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Substrate processing apparatus
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Patent number 11,969,858
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Issue date Apr 30, 2024
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Ebara Corporation
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Keisuke Namiki
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B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
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Semiconductor device
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Patent number 11,973,117
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Issue date Apr 30, 2024
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Taiwan Semiconductor Manufacturing Company, Ltd
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Chun-Hsien Huang
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H01 - BASIC ELECTRIC ELEMENTS
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Plasma processing apparatus
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Patent number 11,967,511
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Issue date Apr 23, 2024
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Tokyo Electron Limited
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Akira Ishikawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Semiconductor device
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Patent number 11,955,550
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Issue date Apr 9, 2024
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Semiconductor Manufacturing International (Shanghai) Corporation
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Fei Zhou
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H01 - BASIC ELECTRIC ELEMENTS
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