characterized by the presence of more than one transfer chamber

Industry

CPC
H01L21/67184

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67184characterized by the presence of more than one transfer chamber

Industries

Patents Grantslast 30 patents

Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,971,661
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Yoji Sakata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organic contamination free surface machining
- Patent number 11,932,950
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Yuanhong Guo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor substrate treatment system
- Patent number 11,908,713
- Issue date Feb 20, 2024
- Samsung Electronics Co., Ltd.
- Daesung Jung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,901,175
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate treating apparatus
- Patent number 11,810,795
- Issue date Nov 7, 2023
- SCREEN Holdings Co., Ltd.
- Jun Sawashima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Robot embedded vision apparatus
- Patent number 11,810,801
- Issue date Nov 7, 2023
- BROOKS AUTOMATION US, LLC
- Jairo Terra Moura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
UHV in-situ cryo-cool chamber
- Patent number 11,802,340
- Issue date Oct 31, 2023
- Applied Materials, Inc.
- Bharath Swaminathan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for thermal control of tubing assembly and associated met...
- Patent number 11,768,011
- Issue date Sep 26, 2023
- Lam Research Corporation
- Karl F. Leeser
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Front surface and back surface orientation detection of transparent...
- Patent number 11,728,191
- Issue date Aug 15, 2023
- Applied Materials, Inc.
- Michelle Alejandra Wong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate transfer apparatus and me...
- Patent number 11,721,564
- Issue date Aug 8, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus
- Patent number 11,710,619
- Issue date Jul 25, 2023
- HITACHI HIGH-TECH CORPORATION
- Kohei Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer system and atmospheric transfer module
- Patent number 11,705,355
- Issue date Jul 18, 2023
- Tokyo Electron Limited
- Norihiko Amikura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for continuously performing grain boundary diffus...
- Patent number 11,636,976
- Issue date Apr 25, 2023
- Fujian Changting Golden Dragon Rare-Earth Co., Ltd
- Qingjiang Wang
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Multi-blade robot apparatus, electronic device manufacturing appara...
- Patent number 11,621,182
- Issue date Apr 4, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature measuring mechanism, temperature measuring method, and...
- Patent number 11,605,547
- Issue date Mar 14, 2023
- Tokyo Electron Limited
- Manabu Nakagawasai
- G01 - MEASURING TESTING
Information Patent Grant
High-throughput, multi-chamber substrate processing system
- Patent number 11,600,503
- Issue date Mar 7, 2023
- ASM IP Holding B.V.
- Yukihiro Mori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and operating method of vacuum processi...
- Patent number 11,600,472
- Issue date Mar 7, 2023
- HITACHI HIGH-TECH CORPORATION
- Ryoichi Isomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Platform and method of operating for integrated end-to-end fully se...
- Patent number 11,594,451
- Issue date Feb 28, 2023
- Tokyo Electron Limited
- Robert Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
External substrate system rotation in a semiconductor processing sy...
- Patent number 11,574,825
- Issue date Feb 7, 2023
- Applied Materials, Inc.
- Tuan Anh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Organic contamination free surface machining
- Patent number 11,555,250
- Issue date Jan 17, 2023
- Applied Materials, Inc.
- Yuanhong Guo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and methods for wafer drying
- Patent number 11,515,178
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Trace Hurd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Continous heat treatment device and method for alloy workpiece or m...
- Patent number 11,508,519
- Issue date Nov 22, 2022
- Fujian Changting Golden Dragon Rare-Earth Co., Ltd
- Qingjiang Wang
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Apparatus and techniques for electronic device encapsulation
- Patent number 11,489,119
- Issue date Nov 1, 2022
- Kateeva, Inc.
- Alexander Sou-Kang Ko
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Platform and method of operating for integrated end-to-end fully se...
- Patent number 11,456,212
- Issue date Sep 27, 2022
- Tokyo Electron Limited
- Robert Clark
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 11,456,190
- Issue date Sep 27, 2022
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 11,443,972
- Issue date Sep 13, 2022
- SCREEN Holdings Co., Ltd.
- Ryo Muramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,424,119
- Issue date Aug 23, 2022
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer device, transfer method and photolithography app...
- Patent number 11,367,636
- Issue date Jun 21, 2022
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Fulong Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer handling and transport
- Patent number 11,352,220
- Issue date Jun 7, 2022
- BROOKS AUTOMATION US, LLC
- Robert T. Caveney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 11,309,199
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Keita Horiuchi
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Multi-chamber Configuration
- Publication number 20240087924
- Publication date Mar 14, 2024
- HINE AUTOMATION, LLC
- Joseph Arthur Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE
- Publication number 20240057464
- Publication date Feb 15, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Shingo EGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
- Publication number 20240047254
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- Norihiko AMIKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...
- Publication number 20230317478
- Publication date Oct 5, 2023
- Applied Materials, Inc.
- Robert Irwin DECOTTIGNIES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...
- Publication number 20230282492
- Publication date Sep 7, 2023
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCT...
- Publication number 20230274953
- Publication date Aug 31, 2023
- KIOXIA Corporation
- Tooru MIKAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BATCH THERMAL PROCESS CHAMBER
- Publication number 20230230859
- Publication date Jul 20, 2023
- Applied Materials, Inc.
- Adel George TANNOUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20230230865
- Publication date Jul 20, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPERATING METHOD OF VACUUM PROCESSING APPARATUS
- Publication number 20230215751
- Publication date Jul 6, 2023
- Hitachi High-Tech Corporation
- Daichi Naiki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...
- Publication number 20230207354
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Devendra Channappa Holeyannavar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20230162998
- Publication date May 25, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jingfeng WEI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...
- Publication number 20230162999
- Publication date May 25, 2023
- Applied Materials, Inc.
- Tuan Anh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ORGANIC CONTAMINATION FREE SURFACE MACHINING
- Publication number 20230151497
- Publication date May 18, 2023
- Applied Materials, Inc.
- Yuanhong Guo
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Methods for Wafer Drying
- Publication number 20230092779
- Publication date Mar 23, 2023
- TOKYO ELECTRON LIMITED
- Trace Hurd
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING...
- Publication number 20230080991
- Publication date Mar 16, 2023
- Samsung Electronics Co., Ltd.
- Jinhyuk Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20230042033
- Publication date Feb 9, 2023
- SCREEN Semiconductor Solutions Co., Ltd.
- Yoshiteru Fukutomi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS
- Publication number 20230023764
- Publication date Jan 26, 2023
- Applied Materials, Inc.
- David W. GROECHEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20230016879
- Publication date Jan 19, 2023
- Kokusai Electric Corporation
- Daigi KAMIMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED WET CLEAN FOR EPITAXIAL GROWTH
- Publication number 20230008695
- Publication date Jan 12, 2023
- Applied Materials, Inc.
- Brian K. Kirkpatrick
- B08 - CLEANING
Information Patent Application
APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION
- Publication number 20220399499
- Publication date Dec 15, 2022
- Kateeva, Inc.
- Alexander Sou-Kang KO
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...
- Publication number 20220351958
- Publication date Nov 3, 2022
- ASM IP HOLDING B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD USING THE...
- Publication number 20220285179
- Publication date Sep 8, 2022
- SAMSUNG DISPLAY CO., LTD.
- Kyung Hoon CHUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20220230896
- Publication date Jul 21, 2022
- TOKYO ELECTRON LIMITED
- Kiyoshi MORI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORELINE ASSEMBLY FOR QUAD STATION PROCESS MODULE
- Publication number 20220208575
- Publication date Jun 30, 2022
- Miguel Benjamin Vasquez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20220189801
- Publication date Jun 16, 2022
- Kokusai Electric Corporation
- Hidehiro YANAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER INTERFACE FOR LINKED PROCESSING TOOLS
- Publication number 20220139740
- Publication date May 5, 2022
- Applied Materials, Inc.
- Robert I. Decottignies
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT...
- Publication number 20220093749
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- Gaurav THAREJA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE
- Publication number 20220093438
- Publication date Mar 24, 2022
- TOYOTA ELECTRON LIMITED
- Norihiko AMIKURA
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
SUBSTRATE TRANSFER DEVICES
- Publication number 20220068690
- Publication date Mar 3, 2022
- Applied Materials, Inc.
- Sreenath SOVENAHALLI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EPITAXY AND PRECLEAN SYSTEM
- Publication number 20220059342
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Lara HAWRYLCHAK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the presence of more than one transfer chamber

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing apparatus and substrate processing method

Organic contamination free surface machining

Semiconductor substrate treatment system

Method for selective deposition of silicon nitride layer and struct...

Substrate treating apparatus

Robot embedded vision apparatus

UHV in-situ cryo-cool chamber

Apparatus for thermal control of tubing assembly and associated met...

Front surface and back surface orientation detection of transparent...

Substrate processing system and substrate transfer apparatus and me...

Vacuum processing apparatus

Substrate transfer system and atmospheric transfer module

Device and method for continuously performing grain boundary diffus...

Multi-blade robot apparatus, electronic device manufacturing appara...

Temperature measuring mechanism, temperature measuring method, and...

High-throughput, multi-chamber substrate processing system

Vacuum processing apparatus and operating method of vacuum processi...

Platform and method of operating for integrated end-to-end fully se...

External substrate system rotation in a semiconductor processing sy...

Organic contamination free surface machining

System and methods for wafer drying

Continous heat treatment device and method for alloy workpiece or m...

Apparatus and techniques for electronic device encapsulation

Platform and method of operating for integrated end-to-end fully se...

Substrate processing apparatus and method of manufacturing semicond...

Substrate processing apparatus

Method for selective deposition of silicon nitride layer and struct...

Substrate transfer device, transfer method and photolithography app...

Semiconductor wafer handling and transport

Substrate transfer apparatus and substrate transfer method

Patents Applicationslast 30 patents

Multi-chamber Configuration

MANUFACTURING EQUIPMENT FOR LIGHT-EMITTING DEVICE

SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE

MODULAR MULTI-CHAMBER PROCESSING TOOL HAVING LINK CHAMBER FOR ULTRA...

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE TRANSFER APPARATUS AND ME...

SUBSTRATE TREATMENT DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCT...

BATCH THERMAL PROCESS CHAMBER

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

OPERATING METHOD OF VACUUM PROCESSING APPARATUS

MULTI-BLADE ROBOT APPARATUS, ELECTRONIC DEVICE MANUFACTURING APPARA...

SEMICONDUCTOR PROCESSING APPARATUS

EXTERNAL SUBSTRATE SYSTEM ROTATION IN A SEMICONDUCTOR PROCESSING SY...

ORGANIC CONTAMINATION FREE SURFACE MACHINING

System and Methods for Wafer Drying

WAFER PROCESSING APPARATUS INCLUDING EFEM AND METHOD OF PROCESSING...

SUBSTRATE TREATING APPARATUS

SURFACE PROFILING AND TEXTURING OF CHAMBER COMPONENTS

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

INTEGRATED WET CLEAN FOR EPITAXIAL GROWTH

APPARATUS AND TECHNIQUES FOR ELECTRONIC DEVICE ENCAPSULATION

METHOD FOR SELECTIVE DEPOSITION OF SILICON NITRIDE LAYER AND STRUCT...

VACUUM PROCESSING APPARATUS AND VACUUM PROCESSING METHOD USING THE...

SUBSTRATE PROCESSING APPARATUS

FORELINE ASSEMBLY FOR QUAD STATION PROCESS MODULE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

CHAMBER INTERFACE FOR LINKED PROCESSING TOOLS

METHOD OF FABRICATING A SEMICONDUCTOR DEVICE HAVING REDUCED CONTACT...

SUBSTRATE TRANSFER SYSTEM AND ATMOSPHERIC TRANSFER MODULE

SUBSTRATE TRANSFER DEVICES

INTEGRATED EPITAXY AND PRECLEAN SYSTEM