characterized by movements or sequence of movements of transfer devices

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CPC
H01L21/67745

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67745characterized by movements or sequence of movements of transfer devices

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate treatment apparatus and transfer schedule creation method
- Patent number 12,315,752
- Issue date May 27, 2025
- Tokyo Electron Limited
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High throughput polishing modules and modular polishing systems
- Patent number 12,308,272
- Issue date May 20, 2025
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 12,300,528
- Issue date May 13, 2025
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
In-vacuum twin-arm robot
- Patent number 12,283,508
- Issue date Apr 22, 2025
- Kawasaki Jukogyo Kabushiki Kaisha
- Takeshi Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate transfer method
- Patent number 12,283,502
- Issue date Apr 22, 2025
- Samsung Electronics Co., Ltd.
- Young Wook Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transferring substrate, and apparatus and method for...
- Patent number 12,278,128
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Jinwoo Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 12,246,404
- Issue date Mar 11, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate transfer method and substrate transfer system
- Patent number 12,198,955
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,176,205
- Issue date Dec 24, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing method, method of manufacturing semiconductor, and subst...
- Patent number 12,165,894
- Issue date Dec 10, 2024
- Kokusai Electric Corporation
- Yasuhiro Mizuguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and chamber for backside physical vapor deposition
- Patent number 12,142,478
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Chunming Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air curtain for defect reduction
- Patent number 12,062,562
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operating method of vacuum processing apparatus
- Patent number 12,062,564
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Daichi Naiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 12,035,576
- Issue date Jul 9, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for thin film deposition
- Patent number 12,024,772
- Issue date Jul 2, 2024
- ASM IP Holding B.V.
- Jun Kawahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating system and substrate transporting method
- Patent number 12,014,940
- Issue date Jun 18, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for transporting substrate, system for processing substra...
- Patent number 12,009,240
- Issue date Jun 11, 2024
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 11,996,311
- Issue date May 28, 2024
- Kokusai Electric Corporation
- Hiroshi Ashihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate processing system
- Patent number 11,948,822
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Dongwei Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating method
- Patent number 11,927,886
- Issue date Mar 12, 2024
- Semes Co., Ltd.
- Doo Young Oh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treatment apparatus and transfer schedule creation method
- Patent number 11,915,959
- Issue date Feb 27, 2024
- Tokyo Electron Limited
- Kenichirou Matsuyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,894,252
- Issue date Feb 6, 2024
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 11,850,692
- Issue date Dec 26, 2023
- TAIWAN SEMICONDUCTORMANUFACTURING COMPANY LIMITED
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of operating transport system
- Patent number 11,854,844
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chi-Yuan Chu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing apparatus
- Patent number 11,823,932
- Issue date Nov 21, 2023
- Samsung Electronics Co., Ltd.
- Eungjin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device maintenance in semiconductor manufacturing environment
- Patent number 11,819,965
- Issue date Nov 21, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Vincent Chien
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer processing apparatus including equipment front end module (EF...
- Patent number 11,804,393
- Issue date Oct 31, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20250174478
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20250174480
- Publication date May 29, 2025
- SCREEN Holdings Co., Ltd.
- Shinichi TANIGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE, NOTCH POSITION CORRECTION METHOD, SUBSTR...
- Publication number 20250118584
- Publication date Apr 10, 2025
- ASM IP HOLDING B.V.
- Masashi Nakano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...
- Publication number 20250112074
- Publication date Apr 3, 2025
- LPE S.p.A.
- Francesco Corea
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250096018
- Publication date Mar 20, 2025
- SEMES CO., LTD.
- Changhwa JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM
- Publication number 20250054792
- Publication date Feb 13, 2025
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SU...
- Publication number 20250054794
- Publication date Feb 13, 2025
- Kokusai Electric Corporation
- Yasuhiro MIZUGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20250046631
- Publication date Feb 6, 2025
- SEMES CO., LTD.
- Young Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...
- Publication number 20250046645
- Publication date Feb 6, 2025
- Tokyo Electron Limited
- Tamihiro KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250022737
- Publication date Jan 16, 2025
- SEMES CO., LTD.
- Taewoong SEO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...
- Publication number 20250014929
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Risa TANIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE
- Publication number 20250006533
- Publication date Jan 2, 2025
- TOKYO ELECTRON LIMITED
- Wataru MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20240379397
- Publication date Nov 14, 2024
- VM Inc.
- Sang Woo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER
- Publication number 20240371673
- Publication date Nov 7, 2024
- Applied Materials, Inc.
- Aditya Chuttar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240373683
- Publication date Nov 7, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN FOR DEFECT REDUCTION
- Publication number 20240355660
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334758
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334759
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...
- Publication number 20240304472
- Publication date Sep 12, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...
- Publication number 20240290645
- Publication date Aug 29, 2024
- TOKYO ELECTRON LIMITED
- Takehiro SHINDO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240274455
- Publication date Aug 15, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...
- Publication number 20240249963
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240231232
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...
- Publication number 20240222176
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Umeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL
- Publication number 20240213089
- Publication date Jun 27, 2024
- LAM RESEARCH CORPORATION
- Navaneetha Krishnan SUBBAIYAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20240178032
- Publication date May 30, 2024
- Robert T. Caveney
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240178031
- Publication date May 30, 2024
- SEMES CO., LTD.
- Sumi Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND TRANSFER SCHEDULE CREATION METHOD
- Publication number 20240162072
- Publication date May 16, 2024
- TOKYO ELECTRON LIMITED
- Kenichirou MATSUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM
- Publication number 20240128110
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS

characterized by movements or sequence of movements of transfer devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate treatment apparatus and transfer schedule creation method

High throughput polishing modules and modular polishing systems

Substrate transport apparatus

In-vacuum twin-arm robot

Substrate transfer device and substrate transfer method

Apparatus for transferring substrate, and apparatus and method for...

Substrate transport apparatus and substrate transport method

Device maintenance in semiconductor manufacturing environment

Substrate transfer method and substrate transfer system

Method and chamber for backside physical vapor deposition

Processing method, method of manufacturing semiconductor, and subst...

Method and chamber for backside physical vapor deposition

Calibration of an electronics processing system

Air curtain for defect reduction

Operating method of vacuum processing apparatus

Substrate treating apparatus and substrate transporting method

Apparatuses for thin film deposition

Substrate treating system and substrate transporting method

Apparatus for transporting substrate, system for processing substra...

Substrate processing apparatus, method of processing substrate, met...

Substrate processing apparatus and substrate processing method

Substrate transfer device and substrate processing system

Substrate treating method

Substrate treatment apparatus and transfer schedule creation method

Substrate transport apparatus

Device maintenance in semiconductor manufacturing environment

Method of operating transport system

Substrate processing system and substrate processing apparatus

Device maintenance in semiconductor manufacturing environment

Wafer processing apparatus including equipment front end module (EF...

Patents Applicationslast 30 patents

SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER DEVICE, NOTCH POSITION CORRECTION METHOD, SUBSTR...

WAFER CASSETTE LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACT...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSFER APPARATUS INCLUDING MULTILAYER EFEM

PROCESSING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SU...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SUBSTRATE TREATMENT DEVICE, SUBSTRATE TREATMENT SYSTEM, AND METHOD...

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD, METHOD OF MANUFACT...

SUBSTRATE CONVEYANCE METHOD AND SUBSTRATE CONVEYANCE DEVICE

SUBSTRATE TRANSFER APPARATUS

LIFT ASSEMBLY FOR SEMICONDUCTOR MANUFACTURING PROCESSING CHAMBER

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

AIR CURTAIN FOR DEFECT REDUCTION

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...

APPARATUS FOR TRANSPORTING SUBSTRATE, SYSTEM FOR PROCESSING SUBSTRA...

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...

INTEGRATED ATMOSPHERIC PLASMA TREATMENT STATION IN PROCESSING TOOL

SUBSTRATE TRANSPORT APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TREATMENT APPARATUS AND TRANSFER SCHEDULE CREATION METHOD

METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM