characterized by the construction of the transfer chamber

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CPC
H01L21/67196

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67196characterized by the construction of the transfer chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operations of robot apparatuses within rectangular mainframes
- Patent number 12,226,896
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Rajkumar Thanu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,198,909
- Issue date Jan 14, 2025
- Semes Co., Ltd.
- Duk Hyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,952
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and method of using an embedded chamber
- Patent number 12,191,174
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air curtain device and workpiece processing tool
- Patent number 12,188,686
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 12,170,220
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure system having walls comprising sidewalls and radio-freque...
- Patent number 12,159,795
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Equipment front end module
- Patent number 12,106,989
- Issue date Oct 1, 2024
- PICO & TERA CO., LTD.
- Bum Je Woo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bipolar esc with balanced RF impedance
- Patent number 12,094,748
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Jian Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing system
- Patent number 12,080,570
- Issue date Sep 3, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Defect inspection system and semiconductor fabrication apparatus in...
- Patent number 12,073,556
- Issue date Aug 27, 2024
- SK Hynix Inc.
- Jeong Ok Park
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Techniques for thermal treatment of electronic devices
- Patent number 12,040,203
- Issue date Jul 16, 2024
- Kateeva, Inc.
- Conor F. Madigan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,036,662
- Issue date Jul 16, 2024
- SCREEN Holdings Co., Ltd.
- Tomoyuki Shinohara
- B08 - CLEANING
Information Patent Grant
EFEM
- Patent number 12,002,693
- Issue date Jun 4, 2024
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20250054793
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER
- Publication number 20250054787
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...
- Publication number 20250038027
- Publication date Jan 30, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Substrate Processing System
- Publication number 20250022728
- Publication date Jan 16, 2025
- SPTS TECHNOLOGIES LIMITED
- Attila Nagy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID MOVING SYSTEMS AND METHODS FOR CHAMBERS AND CONTAINERS
- Publication number 20250022729
- Publication date Jan 16, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20250001583
- Publication date Jan 2, 2025
- VM Inc.
- Tae Jin Kwon
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...
- Publication number 20250006521
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS
- Publication number 20240404841
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Praveen A. KOTINATOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
- Publication number 20240395581
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240387207
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Ki Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240355654
- Publication date Oct 24, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM
- Publication number 20240355652
- Publication date Oct 24, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Gengoro Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES
- Publication number 20240312811
- Publication date Sep 19, 2024
- Kateeva, Inc.
- Conor F. MADIGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM
- Publication number 20240282606
- Publication date Aug 22, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...
- Publication number 20240274448
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Zhepeng CONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...
- Publication number 20240266197
- Publication date Aug 8, 2024
- Siliconware Precision Industries Co., Ltd.
- Tang-Hsin KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...
- Publication number 20240258137
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Nir Merry
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE
- Publication number 20240258136
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS
- Publication number 20240249957
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Li-Chao YIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240242977
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Shota Umezaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...
- Publication number 20240242983
- Publication date Jul 18, 2024
- Kokusai Electric Corporation
- Motonari TAKEBAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240234183
- Publication date Jul 11, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING
- Publication number 20240234167
- Publication date Jul 11, 2024
- Applied Materials, Inc.
- Shashank Sharma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING RE...
- Publication number 20240213056
- Publication date Jun 27, 2024
- Applied Materials, Inc.
- Angela Rose Sico
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate transport apparatus and substrate transport method

Operations of robot apparatuses within rectangular mainframes

Substrate processing system and method for controlling substrate pr...

Substrate treating apparatus with parallel first and second parts o...

Wafer placement correction in indexed multi-station processing cham...

Reconfigurable mainframe with replaceable interface plate

Apparatus for treating substrate

Substrate processing apparatus

High pressure wafer processing systems and related methods

Semiconductor processing tool and method of using an embedded chamber

Air curtain device and workpiece processing tool

Substrate transfer apparatus, substrate transfer method, and substr...

Substrate processing apparatus for processing substrates

Robot for simultaneous substrate transfer

Substrate processing system and transfer method

Enclosure system having walls comprising sidewalls and radio-freque...

Sensor-based correction of robot-held object

Side storage pods, equipment front end modules, and methods for pro...

Substrate processing apparatus

Calibration of an electronics processing system

Substrate processing apparatus and method of manufacturing semicond...

PECVD apparatus

Equipment front end module

Bipolar esc with balanced RF impedance

Substrate processing module and method of moving a workpiece

Semiconductor processing system

Defect inspection system and semiconductor fabrication apparatus in...

Techniques for thermal treatment of electronic devices

Substrate processing apparatus and substrate processing method

EFEM

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER

WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...

Substrate Processing System

LID MOVING SYSTEMS AND METHODS FOR CHAMBERS AND CONTAINERS

SUBSTRATE TRANSFER APPARATUS

EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...

EQUIPMENT FRONT END MODULE

FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...

SUBSTRATE PROCESSING SYSTEM

EFEM

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

TECHNIQUES FOR THERMAL TREATMENT OF ELECTRONIC DEVICES

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

EFEM

TRANSFER APPARATUS, AND RELATED COMPONENTS AND METHODS, FOR TRANSFE...

WORKING SYSTEM FOR SEMICONDUCTOR PACKAGING PROCESS AND OPERATION ME...

SEMICONDUCTOR PROCESSING TOOL PLATFORM CONFIGURATION WITH REDUCED F...

SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE

APPARATUS FOR PROCESSING SUBSTRATES OR WAFERS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, METHOD...

SUBSTRATE PROCESSING APPARATUS

MODULAR PRECURSOR DELIVERY AND SPLITTING FOR FAST SWITCHING

RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE HAVING RE...