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characterized by movements or sequence of movements of transfer devices
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H01L21/67745
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/67745
characterized by movements or sequence of movements of transfer devices
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Patents Grants
last 30 patents
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Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,971,661
Issue date
Apr 30, 2024
Tokyo Electron Limited
Yoji Sakata
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer device and substrate processing system
Patent number
11,948,822
Issue date
Apr 2, 2024
Tokyo Electron Limited
Dongwei Li
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating method
Patent number
11,927,886
Issue date
Mar 12, 2024
Semes Co., Ltd.
Doo Young Oh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treatment apparatus and transfer schedule creation method
Patent number
11,915,959
Issue date
Feb 27, 2024
Tokyo Electron Limited
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transport apparatus
Patent number
11,894,252
Issue date
Feb 6, 2024
BROOKS AUTOMATION US, LLC
Robert T. Caveney
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Device maintenance in semiconductor manufacturing environment
Patent number
11,850,692
Issue date
Dec 26, 2023
TAIWAN SEMICONDUCTORMANUFACTURING COMPANY LIMITED
Vincent Chien
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Method of operating transport system
Patent number
11,854,844
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Yuan Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing system and substrate processing apparatus
Patent number
11,823,932
Issue date
Nov 21, 2023
Samsung Electronics Co., Ltd.
Eungjin Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Device maintenance in semiconductor manufacturing environment
Patent number
11,819,965
Issue date
Nov 21, 2023
Taiwan Semiconductor Manufacturing Company Limited
Vincent Chien
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Wafer processing apparatus including equipment front end module (EF...
Patent number
11,804,393
Issue date
Oct 31, 2023
Samsung Electronics Co., Ltd.
Jinhyuk Choi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transfer system and load lock module
Patent number
11,791,180
Issue date
Oct 17, 2023
Tokyo Electron Limited
Norihiko Amikura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate transport system and substrate transport method
Patent number
11,776,831
Issue date
Oct 3, 2023
Tokyo Electron Limited
Takehiro Shindo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Calibration of an electronics processing system
Patent number
11,766,782
Issue date
Sep 26, 2023
Applied Materials, Inc.
Nicholas Michael Bergantz
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Calibration of an electronics processing system
Patent number
11,759,954
Issue date
Sep 19, 2023
Applied Materials, Inc.
Nicholas Michael Bergantz
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Chamber module and test handler including the same
Patent number
11,762,009
Issue date
Sep 19, 2023
Semes Co., Ltd.
Hyon Jin Lee
G01 - MEASURING TESTING
Information
Patent Grant
Substrate treating apparatus
Patent number
11,756,813
Issue date
Sep 12, 2023
Semes Co., Ltd.
Yong Seok Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device by setting process cha...
Patent number
11,749,550
Issue date
Sep 5, 2023
Kokusai Electric Corporation
Yasuhiro Mizuguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate handling systems
Patent number
11,705,354
Issue date
Jul 18, 2023
Applied Materials, Inc.
Gee Sun Hoey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Rotational indexer with additional rotational axes
Patent number
11,699,610
Issue date
Jul 11, 2023
Lam Research Corporation
Richard M. Blank
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and methods for handling die carriers
Patent number
11,682,571
Issue date
Jun 20, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Sheng Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing display apparatus
Patent number
11,618,940
Issue date
Apr 4, 2023
Samsung Display Co., Ltd.
Kyubum Kim
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Equipment front end modules including multiple aligners, assemblies...
Patent number
11,610,796
Issue date
Mar 21, 2023
Applied Materials, Inc.
Nicholas Michael Bergantz
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Method of manufacturing display apparatus
Patent number
11,597,994
Issue date
Mar 7, 2023
Samsung Display Co., Ltd.
Kyubum Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Using sacrificial solids in semiconductor processing
Patent number
11,600,485
Issue date
Mar 7, 2023
Micron Technology, Inc.
Matthew S. Thorum
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Platform and method of operating for integrated end-to-end fully se...
Patent number
11,594,451
Issue date
Feb 28, 2023
Tokyo Electron Limited
Robert Clark
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate treating apparatus and substrate transporting method
Patent number
11,590,540
Issue date
Feb 28, 2023
SCREEN Holdings Co., Ltd.
Joji Kuwahara
B08 - CLEANING
Information
Patent Grant
Substrate transport apparatus
Patent number
11,587,813
Issue date
Feb 21, 2023
BROOKS AUTOMATION US, LLC
Robert T. Caveney
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Substrate processing apparatus, substrate processing method and rec...
Patent number
11,545,377
Issue date
Jan 3, 2023
Tokyo Electron Limited
Seiji Nakano
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for tray cassette warehousing
Patent number
11,527,425
Issue date
Dec 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung-Sheng Kuo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
End effectors for moving workpieces and replaceable parts within a...
Patent number
11,515,127
Issue date
Nov 29, 2022
Beijing E-Town Semiconductor Technology Co., Ltd.
Martin L. Zucker
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM
Publication number
20240128110
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Kosuke KINOSHITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER TRANSPORT SYSTEM AND TRANSPORTING METHOD USING THE SAME
Publication number
20240128103
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Qun DENG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER PROCESSING APPARATUS
Publication number
20240120226
Publication date
Apr 11, 2024
ASM IP HOLDING, B.V.
Yoshiyuki Umeoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER MODULE AND SUBSTRATE TRANSFER METHOD
Publication number
20240112936
Publication date
Apr 4, 2024
TOKYO ELECTRON LIMITED
Mitsuyori SUWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE MAINTENANCE IN SEMICONDUCTOR MANUFACTURING ENVIRONMENT
Publication number
20240082964
Publication date
Mar 14, 2024
Taiwan Semiconductor Manufacturing Company Limited
Vincent Chien
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
WAFER ALIGNMENT ASSEMBLY OF THE SOLDER REFLOW SYSTEM
Publication number
20240047255
Publication date
Feb 8, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chia-Ching Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20240021457
Publication date
Jan 18, 2024
TOKYO ELECTRON LIMITED
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER METHOD, SUBSTRATE PROCESSING APPARATUS, AND RECO...
Publication number
20240006205
Publication date
Jan 4, 2024
TOKYO ELECTRON LIMITED
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND TRANSFER METHOD
Publication number
20230420286
Publication date
Dec 28, 2023
TOKYO ELECTRON LIMITED
Takayasu KIYOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR HANDLING POT-SHAPED HOLLOW BODIES, MORE PARTI...
Publication number
20230411195
Publication date
Dec 21, 2023
GSEC German Semiconductor Equipment Company GmbH
Gunter HAAS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALIBRATION OF AN ELECTRONICS PROCESSING SYSTEM
Publication number
20230364794
Publication date
Nov 16, 2023
Applied Materials, Inc.
Nicholas Michael Bergantz
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE BY SETTING PROCESS CHA...
Publication number
20230360942
Publication date
Nov 9, 2023
Kokusai Electric Corporation
Yasuhiro MIZUGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND CHAMBER FOR BACKSIDE PHYSICAL VAPOR DEPOSITION
Publication number
20230335393
Publication date
Oct 19, 2023
Applied Materials, Inc.
Chunming ZHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TREATMENT METHOD, STORAGE MEDIUM, AND SUBSTRATE TREATMENT...
Publication number
20230305389
Publication date
Sep 28, 2023
TOKYO ELECTRON LIMITED
Takashi YAMAUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING SYSTEM
Publication number
20230307278
Publication date
Sep 28, 2023
TOKYO ELECTRON LIMITED
Dongwei LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
Publication number
20230298918
Publication date
Sep 21, 2023
Kokusai Electric Corporation
Hiroshi ASHIHARA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHODS FOR HANDLING DIE CARRIERS
Publication number
20230298919
Publication date
Sep 21, 2023
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Tsung-Sheng KUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-STATION PROCESSING CHAMBER FOR SEMICONDUCTOR
Publication number
20230274957
Publication date
Aug 31, 2023
PIOTECH CO., LTD.
HUAQIANG TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTIPLE SUBSTRATE HANDLING SYSTEM AND METHOD
Publication number
20230260815
Publication date
Aug 17, 2023
Applied Materials, Inc.
Hsiu-jen WANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSPORT METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20230230862
Publication date
Jul 20, 2023
TOKYO ELECTRON LIMITED
Kiyoshi SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
Publication number
20230230865
Publication date
Jul 20, 2023
Samsung Electronics Co., Ltd.
Jinhyuk CHOI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
Publication number
20230215751
Publication date
Jul 6, 2023
Hitachi High-Tech Corporation
Daichi Naiki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CARRIER, APPARATUS FOR MANUFACTURING DISPLAY APPARATUS AND INCLUDIN...
Publication number
20230193450
Publication date
Jun 22, 2023
SAMSUNG DISPLAY CO., LTD.
Kyubum Kim
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE TRANSPORT APPARATUS
Publication number
20230197493
Publication date
Jun 22, 2023
BROOKS AUTOMATION US, LLC
Robert T. Caveney
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
Publication number
20230166301
Publication date
Jun 1, 2023
SCREEN Holdings Co., Ltd.
Joji KUWAHARA
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20230152716
Publication date
May 18, 2023
TOKYO ELECTRON LIMITED
Kenichirou Matsuyama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-VACUUM TWIN-ARM ROBOT
Publication number
20230141856
Publication date
May 11, 2023
KAWASAKI JUKOGYO KABUSHIKI KAISHA
Takeshi SHIBATA
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
BATCH PROCESSING OVEN FOR MAGNETIC ANNEAL
Publication number
20230117184
Publication date
Apr 20, 2023
Yield Engineering Systems, Inc.
M. Ziaul Karim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR TRAY CASSETTE WAREHOUSING
Publication number
20230095609
Publication date
Mar 30, 2023
Taiwan Semiconductor Manufacturing Co., LTD
Tsung-Sheng KUO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Transfer Position for Workpieces and Replaceable Parts in a Vacuum...
Publication number
20230091035
Publication date
Mar 23, 2023
Beijing E-Town Semiconductor Technology Co., Ltd.
Martin L. Zucker
H01 - BASIC ELECTRIC ELEMENTS