characterized by the use of precursors specially adapted for ALD

Industry

CPC
C23C16/45553

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/45553characterized by the use of precursors specially adapted for ALD

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method for depositing a gap-fill layer by plasma-assisted deposition
- Patent number 11,972,944
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Timothee Julien Vincent Blanquart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of metal films
- Patent number 11,970,776
- Issue date Apr 30, 2024
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method and film forming apparatus
- Patent number 11,970,767
- Issue date Apr 30, 2024
- Tokyo Electron Limited
- Taichi Monden
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclical deposition methods
- Patent number 11,970,769
- Issue date Apr 30, 2024
- ASM IP Holding B.V.
- Trigagema Gama
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of low-k films
- Patent number 11,970,777
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Shuaidi Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Precursor solution for thin film deposition and thin film forming m...
- Patent number 11,972,941
- Issue date Apr 30, 2024
- SK TRICHEM
- Chang Sung Hong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for nucleation of conductive nitride films
- Patent number 11,965,239
- Issue date Apr 23, 2024
- Entegris, Inc.
- Gavin Richards
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a transition metal containing film on a substrat...
- Patent number 11,959,171
- Issue date Apr 16, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organo tin compound for thin film deposition and method for forming...
- Patent number 11,958,874
- Issue date Apr 16, 2024
- EGTM CO., LTD.
- Jang Keun Sim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for coating a substrate with magnesium fluoride via atomic...
- Patent number 11,952,659
- Issue date Apr 9, 2024
- Corning Incorporated
- Ming-Huang Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized linear and cyclic oligosiloxanes for dep...
- Patent number 11,952,465
- Issue date Apr 9, 2024
- VERSUM MATERIALS US, LLC
- Manchao Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cyclic deposition methods for forming metal-containing material and...
- Patent number 11,952,658
- Issue date Apr 9, 2024
- ASM IP Holding B.V.
- Katja Väyrynen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition of lithium boron comprising nanocomposite s...
- Patent number 11,946,139
- Issue date Apr 2, 2024
- UChicago Argonne, LLC
- Anil U. Mane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of synthesizing molybdenum oxychloride by reacting molybdenu...
- Patent number 11,939,231
- Issue date Mar 26, 2024
- JX Metals Corporation
- Hideyuki Takahashi
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
High voltage, low pressure plasma enhanced atomic layer deposition
- Patent number 11,935,759
- Issue date Mar 19, 2024
- Lotus Applied Technology, LLC
- Eric R. Dickey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion resistant film on a chamber component and methods of depo...
- Patent number 11,932,938
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Lisa J. Enman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silyl pseudohalides for silicon containing films
- Patent number 11,932,940
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Keenan N. Woods
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Niobium precursor compound for thin film deposition and method for...
- Patent number 11,926,897
- Issue date Mar 12, 2024
- EGTM Co., Ltd.
- Tae Young Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing an oxide film on a substrate by a cyclical d...
- Patent number 11,923,192
- Issue date Mar 5, 2024
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processes for depositing silicon-containing films using halidosilan...
- Patent number 11,913,112
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Xinjian Lei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Organoamino-functionalized cyclic oligosiloxanes for deposition of...
- Patent number 11,912,730
- Issue date Feb 27, 2024
- VERSUM MATERIALS US, LLC
- Matthew R. MacDonald
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphor particle coating
- Patent number 11,912,914
- Issue date Feb 27, 2024
- Lumileds LLC
- Jens Meyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phosphor particle coating
- Patent number 11,912,918
- Issue date Feb 27, 2024
- Lumileds LLC
- Jens Meyer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon precursor compound, preparation method therefor, and silico...
- Patent number 11,905,305
- Issue date Feb 20, 2024
- UP Chemical Co., Ltd.
- Jin Sik Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method for gate electrode and thin film transistor an...
- Patent number 11,901,420
- Issue date Feb 13, 2024
- BEIHAI HKC OPTOELECTRONICS TECHNOLOGY CO., LTD.
- En-Tsung Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for selective deposition of silicon nitride layer and struct...
- Patent number 11,901,175
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Eric James Shero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a polycrystalline molybdenum film over a surfac...
- Patent number 11,898,242
- Issue date Feb 13, 2024
- ASM IP Holding B.V.
- Bhushan Zope
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Barrier coatings
- Patent number 11,901,169
- Issue date Feb 13, 2024
- UChicago Argonne, LLC
- Jeffrey W. Elam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Molybdenum thin films by oxidation-reduction
- Patent number 11,891,690
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Feng Q. Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for increasing the density of high-index nanoimprint lithog...
- Patent number 11,892,771
- Issue date Feb 6, 2024
- Applied Materials, Inc.
- Andrew Ceballos
- B82 - NANO-TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...
- Publication number 20240145301
- Publication date May 2, 2024
- Soulbrain Co., LTD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSITION METAL DEPOSITION METHOD
- Publication number 20240133032
- Publication date Apr 25, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING CARBON CONDUCTING FILMS BY ATOMIC LAYER DEPO...
- Publication number 20240124977
- Publication date Apr 18, 2024
- Micron Technology, Inc.
- Jean-Sebastien Materne Lehn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUANTUM DOT COMPOSITE STRUCTURE AND A FORMING METHOD THEREOF
- Publication number 20240124350
- Publication date Apr 18, 2024
- Lextar Electronics Corporation
- Ching LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240124976
- Publication date Apr 18, 2024
- TOKYO ELECTRON LIMITED
- Kazumi KUBO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...
- Publication number 20240124972
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Kyungrim KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Compound For Forming Metal-Containing Film, Composition For Forming...
- Publication number 20240116958
- Publication date Apr 11, 2024
- Shin-Etsu Chemical Co., Ltd.
- Naoki KOBAYASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE
- Publication number 20240102162
- Publication date Mar 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chun-Yi CHOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS COMPRISING BORAZINE AND ITS DERIVATIVES, AND RELATED M...
- Publication number 20240102163
- Publication date Mar 28, 2024
- ASM IP HOLDING, B.V.
- Patricio Romero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA-ENHANCED MOLYBDENUM DEPOSITION
- Publication number 20240102157
- Publication date Mar 28, 2024
- Applied Materials, Inc.
- TUERXUN AILIHUMAER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LITHIUM PRECURSORS FOR DEPOSITION OF LITHIUM-CONTAINING LAYERS, ISL...
- Publication number 20240102161
- Publication date Mar 28, 2024
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...
- Publication number 20240093363
- Publication date Mar 21, 2024
- ASM IP HOLDING B.V.
- Charles Dezelah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION
- Publication number 20240092804
- Publication date Mar 21, 2024
- Intel Corporation
- Patricio E. ROMERO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS
- Publication number 20240093366
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- MING LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...
- Publication number 20240093360
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTION CHAMBER COMPONENT, DEPOSITION APPARATUS PROVIDED WITH SUCH...
- Publication number 20240084446
- Publication date Mar 14, 2024
- ASM IP HOLDING, B.V.
- Iordan Iordanov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES
- Publication number 20240076775
- Publication date Mar 7, 2024
- ASM IP HOLDING B.V.
- Andrea Illiberi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...
- Publication number 20240068092
- Publication date Feb 29, 2024
- ASM IP HOLDING B.V.
- Eric Christopher Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20240063015
- Publication date Feb 22, 2024
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONFORMAL MOLYBDENUM DEPOSITION
- Publication number 20240060175
- Publication date Feb 22, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS
- Publication number 20240060180
- Publication date Feb 22, 2024
- KOJUNDO CHEMICAL LABORATORY CO., LTD.
- Fumikazu MIZUTANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD AND FILM FORMING APPARATUS
- Publication number 20240052483
- Publication date Feb 15, 2024
- TOKYO ELECTRON LIMITED
- Kazuki GOTO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS
- Publication number 20240052486
- Publication date Feb 15, 2024
- LAM RESEARCH CORPORATION
- Kyle Jordan Blakeney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION
- Publication number 20240052487
- Publication date Feb 15, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER
- Publication number 20240043992
- Publication date Feb 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ren-Guan Duan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING AN INTERFACIAL LITHIUM FLUORIDE LAYER FOR...
- Publication number 20240047821
- Publication date Feb 8, 2024
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Biqiong WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS
- Publication number 20240047215
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Kunal Bhatnagar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC...
- Publication number 20240047218
- Publication date Feb 8, 2024
- TOKYO ELECTRON LIMITED
- David O'Meara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MATERIAL IN M...
- Publication number 20240038528
- Publication date Feb 1, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Fang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS FOR DEPOSITING MOLYBDENUM SULFIDE
- Publication number 20240035152
- Publication date Feb 1, 2024
- Applied Materials, Inc.
- Keith T. Wong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

characterized by the use of precursors specially adapted for ALD

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for depositing a gap-fill layer by plasma-assisted deposition

Atomic layer deposition of metal films

Film forming method and film forming apparatus

Cyclical deposition methods

Deposition of low-k films

Precursor solution for thin film deposition and thin film forming m...

Method for nucleation of conductive nitride films

Methods of forming a transition metal containing film on a substrat...

Organo tin compound for thin film deposition and method for forming...

Methods for coating a substrate with magnesium fluoride via atomic...

Organoamino-functionalized linear and cyclic oligosiloxanes for dep...

Cyclic deposition methods for forming metal-containing material and...

Atomic layer deposition of lithium boron comprising nanocomposite s...

Method of synthesizing molybdenum oxychloride by reacting molybdenu...

High voltage, low pressure plasma enhanced atomic layer deposition

Corrosion resistant film on a chamber component and methods of depo...

Silyl pseudohalides for silicon containing films

Niobium precursor compound for thin film deposition and method for...

Methods for depositing an oxide film on a substrate by a cyclical d...

Processes for depositing silicon-containing films using halidosilan...

Organoamino-functionalized cyclic oligosiloxanes for deposition of...

Phosphor particle coating

Phosphor particle coating

Silicon precursor compound, preparation method therefor, and silico...

Manufacturing method for gate electrode and thin film transistor an...

Method for selective deposition of silicon nitride layer and struct...

Methods for forming a polycrystalline molybdenum film over a surfac...

Barrier coatings

Molybdenum thin films by oxidation-reduction

Methods for increasing the density of high-index nanoimprint lithog...

Patents Applicationslast 30 patents

METAL THIN-FILM PRECURSOR COMPOSITION, METHOD OF FORMING THIN FILM...

TRANSITION METAL DEPOSITION METHOD

METHODS FOR DEPOSITING CARBON CONDUCTING FILMS BY ATOMIC LAYER DEPO...

QUANTUM DOT COMPOSITE STRUCTURE AND A FORMING METHOD THEREOF

FILM FORMING METHOD AND FILM FORMING APPARATUS

CANISTER, PRECURSOR TRANSFER SYSTEM HAVING THE SAME AND METHOD FOR...

Compound For Forming Metal-Containing Film, Composition For Forming...

MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE

COMPOSITIONS COMPRISING BORAZINE AND ITS DERIVATIVES, AND RELATED M...

PLASMA-ENHANCED MOLYBDENUM DEPOSITION

LITHIUM PRECURSORS FOR DEPOSITION OF LITHIUM-CONTAINING LAYERS, ISL...

METHOD OF DEPOSITING VANADIUM METAL, STRUCTURE, DEVICE AND A DEPOSI...

SCANDIUM PRECURSOR FOR SC2O3 OR SC2S3 ATOMIC LAYER DEPOSITION

COMPOSITIONS AND METHODS FOR DEPOSITING SILICON-CONTAINING FILMS

COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...

REACTION CHAMBER COMPONENT, DEPOSITION APPARATUS PROVIDED WITH SUCH...

SELECTIVE DEPOSITION OF SILICON OXIDE ON METAL SURFACES

METHODS FOR DEPOSITING A MOLYBDENUM NITRIDE FILM ON A SURFACE OF A...

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

CONFORMAL MOLYBDENUM DEPOSITION

ATOMIC LAYER DEPOSITION METHOD FOR METAL THIN FILMS

FILM FORMING METHOD AND FILM FORMING APPARATUS

PRECURSORS FOR DEPOSITION OF MOLYBDENUM-CONTAINING FILMS

METHODS OF SELECTIVE ATOMIC LAYER DEPOSITION

MULTILAYER ALD COATING FOR CRITICAL COMPONENTS IN PROCESS CHAMBER

METHOD FOR MANUFACTURING AN INTERFACIAL LITHIUM FLUORIDE LAYER FOR...

LOW TEMPERATURE DEPOSITION OF PURE MOLYBENUM FILMS

SYSTEMS AND METHODS FOR IMPROVING PLANARITY USING SELECTIVE ATOMIC...

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE WITH MATERIAL IN M...

METHODS FOR DEPOSITING MOLYBDENUM SULFIDE