS GMBH
- Meik PANITZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...
- Publication number 20240304444
- Publication date Sep 12, 2024
- NANYA TECHNOLOGY CORPORATION
- KUO-HUI SU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR REMOVING RESIST LAYER, METHOD OF FORMING A PATTERN AND M...
- Publication number 20240288776
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Christine Y. Ouyang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOLDER VOLUME FOR FLIP-CHIP BONDING
- Publication number 20240282735
- Publication date Aug 22, 2024
- International Business Machines Corporation
- Toyohiro Aoki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
- Publication number 20240282575
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jian-Jou Lian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST
- Publication number 20240264526
- Publication date Aug 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- An-Ren ZI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR FORMING SEMICONDUCTOR DEVICES USING MODIFIED PHOTOMASK...
- Publication number 20240222118
- Publication date Jul 4, 2024
- TOKYO ELECTRON LIMITED
- Peng WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
- Publication number 20240213023
- Publication date Jun 27, 2024
- Samsung Electronics Co., Ltd.
- Doo Gyu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF TRAINING DEEP LEARNING MODELS FOR OPTICAL PROXIMITY CORR...
- Publication number 20240160827
- Publication date May 16, 2024
- Samsung Electronics Co., Ltd.
- Sangchul Yeo
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF
- Publication number 20240136199
- Publication date Apr 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Chi LIN
- H01 - BASIC ELECTRIC ELEMENTS

characterised by the treatment of photoresist layers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method composition and methods thereof

Apparatus and method for treating substrate

Ion implantation method for reducing roughness of patterned resist...

Substrate treatment method and substrate treatment system

Semiconductor structure comprising a word line with convex portions...

Bevel etching method

Self-aligned patterning with colored blocking and structures result...

Method for preparing semiconductor device structure having features...

Staircase etch control in forming three-dimensional memory device

Semiconductor structure and manufacturing method thereof

Staircase structure for memory device

Operating method of etching device

Formation of antireflective surfaces

Method and apparatus for coating photoresist over a substrate

Selective liquid sliding surface and method of fabricating the same

Metal oxycarbide resists as leave behind plugs

Methods of manufacturing semiconductor devices

Method for forming semiconductor structure and semiconductor structure

Semiconductor device and method of manufacture

Photoresist patterning process

Semiconductor structure and method of forming the same

Lithography method using multi-scale simulation, semiconductor devi...

Semiconductor device and method of forming the same

Protective film-forming composition having acetal structure and ami...

Method for forming components without adding tabs during etching

Semiconductor structure processing method and manufacturing method

Abnormality detection device of chemical solution, liquid processin...

Polymer material, composition, and method of manufacturing semicond...

Semiconductor device fabrication with removal of accumulation of ma...

Method for removing resist layer, method of forming a pattern and m...

Patents Applicationslast 30 patents

FORMATION OF ANTIREFLECTIVE SURFACES

STAIRCASE STRUCTURE FOR MEMORY DEVICE

SPIN-ON CARBON HARD MASK COMPOSITION WITH HIGH PLANARIZATION PERFOR...

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE WITH FEATURES A...

METHOD FOR REMOVING UPPER PART OF SACRIFICIAL LAYER, AND SACRIFICIA...

PATTERNING METHODS, SEMICONDUCTOR STRUCTURES AND MEMORY

SYSTEM AND METHOD FOR DETECTING SEMICONDUCTOR PROCESSING ERROR

METHOD FOR DRY ETCHING USING PLASMA

PHOTORESIST PATTERNING PROCESS

SEMICONDUCTOR DEVICES AND METHODS OF MANUFACTURE

SYSTEM, APPARATUS, AND METHOD FOR IMPROVING PHOTORESIST COATING OPE...

APPARATUS, SYSTEM AND METHOD

SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF

METHOD AND APPARATUS FOR COATING PHOTORESIST OVER A SUBSTRATE

ASSISTED FEATURE PLACEMENT IN SEMICONDUCTOR PATTERNING

FIN-END GATE STRUCTURES AND METHOD FORMING SAME

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...

PHOTOMASK STRUCTURE

SYSTEM AND METHOD FOR BONDING TRANSPARENT CONDUCTOR SUBSTRATES

METHOD OF PRODUCING AN ETCHING MASK, METHOD OF ETCHING A STRUCTURE...

METHOD FOR PREPARING SEMICONDUCTOR DEVICE STRUCTURE HAVING FEATURES...

METHOD FOR REMOVING RESIST LAYER, METHOD OF FORMING A PATTERN AND M...

SOLDER VOLUME FOR FLIP-CHIP BONDING

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE

PHOTORESIST DEVELOPER AND METHOD OF DEVELOPING PHOTORESIST

METHODS FOR FORMING SEMICONDUCTOR DEVICES USING MODIFIED PHOTOMASK...

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE

METHODS OF TRAINING DEEP LEARNING MODELS FOR OPTICAL PROXIMITY CORR...

SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF