Cleaning before device manufacture

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CPC
H01L21/02043

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/02043Cleaning before device manufacture

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Post-CMP cleaning and apparatus
- Patent number 12,170,195
- Issue date Dec 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Grant
System and method for ring frame cleaning and inspection
- Patent number 12,165,901
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System with substrate carrier deterioration detection and repair
- Patent number 12,162,134
- Issue date Dec 10, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Shutter disk
- Patent number 12,148,629
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stacked wafer structure and method for forming the same
- Patent number 12,080,544
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gate-last ferroelectric field effect transistor and manufacturing m...
- Patent number 11,996,454
- Issue date May 28, 2024
- Xiangtan University
- Min Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatments to enhance material structures
- Patent number 11,961,734
- Issue date Apr 16, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatments to enhance material structures
- Patent number 11,955,332
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for precleaning and treating wafer surfaces
- Patent number 11,939,666
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Xiangjin Xie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shutter disk
- Patent number 11,862,480
- Issue date Jan 2, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for ring frame cleaning and inspection
- Patent number 11,764,097
- Issue date Sep 19, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for aluminum oxide surface recovery
- Patent number 11,756,784
- Issue date Sep 12, 2023
- Applied Materials, Inc.
- Carmen Leal Cervantes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP cleaning and apparatus
- Patent number 11,728,157
- Issue date Aug 15, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Grant
Conformal high concentration boron doping of semiconductors
- Patent number 11,705,335
- Issue date Jul 18, 2023
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrier deterioration detection and repair
- Patent number 11,584,019
- Issue date Feb 21, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Jen-Ti Wang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of cleaning substrate processing apparatus, and substrate pr...
- Patent number 11,515,142
- Issue date Nov 29, 2022
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for aluminum oxide surface recovery
- Patent number 11,443,936
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Carmen Leal Cervantes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group III-V compound semiconductor substrate and group III-V compou...
- Patent number 11,444,161
- Issue date Sep 13, 2022
- Sumitomo Electric Industries, Ltd.
- Shinya Fujiwara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Treatments to enhance material structures
- Patent number 11,417,517
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning compositions
- Patent number 11,407,966
- Issue date Aug 9, 2022
- Fujifilm Electronic Materials U.S.A., Inc.
- Thomas Dory
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
- Patent number 11,355,376
- Issue date Jun 7, 2022
- TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
- Jeffery W. Butterbaugh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Conformal high concentration boron doping of semiconductors
- Patent number 11,328,928
- Issue date May 10, 2022
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Post-CMP cleaning and apparatus
- Patent number 11,322,345
- Issue date May 3, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Grant
Cleaning compositions
- Patent number 11,279,903
- Issue date Mar 22, 2022
- Fujifilm Electronic Materials U.S.A., Inc.
- Thomas Dory
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Device modified substrate article and methods for making
- Patent number 11,192,340
- Issue date Dec 7, 2021
- Corning Incorporated
- Kaveh Adib
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of enhancing a DLC coated surface for enhanced multipaction...
- Patent number 11,183,390
- Issue date Nov 23, 2021
- Nokomis, Inc.
- Robert Michael Nichol
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shutter disk
- Patent number 11,171,017
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus, substrate processing method and rec...
- Patent number 11,084,072
- Issue date Aug 10, 2021
- Tokyo Electron Limited
- Shogo Fukui
- B08 - CLEANING
Information Patent Grant
In-situ integrated chambers
- Patent number 11,037,838
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Xuebin Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for ring frame cleaning and inspection
- Patent number 11,004,720
- Issue date May 11, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
STACKED WAFER STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20240371625
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20240266163
- Publication date Aug 8, 2024
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER SEPARATION APPARATUS AND METHOD, AND METHOD FOR MANUFACTURING...
- Publication number 20240213050
- Publication date Jun 27, 2024
- SUMCO CORPORATION
- Tomohiro HASHII
- B32 - LAYERED PRODUCTS
Information Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
- Publication number 20240183028
- Publication date Jun 6, 2024
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Shutter Disk
- Publication number 20240087913
- Publication date Mar 14, 2024
- Applied Materials, Inc.
- Kang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION
- Publication number 20230386887
- Publication date Nov 30, 2023
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Post-CMP Cleaning and Apparatus
- Publication number 20230352295
- Publication date Nov 2, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH PRE-CLEANING TREAT...
- Publication number 20230317508
- Publication date Oct 5, 2023
- NANYA TECHNOLOGY CORPORATION
- WEI-CHEN PAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device Having Cleaning Bodies
- Publication number 20230178360
- Publication date Jun 8, 2023
- TUNG AN DEVELOPMENT LTD.
- Chih-An Ku
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ENHANCED PROCESS FOR QUBIT FABRICATION
- Publication number 20230059594
- Publication date Feb 23, 2023
- International Business Machines Corporation
- Gerald W. Gibson
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND APPARATUS FOR MINIMIZING VOIDS FOR CHIP ON WAFER COMPON...
- Publication number 20230045597
- Publication date Feb 9, 2023
- Applied Materials, Inc.
- Ying WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT
- Publication number 20220376132
- Publication date Nov 24, 2022
- KYOCERA CORPORATION
- Takehiro NISHIMURA
- C30 - CRYSTAL GROWTH
Information Patent Application
STACKED WAFER STRUCTURE AND METHOD FOR FORMING THE SAME
- Publication number 20220344150
- Publication date Oct 27, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR ALUMINUM OXIDE SURFACE RECOVERY
- Publication number 20220336207
- Publication date Oct 20, 2022
- Applied Materials, Inc.
- Carmen LEAL CERVANTES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20220328308
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Compositions
- Publication number 20220306971
- Publication date Sep 29, 2022
- Fujifilm Electronic Materials U.S.A., Inc.
- Thomas Dory
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
Post-CMP Cleaning and Apparatus
- Publication number 20220262620
- Publication date Aug 18, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Fu-Ming Huang
- B08 - CLEANING
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20220262629
- Publication date Aug 18, 2022
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Conformal High Concentration Boron Doping Of Semiconductors
- Publication number 20220246432
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Srinivas Gandikota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cleaning Compositions
- Publication number 20220145221
- Publication date May 12, 2022
- Fujifilm Electronic Materials U.S.A., Inc.
- Thomas Dory
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20220028702
- Publication date Jan 27, 2022
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GATE-LAST FERROELECTRIC FIELD EFFECT TRANSISTOR AND MANUFACTURING M...
- Publication number 20220020855
- Publication date Jan 20, 2022
- XIANGTAN UNIVERSITY
- Min LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR ALUMINUM OXIDE SURFACE RECOVERY
- Publication number 20210398798
- Publication date Dec 23, 2021
- Applied Materials, Inc.
- Carmen LEAL CERVANTES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES
- Publication number 20210371972
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Xiangjin XIE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION
- Publication number 20210257247
- Publication date Aug 19, 2021
- TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TREATMENTS TO ENHANCE MATERIAL STRUCTURES
- Publication number 20210111020
- Publication date Apr 15, 2021
- Applied Materials, Inc.
- Srinivas GANDIKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...
- Publication number 20210082691
- Publication date Mar 18, 2021
- TOKYO ELECTRON LIMITED
- Shogo FUKUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Shutter Disk
- Publication number 20210074552
- Publication date Mar 11, 2021
- Applied Materials, Inc.
- Zhang Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GROUP III-V COMPOUND SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOU...
- Publication number 20210057527
- Publication date Feb 25, 2021
- Sumitomo Electric Industries, Ltd.
- Shinya FUJIWARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...
- Publication number 20210050233
- Publication date Feb 18, 2021
- TEL Manufacturing and Engineering of America, Inc.
- Chimaobi W. Mbanaso
- H01 - BASIC ELECTRIC ELEMENTS

Cleaning before device manufacture

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Post-CMP cleaning and apparatus

System and method for ring frame cleaning and inspection

System with substrate carrier deterioration detection and repair

Shutter disk

Stacked wafer structure and method for forming the same

Gate-last ferroelectric field effect transistor and manufacturing m...

Treatments to enhance material structures

Treatments to enhance material structures

Methods and apparatus for precleaning and treating wafer surfaces

Shutter disk

System and method for ring frame cleaning and inspection

Methods for aluminum oxide surface recovery

Post-CMP cleaning and apparatus

Conformal high concentration boron doping of semiconductors

Substrate carrier deterioration detection and repair

Method of cleaning substrate processing apparatus, and substrate pr...

Methods and apparatus for aluminum oxide surface recovery

Group III-V compound semiconductor substrate and group III-V compou...

Treatments to enhance material structures

Cleaning compositions

Systems and methods for treating substrates with cryogenic fluid mi...

Conformal high concentration boron doping of semiconductors

Post-CMP cleaning and apparatus

Cleaning compositions

Device modified substrate article and methods for making

Method of enhancing a DLC coated surface for enhanced multipaction...

Shutter disk

Substrate processing apparatus, substrate processing method and rec...

In-situ integrated chambers

System and method for ring frame cleaning and inspection

Patents Applicationslast 30 patents

STACKED WAFER STRUCTURE AND METHOD FOR FORMING THE SAME

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

WAFER SEPARATION APPARATUS AND METHOD, AND METHOD FOR MANUFACTURING...

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

Shutter Disk

SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION

Post-CMP Cleaning and Apparatus

METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH PRE-CLEANING TREAT...

Device Having Cleaning Bodies

ENHANCED PROCESS FOR QUBIT FABRICATION

METHODS AND APPARATUS FOR MINIMIZING VOIDS FOR CHIP ON WAFER COMPON...

METHOD FOR MANUFACTURING SEMICONDUCTOR ELEMENT

STACKED WAFER STRUCTURE AND METHOD FOR FORMING THE SAME

METHODS FOR ALUMINUM OXIDE SURFACE RECOVERY

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

Cleaning Compositions

Post-CMP Cleaning and Apparatus

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

Conformal High Concentration Boron Doping Of Semiconductors

Cleaning Compositions

Shutter Disk

GATE-LAST FERROELECTRIC FIELD EFFECT TRANSISTOR AND MANUFACTURING M...

METHODS AND APPARATUS FOR ALUMINUM OXIDE SURFACE RECOVERY

METHODS AND APPARATUS FOR PRECLEANING AND TREATING WAFER SURFACES

SYSTEM AND METHOD FOR RING FRAME CLEANING AND INSPECTION

TREATMENTS TO ENHANCE MATERIAL STRUCTURES

METHOD OF CLEANING SUBSTRATE PROCESSING APPARATUS, AND SUBSTRATE PR...

Shutter Disk

GROUP III-V COMPOUND SEMICONDUCTOR SUBSTRATE AND GROUP III-V COMPOU...

SYSTEMS AND METHODS FOR TREATING SUBSTRATES WITH CRYOGENIC FLUID MI...