characterized by the construction of the load-lock chamber

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CPC
H01L21/67201

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67201characterized by the construction of the load-lock chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Transfer detection method and substrate processing apparatus
- Patent number 12,159,798
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for integrating load locks into a factory inter...
- Patent number 12,159,796
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vapor deposition method and vapor deposition device
- Patent number 12,142,482
- Issue date Nov 12, 2024
- Sumco Corporation
- Naoyuki Wada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Equipment front end module
- Patent number 12,106,989
- Issue date Oct 1, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer systems and methods of use thereof
- Patent number 12,106,991
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a load lock configuration
- Patent number 12,094,715
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Martin Jeffrey Salinas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Autoclean for load locks in substrate processing systems
- Patent number 12,094,739
- Issue date Sep 17, 2024
- Lam Research Corporation
- Adam Patrick Bateman
- B08 - CLEANING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,080,572
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Heat shield for chamber door and devices manufactured using same
- Patent number 12,074,032
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Meng-Je Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and particle removal method
- Patent number 12,062,557
- Issue date Aug 13, 2024
- Tokyo Electron Limited
- Genichi Nanasaki
- B08 - CLEANING
Information Patent Grant
Techniques for thermal treatment of electronic devices
- Patent number 12,040,203
- Issue date Jul 16, 2024
- Kateeva, Inc.
- Conor F. Madigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 12,040,202
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer cooling system
- Patent number 12,033,873
- Issue date Jul 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for measuring displacement of an end effector
- Patent number 12,027,395
- Issue date Jul 2, 2024
- SK ENPULSE CO., LTD.
- Nam In Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM
- Patent number 12,002,693
- Issue date Jun 4, 2024
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operation method of vacuum processing device
- Patent number 12,002,692
- Issue date Jun 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Ryoichi Isomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Load port module
- Patent number 12,002,694
- Issue date Jun 4, 2024
- BROOKS AUTOMATION US, LLC
- Radik Sunugatov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, method of processing substrate, met...
- Patent number 11,996,311
- Issue date May 28, 2024
- Kokusai Electric Corporation
- Hiroshi Ashihara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM robot auto teaching methodology
- Patent number 11,984,331
- Issue date May 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,978,654
- Issue date May 7, 2024
- Semes Co., Ltd.
- Min Sung Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport
- Patent number 11,978,648
- Issue date May 7, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,967,513
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer device and substrate processing system
- Patent number 11,948,822
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Dongwei Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrates or wafers
- Patent number 11,948,810
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam inspection apparatus
- Patent number 11,942,340
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Jeroen Gerard Gosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,770
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for load-locked printing
- Patent number 11,926,902
- Issue date Mar 12, 2024
- Kateeva, Inc.
- Sass Somekh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for workpiece processing
- Patent number 11,923,215
- Issue date Mar 5, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Michael Yang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20240420981
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS
- Publication number 20240404841
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Praveen A. KOTINATOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT
- Publication number 20240395514
- Publication date Nov 28, 2024
- Prashant AGARWAL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
- Publication number 20240395581
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD PORT AND METHODS OF OPERATION
- Publication number 20240387208
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Fam SHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...
- Publication number 20240383012
- Publication date Nov 21, 2024
- Samsung Electronics Co., Ltd.
- Youngon OH
- B08 - CLEANING
Information Patent Application
PROCESSING SYSTEM AND TEACHING METHOD
- Publication number 20240379392
- Publication date Nov 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Wafer Cooling System
- Publication number 20240332044
- Publication date Oct 3, 2024
- Taiwan Semconductor Manufacturing Company, Ltd.
- Otto CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...
- Publication number 20240321612
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Takuya SAITO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Semiconductor process machine and operation method thereof
- Publication number 20240297056
- Publication date Sep 5, 2024
- United Semiconductor (Xiamen) Co., Ltd.
- HAIPENG ZHU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM
- Publication number 20240282606
- Publication date Aug 22, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240274455
- Publication date Aug 15, 2024
- Kokusai Electric Corporation
- Hiroshi ASHIHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD USING...
- Publication number 20240263308
- Publication date Aug 8, 2024
- HANWHA PRECISION MACHINERY CO., LTD.
- Dong Won SEO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE BEAM INSPECTION APPARATUS
- Publication number 20240258138
- Publication date Aug 1, 2024
- ASML NETHERLANDS B.V.
- Jeroen Gerard GOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM ROBOT AUTO TEACHING METHODOLOGY
- Publication number 20240249961
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS
- Publication number 20240249957
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chao YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240234183
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
LOAD LOCK CHAMBER AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20240234184
- Publication date Jul 11, 2024
- PSK INC.
- Jong-Chan LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...
- Publication number 20240222176
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Umeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOAD LOCK ARRANGEMENTS, ASSOCIATED TEMPERATURE CONTROL ASSEMBLIES,...
- Publication number 20240213058
- Publication date Jun 27, 2024
- ASM IP HOLDING B.V.
- Masaei Suwada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE
- Publication number 20240194505
- Publication date Jun 13, 2024
- Richard H. Gould
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A RADICAL TREATMENT...
- Publication number 20240178004
- Publication date May 30, 2024
- Applied Materials, Inc.
- Pradeep SAMPATH KUMAR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...
- Publication number 20240178019
- Publication date May 30, 2024
- ASM IP HOLDING B.V.
- Mandar Deshpande
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240178031
- Publication date May 30, 2024
- SEMES CO., LTD.
- Sumi Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION SYSTEM AND METHOD OF USE THEREOF
- Publication number 20240178020
- Publication date May 30, 2024
- JNK TECH
- Youngjin CHOI
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the load-lock chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transfer detection method and substrate processing apparatus

Systems and methods for integrating load locks into a factory inter...

Sensor-based correction of robot-held object

Side storage pods, equipment front end modules, and methods for pro...

Vapor deposition method and vapor deposition device

Equipment front end module

Substrate transfer systems and methods of use thereof

Abatement and strip process chamber in a load lock configuration

Autoclean for load locks in substrate processing systems

Substrate processing apparatus

Heat shield for chamber door and devices manufactured using same

Substrate processing system and particle removal method

Techniques for thermal treatment of electronic devices

Processing system

Wafer cooling system

Method and apparatus for measuring displacement of an end effector

EFEM

Operation method of vacuum processing device

Load port module

Substrate processing apparatus, method of processing substrate, met...

EFEM robot auto teaching methodology

Substrate processing apparatus

Substrate transport

Substrate processing apparatus

Substrate transfer device and substrate processing system

Apparatus for processing substrates or wafers

Particle beam inspection apparatus

Modular mainframe layout for supporting multiple semiconductor proc...

Method and apparatus for load-locked printing

Systems and methods for workpiece processing

Patents Applicationslast 30 patents

EQUIPMENT FRONT END MODULE

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

SEMICONDUCTOR PROCESSING APPARATUS

FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS

MULTI-CHAMBER PROCESSING TOOL WITH ENHANCED THROUGHPUT

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

LOAD PORT AND METHODS OF OPERATION

CLEANING APPARATUS, SEMICONDUCTOR FABRICATION SYSTEM INCLUDING THE...

PROCESSING SYSTEM AND TEACHING METHOD

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

Wafer Cooling System

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE CHECKING METHOD, METHOD O...

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

Semiconductor process machine and operation method thereof

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

EFEM

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SUBSTRATE TREATMENT APPARATUS AND SUBSTRATE TREATMENT METHOD USING...

PARTICLE BEAM INSPECTION APPARATUS

EFEM ROBOT AUTO TEACHING METHODOLOGY

APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS

SUBSTRATE PROCESSING APPARATUS

LOAD LOCK CHAMBER AND APPARATUS FOR TREATING SUBSTRATE

SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...

LOAD LOCK ARRANGEMENTS, ASSOCIATED TEMPERATURE CONTROL ASSEMBLIES,...

TRANSFER ROBOT FOR REDUCED FOOTPRINT PLATFORM ARCHITECTURE

METHODS, SYSTEMS, AND APPARATUS FOR CONDUCTING A RADICAL TREATMENT...

EQUIPMENT FRONT-END MODULES FOR SEMICONDUCTOR PROCESSING SYSTEMS AN...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE INSPECTION SYSTEM AND METHOD OF USE THEREOF