characterized by the substrate support

Industry

CPC
H01L21/67309

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67309characterized by the substrate support

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Supporting shelf module and wafer container using same
- Patent number 12,237,190
- Issue date Feb 25, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and image capturing method
- Patent number 12,230,523
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Tadashi Enomoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate container with enhanced flow field therein
- Patent number 12,183,608
- Issue date Dec 31, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High density semiconductor storage system
- Patent number 12,176,228
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Rong Syuan Fan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus including a cassette mounting section, a readi...
- Patent number 12,040,214
- Issue date Jul 16, 2024
- Disco Corporation
- Kazuma Sekiya
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer boat handling device, vertical batch furnace and method
- Patent number 11,996,309
- Issue date May 28, 2024
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate support, and method of ma...
- Patent number 11,929,272
- Issue date Mar 12, 2024
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Grant
Rounded vertical wafer vessel rods
- Patent number 11,908,719
- Issue date Feb 20, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Wen Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer boat
- Patent number 11,869,786
- Issue date Jan 9, 2024
- ASM IP Holding B.V.
- Theodorus G. M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Open-ended type substrate receiving cassette and system thereof
- Patent number 11,798,829
- Issue date Oct 24, 2023
- Samsung Electronics Co., Ltd.
- Yoon Su Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber for degassing substrates
- Patent number 11,776,825
- Issue date Oct 3, 2023
- EVATEC AG
- Rogier Lodder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Base frame of substrate carrier, substrate carrier and substrate tr...
- Patent number 11,705,352
- Issue date Jul 18, 2023
- HKC CORPORATION LIMITED
- Qiaodong Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Unit for supplying liquid, apparatus and method for treating substr...
- Patent number 11,658,048
- Issue date May 23, 2023
- Semes Co., Ltd.
- Seong Soo Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport system
- Patent number 11,581,207
- Issue date Feb 14, 2023
- Infineon Technologies AG
- Michael Daginnus-Metzen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,515,152
- Issue date Nov 29, 2022
- Kokusai Electric Corporation
- Shintaro Kogura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer boat handling device, vertical batch furnace and method
- Patent number 11,515,188
- Issue date Nov 29, 2022
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,488,845
- Issue date Nov 1, 2022
- EUGENE TECHNOLOGY CO., LTD.
- Cha Young Yoo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rounded vertical wafer vessel rods
- Patent number 11,450,542
- Issue date Sep 20, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ching-Wen Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat insulation structure at lower end of vertical heat treatment a...
- Patent number 11,424,143
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Koji Yoshii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction tube structure and substrate processing apparatus
- Patent number 11,359,283
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Tetsuya Marubayashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, heater and method of manufacturing...
- Patent number 11,359,285
- Issue date Jun 14, 2022
- Kokusai Electric Corporation
- Hitoshi Murata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate liquid treatment apparatus
- Patent number 11,309,194
- Issue date Apr 19, 2022
- Tokyo Electron Limited
- Koji Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical heat treatment apparatus
- Patent number 11,282,721
- Issue date Mar 22, 2022
- Tokyo Electron Limited
- Hiroki Iriuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and method
- Patent number 11,232,963
- Issue date Jan 25, 2022
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 11,208,721
- Issue date Dec 28, 2021
- Tokyo Electron Limited
- Kohei Fukushima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming films on wafers separated by different distances
- Patent number 11,133,207
- Issue date Sep 28, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wen-Bin Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and recording medium
- Patent number 11,094,572
- Issue date Aug 17, 2021
- Kokusai Electric Corporation
- Osamu Morita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 11,047,044
- Issue date Jun 29, 2021
- Tokyo Electron Limited
- Yoshihiro Takezawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two piece shutter disk assembly with self-centering feature
- Patent number 11,043,406
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Cheng-Hsiung Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus and metal member
- Patent number 11,035,037
- Issue date Jun 15, 2021
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
WAFER HOLDER ASSEMBLY
- Publication number 20250006528
- Publication date Jan 2, 2025
- Taiwan Semiconductor Manufacturing company Ltd.
- CHENG-YOU TAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF
- Publication number 20250006529
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CLEANING APPARATUS AND WAFER TRANSFER DEVICE
- Publication number 20240420977
- Publication date Dec 19, 2024
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hongshuai MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240395585
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Manabu HONMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME
- Publication number 20240379394
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tung-Huang CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PLACEMENT TABLE
- Publication number 20240355656
- Publication date Oct 24, 2024
- NGK Insulators, Ltd.
- Tatsuya KUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...
- Publication number 20240249963
- Publication date Jul 25, 2024
- Kokusai Electric Corporation
- Yukinori ABURATANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROUNDED VERTICAL WAFER VESSEL RODS
- Publication number 20240203770
- Publication date Jun 20, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Ching-Wen CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240120234
- Publication date Apr 11, 2024
- Samsung Electronics Co., Ltd.
- Joohoon KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...
- Publication number 20240096669
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Fumiki AISO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER FOR DEGASSING SUBSTRATES
- Publication number 20230395402
- Publication date Dec 7, 2023
- Evatec AG
- Rogier Lodder
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM
- Publication number 20230343621
- Publication date Oct 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Rong Syuan FAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR SECURING SEMICONDUCTOR DEVICE CARRYING BOA...
- Publication number 20230268210
- Publication date Aug 24, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- CHUN-YU LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND IMAGE CAPTURING METHOD
- Publication number 20230154776
- Publication date May 18, 2023
- TOKYO ELECTRON LIMITED
- Tadashi ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE RETAINER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MA...
- Publication number 20230116953
- Publication date Apr 20, 2023
- Kokusai Electric Corporation
- Atsushi HIRANO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ROUNDED VERTICAL WAFER VESSEL RODS
- Publication number 20220384224
- Publication date Dec 1, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Ching-Wen CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT
- Publication number 20220254668
- Publication date Aug 11, 2022
- ASM IP HOLDING B.V.
- Theodorus G.M. Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPPORT AND METHOD OF MA...
- Publication number 20220157628
- Publication date May 19, 2022
- Kokusai Electric Corporation
- Yusaku OKAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER BOAT STRUCTURE, AS WELL AS WAFER BOAT ASSEMBLY AND DIFFUSION...
- Publication number 20220148899
- Publication date May 12, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Pengfei GAO
- C30 - CRYSTAL GROWTH
Information Patent Application
SUPPORTING SHELF MODULE AND WAFER CONTAINER USING SAME
- Publication number 20220093434
- Publication date Mar 24, 2022
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPEN-ENDED TYPE SUBSTRATE RECEIVING CASSETTE AND SYSTEM THEREOF
- Publication number 20210384055
- Publication date Dec 9, 2021
- Samsung Electronics Co., Ltd.
- YOON SU KIM
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
ROUNDED VERTICAL WAFER VESSEL RODS
- Publication number 20210225675
- Publication date Jul 22, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Ching-Wen CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER
- Publication number 20210043485
- Publication date Feb 11, 2021
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT, AND METHOD OF MA...
- Publication number 20210035835
- Publication date Feb 4, 2021
- Kokusai Electric Corporation
- Kenichi Suzaki
- F27 - FURNACES KILNS OVENS RETORTS
Information Patent Application
BASE FRAME OF SUBSTRATE CARRIER, SUBSTRATE CARRIER AND SUBSTRATE TR...
- Publication number 20210028037
- Publication date Jan 28, 2021
- HKC Corporation Limited
- Qiaodong LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APERTURE DESIGN FOR UNIFORMITY CONTROL IN SELECTIVE PHYSICAL VAPOR...
- Publication number 20210020484
- Publication date Jan 21, 2021
- Applied Materials, Inc.
- Keith Miller
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIT FOR SUPPLYING LIQUID, APPARATUS AND METHOD FOR TREATING SUBSTR...
- Publication number 20200402818
- Publication date Dec 24, 2020
- SEMES CO., LTD.
- Seong Soo LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport System
- Publication number 20200388519
- Publication date Dec 10, 2020
- Michael Daginnus-Metzen
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20200373150
- Publication date Nov 26, 2020
- Kokusai Electric Corporation
- Shintaro KOGURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER BOAT HANDLING DEVICE, VERTICAL BATCH FURNACE AND METHOD
- Publication number 20200365433
- Publication date Nov 19, 2020
- ASM IP HOLDING B.V.
- Christianus G.M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS

characterized by the substrate support

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Supporting shelf module and wafer container using same

Substrate processing apparatus and image capturing method

Substrate container with enhanced flow field therein

High density semiconductor storage system

Processing apparatus including a cassette mounting section, a readi...

Wafer boat handling device, vertical batch furnace and method

Substrate processing apparatus, substrate support, and method of ma...

Rounded vertical wafer vessel rods

Wafer boat

Open-ended type substrate receiving cassette and system thereof

Chamber for degassing substrates

Base frame of substrate carrier, substrate carrier and substrate tr...

Unit for supplying liquid, apparatus and method for treating substr...

Transport system

Method of manufacturing semiconductor device, substrate processing...

Wafer boat handling device, vertical batch furnace and method

Substrate processing apparatus

Rounded vertical wafer vessel rods

Heat insulation structure at lower end of vertical heat treatment a...

Reaction tube structure and substrate processing apparatus

Substrate processing apparatus, heater and method of manufacturing...

Substrate liquid treatment apparatus

Vertical heat treatment apparatus

Substrate processing apparatus and method

Substrate processing apparatus

Method for forming films on wafers separated by different distances

Substrate processing apparatus and recording medium

Film forming apparatus and film forming method

Two piece shutter disk assembly with self-centering feature

Substrate processing apparatus and metal member

Patents Applicationslast 30 patents

WAFER HOLDER ASSEMBLY

WAFER BOAT SYSTEM, HOLDER RING AND USE THEREOF

WAFER CLEANING APPARATUS AND WAFER TRANSFER DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE TRANSFER METHOD

SEMICONDUCTOR SUBSTRATE BOAT AND METHODS OF USING THE SAME

WAFER PLACEMENT TABLE

SUBSTRATE PROCESSING APPARATUS, TRANSFER METHOD OF SUBSTRATE SUPPOR...

ROUNDED VERTICAL WAFER VESSEL RODS

SEMICONDUCTOR MANUFACTURING APPARATUS

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND ME...

CHAMBER FOR DEGASSING SUBSTRATES

HIGH DENSITY SEMICONDUCTOR STORAGE SYSTEM

METHOD AND APPARATUS FOR SECURING SEMICONDUCTOR DEVICE CARRYING BOA...

SUBSTRATE PROCESSING APPARATUS AND IMAGE CAPTURING METHOD

SUBSTRATE RETAINER, SUBSTRATE PROCESSING APPARATUS AND METHOD OF MA...

ROUNDED VERTICAL WAFER VESSEL RODS

WAFER BOAT

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPPORT AND METHOD OF MA...

WAFER BOAT STRUCTURE, AS WELL AS WAFER BOAT ASSEMBLY AND DIFFUSION...

SUPPORTING SHELF MODULE AND WAFER CONTAINER USING SAME

OPEN-ENDED TYPE SUBSTRATE RECEIVING CASSETTE AND SYSTEM THEREOF

ROUNDED VERTICAL WAFER VESSEL RODS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE HOLDER

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE SUPPORT, AND METHOD OF MA...

BASE FRAME OF SUBSTRATE CARRIER, SUBSTRATE CARRIER AND SUBSTRATE TR...

APERTURE DESIGN FOR UNIFORMITY CONTROL IN SELECTIVE PHYSICAL VAPOR...

UNIT FOR SUPPLYING LIQUID, APPARATUS AND METHOD FOR TREATING SUBSTR...

Transport System

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

WAFER BOAT HANDLING DEVICE, VERTICAL BATCH FURNACE AND METHOD