characterized by a material, a roughness, a coating or the like

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H01L21/67316

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67316characterized by a material, a roughness, a coating or the like

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Fluidic assembly MicroLED mass transfer method
- Patent number 12,132,034
- Issue date Oct 29, 2024
- eLux, Inc.
- Paul J. Schuele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluidic assembly carrier substrate for microLED mass transfer
- Patent number 11,990,453
- Issue date May 21, 2024
- eLux Inc.
- Paul J. Schuele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Fluidic assembly enabled mass transfer for microLED displays
- Patent number 11,894,350
- Issue date Feb 6, 2024
- e Lux, Inc.
- Paul J. Schuele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support, test device, and method of adjusting temperature...
- Patent number 11,810,800
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Hiroyuki Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport fixing jig
- Patent number 11,420,832
- Issue date Aug 23, 2022
- Nitto Denko Corporation
- Shotaro Masuda
- B32 - LAYERED PRODUCTS
Information Patent Grant
Industrial heater
- Patent number 11,147,129
- Issue date Oct 12, 2021
- Arsalan Emami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bowing semiconductor wafers
- Patent number 10,720,351
- Issue date Jul 21, 2020
- SunPower Corporation
- Emmanuel Chua Abas
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Semiconductor wafer carriers
- Patent number 10,553,466
- Issue date Feb 4, 2020
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 10,074,535
- Issue date Sep 11, 2018
- Hitachi Kokusai Electric Inc.
- Tatsuru Matsuoka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bowing semiconductor wafers
- Patent number 10,068,787
- Issue date Sep 4, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer carriers
- Patent number 10,020,213
- Issue date Jul 10, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moisture and/or electrically conductive remains detection for wafer...
- Patent number 9,978,622
- Issue date May 22, 2018
- GLOBALFOUNDRIES Inc.
- Thomas Pappritz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Light emitting device, adhesive having surface roughness, and light...
- Patent number 9,184,349
- Issue date Nov 10, 2015
- LG Innotek Co., Ltd
- Ji Eun Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz boat method and apparatus for thin film thermal treatment
- Patent number 8,461,061
- Issue date Jun 11, 2013
- Stion Corporation
- Paul Alexander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor dryer having hydrophilic end effector
- Patent number 8,205,352
- Issue date Jun 26, 2012
- Applied Materials, Inc.
- John S. Lewis
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for treating semiconductor processing components and compone...
- Patent number 8,058,174
- Issue date Nov 15, 2011
- Coorstek, Inc.
- Yeshwanth Narendar
- C30 - CRYSTAL GROWTH
Information Patent Grant
Vapor dryer having hydrophilic end effector
- Patent number 7,980,000
- Issue date Jul 19, 2011
- Applied Materials, Inc.
- John S. Lewis
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Container for precision substrate
- Patent number 7,781,035
- Issue date Aug 24, 2010
- Zeon Corporation
- Toshihiko Jimbo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lockdown rotor for a processing machine
- Patent number 7,127,828
- Issue date Oct 31, 2006
- Semitool, Inc.
- Robert Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of machining silicon
- Patent number 6,617,225
- Issue date Sep 9, 2003
- Integrated Materials, Inc.
- James E. Boyle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating silicon structures including fixtures for sup...
- Patent number 6,455,395
- Issue date Sep 24, 2002
- Integrated Materials, Inc.
- James E. Boyle
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing machine with lockdown rotor
- Patent number 6,370,791
- Issue date Apr 16, 2002
- Semitool, Inc.
- Robert Weaver
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System to reduce particulate contamination
- Patent number 6,355,577
- Issue date Mar 12, 2002
- LSI Logice Corporation
- Steven E. Reder
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method and apparatus for reducing particle contamination on wafers
- Patent number 6,334,404
- Issue date Jan 1, 2002
- United Microelectronics Corp.
- Tien-Jui Liu
- C30 - CRYSTAL GROWTH
Information Patent Grant
Apparatus for cleaning semiconductor wafers
- Patent number 6,318,389
- Issue date Nov 20, 2001
- MEMC Electronic Materials, Inc.
- Philip R. Schmidt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing jig for use in manufacturing semiconductor devic...
- Patent number 6,245,147
- Issue date Jun 12, 2001
- Fujitsu Limited
- Masanori Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier
- Patent number 6,237,979
- Issue date May 29, 2001
- Micron Technology, Inc.
- David Korn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of constructing a wafer carrier
- Patent number 6,227,590
- Issue date May 8, 2001
- Micron Technology, Inc.
- David Korn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of using a compliant process cassette
- Patent number 6,153,533
- Issue date Nov 28, 2000
- SCP Global Technologies
- Anthony Senn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer carrier having both a rigid structure and resistance to corro...
- Patent number 6,092,851
- Issue date Jul 25, 2000
- Micron Technology, Inc.
- David Korn
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Fluidic Assembly MicroLED Mass Transfer Method
- Publication number 20240145443
- Publication date May 2, 2024
- eLux Inc.
- Paul J. Schuele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORTS, SEMICONDUCTOR PROCESSING SYSTEMS, AND MATERIAL...
- Publication number 20230386874
- Publication date Nov 30, 2023
- ASM IP HOLDING, B.V.
- Shujin Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRAPHITE DISC
- Publication number 20230253225
- Publication date Aug 10, 2023
- ENKRIS SEMICONDUCTOR, INC.
- Kai CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Fluidic Assembly Carrier Substrate for MicroLED Mass Transfer
- Publication number 20230253377
- Publication date Aug 10, 2023
- eLux Inc.
- Paul J. Schuele
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOLDING DEVICE, AND USE OF THE HOLDING DEVICE
- Publication number 20230245868
- Publication date Aug 3, 2023
- HANWHA Q CELLS GMBH
- Martin SCHAPER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT
- Publication number 20230111655
- Publication date Apr 13, 2023
- KYOCERA CORPORATION
- Shoichi OTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT, TEST DEVICE, AND METHOD OF ADJUSTING TEMPERATURE...
- Publication number 20210296145
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Hiroyuki NAKAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COATING DEVICE AND COATING METHOD FOR TUBE-TYPE PERC SOLAR CELL
- Publication number 20200199746
- Publication date Jun 25, 2020
- Zhejiang Aiko Solar Energy Technology Co., Ltd.
- Kang-Cheng LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR IMPROVING WAFER BONDING STRENGTH
- Publication number 20200176256
- Publication date Jun 4, 2020
- Wuhan Xinxin Semiconductor Manufacturing Co., Ltd.
- YIN ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYDROPHOBIC ELECTROSTATIC CHUCK
- Publication number 20190115241
- Publication date Apr 18, 2019
- Kim VELLORE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BOWING SEMICONDUCTOR WAFERS
- Publication number 20180374730
- Publication date Dec 27, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER CARRIERS
- Publication number 20180337080
- Publication date Nov 22, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CASSETTE AND A METHOD OF FORMING THE SAME
- Publication number 20180261482
- Publication date Sep 13, 2018
- HIMAX TECHNOLOGIES LIMITED
- Jui Tang Chang
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
BOWING SEMICONDUCTOR WAFERS
- Publication number 20180190525
- Publication date Jul 5, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR WAFER CARRIERS
- Publication number 20180190524
- Publication date Jul 5, 2018
- SunPower Corporation
- Emmanuel Chua Abas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INDUSTRIAL HEATER
- Publication number 20170265252
- Publication date Sep 14, 2017
- Arsalan Emami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20170011908
- Publication date Jan 12, 2017
- Hitachi Kokusai Electric Inc.
- Tatsuru MATSUOKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT
- Publication number 20160315003
- Publication date Oct 27, 2016
- Centrotherm Photovoltaics AG
- Andreas Reichart
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOISTURE AND/OR ELECTRICALLY CONDUCTIVE REMAINS DETECTION FOR WAFER...
- Publication number 20160300744
- Publication date Oct 13, 2016
- GLOBALFOUNDRIES INC.
- Thomas PAPPRITZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY
- Publication number 20160276142
- Publication date Sep 22, 2016
- Andreas Ewald LOPP
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ BOAT METHOD AND APPARATUS FOR THIN FILM THERMAL TREATMENT
- Publication number 20140147800
- Publication date May 29, 2014
- Stion Corporation
- Paul Alexander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT EMITTING DEVICE AND LIGHTING SYSTEM HAVING THE SAME
- Publication number 20140124820
- Publication date May 8, 2014
- LG Innotek Co., Ltd.
- Ji Eun JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CARRIER AND SELENIZATION PROCESS SYSTEM THEREOF
- Publication number 20130236844
- Publication date Sep 12, 2013
- AXUNTEK SOLAR ENERGY
- Shih-Wei Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Quartz Boat Method and Apparatus for Thin Film Thermal Treatment
- Publication number 20120021552
- Publication date Jan 26, 2012
- Stion Corporation
- Paul Alexander
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DRYER HAVING HYDROPHILIC END EFFECTOR
- Publication number 20110266736
- Publication date Nov 3, 2011
- JOHN S. LEWIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Chimerized Wafer Boat for Use in Semiconductor Chip Processing and...
- Publication number 20110062053
- Publication date Mar 17, 2011
- Greene Tweed of Delaware, Inc.
- Francis Vo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TREATING SEMICONDUCTOR PROCESSING COMPONENTS AND COMPONE...
- Publication number 20090159897
- Publication date Jun 25, 2009
- Saint-Gobain Ceramics & Plastics, Inc.
- Yeshwanth Narendar
- C30 - CRYSTAL GROWTH
Information Patent Application
VAPOR DRYER HAVING HYDROPHILIC END EFFECTOR
- Publication number 20090084413
- Publication date Apr 2, 2009
- APPLIED MATERIALS, INC.
- JOHN S. LEWIS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for carrying reticles and method of using the same to pro...
- Publication number 20050051083
- Publication date Mar 10, 2005
- Carlos Ruiz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Coated wafer processing equipment
- Publication number 20040226506
- Publication date Nov 18, 2004
- David Mark Lynn
- H01 - BASIC ELECTRIC ELEMENTS

characterized by a material, a roughness, a coating or the like

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Fluidic assembly MicroLED mass transfer method

Fluidic assembly carrier substrate for microLED mass transfer

Fluidic assembly enabled mass transfer for microLED displays

Substrate support, test device, and method of adjusting temperature...

Transport fixing jig

Industrial heater

Bowing semiconductor wafers

Semiconductor wafer carriers

Method of manufacturing semiconductor device, substrate processing...

Bowing semiconductor wafers

Semiconductor wafer carriers

Moisture and/or electrically conductive remains detection for wafer...

Light emitting device, adhesive having surface roughness, and light...

Quartz boat method and apparatus for thin film thermal treatment

Vapor dryer having hydrophilic end effector

Method for treating semiconductor processing components and compone...

Vapor dryer having hydrophilic end effector

Container for precision substrate

Lockdown rotor for a processing machine

Method of machining silicon

Method of fabricating silicon structures including fixtures for sup...

Processing machine with lockdown rotor

System to reduce particulate contamination

Method and apparatus for reducing particle contamination on wafers

Apparatus for cleaning semiconductor wafers

Thermal processing jig for use in manufacturing semiconductor devic...

Wafer carrier

Method of constructing a wafer carrier

Method of using a compliant process cassette

Wafer carrier having both a rigid structure and resistance to corro...

Patents Applicationslast 30 patents

Fluidic Assembly MicroLED Mass Transfer Method

SUBSTRATE SUPPORTS, SEMICONDUCTOR PROCESSING SYSTEMS, AND MATERIAL...

GRAPHITE DISC

Fluidic Assembly Carrier Substrate for MicroLED Mass Transfer

HOLDING DEVICE, AND USE OF THE HOLDING DEVICE

WAFER BOAT

SUBSTRATE SUPPORT, TEST DEVICE, AND METHOD OF ADJUSTING TEMPERATURE...

COATING DEVICE AND COATING METHOD FOR TUBE-TYPE PERC SOLAR CELL

METHOD AND SYSTEM FOR IMPROVING WAFER BONDING STRENGTH

HYDROPHOBIC ELECTROSTATIC CHUCK

BOWING SEMICONDUCTOR WAFERS

SEMICONDUCTOR WAFER CARRIERS

WAFER CASSETTE AND A METHOD OF FORMING THE SAME

BOWING SEMICONDUCTOR WAFERS

SEMICONDUCTOR WAFER CARRIERS

INDUSTRIAL HEATER

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

WAFER BOAT

MOISTURE AND/OR ELECTRICALLY CONDUCTIVE REMAINS DETECTION FOR WAFER...

SUBSTRATE CARRIER FOR A REDUCED TRANSMISSION OF THERMAL ENERGY

QUARTZ BOAT METHOD AND APPARATUS FOR THIN FILM THERMAL TREATMENT

LIGHT EMITTING DEVICE AND LIGHTING SYSTEM HAVING THE SAME

SUBSTRATE CARRIER AND SELENIZATION PROCESS SYSTEM THEREOF

Quartz Boat Method and Apparatus for Thin Film Thermal Treatment

VAPOR DRYER HAVING HYDROPHILIC END EFFECTOR

Chimerized Wafer Boat for Use in Semiconductor Chip Processing and...

METHOD FOR TREATING SEMICONDUCTOR PROCESSING COMPONENTS AND COMPONE...

VAPOR DRYER HAVING HYDROPHILIC END EFFECTOR

Apparatus for carrying reticles and method of using the same to pro...

Coated wafer processing equipment