Characterising semiconductor materials

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G01R31/2648

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GPHYSICS G01Measuring instruments G01RMEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES G01R31/00Arrangements for testing electric properties Arrangements for locating electric faults Arrangements for electrical testing characterised by what is being tested not provided for elsewhere

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G01R31/2648Characterising semiconductor materials

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Detection method for sensitive parts of ionization damage in bipola...
- Patent number 12,153,082
- Issue date Nov 26, 2024
- Harbin Institute of Technology
- Xingji Li
- G01 - MEASURING TESTING
Information Patent Grant
Electronic detection interface and electronic detection module usin...
- Patent number 12,154,932
- Issue date Nov 26, 2024
- Ultra Display Technology Corp.
- Hsien-Te Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic detection interface and electronic detection module usin...
- Patent number 12,148,786
- Issue date Nov 19, 2024
- Ultra Display Technology Corp.
- Hsien-Te Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining material parameters of a multilayer test sample
- Patent number 12,105,136
- Issue date Oct 1, 2024
- KLA Corporation
- Alberto Cagliani
- G01 - MEASURING TESTING
Information Patent Grant
Wide-bandgap semiconductor layer characterization
- Patent number 12,078,607
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection unit, semiconductor film layer inspection apparatus inclu...
- Patent number 12,000,866
- Issue date Jun 4, 2024
- EnVigth Co., Ltd.
- Hyoung Sik Kim
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor wafer evaluation apparatus and semiconductor wafer ma...
- Patent number 11,906,569
- Issue date Feb 20, 2024
- Showa Denko K.K.
- Koichi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device, and method for manufacturing semiconductor de...
- Patent number 11,862,672
- Issue date Jan 2, 2024
- Rohm Co., Ltd.
- Katsuhisa Nagao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical systems and methods of characterizing high-k dielectrics
- Patent number 11,808,706
- Issue date Nov 7, 2023
- California Institute of Technology
- Philippe C. Adell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device defect analysis method
- Patent number 11,668,743
- Issue date Jun 6, 2023
- Samsung Electronics Co., Ltd.
- Hakgyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for measuring electrical characteristics of a m...
- Patent number 11,442,090
- Issue date Sep 13, 2022
- UTICA LEASECO, LLC
- Jan Moritz Limpinsel
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device, manufacture thereof, and a radiation measurem...
- Patent number 11,437,478
- Issue date Sep 6, 2022
- Semiconductor Manufacturing International (Shanghai) Corporation
- Fei Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring an electric property of a test sample
- Patent number 11,307,245
- Issue date Apr 19, 2022
- KLA Corporation
- Alberto Cagliani
- G11 - INFORMATION STORAGE
Information Patent Grant
Semiconductor device inspection apparatus, semiconductor device ins...
- Patent number 11,156,654
- Issue date Oct 26, 2021
- Kabushiki Kaisha Toshiba
- Akihiro Goryu
- G01 - MEASURING TESTING
Information Patent Grant
Wide injection range open circuit voltage decay system
- Patent number 11,143,694
- Issue date Oct 12, 2021
- Texas Tech University System
- Shelby Lacouture
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device for measuring surface characteristics of a material
- Patent number 11,125,805
- Issue date Sep 21, 2021
- Imec VZW
- Kristof Paredis
- G01 - MEASURING TESTING
Information Patent Grant
Methods for assessing semiconductor structures
- Patent number 11,081,407
- Issue date Aug 3, 2021
- GlobalWafers Co., Ltd.
- Igor Rapoport
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, and method for manufacturing semiconductor de...
- Patent number 11,075,263
- Issue date Jul 27, 2021
- ROHM CO, , LTD.
- Katsuhisa Nagao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for nanoscale-dimension measurement using a di...
- Patent number 11,018,063
- Issue date May 25, 2021
- SanDisk Technologies LLC
- Koetsu Sawai
- G01 - MEASURING TESTING
Information Patent Grant
Non-contact measurement of a stress in a film on a substrate
- Patent number 10,964,730
- Issue date Mar 30, 2021
- APPLEJACK 199 L.P.
- Oanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring Fe concentration in p-type silicon wafer
- Patent number 10,871,515
- Issue date Dec 22, 2020
- Sumco Corporation
- Shinya Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Structure and method for testing semiconductor device
- Patent number 10,816,589
- Issue date Oct 27, 2020
- CSMC Technologies Fab2 Co., Ltd.
- Xiaobing Ren
- G01 - MEASURING TESTING
Information Patent Grant
Methods and systems for material property profiling of thin films
- Patent number 10,790,203
- Issue date Sep 29, 2020
- Active Layer Parametrics, Inc.
- Bulent M. Basol
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of evaluating manufacturing process of silicon material and...
- Patent number 10,676,840
- Issue date Jun 9, 2020
- Sumco Corporation
- Noritomo Mitsugi
- G01 - MEASURING TESTING
Information Patent Grant
Capacitance sensor and direction detection device including same
- Patent number 10,641,787
- Issue date May 5, 2020
- LG Innotek Co., Ltd
- Jeong Han Kim
- G01 - MEASURING TESTING
Information Patent Grant
Semiconductor device, manufacture thereof, and a radiation measurem...
- Patent number 10,566,431
- Issue date Feb 18, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Fei Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method of semiconductor characterization
- Patent number 10,564,215
- Issue date Feb 18, 2020
- Raja Technologies Inc.
- Ramesh Rajaduray
- G01 - MEASURING TESTING
Information Patent Grant
Electrostatic encoder
- Patent number 10,551,219
- Issue date Feb 4, 2020
- ORIENTAL MOTOR CO. LTD.
- Daiki Kondo
- G01 - MEASURING TESTING
Information Patent Grant
Method for multicarrier mobility spectrum analysis
- Patent number 10,551,427
- Issue date Feb 4, 2020
- The United States of America as represented by the Secretary of the Army
- William A. Beck
- G01 - MEASURING TESTING
Information Patent Grant
Methods for assessing semiconductor structures
- Patent number 10,490,464
- Issue date Nov 26, 2019
- GlobalWafers Co., Ltd.
- Igor Rapoport
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHODS AND TOOLS FOR ELECTRICAL PROPERTY DEPTH PROFILING USING ELE...
- Publication number 20240353472
- Publication date Oct 24, 2024
- Active Layer Parametrics, Inc.
- Bulent Mehmet BASOL
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED CURRENT MONITOR USING VARIABLE DRAIN-TO-SOURCE VOLTAGES
- Publication number 20240353471
- Publication date Oct 24, 2024
- NVIDA CORPORATION
- Miguel Rodriguez
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD OF MEASURING RELIABILITY FOR FLASH MEMORY MATE...
- Publication number 20240159818
- Publication date May 16, 2024
- SK HYNIX INC.
- Nam Cheol JEON
- G11 - INFORMATION STORAGE
Information Patent Application
ENERGIZATION INSPECTION APPARATUS, METHOD FOR MANUFACTURING SEMICON...
- Publication number 20230417819
- Publication date Dec 28, 2023
- Hitachi Power Semiconductor Device, Ltd.
- Masakazu Sagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DETECTION UNIT, SEMICONDUCTOR FILM LAYER INSPECTION APPARATUS INCLU...
- Publication number 20230341438
- Publication date Oct 26, 2023
- ENGION CO., LTD.
- Hyoung Sik KIM
- G01 - MEASURING TESTING
Information Patent Application
PREDICTION OF ELECTRONIC TRANSPORT WITH PHYSICS-AWARE MACHINE LEAR...
- Publication number 20230088979
- Publication date Mar 23, 2023
- The Reg. of the Univ. of CO, a body corporate
- Sanghamitra Neogi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method for Determining Material Parameters of a Multilayer Test Sample
- Publication number 20230078663
- Publication date Mar 16, 2023
- KLA Corporation
- Alberto Cagliani
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20220406887
- Publication date Dec 22, 2022
- ROHM CO., LTD.
- Katsuhisa NAGAO
- G01 - MEASURING TESTING
Information Patent Application
Detection Method for Sensitive Parts of Ionization Damage in Bipola...
- Publication number 20220349934
- Publication date Nov 3, 2022
- HARBIN INSTITUTE OF TECHNOLOGY
- Xingji Li
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE DEFECT ANALYSIS METHOD
- Publication number 20220236314
- Publication date Jul 28, 2022
- Samsung Electronics Co., Ltd.
- Hakgyun KIM
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEMS AND METHODS OF CHARACTERIZING HIGH-K DIELECTRICS
- Publication number 20220003678
- Publication date Jan 6, 2022
- California Institute of Technology
- Philippe C. Adell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20210313418
- Publication date Oct 7, 2021
- ROHM CO., LTD.
- Katsuhisa NAGAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Measuring An Electric Property of a Test Sample
- Publication number 20210231731
- Publication date Jul 29, 2021
- KLA Corporation
- Alberto Cagliani
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR MEASURING ELECTRICAL CHARACTERISTICS OF A M...
- Publication number 20210003628
- Publication date Jan 7, 2021
- Alta Devices, Inc.
- Jan Moritz Limpinsel
- G01 - MEASURING TESTING
Information Patent Application
WIDE INJECTION RANGE OPEN CIRCUIT VOLTAGE DECAY SYSTEM
- Publication number 20200341051
- Publication date Oct 29, 2020
- TEXAS TECH UNIVERSITY SYSTEM
- Shelby LACOUTURE
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, AND A RADIATION MEASUREM...
- Publication number 20200185503
- Publication date Jun 11, 2020
- Semiconductor Manufacturing International (Shanghai) Corporation
- Fei ZHOU
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR NANOSCALE-DIMENSION MEASUREMENT USING A DI...
- Publication number 20200168513
- Publication date May 28, 2020
- SANDISK TECHNOLOGIES LLC
- Koetsu SAWAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NON-CONTACT MEASUREMENT OF A STRESS IN A FILM ON A SUBSTRATE
- Publication number 20200152783
- Publication date May 14, 2020
- Applejack 199 L.P.
- Oanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR ASSESSING SEMICONDUCTOR STRUCTURES
- Publication number 20200058566
- Publication date Feb 20, 2020
- GLOBALWAFERS CO., LTD.
- Igor Rapoport
- G01 - MEASURING TESTING
Information Patent Application
DEVICE FOR MEASURING SURFACE CHARACTERISTICS OF A MATERIAL
- Publication number 20200033395
- Publication date Jan 30, 2020
- IMEC vzw
- Kristof Paredis
- G01 - MEASURING TESTING
Information Patent Application
STRUCTURE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE
- Publication number 20190346500
- Publication date Nov 14, 2019
- CSMC TECHNOLOGIES FAB2 CO., LTD.
- Xiaobing REN
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD OF SEMICONDUCTOR CHARACTERIZATION
- Publication number 20190324077
- Publication date Oct 24, 2019
- Raja Technologies Inc.
- Ramesh Rajaduray
- G01 - MEASURING TESTING
Information Patent Application
SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...
- Publication number 20190165091
- Publication date May 30, 2019
- ROHM CO., LTD.
- Katsuhisa NAGAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND SYSTEMS FOR MATERIAL PROPERTY PROFILING OF THIN FILMS
- Publication number 20190148248
- Publication date May 16, 2019
- Active Layer Parametrics, Inc.
- Bulent M. BASOL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE INSPECTION APPARATUS, SEMICONDUCTOR DEVICE INS...
- Publication number 20190064248
- Publication date Feb 28, 2019
- Kabushiki Kaisha Toshiba
- Akihiro GORYU
- G01 - MEASURING TESTING
Information Patent Application
A SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, AND A RADIATION MEASUR...
- Publication number 20180331192
- Publication date Nov 15, 2018
- Semiconductor Manufacturing International (Shanghai) Corporation
- Fei ZHOU
- G01 - MEASURING TESTING
Information Patent Application
NON-CONTACT MEASUREMENT OF A STRESS IN A FILM ON A SUBSTRATE
- Publication number 20180308971
- Publication date Oct 25, 2018
- Applejack 199 L.P.
- Wojciech Jan Walecki
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF MEASURING FE CONCENTRATION IN P-TYPE SILICON WAFER
- Publication number 20180284182
- Publication date Oct 4, 2018
- SUMCO CORPORATION
- Shinya FUKUSHIMA
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR MULTICARRIER MOBILITY SPECTRUM ANALYSIS
- Publication number 20180231602
- Publication date Aug 16, 2018
- U.S. ARMY RESEARCH LABORATORY ATTN: RDRL-LOC-I
- William A. Beck
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF EVALUATING MANUFACTURING PROCESS OF SILICON MATERIAL AND...
- Publication number 20180179661
- Publication date Jun 28, 2018
- SUMCO CORPORATION
- Noritomo MITSUGI
- C30 - CRYSTAL GROWTH

Characterising semiconductor materials

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Detection method for sensitive parts of ionization damage in bipola...

Electronic detection interface and electronic detection module usin...

Electronic detection interface and electronic detection module usin...

Method for determining material parameters of a multilayer test sample

Wide-bandgap semiconductor layer characterization

Detection unit, semiconductor film layer inspection apparatus inclu...

Semiconductor wafer evaluation apparatus and semiconductor wafer ma...

Semiconductor device, and method for manufacturing semiconductor de...

Optical systems and methods of characterizing high-k dielectrics

Semiconductor device defect analysis method

Systems and methods for measuring electrical characteristics of a m...

Semiconductor device, manufacture thereof, and a radiation measurem...

Method for measuring an electric property of a test sample

Semiconductor device inspection apparatus, semiconductor device ins...

Wide injection range open circuit voltage decay system

Device for measuring surface characteristics of a material

Methods for assessing semiconductor structures

Semiconductor device, and method for manufacturing semiconductor de...

Method and apparatus for nanoscale-dimension measurement using a di...

Non-contact measurement of a stress in a film on a substrate

Method of measuring Fe concentration in p-type silicon wafer

Structure and method for testing semiconductor device

Methods and systems for material property profiling of thin films

Method of evaluating manufacturing process of silicon material and...

Capacitance sensor and direction detection device including same

Semiconductor device, manufacture thereof, and a radiation measurem...

System and method of semiconductor characterization

Electrostatic encoder

Method for multicarrier mobility spectrum analysis

Methods for assessing semiconductor structures

Patents Applicationslast 30 patents

METHODS AND TOOLS FOR ELECTRICAL PROPERTY DEPTH PROFILING USING ELE...

INTEGRATED CURRENT MONITOR USING VARIABLE DRAIN-TO-SOURCE VOLTAGES

APPARATUS AND METHOD OF MEASURING RELIABILITY FOR FLASH MEMORY MATE...

ENERGIZATION INSPECTION APPARATUS, METHOD FOR MANUFACTURING SEMICON...

DETECTION UNIT, SEMICONDUCTOR FILM LAYER INSPECTION APPARATUS INCLU...

PREDICTION OF ELECTRONIC TRANSPORT WITH PHYSICS-AWARE MACHINE LEAR...

Method for Determining Material Parameters of a Multilayer Test Sample

SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...

Detection Method for Sensitive Parts of Ionization Damage in Bipola...

SEMICONDUCTOR DEVICE DEFECT ANALYSIS METHOD

OPTICAL SYSTEMS AND METHODS OF CHARACTERIZING HIGH-K DIELECTRICS

SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...

Method for Measuring An Electric Property of a Test Sample

SYSTEMS AND METHODS FOR MEASURING ELECTRICAL CHARACTERISTICS OF A M...

WIDE INJECTION RANGE OPEN CIRCUIT VOLTAGE DECAY SYSTEM

SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, AND A RADIATION MEASUREM...

METHOD AND APPARATUS FOR NANOSCALE-DIMENSION MEASUREMENT USING A DI...

NON-CONTACT MEASUREMENT OF A STRESS IN A FILM ON A SUBSTRATE

METHODS FOR ASSESSING SEMICONDUCTOR STRUCTURES

DEVICE FOR MEASURING SURFACE CHARACTERISTICS OF A MATERIAL

STRUCTURE AND METHOD FOR TESTING SEMICONDUCTOR DEVICE

SYSTEM AND METHOD OF SEMICONDUCTOR CHARACTERIZATION

SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DE...

METHODS AND SYSTEMS FOR MATERIAL PROPERTY PROFILING OF THIN FILMS

SEMICONDUCTOR DEVICE INSPECTION APPARATUS, SEMICONDUCTOR DEVICE INS...

A SEMICONDUCTOR DEVICE, MANUFACTURE THEREOF, AND A RADIATION MEASUR...

NON-CONTACT MEASUREMENT OF A STRESS IN A FILM ON A SUBSTRATE

METHOD OF MEASURING FE CONCENTRATION IN P-TYPE SILICON WAFER

METHOD FOR MULTICARRIER MOBILITY SPECTRUM ANALYSIS

METHOD OF EVALUATING MANUFACTURING PROCESS OF SILICON MATERIAL AND...