characterized by the presence of more than one transfer chamber

Industry

CPC
H01L21/67184

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67184characterized by the presence of more than one transfer chamber

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Foreline assembly for quad station process module
- Patent number 12,362,206
- Issue date Jul 15, 2025
- Lam Research Corporation
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and vacuum processing method using the...
- Patent number 12,288,709
- Issue date Apr 29, 2025
- Samsung Display Co., Ltd.
- Kyung Hoon Chung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for manufacturing semiconductor device
- Patent number 12,286,707
- Issue date Apr 29, 2025
- Samsung Electronics Co., Ltd.
- Joonmyoung Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus
- Patent number 12,278,123
- Issue date Apr 15, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jingfeng Wei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Using spectroscopic measurements for substrate temperature monitoring
- Patent number 12,249,525
- Issue date Mar 11, 2025
- Applied Materials, Inc.
- Ian McDonald
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing apparatus including EFEM and method of processing...
- Patent number 12,217,984
- Issue date Feb 4, 2025
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum transfer device, substrate processing system, and substrate...
- Patent number 12,211,720
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Tatsuo Hatano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Execution device and execution method
- Patent number 12,198,954
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Kippei Sugita
- G01 - MEASURING TESTING
Information Patent Grant
Substrate processing apparatus
- Patent number 12,148,637
- Issue date Nov 19, 2024
- Tokyo Electron Limited
- Kiyoshi Mori
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Side storage pods, equipment front end modules, and methods for pro...
- Patent number 12,142,500
- Issue date Nov 12, 2024
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,142,511
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Polishing apparatus and polishing method
- Patent number 12,131,923
- Issue date Oct 29, 2024
- Ebara Corporation
- Yuta Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated epitaxy and preclean system
- Patent number 12,125,698
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Lara Hawrylchak
- B08 - CLEANING
Information Patent Grant
Substrate processing device
- Patent number 12,106,982
- Issue date Oct 1, 2024
- SCREEN Holdings Co., Ltd.
- Masaki Inaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Operating method of vacuum processing apparatus
- Patent number 12,062,564
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Daichi Naiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing system
- Patent number 12,040,202
- Issue date Jul 16, 2024
- Tokyo Electron Limited
- Norihiko Amikura
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
System and methods for wafer drying
- Patent number 12,002,687
- Issue date Jun 4, 2024
- Tokyo Electron Limited
- Trace Hurd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Operation method of vacuum processing device
- Patent number 12,002,692
- Issue date Jun 4, 2024
- HITACHI HIGH-TECH CORPORATION
- Ryoichi Isomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organic contamination free surface machining
- Patent number 11,932,950
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Yuanhong Guo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor substrate treatment system
- Patent number 11,908,713
- Issue date Feb 20, 2024
- Samsung Electronics Co., Ltd.
- Daesung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,901,175
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Robot embedded vision apparatus
- Patent number 11,810,801
- Issue date Nov 7, 2023
- BROOKS AUTOMATION US, LLC
- Jairo Terra Moura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate treating apparatus
- Patent number 11,810,795
- Issue date Nov 7, 2023
- SCREEN Holdings Co., Ltd.
- Jun Sawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UHV in-situ cryo-cool chamber
- Patent number 11,802,340
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Bharath Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for thermal control of tubing assembly and associated met...
- Patent number 11,768,011
- Issue date Sep 26, 2023
- Lam Research Corporation
- Karl F. Leeser
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Front surface and back surface orientation detection of transparent...
- Patent number 11,728,191
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Michelle Alejandra Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate transfer apparatus and me...
- Patent number 11,721,564
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,710,619
- Issue date Jul 25, 2023
- HITACHI HIGH-TECH CORPORATION
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20250201585
- Publication date Jun 19, 2025
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBS...
- Publication number 20250201595
- Publication date Jun 19, 2025
- SCREEN Holdings Co., Ltd.
- Kazuhiko FUSE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM
- Publication number 20250174478
- Publication date May 29, 2025
- TOKYO ELECTRON LIMITED
- Ryota GOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20250069939
- Publication date Feb 27, 2025
- BROOKS AUTOMATION US, LLC
- Alexander Krupyshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20250046596
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...
- Publication number 20250014924
- Publication date Jan 9, 2025
- Kokusai Electric Corporation
- Tsukasa KAMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...
- Publication number 20250006521
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Senthil Sivaraman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240339337
- Publication date Oct 10, 2024
- Kokusai Electric Corporation
- Daigi KAMIMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL
- Publication number 20240290644
- Publication date Aug 29, 2024
- Applied Materials, Inc.
- Dmitry Lubomirsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE
- Publication number 20240258136
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240231232
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...
- Publication number 20240213064
- Publication date Jun 27, 2024
- TOKYO ELECTRON LIMITED
- Minoru NAGASAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER MODULE AND TRANSFER METHOD
- Publication number 20240186158
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, OPERATING METHOD THEREOF, AND PHOTO...
- Publication number 20240178011
- Publication date May 30, 2024
- SEMES CO., LTD.
- Ho Jin JANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240178031
- Publication date May 30, 2024
- SEMES CO., LTD.
- Sumi Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT EMBEDDED VISION APPARATUS
- Publication number 20240153794
- Publication date May 9, 2024
- Brook Automation US, LLC
- Jairo Terra Moura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Multi-chamber Configuration
- Publication number 20240087924
- Publication date Mar 14, 2024
- HINE AUTOMATION, LLC
- Joseph Arthur Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240057464
- Publication date Feb 15, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shingo EGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
- Publication number 20240047254
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...
- Publication number 20230317478
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Robert Irwin DECOTTIGNIES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
- Publication number 20230282492
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCT...
- Publication number 20230274953
- Publication date Aug 31, 2023
- KIOXIA Corporation
- Tooru MIKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH THERMAL PROCESS CHAMBER
- Publication number 20230230859
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Adel George TANNOUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20230230865
- Publication date Jul 20, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
- Publication number 20230215751
- Publication date Jul 6, 2023
- Hitachi High-Tech Corporation
- Daichi Naiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
- Publication number 20230207354
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20230162998
- Publication date May 25, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jingfeng WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...
- Publication number 20230162999
- Publication date May 25, 2023
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANIC CONTAMINATION FREE SURFACE MACHINING
- Publication number 20230151497
- Publication date May 18, 2023
- Applied Materials, Inc.
- Yuanhong Guo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Methods for Wafer Drying
- Publication number 20230092779
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Trace Hurd
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the presence of more than one transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Foreline assembly for quad station process module

Vacuum processing apparatus and vacuum processing method using the...

Apparatus for manufacturing semiconductor device

Semiconductor processing apparatus

Using spectroscopic measurements for substrate temperature monitoring

Wafer processing apparatus including EFEM and method of processing...

Vacuum transfer device, substrate processing system, and substrate...

Execution device and execution method

Substrate processing apparatus

Side storage pods, equipment front end modules, and methods for pro...

Substrate processing apparatus

Polishing apparatus and polishing method

Integrated epitaxy and preclean system

Substrate processing device

Substrate processing module and method of moving a workpiece

Operating method of vacuum processing apparatus

Processing system

System and methods for wafer drying

Operation method of vacuum processing device

Substrate processing apparatus and substrate processing method

Organic contamination free surface machining

Semiconductor substrate treatment system

Method for selective deposition of silicon nitride layer and struct...

Robot embedded vision apparatus

Substrate treating apparatus

UHV in-situ cryo-cool chamber

Apparatus for thermal control of tubing assembly and associated met...

Front surface and back surface orientation detection of transparent...

Substrate processing system and substrate transfer apparatus and me...

Vacuum processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBS...

SUBSTRATE TRANSFER METHOD AND SEMICONDUCTOR MANUFACTURING SYSTEM

SUBSTRATE PROCESSING APPARATUS

INTEGRATED EPITAXY AND PRECLEAN SYSTEM

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, METHOD...

EXTENDED SUBSTRATE PROCESSING SYSTEMS AND METHODS WITH ADDITIONAL P...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

TWO LEVEL VACUUM WAFER TRANSFER SYSTEM WITH ROBOTS ON EACH LEVEL

SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING SYSTEM, CONTROL DEVICE, AND SUBSTRATE TRANSFER...

TRANSFER MODULE AND TRANSFER METHOD

SUBSTRATE PROCESSING APPARATUS, OPERATING METHOD THEREOF, AND PHOTO...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

ROBOT EMBEDDED VISION APPARATUS

Multi-chamber Configuration

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...

SUBSTRATE TREATMENT DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCT...

BATCH THERMAL PROCESS CHAMBER

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

OPERATING METHOD OF VACUUM PROCESSING APPARATUS

MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...

SEMICONDUCTOR PROCESSING APPARATUS

EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...

ORGANIC CONTAMINATION FREE SURFACE MACHINING

System and Methods for Wafer Drying