characterized by the construction of the transfer chamber

Industry

CPC
H01L21/67196

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67196characterized by the construction of the transfer chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Interface tool and methods of operation
- Patent number 12,362,198
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Syuan Cai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Foreline assembly for quad station process module
- Patent number 12,362,206
- Issue date Jul 15, 2025
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
EFEM
- Patent number 12,362,207
- Issue date Jul 15, 2025
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mechanical indexer for multi-station process module
- Patent number 12,322,641
- Issue date Jun 3, 2025
- Lam Research Corporation
- Michael Nordin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus and transfer method
- Patent number 12,322,629
- Issue date Jun 3, 2025
- Tokyo Electron Limited
- Tomonori Horiuchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Exhaust assembly, and liquid processing apparatus and substrate pro...
- Patent number 12,318,819
- Issue date Jun 3, 2025
- Semes Co., Ltd.
- Kyung Min Kim
- B08 - CLEANING
Information Patent Grant
Multi-chamber semiconductor manufacturing system
- Patent number 12,288,701
- Issue date Apr 29, 2025
- Syskey Technology Co., Ltd.
- Hsueh-Hsien Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electronic device manufacturing system
- Patent number 12,274,007
- Issue date Apr 8, 2025
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 12,272,580
- Issue date Apr 8, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple process semiconductor processing system
- Patent number 12,266,550
- Issue date Apr 1, 2025
- Applied Materials, Inc.
- Nitin Pathak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 12,255,091
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus and substrate transport method
- Patent number 12,249,527
- Issue date Mar 11, 2025
- Tokyo Electron Limited
- Isamu Taoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operations of robot apparatuses within rectangular mainframes
- Patent number 12,226,896
- Issue date Feb 18, 2025
- Applied Materials, Inc.
- Rajkumar Thanu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and method for controlling substrate pr...
- Patent number 12,224,194
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Atsushi Kubo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus with parallel first and second parts o...
- Patent number 12,217,986
- Issue date Feb 4, 2025
- Screen Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer placement correction in indexed multi-station processing cham...
- Patent number 12,217,985
- Issue date Feb 4, 2025
- Lam Research Corporation
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reconfigurable mainframe with replaceable interface plate
- Patent number 12,211,714
- Issue date Jan 28, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Apparatus for treating substrate
- Patent number 12,198,909
- Issue date Jan 14, 2025
- Semes Co., Ltd.
- Duk Hyun Son
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,198,952
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High pressure wafer processing systems and related methods
- Patent number 12,198,951
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Qiwei Liang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and method of using an embedded chamber
- Patent number 12,191,174
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air curtain device and workpiece processing tool
- Patent number 12,188,686
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Wei Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus, substrate transfer method, and substr...
- Patent number 12,183,612
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 12,170,220
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Jason M. Schaller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and transfer method
- Patent number 12,165,893
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enclosure system having walls comprising sidewalls and radio-freque...
- Patent number 12,159,795
- Issue date Dec 3, 2024
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Sensor-based correction of robot-held object
- Patent number 12,142,503
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
COVER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLUDING COVER MODULE
- Publication number 20250218823
- Publication date Jul 3, 2025
- SEMES CO., LTD.
- Sung Gyu LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20250210389
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Jung HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250201585
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS
- Publication number 20250183067
- Publication date Jun 5, 2025
- Intel Corporation
- John William Rudolph
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED MATERIAL HANDLING SYSTEM
- Publication number 20250183078
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Yu-Zhu LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...
- Publication number 20250174482
- Publication date May 29, 2025
- SEMES CO., LTD.
- Hee Jae BYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS
- Publication number 20250167017
- Publication date May 22, 2025
- LPE S.p.A.
- Maurilio Meschia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING A WAFER
- Publication number 20250149357
- Publication date May 8, 2025
- Samsung Electronics Co., Ltd.
- Hyuntae Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS O...
- Publication number 20250140584
- Publication date May 1, 2025
- SCREEN Semiconductor Solutions Co., Ltd.
- Hiroyuki Ogura
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...
- Publication number 20250125169
- Publication date Apr 17, 2025
- LAM RESEARCH CORPORATION
- Stephen Topping
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE
- Publication number 20250125170
- Publication date Apr 17, 2025
- Applied Materials, Inc.
- Michael R. Rice
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL
- Publication number 20250109870
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Wei WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STANDARD BASE COMPONENTS FOR FORMING INBOARD AND OUTBOARD SUBSTRATE...
- Publication number 20250112061
- Publication date Apr 3, 2025
- ASM IP HOLDING B.V.
- Senthil Arasu Subas Chandra Bose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOTOR ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING MOTOR A...
- Publication number 20250105705
- Publication date Mar 27, 2025
- ASM IP HOLDING B.V.
- Mario Gonzalez
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250096020
- Publication date Mar 20, 2025
- TOKYO ELECTRON LIMITED
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORT APPARATUS AND ADAPTER PENDANT
- Publication number 20250096029
- Publication date Mar 20, 2025
- BROOKS AUTOMATION US, LLC
- Dana L. ATWOOD
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
- Publication number 20250054793
- Publication date Feb 13, 2025
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER
- Publication number 20250054787
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- John C. Menk
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...
- Publication number 20250038027
- Publication date Jan 30, 2025
- LPE S.p.A.
- Maurilio Giuseppe Meschia
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Substrate Processing System
- Publication number 20250022728
- Publication date Jan 16, 2025
- SPTS TECHNOLOGIES LIMITED
- Attila Nagy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID MOVING SYSTEMS AND METHODS FOR CHAMBERS AND CONTAINERS
- Publication number 20250022729
- Publication date Jan 16, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS
- Publication number 20250001583
- Publication date Jan 2, 2025
- VM Inc.
- Tae Jin Kwon
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...
- Publication number 20250006521
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240420979
- Publication date Dec 19, 2024
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS
- Publication number 20240404841
- Publication date Dec 5, 2024
- Applied Materials, Inc.
- Praveen A. KOTINATOT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE
- Publication number 20240395580
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER
- Publication number 20240395581
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240387207
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Ki Won HAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...
- Publication number 20240371672
- Publication date Nov 7, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yongfei WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the construction of the transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Interface tool and methods of operation

Foreline assembly for quad station process module

EFEM

Mechanical indexer for multi-station process module

Transfer apparatus and transfer method

Exhaust assembly, and liquid processing apparatus and substrate pro...

Multi-chamber semiconductor manufacturing system

Electronic device manufacturing system

Modular pressurized workstation

Multiple process semiconductor processing system

Semiconductor processing apparatus and method utilizing electrostat...

Substrate transport apparatus and substrate transport method

Operations of robot apparatuses within rectangular mainframes

Substrate processing system and method for controlling substrate pr...

Substrate treating apparatus with parallel first and second parts o...

Wafer placement correction in indexed multi-station processing cham...

Reconfigurable mainframe with replaceable interface plate

Apparatus for treating substrate

Substrate processing apparatus

High pressure wafer processing systems and related methods

Semiconductor processing tool and method of using an embedded chamber

Air curtain device and workpiece processing tool

Substrate transfer apparatus, substrate transfer method, and substr...

Substrate processing apparatus for processing substrates

Robot for simultaneous substrate transfer

Substrate processing system and transfer method

Enclosure system having walls comprising sidewalls and radio-freque...

Sensor-based correction of robot-held object

Side storage pods, equipment front end modules, and methods for pro...

Substrate processing apparatus

Patents Applicationslast 30 patents

COVER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLUDING COVER MODULE

MODULAR PRESSURIZED WORKSTATION

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

MODULAR EQUIPMENT MAINFRAME FOR SEMICONDUCTOR PROCESS FLOWS

AUTOMATED MATERIAL HANDLING SYSTEM

TRANSFER ROBOT, METHOD OF OPERATING TRANSFER ROBOT, AND SEMICONDUCT...

MULTI-CHAMBER ASSEMBLY FOR HANDLING REMOVABLE EPITAXIAL REACTION UNITS

APPARATUS FOR PROCESSING A WAFER

SUBSTRATE TREATING APPARATUS WITH PARALLEL FIRST AND SECOND PARTS O...

WAFER PLACEMENT CORRECTION IN INDEXED MULTI-STATION PROCESSING CHAM...

RECONFIGURABLE MAINFRAME WITH REPLACEABLE INTERFACE PLATE

AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL

STANDARD BASE COMPONENTS FOR FORMING INBOARD AND OUTBOARD SUBSTRATE...

MOTOR ARRANGEMENTS, SEMICONDUCTOR PROCESSING SYSTEMS HAVING MOTOR A...

SUBSTRATE PROCESSING APPARATUS

TRANSPORT APPARATUS AND ADAPTER PENDANT

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD

ENCLOSURE SYSTEM HAVING RADIO FREQUENCY IDENTIFIER

WAFER LOADING AND UNLOADING SYSTEM FOR AN EPITAXIAL REACTOR AND AN...

Substrate Processing System

LID MOVING SYSTEMS AND METHODS FOR CHAMBERS AND CONTAINERS

SUBSTRATE TRANSFER APPARATUS

EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...

EQUIPMENT FRONT END MODULE

FACTORY INTERFACE VACUUM GENERATION USING VACUUM EJECTORS

MULTI-STATION PROCESSING MODULE AND REACTOR ARCHITECTURE

SEMICONDUCTOR PROCESSING TOOL AND METHOD OF USING AN EMBEDDED CHAMBER

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SEMICONDUCTOR PROCESS CHAMBER, SEMICONDUCTOR PROCESS INSTRUMENT, AN...