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H01L21/0332
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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/0332
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Patents Grants
last 30 patents
Information
Patent Grant
Methods for fabricating semiconductor structures
Patent number
12,170,205
Issue date
Dec 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi-Nien Su
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Network type pellicle membrane and method for forming the same
Patent number
12,153,339
Issue date
Nov 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Pei-Cheng Hsu
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Structure and method to pattern pitch lines
Patent number
12,148,617
Issue date
Nov 19, 2024
International Business Machines Corporation
Chanro Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact over active gate structures for advanced integrated circuit...
Patent number
12,142,667
Issue date
Nov 12, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
12,135,501
Issue date
Nov 5, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ming-Hui Weng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma-enhanced chemical vapor deposition of carbon hard-mask
Patent number
12,136,549
Issue date
Nov 5, 2024
Applied Materials, Inc.
Byung Seok Kwon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method to improve wafer edge uniformity
Patent number
12,125,683
Issue date
Oct 22, 2024
Applied Materials, Inc.
Mingle Tong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing mask structure, semiconductor structure an...
Patent number
12,119,226
Issue date
Oct 15, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yexiao Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and method for forming semiconductor structure
Patent number
12,120,869
Issue date
Oct 15, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Mengna Zhu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and manufacturing method thereof
Patent number
12,112,979
Issue date
Oct 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yan-Jhi Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Highly etch selective amorphous carbon film
Patent number
12,112,949
Issue date
Oct 8, 2024
Applied Materials, Inc.
Rajesh Prasad
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multiply spin-coated ultra-thick hybrid hard mask for sub 60nm MRAM...
Patent number
12,108,679
Issue date
Oct 1, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yi Yang
G11 - INFORMATION STORAGE
Information
Patent Grant
Nonpolar or semipolar group III-nitride substrates
Patent number
12,106,959
Issue date
Oct 1, 2024
Saphlux, Inc.
Jie Song
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Double-patterning method to improve sidewall uniformity
Patent number
12,106,964
Issue date
Oct 1, 2024
Winbond Electronics Corp.
Chu-Chun Hsieh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of using dual frequency RF power in a process chamber
Patent number
12,106,958
Issue date
Oct 1, 2024
Applied Materials, Inc.
Anup Kumar Singh
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Implantation mask formation
Patent number
12,100,592
Issue date
Sep 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Chao Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Photoactive metal-based hard mask integration
Patent number
12,100,591
Issue date
Sep 24, 2024
Tokyo Electron Limited
Katie Lutker-Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
12,094,720
Issue date
Sep 17, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Chung-Yen Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming extreme ultraviolet mask comprising magnetic ma...
Patent number
12,092,952
Issue date
Sep 17, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kevin Tanady
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Conductive feature formation
Patent number
12,096,609
Issue date
Sep 17, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yu-Lien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tin oxide films in semiconductor device manufacturing
Patent number
12,094,711
Issue date
Sep 17, 2024
Lam Research Corporation
Jengyi Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Improving resolution of masks for semiconductor manufacture
Patent number
12,087,582
Issue date
Sep 10, 2024
Semiconductor Manufacturing International (Shanghai) Corporation
Jisong Jin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
FinFETs and methods of forming FinFETs
Patent number
12,087,861
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chin-Hsiang Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of manufacture
Patent number
12,080,553
Issue date
Sep 3, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Resist underlayer film-forming composition containing novolac resin...
Patent number
12,072,629
Issue date
Aug 27, 2024
Nissan Chemical Industries, Ltd.
Takafumi Endo
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Tungsten deposition on a cobalt surface
Patent number
12,065,731
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chi-Cheng Hung
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pellicle for an EUV lithography mask and a method of manufacturing...
Patent number
12,066,755
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yun-Yue Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor structure
Patent number
12,068,160
Issue date
Aug 20, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xinman Cao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Processes for reducing line-end spacing
Patent number
12,068,168
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Wen-Yen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low-resistance contact plugs and method forming same
Patent number
12,068,191
Issue date
Aug 20, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shao-Ming Koh
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MULTILAYER REFLECTIVE FILM-ATTACHED SUBSTRATE, REFLECTIVE MASK BLAN...
Publication number
20240411220
Publication date
Dec 12, 2024
HOYA CORPORATION
Masanori NAKAGAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRODUCTION METHOD FOR SEMICONDUCTOR SUBSTRATES
Publication number
20240411228
Publication date
Dec 12, 2024
JSR Corporation
Ken MARUYAMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MULTILAYER MASKING LAYER AND METHOD OF FORMING SAME
Publication number
20240395907
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Ju Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING LIQUID, METHOD OF CLEANING SUBSTRATE, AND METHOD OF MANUFA...
Publication number
20240392218
Publication date
Nov 28, 2024
Tokyo Ohka Kogyo Co., Ltd.
Kohei SERIZAWA
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
METHOD OF FORMING MASK PATTERN INCLUDING SURFACE ENHANCEMENT LAYER...
Publication number
20240395552
Publication date
Nov 28, 2024
SK HYNIX INC.
Jin Woong KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR FORMING EXTREME ULTRAVIOLET MASK COMPRISING MAGNETIC MA...
Publication number
20240393674
Publication date
Nov 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kevin TANADY
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
Publication number
20240387174
Publication date
Nov 21, 2024
Applied Materials, Inc.
Guangyan Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NANOWIRE TRANSISTOR FABRICATION WITH HARDMASK LAYERS
Publication number
20240387634
Publication date
Nov 21, 2024
SONY GROUP CORPORATION
Seung Hoon Sung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
Publication number
20240385514
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ming-Hui WENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING SEMICONDUCTOR DEVICE
Publication number
20240387189
Publication date
Nov 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Yu CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FORMATION OF SILICON-AND-METAL-CONTAINING MATERIALS FOR HARDMASK AP...
Publication number
20240387190
Publication date
Nov 21, 2024
Applied Materials, Inc.
Guangyan Zhong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR ETCHING A CARBON CONTAINING LAYER
Publication number
20240379375
Publication date
Nov 14, 2024
LAM RESEARCH CORPORATION
Xiaofeng SU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IMPLANTATION MASK FORMATION
Publication number
20240379357
Publication date
Nov 14, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY , LTD.
Wei-Chao CHIU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Source/Drain Regions and Methods of Forming Same
Publication number
20240379454
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Hui-Lin Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHODS FOR DOPING HIGH-K METAL GATES FOR TUNING THRESHOLD VOLTAGES
Publication number
20240379365
Publication date
Nov 14, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Kuo-Feng Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Conductive Feature Formation
Publication number
20240373613
Publication date
Nov 7, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Yu-Lien Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Protection Layer Formation during Plasma Etching Conductive Materials
Publication number
20240371655
Publication date
Nov 7, 2024
TOKYO ELECTRON LIMITED
Yen-Tien Lu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURE
Publication number
20240363349
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TUNGSTEN DEPOSITION ON A COBALT SURFACE
Publication number
20240360548
Publication date
Oct 31, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chi-Cheng HUNG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
MTJS WITH LITHOGRAPHY-VARIATION INDEPENDENT CRITICAL DIMENSION
Publication number
20240357941
Publication date
Oct 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
William J. Gallagher
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESSES FOR REDUCING LINE-END SPACING
Publication number
20240355633
Publication date
Oct 24, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Wen-Yen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240355637
Publication date
Oct 24, 2024
Samsung Electronics Co., Ltd.
John Soo Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURES AND METHODS THEREOF
Publication number
20240355625
Publication date
Oct 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Wei Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE
Publication number
20240355670
Publication date
Oct 24, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Min Han HSU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI LEVEL CONTACT ETCH
Publication number
20240339328
Publication date
Oct 10, 2024
TOKYO ELECTRON LIMITED
Alec Dorfner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240337947
Publication date
Oct 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yuan Chih LO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH ETCHING PROCESS FOR PHOTORESIST LINE ROUGHNESS IMPROVEMENT
Publication number
20240332020
Publication date
Oct 3, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Sheng-Lin HSIEH
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GATE CUT AND FIN TRIM ISOLATION FOR ADVANCED INTEGRATED CIRCUIT STR...
Publication number
20240332399
Publication date
Oct 3, 2024
Intel Corporation
Tahir GHANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HIGH ASPECT RATIO CONTACT ETCHING WITH ADDITIVE GAS
Publication number
20240332029
Publication date
Oct 3, 2024
TOKYO ELECTRON LIMITED
Du Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSISTOR WITH CHANNEL-SYMMETRIC GATE
Publication number
20240332290
Publication date
Oct 3, 2024
Intel Corporation
Shao-Ming Koh
H01 - BASIC ELECTRIC ELEMENTS