characterized by the construction of the load-lock chamber

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CPC
H01L21/67201

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67201characterized by the construction of the load-lock chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
EFEM
- Patent number 12,362,207
- Issue date Jul 15, 2025
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam inspection apparatus
- Patent number 12,354,891
- Issue date Jul 8, 2025
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet processing system and system and method for manufacturing semic...
- Patent number 12,347,702
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Ying-Chieh Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection system and method of use thereof
- Patent number 12,322,616
- Issue date Jun 3, 2025
- JNK TECH
- Youngjin Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,748
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece handling architecture for high workpiece throughput
- Patent number 12,315,747
- Issue date May 27, 2025
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber semiconductor manufacturing system
- Patent number 12,288,701
- Issue date Apr 29, 2025
- Syskey Technology Co., Ltd.
- Hsueh-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for load-locked printing
- Patent number 12,285,945
- Issue date Apr 29, 2025
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas pressure balance valve, gas pressure balance method, and load l...
- Patent number 12,281,723
- Issue date Apr 22, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Wenzhe Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Model-based controlled load lock pumping scheme
- Patent number 12,278,124
- Issue date Apr 15, 2025
- Applied Materials, Inc.
- D. Jeffrey Lischer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus
- Patent number 12,278,123
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jingfeng Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate retaining apparatus, system including the apparatus, and...
- Patent number 12,270,106
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Shiva K. T. Rajavelu Muralidhar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load port and methods of operation
- Patent number 12,272,573
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Fam Shiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Loadlock apparatus and substrate processing apparatus including the...
- Patent number 12,264,747
- Issue date Apr 1, 2025
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gapfill of variable aspect ratio features with a composite PEALD an...
- Patent number 12,261,038
- Issue date Mar 25, 2025
- Lam Research Corporation
- Hu Kang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,243,760
- Issue date Mar 4, 2025
- BEILAB CORP.
- Jihyun Seo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer apparatus with aligner
- Patent number 12,224,191
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- Beomsoo Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus including EFEM and method of processing...
- Patent number 12,217,984
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate vacuum treatment apparatus and method therefor
- Patent number 12,211,715
- Issue date Jan 28, 2025
- EVATEC AG
- Gaston Van Buuren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and method of using an embedded chamber
- Patent number 12,191,174
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port and multi-use carrier
- Patent number 12,191,179
- Issue date Jan 7, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- Yi-Jun Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer detection method and substrate processing apparatus
- Patent number 12,159,798
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for integrating load locks into a factory inter...
- Patent number 12,159,796
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition method and vapor deposition device
- Patent number 12,142,482
- Issue date Nov 12, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20250226245
- Publication date Jul 10, 2025
- Samsung Electronics Co., Ltd.
- Tae Kun KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EQUIPMENT FRONT-END MODULE AND METHOD FOR CONTROLLING HUMIDITY IN E...
- Publication number 20250201599
- Publication date Jun 19, 2025
- SEMES CO., LTD.
- Dukhyun SON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250201585
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFIGURABLE AND MODULAR LOAD LOCK CHAMBER SYSTEMS AND METHODS OF M...
- Publication number 20250183069
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Samer Banna
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING STATION
- Publication number 20250183063
- Publication date Jun 5, 2025
- Applied Materials, Inc.
- Pandu Maddherla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE COOLING APPARATUS USING CONDUCTION AND RADIANCE
- Publication number 20250183068
- Publication date Jun 5, 2025
- ASM IP HOLDING B.V.
- Mandar Vijay Deshpande
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK ARRANGEMENTS CONFIGURED FOR PERFORMING PARALLEL PROCESSES...
- Publication number 20250174483
- Publication date May 29, 2025
- ASM IP HOLDING B.V.
- Salam Harb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250167018
- Publication date May 22, 2025
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
COMPOSITION MIXTURE CONTROL OF EFEM ENVIRONMENT
- Publication number 20250093890
- Publication date Mar 20, 2025
- LAM RESEARCH CORPORATION
- Brandon SENN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT-END MODULE AND SUBSTRATE PROCESSING APPARATUS INCLU...
- Publication number 20250079205
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- Pyeong Gyu SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-USE CARRIER
- Publication number 20250069924
- Publication date Feb 27, 2025
- Brillian Network & Automation Integrated System Co., Ltd.
- YI-JUN GU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING...
- Publication number 20250069920
- Publication date Feb 27, 2025
- ASM IP HOLDING B.V.
- Masaei Suwada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System
- Publication number 20250022728
- Publication date Jan 16, 2025
- SPTS TECHNOLOGIES LIMITED
- Attila Nagy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...
- Publication number 20250006521
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND SUBSTRATE INSPECTION METHOD IN...
- Publication number 20240429083
- Publication date Dec 26, 2024
- PSK INC.
- Man Jin KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20240420981
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS
- Publication number 20240404841
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Praveen A. KOTINATOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
- Publication number 20240395581
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...
- Publication number 20240383012
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Youngon OH
- B08 - CLEANING
Information Patent Application
PROCESSING SYSTEM AND TEACHING METHOD
- Publication number 20240379392
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer Cooling System
- Publication number 20240332044
- Publication date Oct 3, 2024
- Taiwan Semconductor Manufacturing Company, Ltd.
- Otto CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...
- Publication number 20240321612
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor process machine and operation method thereof
- Publication number 20240297056
- Publication date Sep 5, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- HAIPENG ZHU
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the load-lock chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

EFEM

Particle beam inspection apparatus

Wet processing system and system and method for manufacturing semic...

Substrate inspection system and method of use thereof

Workpiece handling architecture for high workpiece throughput

Workpiece handling architecture for high workpiece throughput

Multi-chamber semiconductor manufacturing system

Method and apparatus for load-locked printing

Gas pressure balance valve, gas pressure balance method, and load l...

Model-based controlled load lock pumping scheme

Semiconductor processing apparatus

Substrate retaining apparatus, system including the apparatus, and...

Load port and methods of operation

Loadlock apparatus and substrate processing apparatus including the...

Gapfill of variable aspect ratio features with a composite PEALD an...

Semiconductor processing apparatus and method utilizing electrostat...

Substrate processing apparatus

Wafer transfer apparatus with aligner

Substrate processing system and method for controlling substrate pr...

Wafer processing apparatus including EFEM and method of processing...

Substrate vacuum treatment apparatus and method therefor

High pressure wafer processing systems and related methods

Semiconductor processing tool and method of using an embedded chamber

Load port and multi-use carrier

Substrate transfer apparatus, substrate transfer method, and substr...

Transfer detection method and substrate processing apparatus

Systems and methods for integrating load locks into a factory inter...

Sensor-based correction of robot-held object

Side storage pods, equipment front end modules, and methods for pro...

Vapor deposition method and vapor deposition device

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING SYSTEM

EQUIPMENT FRONT-END MODULE AND METHOD FOR CONTROLLING HUMIDITY IN E...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

CONFIGURABLE AND MODULAR LOAD LOCK CHAMBER SYSTEMS AND METHODS OF M...

COOLING STATION

SUBSTRATE COOLING APPARATUS USING CONDUCTION AND RADIANCE

LOAD LOCK ARRANGEMENTS CONFIGURED FOR PERFORMING PARALLEL PROCESSES...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

TRANSPORT APPARATUS AND ADAPTER PENDANT

COMPOSITION MIXTURE CONTROL OF EFEM ENVIRONMENT

EQUIPMENT FRONT-END MODULE AND SUBSTRATE PROCESSING APPARATUS INCLU...

MULTI-USE CARRIER

LOAD LOCK ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS INCLUDING...

Substrate Processing System

EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...

APPARATUS FOR TREATING SUBSTRATE AND SUBSTRATE INSPECTION METHOD IN...

EQUIPMENT FRONT END MODULE

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

SEMICONDUCTOR PROCESSING APPARATUS

FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

LOAD PORT AND METHODS OF OPERATION

CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...

PROCESSING SYSTEM AND TEACHING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Wafer Cooling System

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

Semiconductor process machine and operation method thereof