characterized by a material, a roughness, a coating or the like

Industry

CPC
H01L21/67306

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67306characterized by a material, a roughness, a coating or the like

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Graphite plate
- Patent number 12,136,559
- Issue date Nov 5, 2024
- ENKRIS SEMICONDUCTOR, INC.
- Peng Xiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate support, and method of ma...
- Patent number 11,929,272
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,232,963
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Industrial heater
- Patent number 11,147,129
- Issue date Oct 12, 2021
- Arsalan Emami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two piece shutter disk assembly with self-centering feature
- Patent number 11,043,406
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing actuator
- Patent number 11,031,883
- Issue date Jun 8, 2021
- Honda Motor Co., Ltd.
- Masahiko Osada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate-storing container
- Patent number 11,011,400
- Issue date May 18, 2021
- Sumco Corporation
- Hirotsugu Eguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Segmented vertical wafer boat
- Patent number 10,861,727
- Issue date Dec 8, 2020
- Samsung Electronics Co., Ltd.
- Larry E. Vaughan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Protective layer for PECVD graphite boats
- Patent number 10,151,030
- Issue date Dec 11, 2018
- KGT Graphit Technologie GmbH
- Torsten Kornmeyer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device and semiconductor manu...
- Patent number 10,049,910
- Issue date Aug 14, 2018
- RENESAS ELECTRONICS CORPORATION
- Ryuji Kirino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer boat and manufacturing method of the same
- Patent number 10,026,633
- Issue date Jul 17, 2018
- COORSTEK KK
- Takeshi Ogitsu
- B24 - GRINDING POLISHING
Information Patent Grant
Heat treatment method
- Patent number 9,922,842
- Issue date Mar 20, 2018
- Shin-Etsu Handotai Co., Ltd.
- Masahiro Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Generation of compact alumina passivation layers on aluminum plasma...
- Patent number 9,903,020
- Issue date Feb 27, 2018
- Applied Materials, Inc.
- Sung Je Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioned semiconductor system parts
- Patent number 9,885,117
- Issue date Feb 6, 2018
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Quartz clip device and manufacturing method thereof and OLED high-t...
- Patent number 9,803,796
- Issue date Oct 31, 2017
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Wei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing
- Patent number 9,490,157
- Issue date Nov 8, 2016
- Tokai Carbon Co., Ltd.
- Jitendra S. Goela
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer support jig, vertical heat treatment boat including wafer sup...
- Patent number 8,506,712
- Issue date Aug 13, 2013
- Shin-Etsu Handotai Co., Ltd.
- Takeshi Kobayashi
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Vertical boat for heat treatment and method for heat treatment of s...
- Patent number 8,287,649
- Issue date Oct 16, 2012
- Shin-Etsu Handotai Co., Ltd.
- Takeshi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Assembly of silicon parts bonded together with a silicon and silica...
- Patent number 8,268,448
- Issue date Sep 18, 2012
- Ferrotec (USA) Corporation
- James E. Boyle
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Opaque low resistivity silicon carbide
- Patent number 8,202,621
- Issue date Jun 19, 2012
- Rohm & Haas Company
- Michael A. Pickering
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat treatment jig for semiconductor silicon substrates and method...
- Patent number 8,105,078
- Issue date Jan 31, 2012
- Sumco Corporation
- Naoshi Adachi
- C04 - CEMENTS CONCRETE ARTIFICIAL STONE CERAMICS REFRACTORIES
Information Patent Grant
Silocon wafer supporting method, heat treatment jig and heat-treate...
- Patent number 8,067,820
- Issue date Nov 29, 2011
- Sumco Corporation
- Takayuki Kihara
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Quartz glass tool for heat treatment of silicon wafer and process f...
- Patent number 7,997,956
- Issue date Aug 16, 2011
- Shin-Etsu Quartz Products Co., Ltd.
- Junichi Tsuruzoe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Holder manufacturing method for loading substrate of semiconductor...
- Patent number 7,963,735
- Issue date Jun 21, 2011
- Terasemicon Corporation
- Taek Young Jang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Heat treating apparatus
- Patent number 7,865,070
- Issue date Jan 4, 2011
- Hitachi Kokusai Electric Inc.
- Iwao Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tube formed of bonded silicon staves
- Patent number 7,854,974
- Issue date Dec 21, 2010
- Integrated Materials, Inc.
- Ranaan Y. Zehavi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Baking method of quartz products, computer program and storage medium
- Patent number 7,829,475
- Issue date Nov 9, 2010
- Tokyo Electron Limited
- Katsuhiko Anbai
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of semiconductor process and semiconductor apparatus system
- Patent number 7,806,684
- Issue date Oct 5, 2010
- United Microelectronics Corp.
- Guang-You Yu
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Container for precision substrate
- Patent number 7,781,035
- Issue date Aug 24, 2010
- Zeon Corporation
- Toshihiko Jimbo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving isothermal batch processing of su...
- Patent number 7,771,563
- Issue date Aug 10, 2010
- Sumitomo Precision Products Co., LTD
- Robert W. Grant
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...
- Publication number 20240363378
- Publication date Oct 31, 2024
- Applied Materials, Inc.
- Thomas ACKERMANN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device and Methods of Making and Using an Enhanced Ca...
- Publication number 20240355655
- Publication date Oct 24, 2024
- STATS ChipPAC Pte Ltd.
- MoonSu Han
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...
- Publication number 20240249963
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Support, Substrate Processing Apparatus and Method of Man...
- Publication number 20240162067
- Publication date May 16, 2024
- Kokusai Electric Corporation
- Daiki TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Graphite Plate
- Publication number 20220238363
- Publication date Jul 28, 2022
- ENKRIS SEMICONDUCTOR, INC.
- Peng XIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC COMPONENT, METHOD OF MANUFACTURING ELECTRONIC COMPONENT,...
- Publication number 20210343573
- Publication date Nov 4, 2021
- TDK Corporation
- Hisayoshi WATANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT, AND METHOD OF MA...
- Publication number 20210035835
- Publication date Feb 4, 2021
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD
- Publication number 20200111690
- Publication date Apr 9, 2020
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT ELEMENT FOR A SUPPORT RACK
- Publication number 20190333787
- Publication date Oct 31, 2019
- HERAEUS NOBLELIGHT GMBH
- Thomas PIELA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
QUARTZ GLASS MEMBER WITH INCREASED EXPOSED AREA, METHOD FOR MANUFAC...
- Publication number 20190321932
- Publication date Oct 24, 2019
- Shin-Etsu Quartz Products Co., Ltd.
- Akiyoshi TSUCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO PIECE SHUTTER DISK ASSEMBLY WITH SELF-CENTERING FEATURE
- Publication number 20190326154
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- CHENG-HSIUNG TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT AND METHOD OF MANUFACTURING THE SAME
- Publication number 20190326145
- Publication date Oct 24, 2019
- Mitsubishi Electric Corporation
- Atsushi YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEGMENTED VERTICAL WAFER BOAT
- Publication number 20190287832
- Publication date Sep 19, 2019
- Samsung Electronics Co., Ltd.
- Larry E. VAUGHAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE-STORING CONTAINER
- Publication number 20190080946
- Publication date Mar 14, 2019
- SUMCO CORPORATION
- Hirotsugu EGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR THERMAL TREATMENT OF A SUBSTRATE, CARRIER AND SUBSTRA...
- Publication number 20180247842
- Publication date Aug 30, 2018
- HERAEUS NOBLELIGHT GMBH
- Thomas PIELA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROTECTIVE LAYER FOR PECVD GRAPHITE BOATS
- Publication number 20170211182
- Publication date Jul 27, 2017
- KGT GRAPHIT TECHNOLOGIE GMBH
- Torsten KORNMEYER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...
- Publication number 20170125279
- Publication date May 4, 2017
- RENESAS ELECTRONICS CORPORATION
- Ryuji KIRINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT AND MANUFACTURING METHOD OF THE SAME
- Publication number 20160379859
- Publication date Dec 29, 2016
- CoorsTek KK
- Takeshi OGITSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT METHOD
- Publication number 20160233107
- Publication date Aug 11, 2016
- Shin-Etsu Handotai Co., Ltd.
- Masahiro KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONED SEMICONDUCTOR SYSTEM PARTS
- Publication number 20150275361
- Publication date Oct 1, 2015
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MECHANISMS FOR FURNACE APPARATUS AND WAFER BOAT
- Publication number 20150128863
- Publication date May 14, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Yi-Chang LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH STRENGTH BONDING AND COATING MIXTURE AND METHOD
- Publication number 20130174980
- Publication date Jul 11, 2013
- FERROTEC (USA) CORPORATION
- Sang In Lee
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ELECTRONIC PART POSITIONING JIG
- Publication number 20120181738
- Publication date Jul 19, 2012
- IBIDEN CO., LTD.
- Keiji Hirose
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES
- Publication number 20110274874
- Publication date Nov 10, 2011
- AGC Electronic Materials
- Michael A. Pickering
- C30 - CRYSTAL GROWTH
Information Patent Application
MANUFACTURING METHOD OF A HOLDER OF A BOAT FOR LOADING A SUBSTRATE
- Publication number 20110217461
- Publication date Sep 8, 2011
- Taek Young Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH STRENGTH BONDING AND COATING MIXTURE
- Publication number 20110073236
- Publication date Mar 31, 2011
- FERROTEC (USA) CORPORATION
- Sang In Lee
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
VERTICAL BOAT FOR HEAT TREATMENT AND METHOD FOR HEAT TREATMENT OF S...
- Publication number 20110028005
- Publication date Feb 3, 2011
- Shin-Etsu Handotai Co., Ltd.
- Takeshi Kobayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Methods of Making Wafer Supports
- Publication number 20100304022
- Publication date Dec 2, 2010
- MEMC Electronic Materials, Inc.
- Larry W. Shive
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILOCON WAFER SUPPORTING METHOD, HEAT TREATMENT JIG AND HEAT-TREATE...
- Publication number 20100200962
- Publication date Aug 12, 2010
- Takayuki Kihara
- C30 - CRYSTAL GROWTH
Information Patent Application
Thermal treatment apparatus, method for manufacturing semiconductor...
- Publication number 20100148415
- Publication date Jun 17, 2010
- Hitachi Kokusai Electric Inc.
- Naoto Nakamura
- H01 - BASIC ELECTRIC ELEMENTS

characterized by a material, a roughness, a coating or the like

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Graphite plate

Substrate processing apparatus, substrate support, and method of ma...

Substrate processing apparatus and method

Industrial heater

Two piece shutter disk assembly with self-centering feature

Method of manufacturing actuator

Substrate-storing container

Segmented vertical wafer boat

Protective layer for PECVD graphite boats

Manufacturing method of semiconductor device and semiconductor manu...

Wafer boat and manufacturing method of the same

Heat treatment method

Generation of compact alumina passivation layers on aluminum plasma...

Conditioned semiconductor system parts

Quartz clip device and manufacturing method thereof and OLED high-t...

Semiconductor processing

Wafer support jig, vertical heat treatment boat including wafer sup...

Vertical boat for heat treatment and method for heat treatment of s...

Assembly of silicon parts bonded together with a silicon and silica...

Opaque low resistivity silicon carbide

Heat treatment jig for semiconductor silicon substrates and method...

Silocon wafer supporting method, heat treatment jig and heat-treate...

Quartz glass tool for heat treatment of silicon wafer and process f...

Holder manufacturing method for loading substrate of semiconductor...

Heat treating apparatus

Tube formed of bonded silicon staves

Baking method of quartz products, computer program and storage medium

Method of semiconductor process and semiconductor apparatus system

Container for precision substrate

Systems and methods for achieving isothermal batch processing of su...

Patents Applicationslast 30 patents

COMPONENTS AND APPARATUS FOR IMPROVING UNIFORMITY OF AN EPITAXIAL L...

Semiconductor Device and Methods of Making and Using an Enhanced Ca...

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...

Substrate Support, Substrate Processing Apparatus and Method of Man...

Graphite Plate

ELECTRONIC COMPONENT, METHOD OF MANUFACTURING ELECTRONIC COMPONENT,...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT, AND METHOD OF MA...

SUBSTRATE PROCESSING APPARATUS AND METHOD

SUBSTRATE SUPPORT ELEMENT FOR A SUPPORT RACK

QUARTZ GLASS MEMBER WITH INCREASED EXPOSED AREA, METHOD FOR MANUFAC...

TWO PIECE SHUTTER DISK ASSEMBLY WITH SELF-CENTERING FEATURE

WAFER BOAT AND METHOD OF MANUFACTURING THE SAME

SEGMENTED VERTICAL WAFER BOAT

SUBSTRATE-STORING CONTAINER

APPARATUS FOR THERMAL TREATMENT OF A SUBSTRATE, CARRIER AND SUBSTRA...

PROTECTIVE LAYER FOR PECVD GRAPHITE BOATS

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANU...

WAFER BOAT AND MANUFACTURING METHOD OF THE SAME

HEAT TREATMENT METHOD

CONDITIONED SEMICONDUCTOR SYSTEM PARTS

MECHANISMS FOR FURNACE APPARATUS AND WAFER BOAT

HIGH STRENGTH BONDING AND COATING MIXTURE AND METHOD

ELECTRONIC PART POSITIONING JIG

CHEMICAL VAPOR DEPOSITED SILICON CARBIDE ARTICLES

MANUFACTURING METHOD OF A HOLDER OF A BOAT FOR LOADING A SUBSTRATE

HIGH STRENGTH BONDING AND COATING MIXTURE

VERTICAL BOAT FOR HEAT TREATMENT AND METHOD FOR HEAT TREATMENT OF S...

Methods of Making Wafer Supports

SILOCON WAFER SUPPORTING METHOD, HEAT TREATMENT JIG AND HEAT-TREATE...

Thermal treatment apparatus, method for manufacturing semiconductor...