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H01L21/465

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/465Chemical or electrical treatment

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method of etching an indium gallium zinc oxide (IGZO) structure
- Patent number 12,154,794
- Issue date Nov 26, 2024
- Imec VZW
- Shreya Kundu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Forming passivation stack having etch stop layer
- Patent number 12,142,481
- Issue date Nov 12, 2024
- Polar Semiconductor, LLC
- Roger Carroll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device
- Patent number 12,125,453
- Issue date Oct 22, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Deposition of highly crystalline 2D materials
- Patent number 12,112,946
- Issue date Oct 8, 2024
- Imec VZW
- Yuanyuan Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide films in semiconductor device manufacturing
- Patent number 12,094,711
- Issue date Sep 17, 2024
- Lam Research Corporation
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching method of oxide semiconductor film, oxide semiconductor wor...
- Patent number 12,074,030
- Issue date Aug 27, 2024
- SONY SEMICONDUCTOR SOLUTIONS CORPORATION
- Akiko Hirata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching oxide semiconductor film and plasma processing a...
- Patent number 12,068,171
- Issue date Aug 20, 2024
- Tokyo Electron Limited
- Masahiro Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching object and etching device
- Patent number 12,033,869
- Issue date Jul 9, 2024
- FLOSFIA INC.
- Isao Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device comprising oxide semic...
- Patent number 11,923,204
- Issue date Mar 5, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of porosifying part of a semiconductor wafer
- Patent number 11,810,779
- Issue date Nov 7, 2023
- Infineon Technologies AG
- Sophia Friedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device, method for manufacturing the same, and electr...
- Patent number 11,777,038
- Issue date Oct 3, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, gate driver including the same, and display d...
- Patent number 11,764,307
- Issue date Sep 19, 2023
- LG Display Co., Ltd.
- Seung-Jin Kim
- G09 - EDUCATION CRYPTOGRAPHY DISPLAY ADVERTISING SEALS
Information Patent Grant
Semiconductor device and fabricating method thereof
- Patent number 11,764,267
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Chieh Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing gallium oxide Schottky barrier diode with nega...
- Patent number 11,757,048
- Issue date Sep 12, 2023
- THE 13TH RESEARCH INSTITUTE OF CHINA ELECTRONICS TECHNOLOGY GROUP CORPORATION
- Yuangang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Display device
- Patent number 11,735,131
- Issue date Aug 22, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active matrix substrate
- Patent number 11,721,704
- Issue date Aug 8, 2023
- SHARP KABUSHIKI KAISHA
- Hajime Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,710,794
- Issue date Jul 25, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Takahiro Sato
- G02 - OPTICS
Information Patent Grant
Semiconductor device and display device including semiconductor device
- Patent number 11,695,078
- Issue date Jul 4, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus
- Patent number 11,670,688
- Issue date Jun 6, 2023
- FLOSFIA INC.
- Tokiyoshi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atomic layer deposition and etching of transition metal dichalcogen...
- Patent number 11,643,728
- Issue date May 9, 2023
- ASM IP Holding B.V.
- Jani Hämäläinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor wafer with low defect count and method for manufactur...
- Patent number 11,610,808
- Issue date Mar 21, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Yu-Hung Cheng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor apparatus
- Patent number 11,594,601
- Issue date Feb 28, 2023
- FLOSFIA INC.
- Tokiyoshi Matsuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of semiconductor device
- Patent number 11,581,427
- Issue date Feb 14, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Junichi Koezuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of etching object
- Patent number 11,515,172
- Issue date Nov 29, 2022
- FLOSFIA INC.
- Isao Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method for manufacturing the same
- Patent number 11,469,330
- Issue date Oct 11, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshinobu Asami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxide semiconductor-device
- Patent number 11,456,187
- Issue date Sep 27, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,450,530
- Issue date Sep 20, 2022
- Tokyo Electron Limited
- Rintaro Higuchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for partially removing a semiconductor wafer
- Patent number 11,404,262
- Issue date Aug 2, 2022
- Infineon Technologies AG
- Sophia Friedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor, gate driver including the same, and display d...
- Patent number 11,355,646
- Issue date Jun 7, 2022
- LG Display Co., Ltd.
- Seung-Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 11,355,353
- Issue date Jun 7, 2022
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ETCHING OBJECT AND ETCHING DEVICE
- Publication number 20240321592
- Publication date Sep 26, 2024
- FLOSFIA INC.
- Isao TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20240258119
- Publication date Aug 1, 2024
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNOLOGIES FOR PEROVSKITE TRANSISTORS
- Publication number 20240113212
- Publication date Apr 4, 2024
- Intel Corporation
- Ian Alexander Young
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VERTICAL GALLIUM OXIDE TRANSISTOR AND PREPARATION METHOD THEREOF
- Publication number 20240079477
- Publication date Mar 7, 2024
- UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA
- Xuanze ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH OXIDE-BASED SEMICONDUCTOR CHANNEL
- Publication number 20230395725
- Publication date Dec 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jih-Chao CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME
- Publication number 20230327007
- Publication date Oct 12, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shu-Jui CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20230317857
- Publication date Oct 5, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Takahiro SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING OF INDIUM GALLIUM ZINC OXIDE
- Publication number 20230274949
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Aaron Lynn Routzahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...
- Publication number 20230250534
- Publication date Aug 10, 2023
- ASM IP HOLDING B.V.
- Jani Hämäläinen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FORMING PASSIVATION STACK HAVING ETCH STOP LAYER
- Publication number 20230215727
- Publication date Jul 6, 2023
- Polar Semiconductor, LLC
- Roger Carroll
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON ETCHING LIQUID CONTAINING AROMATIC ALDEHYDE
- Publication number 20230136986
- Publication date May 4, 2023
- Tokuyama Corporation
- Naoto NOMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TESTING A SEMICONDUCTOR DIE USING TEMPORARY TEST PADS APPLIED TO CO...
- Publication number 20230120305
- Publication date Apr 20, 2023
- ADVANCED MICRO DEVICES, INC.
- CHIA-HAO CHENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE
- Publication number 20230115949
- Publication date Apr 13, 2023
- HON HAI PRECISION INDUSTRY CO., LTD.
- Kuang-Hao CHIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE TREATMENT METHOD FOR GALLIUM OXIDE-BASED SEMICONDUCTOR SUBS...
- Publication number 20230081110
- Publication date Mar 16, 2023
- DENSO CORPORATION
- KATSUHIRO KUTSUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Doped Aluminum-Alloyed Gallium Oxide And Ohmic Contacts
- Publication number 20230074175
- Publication date Mar 9, 2023
- The Regents of the University of Michigan
- Rebecca L. PETERSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20230040161
- Publication date Feb 9, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Yoshinobu ASAMI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...
- Publication number 20230018338
- Publication date Jan 19, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC
- KeJun MU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20230019824
- Publication date Jan 19, 2023
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei YAMAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...
- Publication number 20220325418
- Publication date Oct 13, 2022
- SHOWA DENKO K.K.
- Kazuma MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF POROSIFYING PART OF A SEMICONDUCTOR WAFER
- Publication number 20220310380
- Publication date Sep 29, 2022
- Sophia Friedler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition of Highly Crystalline 2D Materials
- Publication number 20220277953
- Publication date Sep 1, 2022
- IMEC vzw
- Yuanyuan Shi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20220270877
- Publication date Aug 25, 2022
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING
- Publication number 20220165571
- Publication date May 26, 2022
- LAM RESEARCH CORPORATION
- Jengyi Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE MATRIX SUBSTRATE AND MANUFACTURING METHOD THEREOF
- Publication number 20220157855
- Publication date May 19, 2022
- Sharp Kabushiki Kaisha
- Hajime IMAI
- G02 - OPTICS
Information Patent Application
METHOD OF ETCHING AN INDIUM GALLIUM ZINC OXIDE (IGZO) STRUCTURE
- Publication number 20220130681
- Publication date Apr 28, 2022
- IMEC vzw
- Shreya Kundu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20220069137
- Publication date Mar 3, 2022
- Semiconductor Energy Laboratory Co., Ltd.
- Kengo Akimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, AND ELECTR...
- Publication number 20210391468
- Publication date Dec 16, 2021
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...
- Publication number 20210388503
- Publication date Dec 16, 2021
- ASM IP HOLDING B.V.
- Jani Hämäläinen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR POLISHING GALLIUM OXIDE SUBSTRATE
- Publication number 20210348028
- Publication date Nov 11, 2021
- FUJIMI INCORPORATED
- Sachiko HIRAKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Thin Film Transistor and Manufacturing Method Thereof, Array Substr...
- Publication number 20210328060
- Publication date Oct 21, 2021
- BEIJING BOE DISPLAY TECHNOLOGY CO., LTD.
- Di Zhang
- H01 - BASIC ELECTRIC ELEMENTS

Chemical or electrical treatment

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of etching an indium gallium zinc oxide (IGZO) structure

Forming passivation stack having etch stop layer

Display device

Deposition of highly crystalline 2D materials

Tin oxide films in semiconductor device manufacturing

Etching method of oxide semiconductor film, oxide semiconductor wor...

Method for etching oxide semiconductor film and plasma processing a...

Method of etching object and etching device

Manufacturing method of semiconductor device comprising oxide semic...

Method of porosifying part of a semiconductor wafer

Semiconductor device, method for manufacturing the same, and electr...

Thin film transistor, gate driver including the same, and display d...

Semiconductor device and fabricating method thereof

Method for producing gallium oxide Schottky barrier diode with nega...

Display device

Active matrix substrate

Semiconductor device

Semiconductor device and display device including semiconductor device

Semiconductor apparatus

Atomic layer deposition and etching of transition metal dichalcogen...

Semiconductor wafer with low defect count and method for manufactur...

Semiconductor apparatus

Manufacturing method of semiconductor device

Method of etching object

Semiconductor device and method for manufacturing the same

Oxide semiconductor-device

Substrate processing apparatus and substrate processing method

Method for partially removing a semiconductor wafer

Thin film transistor, gate driver including the same, and display d...

Tin oxide mandrels in patterning

Patents Applicationslast 30 patents

METHOD OF ETCHING OBJECT AND ETCHING DEVICE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

TECHNOLOGIES FOR PEROVSKITE TRANSISTORS

VERTICAL GALLIUM OXIDE TRANSISTOR AND PREPARATION METHOD THEREOF

SEMICONDUCTOR DEVICE WITH OXIDE-BASED SEMICONDUCTOR CHANNEL

SEMICONDUCTOR DEVICE AND METHOD FOR FORMING THE SAME

SEMICONDUCTOR DEVICE

ETCHING OF INDIUM GALLIUM ZINC OXIDE

ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...

FORMING PASSIVATION STACK HAVING ETCH STOP LAYER

SILICON ETCHING LIQUID CONTAINING AROMATIC ALDEHYDE

TESTING A SEMICONDUCTOR DIE USING TEMPORARY TEST PADS APPLIED TO CO...

MANUFACTURING METHOD OF SEMICONDUCTOR STRUCTURE

SURFACE TREATMENT METHOD FOR GALLIUM OXIDE-BASED SEMICONDUCTOR SUBS...

Doped Aluminum-Alloyed Gallium Oxide And Ohmic Contacts

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

METHOD FOR MANUFACTURING SEMICONDUCTOR STRUCTURE AND SEMICONDUCTOR...

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

METAL REMOVAL METHOD, DRY ETCHING METHOD, AND PRODUCTION METHOD FOR...

METHOD OF POROSIFYING PART OF A SEMICONDUCTOR WAFER

Deposition of Highly Crystalline 2D Materials

TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING

TIN OXIDE FILMS IN SEMICONDUCTOR DEVICE MANUFACTURING

ACTIVE MATRIX SUBSTRATE AND MANUFACTURING METHOD THEREOF

METHOD OF ETCHING AN INDIUM GALLIUM ZINC OXIDE (IGZO) STRUCTURE

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

SEMICONDUCTOR DEVICE, METHOD FOR MANUFACTURING THE SAME, AND ELECTR...

ATOMIC LAYER DEPOSITION AND ETCHING OF TRANSITION METAL DICHALCOGEN...

COMPOSITION FOR POLISHING GALLIUM OXIDE SUBSTRATE

Thin Film Transistor and Manufacturing Method Thereof, Array Substr...