characterized by the construction of the processing chambers

Industry

CPC
H01L21/6719

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6719characterized by the construction of the processing chambers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 12,170,220
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer cleaning apparatus and method
- Patent number 12,165,887
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jieh-Chau Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi zone spot heating in EPI
- Patent number 12,163,229
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Shu-Kwan Lau
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure system having walls comprising sidewalls and radio-freque...
- Patent number 12,159,795
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate treatment apparatus having exhaust structure
- Patent number 12,146,216
- Issue date Nov 19, 2024
- DEVICEENG CO., LTD
- Taek Youb Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,131,918
- Issue date Oct 29, 2024
- Semes Co., Ltd.
- Sang Min Lee
- B08 - CLEANING
Information Patent Grant
Multi-stage substrate processing system
- Patent number 12,125,722
- Issue date Oct 22, 2024
- ASM IP Holding B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nitrogen injection for arc lamps
- Patent number 12,120,780
- Issue date Oct 15, 2024
- Mattson Technology, Inc.
- Rolf Bremensdorfer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Equipment front end module
- Patent number 12,106,989
- Issue date Oct 1, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Liner, reaction chamber and semiconductor processing equipment
- Patent number 12,106,934
- Issue date Oct 1, 2024
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jinrong Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer edge ring lifting solution
- Patent number 12,094,752
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Michael R. Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Asymmetrical sealing and gas flow control device
- Patent number 12,094,730
- Issue date Sep 17, 2024
- Samsung Electronics Co., Ltd.
- June Hee Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for integrated decomposition and scanning of a semiconducti...
- Patent number 12,094,738
- Issue date Sep 17, 2024
- Elemental Scientific, Inc.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,091,753
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Manabu Honma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Bipolar esc with balanced RF impedance
- Patent number 12,094,748
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing tool
- Patent number 12,084,769
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system
- Patent number 12,080,570
- Issue date Sep 3, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat shield for chamber door and devices manufactured using same
- Patent number 12,074,032
- Issue date Aug 27, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Meng-Je Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High-density substrate processing systems and methods
- Patent number 12,074,042
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection system and semiconductor fabrication apparatus in...
- Patent number 12,073,556
- Issue date Aug 27, 2024
- SK Hynix Inc.
- Jeong Ok Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Thread profiles for semiconductor process chamber components
- Patent number 12,068,137
- Issue date Aug 20, 2024
- Applied Materials, Inc.
- Reyn Tetsuro Wakabayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tool for annealing of magnetic stacks
- Patent number 12,069,789
- Issue date Aug 20, 2024
- III Holdings 1, LLC
- Krishnakumar Mani
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING EQUIPMENT AND METHOD OF DRIVING SUBSTRATE PROC...
- Publication number 20240421566
- Publication date Dec 19, 2024
- SEMES CO., LTD.
- Jae Min KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS
- Publication number 20240404841
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Praveen A. KOTINATOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
- Publication number 20240395581
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240387207
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Ki Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL
- Publication number 20240384416
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Q293851
- Publication number 20240375890
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Hyunyoung LEE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
TOOL FOR ANNEALING OF MAGNETIC STACKS
- Publication number 20240373518
- Publication date Nov 7, 2024
- III Holdings 1, LLC
- Krishnakumar Mani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLOCKABLE SUBSTRATE PROCESSING PEDESTAL FOR USE IN SEMICONDUCTOR FA...
- Publication number 20240371679
- Publication date Nov 7, 2024
- LAM RESEARCH CORPORATION
- Sky MULLENAUX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240355654
- Publication date Oct 24, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM
- Publication number 20240355652
- Publication date Oct 24, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Gengoro Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE
- Publication number 20240347345
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Han-Yu Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240332047
- Publication date Oct 3, 2024
- TOKYO ELECTRON LIMITED
- Yoshitaka MIURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240321596
- Publication date Sep 26, 2024
- Kokusai Electric Corporation
- Masanao Osanai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM
- Publication number 20240318351
- Publication date Sep 26, 2024
- Applied Materials, Inc.
- Zhiyuan YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENCLOSURE CONSTRUCTIONS FOR REACTORS USED IN SEMICONDUCTOR FABRICAT...
- Publication number 20240312810
- Publication date Sep 19, 2024
- ASM IP HOLDING B.V.
- Mun Peow Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Preheat Processes for Millisecond Anneal System
- Publication number 20240304502
- Publication date Sep 12, 2024
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Markus Lieberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERAT...
- Publication number 20240290638
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM
- Publication number 20240282606
- Publication date Aug 22, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT
- Publication number 20240282605
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Rupankar CHOUDHURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266197
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Equipment For Manufacturing Light-Emitting Device
- Publication number 20240266195
- Publication date Aug 8, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240254628
- Publication date Aug 1, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...
- Publication number 20240258137
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the processing chambers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Robot for simultaneous substrate transfer

Wafer cleaning apparatus and method

Multi zone spot heating in EPI

Substrate processing system and transfer method

Enclosure system having walls comprising sidewalls and radio-freque...

Substrate treatment apparatus having exhaust structure

Sensor-based correction of robot-held object

Side storage pods, equipment front end modules, and methods for pro...

Substrate processing apparatus

Substrate processing apparatus

Multi-stage substrate processing system

Nitrogen injection for arc lamps

Calibration of an electronics processing system

Substrate processing apparatus and method of manufacturing semicond...

PECVD apparatus

Equipment front end module

Liner, reaction chamber and semiconductor processing equipment

Wafer edge ring lifting solution

Asymmetrical sealing and gas flow control device

Systems for integrated decomposition and scanning of a semiconducti...

Substrate processing apparatus

Bipolar esc with balanced RF impedance

Semiconductor processing tool

Substrate processing module and method of moving a workpiece

Semiconductor processing system

Heat shield for chamber door and devices manufactured using same

High-density substrate processing systems and methods

Defect inspection system and semiconductor fabrication apparatus in...

Thread profiles for semiconductor process chamber components

Tool for annealing of magnetic stacks

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING EQUIPMENT AND METHOD OF DRIVING SUBSTRATE PROC...

EQUIPMENT FRONT END MODULE

FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR PROCESSING TOOL

Q293851

TOOL FOR ANNEALING OF MAGNETIC STACKS

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

CLOCKABLE SUBSTRATE PROCESSING PEDESTAL FOR USE IN SEMICONDUCTOR FA...

SUBSTRATE PROCESSING SYSTEM

EFEM

SEMICONDUCTOR FABRICATION SYSTEM EMBEDDED WITH EFFECTIVE BAKING MODULE

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

SUBSTRATE PROCESSING APPARATUS

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

MULTI-THERMAL CVD CHAMBERS WITH SHARED GAS DELIVERY AND EXHAUST SYSTEM

ENCLOSURE CONSTRUCTIONS FOR REACTORS USED IN SEMICONDUCTOR FABRICAT...

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

Preheat Processes for Millisecond Anneal System

DEPOSITION OR ETCH CHAMBER WITH COMPLETE SYMMETRY AND HIGH TEMPERAT...

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

EFEM

LOUVER DESIGN FOR ELIMINATING LINE OF SIGHT

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

Equipment For Manufacturing Light-Emitting Device

SUBSTRATE PROCESSING APPARATUS

SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...