Chucks

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G03F7/707

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Parent Industries

GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/707Chucks

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Pellicle demounting method, and pellicle demounting device
- Patent number 12,271,109
- Issue date Apr 8, 2025
- Mitsui Chemicals, Inc.
- Akira Ishikawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support for an optical element
- Patent number 12,271,117
- Issue date Apr 8, 2025
- Carl Zeiss SMT GmbH
- Toralf Gruner
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod having latch including ramped surface
- Patent number 12,271,110
- Issue date Apr 8, 2025
- Entegris, Inc.
- Russ V. Raschke
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for calibration of an optical measurement system and optical...
- Patent number 12,270,647
- Issue date Apr 8, 2025
- ASML Netherlands B.V.
- Maarten Jozef Jansen
- G01 - MEASURING TESTING
Information Patent Grant
Compact dual pass interferometer for a plane mirror interferometer
- Patent number 12,270,644
- Issue date Apr 8, 2025
- ASML Netherlands B.V.
- Maarten Jozef Jansen
- G02 - OPTICS
Information Patent Grant
Nanopositioning systems and associated methods
- Patent number 12,266,501
- Issue date Apr 1, 2025
- The Texas A&M University System
- ChaBum Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Work stage and exposure apparatus
- Patent number 12,261,077
- Issue date Mar 25, 2025
- Ushio Denki Kabushiki Kaisha
- Shunta Sugisaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicle design for mask application
- Patent number 12,253,797
- Issue date Mar 18, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yun-Yue Lin
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wavelength tracking system, method to calibrate a wavelength tracki...
- Patent number 12,247,883
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G01 - MEASURING TESTING
Information Patent Grant
Substrate holder for use in a lithographic apparatus
- Patent number 12,249,535
- Issue date Mar 11, 2025
- ASML Netherlands B.V.
- Niek Jacobus Johannes Roset
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of using wafer stage
- Patent number 12,242,199
- Issue date Mar 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yung-Yao Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography apparatus and a method of manufacturing a device
- Patent number 12,242,200
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate support, lithographic apparatus, method for manipulating...
- Patent number 12,242,204
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Ruud Antonius Catharina Maria Beerens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder for use in a lithographic apparatus and a device m...
- Patent number 12,243,768
- Issue date Mar 4, 2025
- ASML Netherlands B.V.
- Johannes Josephus Maassen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object holder, electrostatic sheet and method for making an electro...
- Patent number 12,235,592
- Issue date Feb 25, 2025
- ASML Netherlands B.V.
- Bastiaan Lambertus Wilhelmus Marinus Van De Ven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Systems for cleaning a portion of a lithography apparatus
- Patent number 12,235,595
- Issue date Feb 25, 2025
- ASML Holding N.V.
- Daniel Paul Rodak
- B08 - CLEANING
Information Patent Grant
System and method for dynamically controlling temperature of thermo...
- Patent number 12,235,593
- Issue date Feb 25, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tzu-Jung Pan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for positioning a shadow mask
- Patent number 12,235,591
- Issue date Feb 25, 2025
- ABB Schweiz AG
- Johannes Felix Holger Schmitt
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Stage apparatus and electron beam lithography system
- Patent number 12,222,658
- Issue date Feb 11, 2025
- Jeol Ltd.
- Hirofumi Miyao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metrology system for packaging applications
- Patent number 12,222,659
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Venkatakaushik Voleti
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and method of manufacturing article
- Patent number 12,216,410
- Issue date Feb 4, 2025
- Canon Kabushiki Kaisha
- Keiji Emoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 12,216,399
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuator assemblies comprising piezo actuators or electrostrictive...
- Patent number 12,210,294
- Issue date Jan 28, 2025
- ASML Netherlands B.V.
- Hans Butler
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Substrate table, immersion lithographic apparatus and device manufa...
- Patent number 12,197,140
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Marco Koert Stavenga
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Suction clamp, object handler, stage apparatus and lithographic app...
- Patent number 12,197,141
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Gijs Kramer
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Tool control using multistage LSTM for predicting on-wafer measurem...
- Patent number 12,197,133
- Issue date Jan 14, 2025
- International Business Machines Corporation
- Dung Tien Phan
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate storage apparatus provided with storage environment detec...
- Patent number 12,198,958
- Issue date Jan 14, 2025
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Object holder, tool and method of manufacturing an object holder
- Patent number 12,197,139
- Issue date Jan 14, 2025
- ASML Netherlands B.V.
- Bastiaan Lambertus Wilhelmus Marinus Van De Ven
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Clamp assembly
- Patent number 12,189,309
- Issue date Jan 7, 2025
- ASML Netherlands B.V.
- Ronald Van Der Wilk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle carrier and associated methods
- Patent number 12,189,311
- Issue date Jan 7, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS CONTROLLER SYSTEM
- Publication number 20250116944
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Bas Johannes Petrus ROSET
- G05 - CONTROLLING REGULATING
Information Patent Application
OPTICAL APPARATUS
- Publication number 20250116943
- Publication date Apr 10, 2025
- ASML NETHERLANDS B.V.
- Debashis DE MUNSHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR COMPENSATING ACTUATOR EFFECTS OF ACTUATORS
- Publication number 20250110413
- Publication date Apr 3, 2025
- Carl Zeiss SMT GMBH
- Markus RAAB
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE MASKING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20250102926
- Publication date Mar 27, 2025
- Samsung Electronics Co., Ltd.
- Sanghwan LEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD
- Publication number 20250102925
- Publication date Mar 27, 2025
- Canon Kabushiki Kaisha
- SHIORI OTOMO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SEPARA...
- Publication number 20250093788
- Publication date Mar 20, 2025
- Canon Kabushiki Kaisha
- YUICHIRO MORIKUNI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20250093789
- Publication date Mar 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER CHUCK INCLUDING SELF-SEALING VACUUM SEAL ASSEMBLIES AND METHO...
- Publication number 20250079228
- Publication date Mar 6, 2025
- Taiwan Semiconductor Manufacturing Company Limited
- Wei-Yu Tsai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET (EUV) SOURCE AND A SUBSTRATE PROCESSING APPARAT...
- Publication number 20250076776
- Publication date Mar 6, 2025
- Samsung Electronics Co., Ltd.
- SEUNGPYO HONG
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY APPARATUS, STAGE APPARATUS, AND ARTICLE MANUFACTURING M...
- Publication number 20250076774
- Publication date Mar 6, 2025
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HANDLING SYSTEM FOR MICROLITHOGRAPHIC PHOTOMASKS, INSPECTION SYSTEM...
- Publication number 20250076773
- Publication date Mar 6, 2025
- Carl Zeiss SMT GMBH
- Johann Irnstetter
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MIRROR FOLDED ILLUMINATION FOR COMPACT OPTICAL METROLOGY SYSTEM
- Publication number 20250068087
- Publication date Feb 27, 2025
- Applied Materials, Inc.
- Yangyang SUN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STORAGE FOR EXTREME ULTRAVIOLET LIGHT LITHOGRAPHY
- Publication number 20250068088
- Publication date Feb 27, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Guancyun LI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, STICKER, COVER RING AND ME...
- Publication number 20250068085
- Publication date Feb 27, 2025
- ASML NETHERLANDS B.V.
- Gijs KRAMER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS
- Publication number 20250060681
- Publication date Feb 20, 2025
- Dzmitry LABETSKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...
- Publication number 20250053100
- Publication date Feb 13, 2025
- GUDENG PRECISION INDUSTRIAL CO,. LTD.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK INSPECTION DEVICE FOR PHOTOMASKS OF EUV LITHOGRAPHY AND CARRIE...
- Publication number 20250044680
- Publication date Feb 6, 2025
- Carl Zeiss SMT GMBH
- Markus Koch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20250044713
- Publication date Feb 6, 2025
- TOKYO ELECTRON LIMITED
- Toshiaki Odaka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO...
- Publication number 20250028254
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Huaichen ZHANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR IMAGING A MASK LAYER AND ASSOCIATED IMAGING SYSTEM
- Publication number 20250028252
- Publication date Jan 23, 2025
- XSYS PREPRESS N.V.
- Frederik DEFOUR
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imprint Apparatus with Movable Stages
- Publication number 20250028259
- Publication date Jan 23, 2025
- ASML NETHERLANDS B.V.
- Junichi KANEHARA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE SUPPORTING MEMBER AND SUBSTRATE PROCESSING APPARATUS INCL...
- Publication number 20250031281
- Publication date Jan 23, 2025
- Samsung Electronics Co., Ltd.
- Sanghyun LIM
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEMICONDUCTOR PROCESS APPARATUS
- Publication number 20250028257
- Publication date Jan 23, 2025
- Samsung Electronics Co., Ltd.
- Kyoungwhan Oh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS AND METHODS FOR REDUCING PATTERN SHIFT IN A LITHOGRAPHIC AP...
- Publication number 20250021018
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Joost Cyrillus Lambert HAGEMAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS TO CALIBRATE RETICLE THERMAL EFFECTS
- Publication number 20250021017
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Raaja Ganapathy SUBRAMANIAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PHOTOLITHOGRAPH APPARATUS, METHOD FOR INSPECTING PARTICLES AND SEMI...
- Publication number 20250020570
- Publication date Jan 16, 2025
- National Tsing-Hua University
- Tsai-Sheng Gau
- G01 - MEASURING TESTING
Information Patent Application
CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...
- Publication number 20250021023
- Publication date Jan 16, 2025
- Canon Kabushiki Kaisha
- Hayato Hoshino
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
UTILITY STAGE FOR PHOTOLITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20250021024
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Keane Michael Levy
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS
- Publication number 20250021022
- Publication date Jan 16, 2025
- Tiannan GUAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME
- Publication number 20250021008
- Publication date Jan 16, 2025
- Samsung Electronics Co., Ltd.
- Yebin Nam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Pellicle demounting method, and pellicle demounting device

Support for an optical element

Reticle pod having latch including ramped surface

Method for calibration of an optical measurement system and optical...

Compact dual pass interferometer for a plane mirror interferometer

Nanopositioning systems and associated methods

Work stage and exposure apparatus

Pellicle design for mask application

Wavelength tracking system, method to calibrate a wavelength tracki...

Substrate holder for use in a lithographic apparatus

Method of using wafer stage

Lithography apparatus and a method of manufacturing a device

Substrate support, lithographic apparatus, method for manipulating...

Substrate holder for use in a lithographic apparatus and a device m...

Object holder, electrostatic sheet and method for making an electro...

Systems for cleaning a portion of a lithography apparatus

System and method for dynamically controlling temperature of thermo...

Device and method for positioning a shadow mask

Stage apparatus and electron beam lithography system

Metrology system for packaging applications

Exposure apparatus and method of manufacturing article

Method of manufacturing semiconductor device

Actuator assemblies comprising piezo actuators or electrostrictive...

Substrate table, immersion lithographic apparatus and device manufa...

Suction clamp, object handler, stage apparatus and lithographic app...

Tool control using multistage LSTM for predicting on-wafer measurem...

Substrate storage apparatus provided with storage environment detec...

Object holder, tool and method of manufacturing an object holder

Clamp assembly

Reticle carrier and associated methods

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS CONTROLLER SYSTEM

OPTICAL APPARATUS

METHOD FOR COMPENSATING ACTUATOR EFFECTS OF ACTUATORS

RETICLE MASKING DEVICE, SUBSTRATE PROCESSING APPARATUS INCLUDING TH...

PROCESSING APPARATUS AND ARTICLE MANUFACTURING METHOD

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SEPARA...

RETICLE CARRIER AND ASSOCIATED METHODS

WAFER CHUCK INCLUDING SELF-SEALING VACUUM SEAL ASSEMBLIES AND METHO...

EXTREME ULTRAVIOLET (EUV) SOURCE AND A SUBSTRATE PROCESSING APPARAT...

LITHOGRAPHY APPARATUS, STAGE APPARATUS, AND ARTICLE MANUFACTURING M...

HANDLING SYSTEM FOR MICROLITHOGRAPHIC PHOTOMASKS, INSPECTION SYSTEM...

MIRROR FOLDED ILLUMINATION FOR COMPACT OPTICAL METROLOGY SYSTEM

STORAGE FOR EXTREME ULTRAVIOLET LIGHT LITHOGRAPHY

SUBSTRATE TABLE, LITHOGRAPHIC APPARATUS, STICKER, COVER RING AND ME...

A SYSTEM FOR USE IN A LITHOGRAPHIC APPARATUS

RETICLE POD PROVIDED WITH RETICLE SUPPORT FOR ABSORBING DOWNWARD PR...

MASK INSPECTION DEVICE FOR PHOTOMASKS OF EUV LITHOGRAPHY AND CARRIE...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHODS OF DETERMINING A MECHANICAL PROPERTY OF A LAYER APPLIED TO...

METHOD FOR IMAGING A MASK LAYER AND ASSOCIATED IMAGING SYSTEM

Imprint Apparatus with Movable Stages

SUBSTRATE SUPPORTING MEMBER AND SUBSTRATE PROCESSING APPARATUS INCL...

SEMICONDUCTOR PROCESS APPARATUS

SYSTEMS AND METHODS FOR REDUCING PATTERN SHIFT IN A LITHOGRAPHIC AP...

METHODS AND SYSTEMS TO CALIBRATE RETICLE THERMAL EFFECTS

PHOTOLITHOGRAPH APPARATUS, METHOD FOR INSPECTING PARTICLES AND SEMI...

CONTROL METHOD OF DRIVING APPARATUS, DRIVING APPARATUS, LITHOGRAPHY...

UTILITY STAGE FOR PHOTOLITHOGRAPHIC APPARATUS AND METHOD

ELECTROSTATIC HOLDER, OBJECT TABLE AND LITHOGRAPHIC APPARATUS

TOP MODULE AND EXPOSING APPARATUS INCLUDING THE SAME