characterized by the construction of the transfer chamber

Industry

CPC
H01L21/67196

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67196characterized by the construction of the transfer chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate transport apparatus, substrate transport method, and subs...
- Patent number 11,990,357
- Issue date May 21, 2024
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for substrate transport apparatus position com...
- Patent number 11,972,965
- Issue date Apr 30, 2024
- BROOKS AUTOMATION US, LLC
- Jairo T. Moura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,967,513
- Issue date Apr 23, 2024
- Kokusai Electric Corporation
- Teruo Yoshino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system and transfer method
- Patent number 11,955,356
- Issue date Apr 9, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus
- Patent number 11,948,816
- Issue date Apr 2, 2024
- Tokyo Electron Limited
- Masahiro Dogome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus
- Patent number 11,948,823
- Issue date Apr 2, 2024
- SCREEN Holdings Co., Ltd.
- Yuichi Takayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot for simultaneous substrate transfer
- Patent number 11,948,817
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Charles T. Carlson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for processing substrates or wafers
- Patent number 11,948,810
- Issue date Apr 2, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Li-Chao Yin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system having a front opening unified pod (FOUP) load lock
- Patent number 11,923,217
- Issue date Mar 5, 2024
- Applied Materials, Inc.
- Jacob Newman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate including process chamb...
- Patent number 11,923,216
- Issue date Mar 5, 2024
- Samsung Electronics Co., Ltd.
- Seung Min Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate treatment system
- Patent number 11,908,713
- Issue date Feb 20, 2024
- Samsung Electronics Co., Ltd.
- Daesung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular pressurized workstation
- Patent number 11,901,206
- Issue date Feb 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-chamber substrate processing platform
- Patent number 11,860,528
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Ribhu Gautam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Transport apparatus, semiconductor manufacturing apparatus, and tra...
- Patent number 11,850,743
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Takehiro Shindo
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Semiconductor processing apparatus and method utilizing electrostat...
- Patent number 11,854,860
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Tsai-Hao Hung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,856,655
- Issue date Dec 26, 2023
- Tokyo Electron Limited
- Hirofumi Yamaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transport apparatus
- Patent number 11,830,749
- Issue date Nov 28, 2023
- BROOKS AUTOMATION US, LLC
- Christopher A. Bussiere
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,823,944
- Issue date Nov 21, 2023
- BROOKS AUTOMATION US, LLC
- Vincent W. Tsang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer chamber
- Patent number 11,823,923
- Issue date Nov 21, 2023
- Sinfonia Technology Co., Ltd.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Calibration of an aligner station of a processing system
- Patent number 11,823,937
- Issue date Nov 21, 2023
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder replacement with protective disk during pasting pr...
- Patent number 11,817,331
- Issue date Nov 14, 2023
- Applied Materials, Inc.
- Srinivasa Rao Yedla
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer system, transfer method, and transfer apparatus
- Patent number 11,804,391
- Issue date Oct 31, 2023
- Kabushiki Kaisha Yaskawa Denki
- Osamu Komiyaji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ wafer rotation for carousel processing chambers
- Patent number 11,798,825
- Issue date Oct 24, 2023
- Applied Materials, Inc.
- Joseph Yudovsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side storage pods, electronic device processing systems, and method...
- Patent number 11,791,185
- Issue date Oct 17, 2023
- Applied Materials, Inc.
- Paul B. Reuter
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Substrate processing apparatus
- Patent number 11,791,195
- Issue date Oct 17, 2023
- Tokyo Electron Limited
- Yoshitomo Konta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer mechanism to reduce back-side substrate contact
- Patent number 11,784,076
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Masato Ishii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing device
- Patent number 11,776,828
- Issue date Oct 3, 2023
- Tokyo Electron Limited
- Hiromitsu Sakaue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Calibration of an electronics processing system
- Patent number 11,766,782
- Issue date Sep 26, 2023
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate processing tool with integrated metrology and method of u...
- Patent number 11,769,677
- Issue date Sep 26, 2023
- Tokyo Electron Limited
- Kandabara Tapily
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Calibration of an electronics processing system
- Patent number 11,759,954
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS

Patents Applicationslast 30 patents

Information Patent Application
EFEM
- Publication number 20240153797
- Publication date May 9, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Gengoro Ogura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR PRESSURIZED WORKSTATION
- Publication number 20240136213
- Publication date Apr 25, 2024
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM
- Publication number 20240128110
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kosuke KINOSHITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240105493
- Publication date Mar 28, 2024
- BROOKS AUTOMATION US, LLC
- Vincent W. TSANG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND MAINTENANCE METHOD
- Publication number 20240105478
- Publication date Mar 28, 2024
- TOKYO ELECTRON LIMITED
- Takashi DOKAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSPORT APPARATUS
- Publication number 20240096672
- Publication date Mar 21, 2024
- BROOKS AUTOMATION US, LLC
- Christopher A. BUSSIERE
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240096666
- Publication date Mar 21, 2024
- Kokusai Electric Corporation
- Yuri TAKEBAYASHI
- G05 - CONTROLLING REGULATING
Information Patent Application
AUTOMATIC WAFER CENTERING METHOD AND APPARATUS
- Publication number 20240087938
- Publication date Mar 14, 2024
- BROOKS AUTOMATION US, LLC
- Alexander KRUPYSHEV
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...
- Publication number 20240087945
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsai-Hao HUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD
- Publication number 20240087936
- Publication date Mar 14, 2024
- TOKYO ELECTRON LIMITED
- Toshiaki KODAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
- Publication number 20240047254
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240047233
- Publication date Feb 8, 2024
- Kokusai Electric Corporation
- Naofumi OHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER
- Publication number 20240038554
- Publication date Feb 1, 2024
- SINFONIA TECHNOLOGY CO., LTD.
- Toshihiro Kawai
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...
- Publication number 20240030046
- Publication date Jan 25, 2024
- TOKYO ELECTRON LIMITED
- Takuya YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM
- Publication number 20240021458
- Publication date Jan 18, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT
- Publication number 20230420279
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Masato ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND TRANSFER METHOD
- Publication number 20230420286
- Publication date Dec 28, 2023
- TOKYO ELECTRON LIMITED
- Takayasu KIYOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC DEVICE MANUFACTURING SYSTEM
- Publication number 20230413448
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Michael Robert Rice
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES
- Publication number 20230395405
- Publication date Dec 7, 2023
- ASM IP HOLDING B.V.
- Theodorus Oosterlaken
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230374663
- Publication date Nov 23, 2023
- JUSUNG ENGINEERING CO., LTD.
- Jong Sik KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Warm Wafer After Ion Cryo-Implantation
- Publication number 20230377913
- Publication date Nov 23, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yu-Chang Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALIBRATION OF AN ELECTRONICS PROCESSING SYSTEM
- Publication number 20230364794
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Semiconductor System with an Integrated Wafer Humidity Control Device
- Publication number 20230369082
- Publication date Nov 16, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Cheng-Lung Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL
- Publication number 20230349574
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chia-Wei WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER CHAMBER AND WAFER PROCESSING MODULE COMPRISING TRANSFER CH...
- Publication number 20230317479
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Shi Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20230317480
- Publication date Oct 5, 2023
- TOKYO ELECTRON LIMITED
- Masahiro DOGOME
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20230317486
- Publication date Oct 5, 2023
- PICO & TERA CO., LTD.
- Bum Je WOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230307278
- Publication date Sep 28, 2023
- TOKYO ELECTRON LIMITED
- Dongwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT
- Publication number 20230307273
- Publication date Sep 28, 2023
- Nicholas Michael Kopec
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
- Publication number 20230282492
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the construction of the transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate transport apparatus, substrate transport method, and subs...

Method and apparatus for substrate transport apparatus position com...

Substrate processing apparatus

Processing system and transfer method

Transfer apparatus

Substrate treating apparatus

Robot for simultaneous substrate transfer

Apparatus for processing substrates or wafers

Processing system having a front opening unified pod (FOUP) load lock

Apparatus and method for treating substrate including process chamb...

Semiconductor substrate treatment system

Modular pressurized workstation

Multi-chamber substrate processing platform

Transport apparatus, semiconductor manufacturing apparatus, and tra...

Semiconductor processing apparatus and method utilizing electrostat...

Substrate processing apparatus and substrate processing method

Substrate transport apparatus

Substrate processing apparatus

Transfer chamber

Calibration of an aligner station of a processing system

Substrate holder replacement with protective disk during pasting pr...

Transfer system, transfer method, and transfer apparatus

In-situ wafer rotation for carousel processing chambers

Side storage pods, electronic device processing systems, and method...

Substrate processing apparatus

Substrate transfer mechanism to reduce back-side substrate contact

Vacuum processing device

Calibration of an electronics processing system

Substrate processing tool with integrated metrology and method of u...

Calibration of an electronics processing system

Patents Applicationslast 30 patents

EFEM

MODULAR PRESSURIZED WORKSTATION

METHOD OF CONTROLLING SUBSTRATE TRANSFER SYSTEM

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING SYSTEM AND MAINTENANCE METHOD

SUBSTRATE TRANSPORT APPARATUS

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

AUTOMATIC WAFER CENTERING METHOD AND APPARATUS

SEMICONDUCTOR PROCESSING APPARATUS AND METHOD UTILIZING ELECTROSTAT...

SUBSTRATE PROCESSING SYSTEM AND CONDITION MONITORING METHOD

SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

TRANSFER CHAMBER

CONTROL DEVICE, SUBSTRATE PROCESSING SYSTEM, AND METHOD OF CONTROLL...

CALIBRATION OF AN ALIGNER STATION OF A PROCESSING SYSTEM

SUBSTRATE TRANSFER MECHANISM TO REDUCE BACK-SIDE SUBSTRATE CONTACT

SUBSTRATE PROCESSING APPARATUS AND TRANSFER METHOD

ELECTRONIC DEVICE MANUFACTURING SYSTEM

SUBSTRATE PROCESSING APPARATUS FOR PROCESSING SUBSTRATES

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

Warm Wafer After Ion Cryo-Implantation

CALIBRATION OF AN ELECTRONICS PROCESSING SYSTEM

Semiconductor System with an Integrated Wafer Humidity Control Device

AIR CURTAIN DEVICE AND WORKPIECE PROCESSING TOOL

TRANSFER CHAMBER AND WAFER PROCESSING MODULE COMPRISING TRANSFER CH...

GATE VALVE APPARATUS AND SEMICONDUCTOR MANUFACTURING APPARATUS

EQUIPMENT FRONT END MODULE

SUBSTRATE PROCESSING SYSTEM

SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...