Cleaning of reactor or reactor parts by using wet or mechanical methods

Industry

CPC
C23C16/4407

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4407Cleaning of reactor or reactor parts by using wet or mechanical methods

Industries

Patents Grantslast 30 patents

Information Patent Grant
Method of evaluating cleanliness, method of determining cleaning co...
- Patent number 11,920,257
- Issue date Mar 5, 2024
- Sumco Corporation
- Takashi Muramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Stress patterning systems and methods for manufacturing free-form d...
- Patent number 11,879,170
- Issue date Jan 23, 2024
- Massachusetts Institute of Technology
- Youwei Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Washing method of semiconductor manufacturing device component havi...
- Patent number 11,753,714
- Issue date Sep 12, 2023
- Shinryo Corporation
- Tomohiro Matsumura
- B08 - CLEANING
Information Patent Grant
Component, method of manufacturing the component, and method of cle...
- Patent number 11,694,879
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Ian Widlow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of cleaning reaction tube, method of manufacturing semicondu...
- Patent number 11,685,993
- Issue date Jun 27, 2023
- Kokusai Electric Corporation
- Shinya Morita
- B08 - CLEANING
Information Patent Grant
Wet cleaning inside of gasline of semiconductor process equipment
- Patent number 11,661,652
- Issue date May 30, 2023
- Applied Materials, Inc.
- Gang Peng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Clean processes for boron carbon film deposition
- Patent number 11,613,808
- Issue date Mar 28, 2023
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Manufacturing method of display device
- Patent number 11,594,561
- Issue date Feb 28, 2023
- Samsung Display Co., Ltd.
- Yong-Hwan Ryu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method and substrate processing apparatus
- Patent number 11,517,943
- Issue date Dec 6, 2022
- Tokyo Electron Limited
- Kyoko Ikeda
- B08 - CLEANING
Information Patent Grant
Semiconductor processing apparatus and a method for processing a su...
- Patent number 11,473,195
- Issue date Oct 18, 2022
- ASM IP Holding B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for conditioning a ceramic coating
- Patent number 11,384,430
- Issue date Jul 12, 2022
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Detoxifying device, method of replacing piping section of detoxifyi...
- Patent number 11,198,160
- Issue date Dec 14, 2021
- Ebara Corporation
- Takanori Inada
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Method of removal of sharp corners from diffuser plate
- Patent number 11,123,837
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Ilyoung Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for exhaust cleaning
- Patent number 10,987,706
- Issue date Apr 27, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei Chang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of performing a surface treatment on a mounting table, the m...
- Patent number 10,738,374
- Issue date Aug 11, 2020
- Tokyo Electron Limited
- Shinya Okabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system and processing method
- Patent number 10,669,626
- Issue date Jun 2, 2020
- Kabushiki Kaisha Toshiba
- Shinya Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for recycling substrate process components
- Patent number 10,662,520
- Issue date May 26, 2020
- Applied Materials, Inc.
- Brian T. West
- B08 - CLEANING
Information Patent Grant
Apparatus and methods for exhaust cleaning
- Patent number 10,618,085
- Issue date Apr 14, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei Chang Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust system, semiconductor manufacturing equipment, and method f...
- Patent number 10,391,529
- Issue date Aug 27, 2019
- TOSHIBA MEMORY CORPORATION
- Shinji Miyazaki
- B08 - CLEANING
Information Patent Grant
Selective etching of reactor surfaces
- Patent number 10,358,599
- Issue date Jul 23, 2019
- ASM America, Inc.
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chemical vapor deposition apparatus and its cleaning method
- Patent number 10,240,231
- Issue date Mar 26, 2019
- ADVANCED MICRO-FABRICATION EQUIPMENT INC, SHANGHAI
- Zhiyou Du
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for recycling a substrate holder
- Patent number 10,100,400
- Issue date Oct 16, 2018
- Commissariat a l'Energie Atomique et Aux Energies Alternatives
- Frank Fournel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Delivery device, methods of manufacture thereof and articles compri...
- Patent number 9,957,612
- Issue date May 1, 2018
- Ceres Technologies, Inc.
- Egbert Woelk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning thin film forming apparatus, thin film forming m...
- Patent number 9,920,424
- Issue date Mar 20, 2018
- Tokyo Electron Limited
- Ryota Goto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing metal contamination and apparatus for removing...
- Patent number 9,875,915
- Issue date Jan 23, 2018
- Tokyo Electron Limited
- Yudai Ito
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactor for producing polycrystalline silicon and method for removi...
- Patent number 9,732,420
- Issue date Aug 15, 2017
- Wacker Chemie AG
- Dirk Weckesser
- B24 - GRINDING POLISHING
Information Patent Grant
Selective etching of reactor surfaces
- Patent number 9,481,937
- Issue date Nov 1, 2016
- ASM America, Inc.
- Srini Raghavan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for mixed acid cleaning of showerhead electrodes
- Patent number 9,396,912
- Issue date Jul 19, 2016
- Lam Research Corporation
- Armen Avoyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Self-cleaning shutter for CVD reactor
- Patent number 9,388,493
- Issue date Jul 12, 2016
- Veeco Instruments Inc.
- Chenghung Paul Chang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning apparatus and method, and film growth reaction apparatus a...
- Patent number 9,382,619
- Issue date Jul 5, 2016
- Advanced Micro-Fabrication Equipment, Inc.
- Yinxin Jiang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE REMOVER AND METHOD
- Publication number 20230381701
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
PYROMETER CONTROLLED MULTI-WAFER CLEANING PROCESS
- Publication number 20230324227
- Publication date Oct 12, 2023
- ASM IP HOLDING, B.V.
- Ernesto Suarez
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND A METHOD FOR PROCESSING A SU...
- Publication number 20230017569
- Publication date Jan 19, 2023
- ASM IP HOLDING B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR CLEANING A SHOWERHEAD
- Publication number 20220367159
- Publication date Nov 17, 2022
- LAM RESEARCH CORPORATION
- Eric Bramwell Britcher
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWDER-ATOMIC-LAYER-DEPOSITION DEVICE WITH KNOCKER
- Publication number 20220341036
- Publication date Oct 27, 2022
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE REMOVER AND METHOD
- Publication number 20220297037
- Publication date Sep 22, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wen-Hao Cheng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING MATERIALS AND PROCESSES FOR LITHIUM PROCESSING EQUIPMENT
- Publication number 20220162747
- Publication date May 26, 2022
- Applied Materials, Inc.
- Tapash Chakraborty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WASHING METHOD OF SEMICONDUCTOR MANUFACTURING DEVICE COMPONENT HAVI...
- Publication number 20220136101
- Publication date May 5, 2022
- Shinryo Corporation
- Tomohiro MATSUMURA
- B08 - CLEANING
Information Patent Application
CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION
- Publication number 20220127722
- Publication date Apr 28, 2022
- Applied Materials, Inc.
- Jiheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR SURFACE TREATMENT OF QUARTZ COMPONENT
- Publication number 20220064787
- Publication date Mar 3, 2022
- CHANGXIN MEMORY TECHNOLOGIES, INC
- Jiazhou Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20210268556
- Publication date Sep 2, 2021
- TOKYO ELECTRON LIMITED
- Kyoko IKEDA
- B08 - CLEANING
Information Patent Application
METHOD OF CLEANING REACTION TUBE, METHOD OF MANUFACTURING SEMICONDU...
- Publication number 20210230745
- Publication date Jul 29, 2021
- Kokusai Electric Corporation
- Shinya MORITA
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHODS FOR EXHAUST CLEANING
- Publication number 20210205861
- Publication date Jul 8, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei Chang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRESS PATTERNING SYSTEMS AND METHODS FOR MANUFACTURING FREE-FORM D...
- Publication number 20210047729
- Publication date Feb 18, 2021
- Massachusetts Institute of Technology
- Youwei Yao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR CLEANING A PLASMA PROCESSING APPARATUS
- Publication number 20200384608
- Publication date Dec 10, 2020
- Shailendra Vikram SINGH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS FOR CLEANING DEPOSITION SYSTEMS
- Publication number 20200354831
- Publication date Nov 12, 2020
- Alta Devices, Inc.
- Roger HAMAMJY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR EXHAUST CLEANING
- Publication number 20200197987
- Publication date Jun 25, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei Chang CHENG
- B08 - CLEANING
Information Patent Application
Component, Method Of Manufacturing The Component, And Method Of Cle...
- Publication number 20200185202
- Publication date Jun 11, 2020
- Applied Materials, Inc.
- Ian WIDLOW
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WET CLEANING INSIDE OF GASLINE OF SEMICONDUCTOR PROCESS EQUIPMENT
- Publication number 20190352775
- Publication date Nov 21, 2019
- Applied Materials, Inc.
- Gang PENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND A METHOD FOR PROCESSING A SU...
- Publication number 20190271078
- Publication date Sep 5, 2019
- ASM IP HOLDING B.V.
- Petri Raisanen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE
- Publication number 20190193233
- Publication date Jun 27, 2019
- Applied Materials, Inc.
- Ilyoung HONG
- B24 - GRINDING POLISHING
Information Patent Application
ADHERED OBJECT REMOVAL METHOD
- Publication number 20190160629
- Publication date May 30, 2019
- SINTOKOGIO, LTD.
- Hitoshi NISHIJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA DEPOSITION METHOD
- Publication number 20190093225
- Publication date Mar 28, 2019
- Semblant Limited
- Shailendra Vikram SINGH
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
EXFOLIATION PROCESS FOR REMOVAL OF DEPOSITED MATERIALS FROM MASKS C...
- Publication number 20180216225
- Publication date Aug 2, 2018
- Applied Materials, Inc.
- Daoying SONG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POLYSILICON PREPARATION APPARATUS FOR PREVENTING GROUND FAULT CURRE...
- Publication number 20170167016
- Publication date Jun 15, 2017
- OCI COMPANY LTD.
- Min-Kyung OH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Reactor For Producing Polycrystalline Silicon and Method For Removi...
- Publication number 20170159174
- Publication date Jun 8, 2017
- Wacker Chemie AG
- Dirk WECKESSER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHEMICAL VAPOR DEPOSITION APPARATUS AND ITS CLEANING METHOD
- Publication number 20160319425
- Publication date Nov 3, 2016
- Advanced Micro-Fabrication Equipment Inc. Shanghai
- Zhiyou DU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20160244875
- Publication date Aug 25, 2016
- Hitachi Kokusai Electric Inc.
- Ryota SASAJIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTOR FOR PRODUCING POLYCRYSTALLINE SILICON AND METHOD FOR REMOVI...
- Publication number 20160115591
- Publication date Apr 28, 2016
- Wacker Chemie AG
- Dirk WECKESSER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PARTICLE IMPROVEMENT FOR SINGLE WAFER APPARATUS
- Publication number 20160040286
- Publication date Feb 11, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ming-Sung HUNG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Cleaning of reactor or reactor parts by using wet or mechanical methods

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of evaluating cleanliness, method of determining cleaning co...

Stress patterning systems and methods for manufacturing free-form d...

Washing method of semiconductor manufacturing device component havi...

Component, method of manufacturing the component, and method of cle...

Method of cleaning reaction tube, method of manufacturing semicondu...

Wet cleaning inside of gasline of semiconductor process equipment

Clean processes for boron carbon film deposition

Manufacturing method of display device

Cleaning method and substrate processing apparatus

Semiconductor processing apparatus and a method for processing a su...

Method for conditioning a ceramic coating

Detoxifying device, method of replacing piping section of detoxifyi...

Method of removal of sharp corners from diffuser plate

Apparatus and methods for exhaust cleaning

Method of performing a surface treatment on a mounting table, the m...

Processing system and processing method

Method for recycling substrate process components

Apparatus and methods for exhaust cleaning

Exhaust system, semiconductor manufacturing equipment, and method f...

Selective etching of reactor surfaces

Chemical vapor deposition apparatus and its cleaning method

Method for recycling a substrate holder

Delivery device, methods of manufacture thereof and articles compri...

Method of cleaning thin film forming apparatus, thin film forming m...

Method for removing metal contamination and apparatus for removing...

Reactor for producing polycrystalline silicon and method for removi...

Selective etching of reactor surfaces

Methods for mixed acid cleaning of showerhead electrodes

Self-cleaning shutter for CVD reactor

Cleaning apparatus and method, and film growth reaction apparatus a...

Patents Applicationslast 30 patents

PARTICLE REMOVER AND METHOD

PYROMETER CONTROLLED MULTI-WAFER CLEANING PROCESS

SEMICONDUCTOR PROCESSING APPARATUS AND A METHOD FOR PROCESSING A SU...

SYSTEMS AND METHODS FOR CLEANING A SHOWERHEAD

POWDER-ATOMIC-LAYER-DEPOSITION DEVICE WITH KNOCKER

PARTICLE REMOVER AND METHOD

CLEANING MATERIALS AND PROCESSES FOR LITHIUM PROCESSING EQUIPMENT

WASHING METHOD OF SEMICONDUCTOR MANUFACTURING DEVICE COMPONENT HAVI...

CLEAN PROCESSES FOR BORON CARBON FILM DEPOSITION

METHOD FOR SURFACE TREATMENT OF QUARTZ COMPONENT

CLEANING METHOD AND SUBSTRATE PROCESSING APPARATUS

METHOD OF CLEANING REACTION TUBE, METHOD OF MANUFACTURING SEMICONDU...

APPARATUS AND METHODS FOR EXHAUST CLEANING

STRESS PATTERNING SYSTEMS AND METHODS FOR MANUFACTURING FREE-FORM D...

METHOD AND APPARATUS FOR CLEANING A PLASMA PROCESSING APPARATUS

METHODS AND SYSTEMS FOR CLEANING DEPOSITION SYSTEMS

APPARATUS AND METHODS FOR EXHAUST CLEANING

Component, Method Of Manufacturing The Component, And Method Of Cle...

WET CLEANING INSIDE OF GASLINE OF SEMICONDUCTOR PROCESS EQUIPMENT

SEMICONDUCTOR PROCESSING APPARATUS AND A METHOD FOR PROCESSING A SU...

METHOD OF REMOVAL OF SHARP CORNERS FROM DIFFUSER PLATE

ADHERED OBJECT REMOVAL METHOD

PLASMA DEPOSITION METHOD

EXFOLIATION PROCESS FOR REMOVAL OF DEPOSITED MATERIALS FROM MASKS C...

POLYSILICON PREPARATION APPARATUS FOR PREVENTING GROUND FAULT CURRE...

Reactor For Producing Polycrystalline Silicon and Method For Removi...

CHEMICAL VAPOR DEPOSITION APPARATUS AND ITS CLEANING METHOD

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

REACTOR FOR PRODUCING POLYCRYSTALLINE SILICON AND METHOD FOR REMOVI...

PARTICLE IMPROVEMENT FOR SINGLE WAFER APPARATUS