Cleaning and liquid contact with solids

Industry

CPC
Y10S134/00

This industry / category may be too specific. Please go to a parent level for more data

Industries

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for contamination identification
- Patent number 11,311,917
- Issue date Apr 26, 2022
- Bruker Nano, Inc.
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 11,069,548
- Issue date Jul 20, 2021
- Tokyo Electron Limited
- Toru Nishino
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Substrate processing method and substrate processing system
- Patent number 10,403,525
- Issue date Sep 3, 2019
- Tokyo Electron Limited
- Toru Nishino
- G05 - CONTROLLING REGULATING
Information Patent Grant
Substrate processing method for drying a substrate by discharging g...
- Patent number 10,134,610
- Issue date Nov 20, 2018
- Screen Semiconductor Solutions Co., Ltd.
- Tadashi Miyagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and materials for making a monolithic porous pad cast onto...
- Patent number 10,040,226
- Issue date Aug 7, 2018
- Entegris, Inc.
- Briant Enoch Benson
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Liquid processing aparatus
- Patent number 9,953,852
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Jiro Higashijima
- B08 - CLEANING
Information Patent Grant
Supply apparatus and supply method for supplying fluid carbon dioxide
- Patent number 9,887,079
- Issue date Feb 6, 2018
- Organo Corporation
- Hiroshi Sugawara
- B08 - CLEANING
Information Patent Grant
Method and apparatus for processing wafer-shaped articles
- Patent number 9,887,122
- Issue date Feb 6, 2018
- Lam Research AG
- Hongbo Si
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lens holder method
- Patent number 9,737,461
- Issue date Aug 22, 2017
- Presbibio, LLC
- Vladimir Feingold
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Wet treatment apparatus and substrate treatment apparatus provided...
- Patent number 9,687,958
- Issue date Jun 27, 2017
- Ebara Corporation
- Hiroyuki Shinozaki
- B24 - GRINDING POLISHING
Information Patent Grant
Jet spray nozzle and method for cleaning photo masks and semiconduc...
- Patent number 9,656,278
- Issue date May 23, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kun-Lung Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus and method for indirect surface cleaning
- Patent number 9,588,420
- Issue date Mar 7, 2017
- Rave LLC
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Grant
Substrate processing method
- Patent number 9,477,162
- Issue date Oct 25, 2016
- Screen Semiconductor Solutions Co., Ltd.
- Koji Kaneyama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 9,431,276
- Issue date Aug 30, 2016
- SCREEN Holdings Co., Ltd.
- Katsuhiko Miya
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus and method for indirect surface cleaning
- Patent number 9,285,674
- Issue date Mar 15, 2016
- RAVE LLC
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Grant
Workpiece surface treatment system
- Patent number 9,242,281
- Issue date Jan 26, 2016
- C. Uyemura & Co., Ltd.
- Yutaka Sugiura
- B08 - CLEANING
Information Patent Grant
Method and apparatus for manufacturing ophthalmic lenses
- Patent number 9,227,746
- Issue date Jan 5, 2016
- Novartis AG
- Roger Biel
- B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information Patent Grant
Liquid processing method
- Patent number 9,224,624
- Issue date Dec 29, 2015
- Tokyo Electron Limited
- Takao Inada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Liquid processing apparatus, liquid processing method, and computer...
- Patent number 9,108,231
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Grant
Methods for cleaning distilling columns
- Patent number 9,102,604
- Issue date Aug 11, 2015
- Baxter International Inc.
- Leonid A. Rozov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tools and methods for processing microelectronic workpieces using p...
- Patent number 9,039,840
- Issue date May 26, 2015
- Tel FSI, Inc.
- Jeffrey M. Lauerhaas
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Substrate processing method
- Patent number 9,032,977
- Issue date May 19, 2015
- SCREEN Semiconductor Solutions Co., Ltd.
- Tetsuya Hamada
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Cleaning device, cleaning method, and composition
- Patent number 9,010,343
- Issue date Apr 21, 2015
- Tokyo Ohka Kogyo Co., Ltd.
- Atsushi Miyanari
- B08 - CLEANING
Information Patent Grant
Prevention of particle adders when contacting a liquid meniscus ove...
- Patent number 8,997,684
- Issue date Apr 7, 2015
- Lam Research Corporation
- Enrico Magni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Adjustable brush cleaning apparatus for semiconductor wafers and as...
- Patent number 8,992,692
- Issue date Mar 31, 2015
- STMicroelectronics, Inc.
- John H. Zhang
- A46 - BRUSHWARE
Information Patent Grant
Apparatus and method for indirect surface cleaning
- Patent number 8,986,460
- Issue date Mar 24, 2015
- Rave, LLC
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Grant
Hands-free paint roller cleaner
- Patent number 8,973,592
- Issue date Mar 10, 2015
- Donald Suydam
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of reducing contamination in CVD chamber
- Patent number 8,974,602
- Issue date Mar 10, 2015
- Shanghia Huali Microelectronics Corporation
- Yadan Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultrasonic cleaning device
- Patent number 8,960,208
- Issue date Feb 24, 2015
- Kaijo Corporation
- Kazunari Suzuki
- B08 - CLEANING
Information Patent Grant
Method and system of drying a microelectronic topography
- Patent number 8,961,701
- Issue date Feb 24, 2015
- Lam Research Corporation
- Mark I. Wagner
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
- Publication number 20230005768
- Publication date Jan 5, 2023
- SEMES CO., LTD.
- MYUNG A JEON
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20190362996
- Publication date Nov 28, 2019
- TOKYO ELECTRON LIMITED
- Toru NISHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...
- Publication number 20140360540
- Publication date Dec 11, 2014
- Nobuhiro Ogata
- B08 - CLEANING
Information Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING DEVICE, AND STORAGE MEDIUM
- Publication number 20140338706
- Publication date Nov 20, 2014
- TOKYO ELECTRON LIMITED
- Jun Nonaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Controls of Ambient Environment During Wafer Drying Using Proximity...
- Publication number 20140332037
- Publication date Nov 13, 2014
- LAM RESEARCH CORPORATION
- Mikhail Korolik
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
JET SPRAY NOZZLE AND METHOD FOR CLEANING PHOTO MASKS AND SEMICONDUC...
- Publication number 20140291416
- Publication date Oct 2, 2014
- Taiwan Semiconductor Manufacturing Co., LTD
- Kun-Lung HSIEH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
Apparatus and Method For Indirect Surface Cleaning
- Publication number 20140283873
- Publication date Sep 25, 2014
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Application
Workpiece Surface Treatment System
- Publication number 20140230858
- Publication date Aug 21, 2014
- C. Uyemura & Co., Ltd.
- Yutaka Sugiura
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...
- Publication number 20140202503
- Publication date Jul 24, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Cleaning Semiconductor Fabrication Equipment...
- Publication number 20140190937
- Publication date Jul 10, 2014
- QUANTUM GLOBAL TECHNOLOGIES LLC
- Samantha Tan
- B44 - DECORATIVE ARTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20140174483
- Publication date Jun 26, 2014
- Dainippon Screen Mfg. Co., Ltd.
- Katsuhiko MIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...
- Publication number 20140158167
- Publication date Jun 12, 2014
- LAM RESEARCH CORPORATION
- John M. de Larios
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20140104586
- Publication date Apr 17, 2014
- Koji KANEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20140106281
- Publication date Apr 17, 2014
- Tetsuya HAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus And Method For Indirect Surface Cleaning
- Publication number 20140069457
- Publication date Mar 13, 2014
- RAVE, LLC
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Application
METHOD AND MATERIALS FOR MAKING A MONOLITHIC POROUS PAD CAST ONTO A...
- Publication number 20140020712
- Publication date Jan 23, 2014
- Entegris, Inc.
- Briant Enoch Benson
- A46 - BRUSHWARE
Information Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
- Publication number 20140014146
- Publication date Jan 16, 2014
- LAM RESEARCH CORPORATION
- Jeffrey J. Farber
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD
- Publication number 20130312790
- Publication date Nov 28, 2013
- EBARA CORPORATION
- Tomoatsu Ishibashi
- B08 - CLEANING
Information Patent Application
Method and System for Distributing Gas for A Bevel Edge Etcher
- Publication number 20130276821
- Publication date Oct 24, 2013
- Greg Sexton
- B08 - CLEANING
Information Patent Application
Apparatus And Method For Indirect Surface Cleaning
- Publication number 20130276818
- Publication date Oct 24, 2013
- Jeffrey E. LeClaire
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICES
- Publication number 20130233342
- Publication date Sep 12, 2013
- Mario E. Bran
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Application
ULTRASONIC CLEANING DEVICE
- Publication number 20130220390
- Publication date Aug 29, 2013
- KAIJO CORPORATION
- Kazunari SUZUKI
- B08 - CLEANING
Information Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
- Publication number 20130213485
- Publication date Aug 22, 2013
- TEL FSI, Inc.
- Jeffrey M. Lauerhaas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR THE RAPID THERMAL CONTROL OF A WORK PIECE...
- Publication number 20130210235
- Publication date Aug 15, 2013
- International Business Machines Corporation
- John P. Simons
- B08 - CLEANING
Information Patent Application
ADJUSTABLE BRUSH CLEANING APPARATUS FOR SEMICONDUCTOR WAFERS AND AS...
- Publication number 20130199563
- Publication date Aug 8, 2013
- STMicroelectronics, Inc.,
- John H. Zhang
- A46 - BRUSHWARE
Information Patent Application
Lens Holder Method
- Publication number 20130180216
- Publication date Jul 18, 2013
- Vladimir Feingold
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
ULTRASONIC CLEANING DEVICE
- Publication number 20130125935
- Publication date May 23, 2013
- KAIJO CORPORATION
- Kazunari SUZUKI
- B08 - CLEANING
Information Patent Application
PREVENTION OF PARTICLE ADDERS WHEN CONTACTING A LIQUID MENISCUS OVE...
- Publication number 20130084392
- Publication date Apr 4, 2013
- Lam Research Corp.
- Enrico Magni
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
WAFER SCRUBBER
- Publication number 20130074878
- Publication date Mar 28, 2013
- NANYA TECHNOLOGY CORPORATION
- Jeng-Hsing Jang
- B08 - CLEANING
Information Patent Application
METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS...
- Publication number 20130061887
- Publication date Mar 14, 2013
- Mikhail Korolik
- H01 - BASIC ELECTRIC ELEMENTS

Cleaning and liquid contact with solids

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Apparatus and method for contamination identification

Substrate processing method and substrate processing system

Substrate processing method and substrate processing system

Substrate processing method for drying a substrate by discharging g...

Methods and materials for making a monolithic porous pad cast onto...

Liquid processing aparatus

Supply apparatus and supply method for supplying fluid carbon dioxide

Method and apparatus for processing wafer-shaped articles

Lens holder method

Wet treatment apparatus and substrate treatment apparatus provided...

Jet spray nozzle and method for cleaning photo masks and semiconduc...

Apparatus and method for indirect surface cleaning

Substrate processing method

Substrate processing apparatus and substrate processing method

Apparatus and method for indirect surface cleaning

Workpiece surface treatment system

Method and apparatus for manufacturing ophthalmic lenses

Liquid processing method

Liquid processing apparatus, liquid processing method, and computer...

Methods for cleaning distilling columns

Tools and methods for processing microelectronic workpieces using p...

Substrate processing method

Cleaning device, cleaning method, and composition

Prevention of particle adders when contacting a liquid meniscus ove...

Adjustable brush cleaning apparatus for semiconductor wafers and as...

Apparatus and method for indirect surface cleaning

Hands-free paint roller cleaner

Method of reducing contamination in CVD chamber

Ultrasonic cleaning device

Method and system of drying a microelectronic topography

Patents Applicationslast 30 patents

APPARATUS AND METHOD FOR PROCESSING SUBSTRATE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...

LIQUID PROCESSING METHOD, LIQUID PROCESSING DEVICE, AND STORAGE MEDIUM

Controls of Ambient Environment During Wafer Drying Using Proximity...

JET SPRAY NOZZLE AND METHOD FOR CLEANING PHOTO MASKS AND SEMICONDUC...

Apparatus and Method For Indirect Surface Cleaning

Workpiece Surface Treatment System

METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...

System and Method for Cleaning Semiconductor Fabrication Equipment...

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...

SUBSTRATE PROCESSING METHOD

SUBSTRATE PROCESSING METHOD

Apparatus And Method For Indirect Surface Cleaning

METHOD AND MATERIALS FOR MAKING A MONOLITHIC POROUS PAD CAST ONTO A...

Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...

SUBSTRATE CLEANING METHOD

Method and System for Distributing Gas for A Bevel Edge Etcher

Apparatus And Method For Indirect Surface Cleaning

METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICES

ULTRASONIC CLEANING DEVICE

TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...

APPARATUS AND METHOD FOR THE RAPID THERMAL CONTROL OF A WORK PIECE...

ADJUSTABLE BRUSH CLEANING APPARATUS FOR SEMICONDUCTOR WAFERS AND AS...

Lens Holder Method

ULTRASONIC CLEANING DEVICE

PREVENTION OF PARTICLE ADDERS WHEN CONTACTING A LIQUID MENISCUS OVE...

WAFER SCRUBBER

METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS...