characterized by the construction of the processing chambers

Industry

CPC
H01L21/6719

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6719characterized by the construction of the processing chambers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,334,370
- Issue date Jun 17, 2025
- Semes Co., Ltd.
- Sangmin Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spindle assembly for wafer transfer in a multi-station process module
- Patent number 12,334,375
- Issue date Jun 17, 2025
- Lam Research Corporation
- Andrew Borth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exhaust device, processing apparatus, and exhausting method
- Patent number 12,322,578
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Kazuya Nagaseki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mechanical indexer for multi-station process module
- Patent number 12,322,641
- Issue date Jun 3, 2025
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Exhaust assembly, and liquid processing apparatus and substrate pro...
- Patent number 12,318,819
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Kyung Min Kim
- B08 - CLEANING
Information Patent Grant
High throughput polishing modules and modular polishing systems
- Patent number 12,308,272
- Issue date May 20, 2025
- Applied Materials, Inc.
- Jagan Rangarajan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for drying substrate
- Patent number 12,308,255
- Issue date May 20, 2025
- Samsung Electronics Co., Ltd.
- Sangjine Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for low temperature selective epitaxy in a dee...
- Patent number 12,297,559
- Issue date May 13, 2025
- Applied Materials, Inc.
- Abhishek Dube
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate treating method
- Patent number 12,300,515
- Issue date May 13, 2025
- Semes Co., Ltd.
- Miso Park
- B08 - CLEANING
Information Patent Grant
Multi-chamber semiconductor manufacturing system
- Patent number 12,288,701
- Issue date Apr 29, 2025
- Syskey Technology Co., Ltd.
- Hsueh-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support unit, substrate treating apparatus including the same, and...
- Patent number 12,278,121
- Issue date Apr 15, 2025
- Semes Co., Ltd.
- Kangseop Yun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 12,270,118
- Issue date Apr 8, 2025
- ASM IP Holding B.V.
- Yong Min Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electronic device manufacturing system
- Patent number 12,274,007
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 12,272,580
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for monitoring semiconductor processes
- Patent number 12,266,552
- Issue date Apr 1, 2025
- Inficon, Inc.
- Matan Lapidot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple process semiconductor processing system
- Patent number 12,266,550
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and filler member provided therein
- Patent number 12,234,555
- Issue date Feb 25, 2025
- Semes Co., Ltd.
- Jin Mo Jae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operations of robot apparatuses within rectangular mainframes
- Patent number 12,226,896
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Rajkumar Thanu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Processing chamber deposition confinement
- Patent number 12,211,673
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Baking apparatus
- Patent number 12,211,711
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Bumjin Jang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and polishing apparatus
- Patent number 12,205,831
- Issue date Jan 21, 2025
- Ebara Corporation
- Mitsuru Miyazaki
- B24 - GRINDING POLISHING
Information Patent Grant
Batch curing chamber with gas distribution and individual pumping
- Patent number 12,203,171
- Issue date Jan 21, 2025
- Applied Materials, Inc.
- Adib Khan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,198,909
- Issue date Jan 14, 2025
- Semes Co., Ltd.
- Duk Hyun Son
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250191942
- Publication date Jun 12, 2025
- Yest Co., Ltd.
- Young Joon Ham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
- Publication number 20250183067
- Publication date Jun 5, 2025
- Intel Corporation
- John William Rudolph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED MATERIAL HANDLING SYSTEM
- Publication number 20250183078
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Zhu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...
- Publication number 20250174482
- Publication date May 29, 2025
- SEMES CO., LTD.
- Hee Jae BYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH-PRESSURE WAFER PROCESSING METHOD USING DUAL HIGH-PRESSURE WAFE...
- Publication number 20250149351
- Publication date May 8, 2025
- HPSP Co., Ltd.
- Sung Kil CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20250149357
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Hyuntae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS O...
- Publication number 20250140584
- Publication date May 1, 2025
- SCREEN Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
FIN STRUCTURES, PLATE APPARATUS, AND RELATED METHODS, PROCESS KITS,...
- Publication number 20250132178
- Publication date Apr 24, 2025
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...
- Publication number 20250125169
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER DEPOSITION CONFINEMENT
- Publication number 20250125129
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Sarah Michelle Bobek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
- Publication number 20250125170
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CERAMIC RF RETURN KIT DESIGN
- Publication number 20250118577
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Vellaichamy Nagappan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...
- Publication number 20250118576
- Publication date Apr 10, 2025
- Applied Materials, Inc.
- Chen-Ying WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL
- Publication number 20250109870
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Wei WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STANDARD BASE COMPONENTS FOR FORMING INBOARD AND OUTBOARD SUBSTRATE...
- Publication number 20250112061
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Senthil Arasu Subas Chandra Bose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOTOR ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING MOTOR A...
- Publication number 20250105705
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Mario Gonzalez
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250096020
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250079220
- Publication date Mar 6, 2025
- SCREEN Holdings Co., Ltd.
- Satoshi KAKINOKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM
- Publication number 20250079212
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong Syuan FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20250066918
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAFER CLEANING APPARATUS AND METHOD
- Publication number 20250062140
- Publication date Feb 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jieh-Chau HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20250054793
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...
- Publication number 20250054805
- Publication date Feb 13, 2025
- SAMSUNG ELECTRONICS CoO., LTD.
- Yongmyung JUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER
- Publication number 20250054787
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...
- Publication number 20250038027
- Publication date Jan 30, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY
- Publication number 20250029849
- Publication date Jan 23, 2025
- Applied Materials, Inc.
- Anish Janakiraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Substrate Processing System
- Publication number 20250022728
- Publication date Jan 16, 2025
- SPTS TECHNOLOGIES LIMITED
- Attila Nagy
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the processing chambers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Apparatus and method for treating substrate

Spindle assembly for wafer transfer in a multi-station process module

Exhaust device, processing apparatus, and exhausting method

Mechanical indexer for multi-station process module

Transfer apparatus and transfer method

Exhaust assembly, and liquid processing apparatus and substrate pro...

High throughput polishing modules and modular polishing systems

Apparatus and method for drying substrate

Method and apparatus for low temperature selective epitaxy in a dee...

Substrate treating apparatus and substrate treating method

Multi-chamber semiconductor manufacturing system

Support unit, substrate treating apparatus including the same, and...

Substrate supporting plate, thin film deposition apparatus includin...

Electronic device manufacturing system

Modular pressurized workstation

System and method for monitoring semiconductor processes

Multiple process semiconductor processing system

Semiconductor processing apparatus and method utilizing electrostat...

Substrate transport apparatus and substrate transport method

Substrate treating apparatus and filler member provided therein

Operations of robot apparatuses within rectangular mainframes

Substrate processing system and method for controlling substrate pr...

Substrate treating apparatus with parallel first and second parts o...

Wafer placement correction in indexed multi-station processing cham...

Reconfigurable mainframe with replaceable interface plate

Processing chamber deposition confinement

Baking apparatus

Cleaning apparatus and polishing apparatus

Batch curing chamber with gas distribution and individual pumping

Apparatus for treating substrate

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS

AUTOMATED MATERIAL HANDLING SYSTEM

TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS

HIGH-PRESSURE WAFER PROCESSING METHOD USING DUAL HIGH-PRESSURE WAFE...

APPARATUS FOR PROCESSING A WAFER

SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS O...

FIN STRUCTURES, PLATE APPARATUS, AND RELATED METHODS, PROCESS KITS,...

WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...

PROCESSING CHAMBER DEPOSITION CONFINEMENT

RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE

CERAMIC RF RETURN KIT DESIGN

CHAMBER KITS, PROCESSING CHAMBERS, AND METHODS FOR GAS ACTIVATION I...

AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL

STANDARD BASE COMPONENTS FOR FORMING INBOARD AND OUTBOARD SUBSTRATE...

MOTOR ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING MOTOR A...

SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS AND ADAPTER PENDANT

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM

SUBSTRATE PROCESSING APPARATUS

MULTI ZONE SPOT HEATING IN EPI

WAFER CLEANING APPARATUS AND METHOD

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

SUBSTRATE PROCESSING CHAMBER, SUBSTRATE PROCESSING SYSTEM INCLUDING...

ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER

WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...

SHAPED FACEPLATE FOR EXTREME EDGE FILM UNIFORMITY

Substrate Processing System