Chucks

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CPC
G03F7/707

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/707Chucks

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Positioning apparatus, lithography apparatus and article manufactur...
- Patent number 12,169,368
- Issue date Dec 17, 2024
- Canon Kabushiki Kaisha
- Tsutomu Terao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage for extreme ultraviolet light lithography
- Patent number 12,169,369
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Guancyun Li
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Vertical motion protection method and device based on dual-stage mo...
- Patent number 12,169,367
- Issue date Dec 17, 2024
- Tsinghua University
- Kaiming Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Displacement measuring apparatus, displacement measuring method and...
- Patent number 12,163,814
- Issue date Dec 10, 2024
- SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
- Ping Wu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of clamping a substrate to a clamping system, a substrate ho...
- Patent number 12,158,704
- Issue date Dec 3, 2024
- ASML Netherlands B.V.
- Abraham Alexander Soethoudt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning method, method for forming semiconductor structure and sys...
- Patent number 12,153,341
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Wu-Hung Ko
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhancing lithography operation for manufacturing semiconductor dev...
- Patent number 12,153,351
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yi-Chen Su
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of using a dual stage lithographic apparatus and lithographi...
- Patent number 12,153,354
- Issue date Nov 26, 2024
- ASML Netherlands B.V.
- Wouter Jan Cornelis Vijselaar
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Motion control apparatus, lithography apparatus, planarization appa...
- Patent number 12,147,164
- Issue date Nov 19, 2024
- Canon Kabushiki Kaisha
- Ryo Nawata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint lithography
- Patent number 12,147,162
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Catharinus De Schiffart
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imprint apparatus with movable stages
- Patent number 12,147,167
- Issue date Nov 19, 2024
- ASML Netherlands B.V.
- Junichi Kanehara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning device
- Patent number 12,140,873
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Paul Corné Henri De Wit
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processing apparatus and article manufacturing method
- Patent number 12,140,876
- Issue date Nov 12, 2024
- Canon Kabushiki Kaisha
- Tsutomu Terao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Vacuum apparatus
- Patent number 12,142,512
- Issue date Nov 12, 2024
- NuFlare Technology, Inc.
- Yoshiaki Shinohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control method of driving apparatus, driving apparatus, lithography...
- Patent number 12,130,560
- Issue date Oct 29, 2024
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 12,117,721
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- Nicolaas Rudolf Kemper
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermo-mechanical actuator
- Patent number 12,117,739
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- Bas Jansen
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Apparatus and method for cleaning a support structure in a lithogra...
- Patent number 12,117,737
- Issue date Oct 15, 2024
- ASML Holding N.V.
- Keane Michael Levy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle detection apparatus, reticle detection method, exposure mac...
- Patent number 12,117,738
- Issue date Oct 15, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 12,117,736
- Issue date Oct 15, 2024
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to manufacture nano ridges in hard ceramic coatings
- Patent number 12,111,581
- Issue date Oct 8, 2024
- ASML Holding N.V.
- Mehmet Ali Akbas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate stage and substrate processing system using the same
- Patent number 12,111,582
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Huan Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,111,583
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kai-Chieh Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus, exposure method, and manufacturing method for p...
- Patent number 12,105,430
- Issue date Oct 1, 2024
- Canon Kabushiki Kaisha
- Yuhei Sumiyoshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Magnetic levitation gravity compensation device
- Patent number 12,103,158
- Issue date Oct 1, 2024
- YinGuan Semiconductor Technology Co., LTD.
- Hui Meng
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Wafer processing apparatus and wafer transfer method
- Patent number 12,099,309
- Issue date Sep 24, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Xueyu Liang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for containing a reticle in a pod
- Patent number 12,094,743
- Issue date Sep 17, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Six-degree-of-freedom air-floating moving apparatus
- Patent number 12,090,590
- Issue date Sep 17, 2024
- WUXI XIVI SCIENCE AND TECHNOLOGY CO., LTD.
- Minjie Lu
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Wafer stage and method of using
- Patent number 12,092,958
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod with antistatic capability
- Patent number 12,087,605
- Issue date Sep 10, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING
- Publication number 20240419088
- Publication date Dec 19, 2024
- ASML NETHERLANDS B.V.
- Akshay Dipakkumar HARLALKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CHUCK, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20240419087
- Publication date Dec 19, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR AND METHOD OF LITHOGRAPHY SUPPORT CLEANING
- Publication number 20240419089
- Publication date Dec 19, 2024
- ASML Holding N.V.
- Keane Michael LEVY
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HIGH RESOLUTION PHOTOLITHOGRAPHY
- Publication number 20240411229
- Publication date Dec 12, 2024
- TERA-PRINT LLC
- Andrey IVANKIN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS
- Publication number 20240411233
- Publication date Dec 12, 2024
- ASML NETHERLANDS B.V.
- Gosse Charles DE VRIES
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240411235
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Dae Geun YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS
- Publication number 20240404780
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Masahiro KAMIGAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES
- Publication number 20240402607
- Publication date Dec 5, 2024
- ESKO-GRAPHICS IMAGING GMBH
- Thomas Klein
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMO-MECHANICAL ACTUATOR
- Publication number 20240402621
- Publication date Dec 5, 2024
- ASML NETHERLANDS B.V.
- Bas JANSEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS STAGE COUPLING
- Publication number 20240402622
- Publication date Dec 5, 2024
- ASML NETHERLANDS B.V.
- Johannes Petrus Martinus Bernardus VERMEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
UV LITHOGRAPHY SYSTEM AND METHOD
- Publication number 20240393696
- Publication date Nov 28, 2024
- The Regents of the University of California
- Alexander Groisman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240393704
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- Norihiro SAKURAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...
- Publication number 20240393701
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yi-Chen SU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...
- Publication number 20240393702
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- RYOTA MAKINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240393705
- Publication date Nov 28, 2024
- SEMES CO., LTD.
- Sang Hyun PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP
- Publication number 20240396476
- Publication date Nov 28, 2024
- ASML NETHERLANDS B.V.
- Jan-Gerard Cornelis VAN DER TOORN
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND ARTICLE MANUFACTURING METHOD
- Publication number 20240393683
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KENJI YAEGASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...
- Publication number 20240393703
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- KOHEI IMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...
- Publication number 20240385512
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- WU-HUNG KO
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20240385524
- Publication date Nov 21, 2024
- SEMES CO., LTD.
- Hee Man AHN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240385537
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kai-Chieh CHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGR...
- Publication number 20240385535
- Publication date Nov 21, 2024
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLAMP FOR HOLDING AN OBJECT AND METHOD
- Publication number 20240385536
- Publication date Nov 21, 2024
- ASML Netherlands B.V.
- Thomas Poiesz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE CAPTURING APPARATUS AND IMAGE CAPTURING METHOD
- Publication number 20240385539
- Publication date Nov 21, 2024
- HITACHI HIGH-TECH CORPORATION
- Akira NISHIOKA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION
- Publication number 20240377727
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chen-Wei LU
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...
- Publication number 20240377763
- Publication date Nov 14, 2024
- Nikon Corporation
- Arata OCHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE
- Publication number 20240377762
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Huan CHEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS
- Publication number 20240369947
- Publication date Nov 7, 2024
- ASML Holding N.V.
- Mehmet Ali AKBAS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUC...
- Publication number 20240369945
- Publication date Nov 7, 2024
- Carl Zeiss SMT GMBH
- Arne Schob
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL CONDITIONING UNIT, SUBSTRATE HANDLING DEVICE AND LITHOGRAPH...
- Publication number 20240369948
- Publication date Nov 7, 2024
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Positioning apparatus, lithography apparatus and article manufactur...

Storage for extreme ultraviolet light lithography

Vertical motion protection method and device based on dual-stage mo...

Displacement measuring apparatus, displacement measuring method and...

Method of clamping a substrate to a clamping system, a substrate ho...

Cleaning method, method for forming semiconductor structure and sys...

Enhancing lithography operation for manufacturing semiconductor dev...

Method of using a dual stage lithographic apparatus and lithographi...

Motion control apparatus, lithography apparatus, planarization appa...

Imprint lithography

Imprint apparatus with movable stages

Positioning device

Processing apparatus and article manufacturing method

Vacuum apparatus

Control method of driving apparatus, driving apparatus, lithography...

Lithographic apparatus and device manufacturing method

Thermo-mechanical actuator

Apparatus and method for cleaning a support structure in a lithogra...

Reticle detection apparatus, reticle detection method, exposure mac...

Lithographic apparatus

Method to manufacture nano ridges in hard ceramic coatings

Substrate stage and substrate processing system using the same

Semiconductor processing tool and methods of operation

Exposure apparatus, exposure method, and manufacturing method for p...

Magnetic levitation gravity compensation device

Wafer processing apparatus and wafer transfer method

Method for containing a reticle in a pod

Six-degree-of-freedom air-floating moving apparatus

Wafer stage and method of using

Reticle pod with antistatic capability

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR LITHOGRAPHIC IMAGING

SUBSTRATE CHUCK, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING M...

APPARATUS FOR AND METHOD OF LITHOGRAPHY SUPPORT CLEANING

HIGH RESOLUTION PHOTOLITHOGRAPHY

LITHOGRAPHIC APPARATUS AND ASSOCIATED METHODS

SEMICONDUCTOR MANUFACTURING APPARATUS

SEMICONDUCTOR PROCESSING APPARATUS

UVC LED LIGHT FINISHER FOR DETACKING FLEXOGRAPHIC PRINTING PLATES

THERMO-MECHANICAL ACTUATOR

LITHOGRAPHIC APPARATUS STAGE COUPLING

UV LITHOGRAPHY SYSTEM AND METHOD

STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD

ENHANCING LITHOGRAPHY OPERATION FOR MANUFACTURING SEMICONDUCTOR DEV...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND ART...

SUBSTRATE PROCESSING APPARATUS

OBJECT TABLE COMPRISING AN ELECTROSTATIC CLAMP

SUBSTRATE PROCESSING SYSTEM AND ARTICLE MANUFACTURING METHOD

HOLDING APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICLE MANUFACTURING...

CLEANING METHOD, METHOD FOR FORMING SEMICONDUCTOR STRUCTURE AND SYS...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

STRUCTURES FOR USE ON A SUBSTRATE HOLDER, SUBSTRATE HOLDER, LITHOGR...

CLAMP FOR HOLDING AN OBJECT AND METHOD

IMAGE CAPTURING APPARATUS AND IMAGE CAPTURING METHOD

STORAGE ENVIRONMENT MONITORING SYSTEM AND METHODS OF OPERATION

FIRST HOLDING APPARATUS, THIRD HOLDING APPARATUS, FIFTH HOLDING APP...

SEMICONDUCTOR SUBSTRATE STAGE FOR CARRING SUBSTRATE

METHOD TO MANUFACTURE NANO RIDGES IN HARD CERAMIC COATINGS

OPTICAL SYSTEM FOR A METROLOGY SYSTEM AND METROLOGY SYSTEM WITH SUC...

THERMAL CONDITIONING UNIT, SUBSTRATE HANDLING DEVICE AND LITHOGRAPH...