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Rounded vertical wafer vessel rods
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Patent number 11,908,719
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Issue date Feb 20, 2024
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ching-Wen Cheng
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Wafer boat
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Patent number 11,869,786
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Issue date Jan 9, 2024
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ASM IP Holding B.V.
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Theodorus G. M. Oosterlaken
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H01 - BASIC ELECTRIC ELEMENTS
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Chamber for degassing substrates
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Patent number 11,776,825
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Issue date Oct 3, 2023
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EVATEC AG
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Rogier Lodder
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Transport system
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Patent number 11,581,207
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Issue date Feb 14, 2023
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Infineon Technologies AG
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Michael Daginnus-Metzen
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H01 - BASIC ELECTRIC ELEMENTS
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Substrate processing apparatus
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Patent number 11,488,845
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Issue date Nov 1, 2022
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EUGENE TECHNOLOGY CO., LTD.
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Cha Young Yoo
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Rounded vertical wafer vessel rods
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Patent number 11,450,542
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Issue date Sep 20, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Ching-Wen Cheng
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H01 - BASIC ELECTRIC ELEMENTS
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Vertical heat treatment apparatus
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Patent number 11,282,721
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Issue date Mar 22, 2022
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Tokyo Electron Limited
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Hiroki Iriuda
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Segmented vertical wafer boat
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Patent number 10,861,727
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Issue date Dec 8, 2020
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Samsung Electronics Co., Ltd.
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Larry E. Vaughan
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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