characterized by the construction of the processing chambers

Industry

CPC
H01L21/6719

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6719characterized by the construction of the processing chambers

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for substrate transport apparatus position com...
- Patent number 11,972,965
- Issue date Apr 30, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,967,513
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate supporting plate, thin film deposition apparatus includin...
- Patent number 11,965,262
- Issue date Apr 23, 2024
- ASM IP Holding B.V.
- Yong Min Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support for reduced damage substrate backside
- Patent number 11,955,362
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Joel M Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and transfer method
- Patent number 11,955,356
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning apparatus and polishing apparatus
- Patent number 11,948,811
- Issue date Apr 2, 2024
- Ebara Corporation
- Mitsuru Miyazaki
- B08 - CLEANING
Information Patent Grant
Transfer apparatus
- Patent number 11,948,816
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,948,823
- Issue date Apr 2, 2024
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 11,948,817
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Charles T. Carlson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrates or wafers
- Patent number 11,948,810
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,771
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular mainframe layout for supporting multiple semiconductor proc...
- Patent number 11,935,770
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Randy A. Harris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for treating substrate
- Patent number 11,923,219
- Issue date Mar 5, 2024
- Semes Co., Ltd.
- Youngseop Choi
- B08 - CLEANING
Information Patent Grant
Processing system having a front opening unified pod (FOUP) load lock
- Patent number 11,923,217
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate including process chamb...
- Patent number 11,923,216
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,915,945
- Issue date Feb 27, 2024
- SCREEN Holdings Co., Ltd.
- Hajime Nishide
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate treatment system
- Patent number 11,908,713
- Issue date Feb 20, 2024
- Samsung Electronics Co., Ltd.
- Daesung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 11,901,206
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single wafer processing environments with spatial separation
- Patent number 11,894,257
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Michael Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and apparatus for manufacturing inte...
- Patent number 11,887,868
- Issue date Jan 30, 2024
- Samsung Electronics Co., Ltd.
- Young-hoo Kim
- B08 - CLEANING
Information Patent Grant
Substrate liquid processing apparatus
- Patent number 11,869,780
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Takahiro Kawazu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber substrate processing platform
- Patent number 11,860,528
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool
- Patent number 11,851,761
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport apparatus, semiconductor manufacturing apparatus, and tra...
- Patent number 11,850,743
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 11,854,860
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heating treatment apparatus and heating treatment method
- Patent number 11,842,906
- Issue date Dec 12, 2023
- Tokyo Electron Limited
- Hideaki Iwasaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma reactor having a function of tuning low frequency RF power d...
- Patent number 11,830,747
- Issue date Nov 28, 2023
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Kui Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,830,749
- Issue date Nov 28, 2023
- BROOKS AUTOMATION US, LLC
- Christopher A. Bussiere
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,823,944
- Issue date Nov 21, 2023
- BROOKS AUTOMATION US, LLC
- Vincent W. Tsang
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20240136213
- Publication date Apr 25, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM
- Publication number 20240128110
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20240105470
- Publication date Mar 28, 2024
- Samsung Electronics Co., Ltd.
- Dong Il PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS ENCLOSURE ASSEMBLY AND SYSTEM
- Publication number 20240100868
- Publication date Mar 28, 2024
- Kateeva, Inc.
- Justin MAUCK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240105493
- Publication date Mar 28, 2024
- BROOKS AUTOMATION US, LLC
- Vincent W. TSANG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND MAINTENANCE METHOD
- Publication number 20240105478
- Publication date Mar 28, 2024
- TOKYO ELECTRON LIMITED
- Takashi DOKAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...
- Publication number 20240105477
- Publication date Mar 28, 2024
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION
- Publication number 20240096688
- Publication date Mar 21, 2024
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240096650
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Shogo FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20240096672
- Publication date Mar 21, 2024
- BROOKS AUTOMATION US, LLC
- Christopher A. BUSSIERE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240096666
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Yuri TAKEBAYASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240096655
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Katsuhiko Yamamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
- Publication number 20240087938
- Publication date Mar 14, 2024
- BROOKS AUTOMATION US, LLC
- Alexander KRUPYSHEV
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20240087945
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
- Publication number 20240087936
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING, METHOD OF MANUF...
- Publication number 20240087946
- Publication date Mar 14, 2024
- Kokusai Electric Corporation
- Yoshitomo HASHIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20240071791
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Tae Soon KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INFORMATION PROCESSING SYSTEM, POWER ADJUSTMENT METHOD, AND HEAT TR...
- Publication number 20240063034
- Publication date Feb 22, 2024
- TOKYO ELECTRON LIMITED
- Masakazu YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
- Publication number 20240047254
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI ZONE SPOT HEATING IN EPI
- Publication number 20240044004
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Shu-Kwan LAU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240047233
- Publication date Feb 8, 2024
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER
- Publication number 20240038554
- Publication date Feb 1, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...
- Publication number 20240030046
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Takuya YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSI...
- Publication number 20240018661
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chiao-Chun Hsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER CLEANING APPARATUS AND METHOD
- Publication number 20240021446
- Publication date Jan 18, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jieh-Chau HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
- Publication number 20240021458
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...
- Publication number 20240006201
- Publication date Jan 4, 2024
- ELEMENTAL SCIENTIFIC, INC.
- Tyler Yost
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TRANSFER METHOD
- Publication number 20230420286
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Takayasu KIYOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTl-STATION TOOL WITH ROTATABLE TOP PLATE ASSEMBLY
- Publication number 20230420289
- Publication date Dec 28, 2023
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the processing chambers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for substrate transport apparatus position com...

Substrate processing apparatus

Substrate supporting plate, thin film deposition apparatus includin...

Substrate support for reduced damage substrate backside

Processing system and transfer method

Cleaning apparatus and polishing apparatus

Transfer apparatus

Substrate treating apparatus

Robot for simultaneous substrate transfer

Apparatus for processing substrates or wafers

Modular mainframe layout for supporting multiple semiconductor proc...

Modular mainframe layout for supporting multiple semiconductor proc...

Apparatus for treating substrate

Processing system having a front opening unified pod (FOUP) load lock

Apparatus and method for treating substrate including process chamb...

Substrate processing apparatus

Semiconductor substrate treatment system

Modular pressurized workstation

Single wafer processing environments with spatial separation

Substrate processing apparatus and apparatus for manufacturing inte...

Substrate liquid processing apparatus

Multi-chamber substrate processing platform

Semiconductor processing tool

Transport apparatus, semiconductor manufacturing apparatus, and tra...

Semiconductor processing apparatus and method utilizing electrostat...

Substrate processing apparatus and substrate processing method

Heating treatment apparatus and heating treatment method

Plasma reactor having a function of tuning low frequency RF power d...

Substrate transport apparatus

Substrate processing apparatus

Patents Applicationslast 30 patents

MODULAR PRESSURIZED WORKSTATION

METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

GAS ENCLOSURE ASSEMBLY AND SYSTEM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND MAINTENANCE METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF PROCESSING SUBSTRATE, MET...

SINGLE WAFER PROCESSING ENVIRONMENTS WITH SPATIAL SEPARATION

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE TRANSPORT APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

AUTOMATIC WAFER CENTERING METHOD AND APPARATUS

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD

SUBSTRATE PROCESSING APPARATUS, METHOD OF CLEANING, METHOD OF MANUF...

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

INFORMATION PROCESSING SYSTEM, POWER ADJUSTMENT METHOD, AND HEAT TR...

SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE

MULTI ZONE SPOT HEATING IN EPI

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

TRANSFER CHAMBER

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...

SEMICONDUCTOR TOOL HAVING CONTROLLABLE AMBIENT ENVIRONMENT PROCESSI...

WAFER CLEANING APPARATUS AND METHOD

CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM

SYSTEMS FOR INTEGRATED DECOMPOSITION AND SCANNING OF A SEMICONDUCTI...

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE PROCESSING APPARATUS AND TRANSFER METHOD

MULTl-STATION TOOL WITH ROTATABLE TOP PLATE ASSEMBLY