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H01L21/02041
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H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/02041
Cleaning
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Patents Grants
last 30 patents
Information
Patent Grant
Method to clean SnO2 film from chamber
Patent number
11,915,923
Issue date
Feb 27, 2024
Lam Research Corporation
Akhil Singhal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate cleaning method, processing container cleaning method, an...
Patent number
11,865,590
Issue date
Jan 9, 2024
Tokyo Electron Limited
Kyoko Ikeda
B08 - CLEANING
Information
Patent Grant
Method of cleaning an apparatus that processes a substrate
Patent number
11,823,915
Issue date
Nov 21, 2023
Semes Co., Ltd.
Jintack Yu
B08 - CLEANING
Information
Patent Grant
Solution, method of forming resist pattern, and semiconductor devic...
Patent number
11,822,250
Issue date
Nov 21, 2023
Tokyo Ohka Kogyo Co., Ltd.
Hiroyuki Iida
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Semiconductor manufacturing apparatus and semiconductor manufacturi...
Patent number
11,791,174
Issue date
Oct 17, 2023
Mitsubishi Electric Corporation
Hiroshi Tanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tonneau system for use with a pickup truck
Patent number
11,780,305
Issue date
Oct 10, 2023
WorkSport Ltd.
Steven Rossi
B60 - VEHICLES IN GENERAL
Information
Patent Grant
Substrate cleaning apparatus
Patent number
11,761,075
Issue date
Sep 19, 2023
Tokyo Electron Limited
Yukimasa Saito
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and apparatus cleaning method
Patent number
11,745,213
Issue date
Sep 5, 2023
Tokyo Electron Limited
Hidemasa Aratake
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Substrate cleaning devices and methods thereof
Patent number
11,745,227
Issue date
Sep 5, 2023
Applied Materials, Inc.
Steven M. Zuniga
B08 - CLEANING
Information
Patent Grant
System and method for fluid preparation
Patent number
11,724,236
Issue date
Aug 15, 2023
XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
Chang-Hyeon Nam
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Post-CMP cleaning composition for germanium-containing substrate
Patent number
11,718,812
Issue date
Aug 8, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ji Cui
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Acoustic measurement of fabrication equipment clearance
Patent number
11,709,153
Issue date
Jul 25, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Jun-Hao Deng
B08 - CLEANING
Information
Patent Grant
Pressure control strategies to provide uniform treatment streams in...
Patent number
11,707,770
Issue date
Jul 25, 2023
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Kevin Siefering
B08 - CLEANING
Information
Patent Grant
Method of manufacturing a resin-sealed semiconductor device
Patent number
11,705,344
Issue date
Jul 18, 2023
Renesas Electronics Corporation
Masakatsu Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Dilute chemical solution production device
Patent number
11,667,515
Issue date
Jun 6, 2023
Kurita Water Industries Ltd.
Yuuya Sasaki
B67 - OPENING, CLOSING OR CLEANING BOTTLES, JARS OR SIMILAR CONTAINERS LIQUID...
Information
Patent Grant
Cleaning method of glass substrate, manufacturing method of semicon...
Patent number
11,637,009
Issue date
Apr 25, 2023
Semiconductor Energy Laboratory Co., Ltd.
Shunpei Yamazaki
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Substrate processing apparatus with moving device for connecting an...
Patent number
11,637,035
Issue date
Apr 25, 2023
Tokyo Electron Limited
Satoshi Morita
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus including periphery cover body
Patent number
11,551,945
Issue date
Jan 10, 2023
Tokyo Electron Limited
Katsuhiro Morikawa
B08 - CLEANING
Information
Patent Grant
Substrate cleaning method
Patent number
11,551,941
Issue date
Jan 10, 2023
Tokyo Electron Limited
Koji Kagawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of making a semiconductor device including etching of a meta...
Patent number
11,515,169
Issue date
Nov 29, 2022
HITACHI HIGH-TECH CORPORATION
Yoshihide Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate cleaning method, processing container cleaning method, an...
Patent number
11,504,751
Issue date
Nov 22, 2022
Tokyo Electron Limited
Kyoko Ikeda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for cleaning semiconductor substrates
Patent number
11,498,100
Issue date
Nov 15, 2022
ACM Research (Shanghai) Inc.
Hui Wang
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,482,428
Issue date
Oct 25, 2022
Tokyo Electron Limited
Nobuhiko Mouri
B08 - CLEANING
Information
Patent Grant
Cleaning solution and method of cleaning wafer
Patent number
11,456,170
Issue date
Sep 27, 2022
Taiwan Semiconductor Manufacturing Co., Ltd
An-Ren Zi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Grant
Cleaning method of semiconductor manufacturing device
Patent number
11,434,565
Issue date
Sep 6, 2022
Kanto Denka Kogyo Co., Ltd.
Yoshinao Takahashi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for drying wafer at room temperature
Patent number
11,417,511
Issue date
Aug 16, 2022
National Sun Yat-sen University
Ting-Chang Chang
B08 - CLEANING
Information
Patent Grant
Substrate processing apparatus
Patent number
11,410,865
Issue date
Aug 9, 2022
SCREEN Holdings Co., Ltd.
Hiroyuki Kawahara
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Automated particle removal system having angular adjustability
Patent number
11,400,495
Issue date
Aug 2, 2022
ASM Technology Singapore Pte. Ltd.
Keng Yew Song
B08 - CLEANING
Information
Patent Grant
Systems and methods for treating substrates with cryogenic fluid mi...
Patent number
11,355,376
Issue date
Jun 7, 2022
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Jeffery W. Butterbaugh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Treatment systems with repositionable nozzle useful in the manufact...
Patent number
11,309,178
Issue date
Apr 19, 2022
TEL MANUFACTURING AND ENGINEERING OF AMERICA, INC.
Kevin L. Siefering
B08 - CLEANING
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
Publication number
20240071818
Publication date
Feb 29, 2024
UNITED MICROELECTRONICS CORP.
I-Wei Chi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TONNEAU SYSTEM FOR USE WITH A PICKUP TRUCK
Publication number
20230391174
Publication date
Dec 7, 2023
WORKSPORT LTD.
Steven ROSSI
B60 - VEHICLES IN GENERAL
Information
Patent Application
IN-SITU INTEGRATED WAFER PARAMETER DETECTION SYSTEM
Publication number
20230378006
Publication date
Nov 23, 2023
Shuran SHENG
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
Acoustic Measurement of Fabrication Equipment Clearance
Publication number
20230366857
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Jun-Hao Deng
B08 - CLEANING
Information
Patent Application
CLEANING METHOD OF GLASS SUBSTRATE, MANUFACTURING METHOD OF SEMICON...
Publication number
20230260778
Publication date
Aug 17, 2023
Semiconductor Energy Laboratory Co., Ltd.
Shunpei YAMAZAKI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Method for Purifying Hydrogen Peroxide
Publication number
20230242400
Publication date
Aug 3, 2023
OCI COMPANY LTD.
Deokyun Kim
B08 - CLEANING
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF WASHING SEM...
Publication number
20230243780
Publication date
Aug 3, 2023
FUJIFILM CORPORATION
Akihiko OHTSU
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
Publication number
20230063907
Publication date
Mar 2, 2023
TOKYO ELECTRON LIMITED
Kyoko IKEDA
B08 - CLEANING
Information
Patent Application
TEMPERATURE CONTROLLABLE BONDER EQUIPMENT FOR SUBSTRATE BONDING
Publication number
20230067088
Publication date
Mar 2, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Han-De CHEN
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
CLEANING SOLUTION AND METHOD OF CLEANING WAFER
Publication number
20220351963
Publication date
Nov 3, 2022
Taiwan Semiconductor Manufacturing Company, Ltd.
An-Ren Zi
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
SUBSTRATE CLEANING COMPOSITION, METHOD FOR CLEANING SUBSTRATE USING...
Publication number
20220336206
Publication date
Oct 20, 2022
DONGJIN SEMICHEM CO., LTD.
Ga Young SONG
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
APPARATUS FOR TREATING SUBSTRATE
Publication number
20220297167
Publication date
Sep 22, 2022
SEMES CO., LTD.
SHI HYUN PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD INCL...
Publication number
20220181169
Publication date
Jun 9, 2022
SEMES CO., LTD.
Seung Tae YANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS SOLUTION SUPPLY DEVICE
Publication number
20220105478
Publication date
Apr 7, 2022
EBARA CORPORATION
Suguru OZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220068668
Publication date
Mar 3, 2022
RENESAS ELECTRONICS CORPORATION
Masakatsu SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20220056590
Publication date
Feb 24, 2022
TOKYO ELECTRON LIMITED
Satoshi Morita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR PHASE GROWTH METHOD
Publication number
20220056577
Publication date
Feb 24, 2022
NUFLARE TECHNOLOGY, INC.
Ichiro MIZUSHIMA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Cleaning Fluid, Method of Cleaning Semiconductor Wafer, and Method...
Publication number
20220028681
Publication date
Jan 27, 2022
MITSUBISHI CHEMICAL CORPORATION
Toshiaki Shibata
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
CLEANING APPARATUS FOR COMPONENT FOR SEMICONDUCTOR PRODUCTION APPAR...
Publication number
20220002864
Publication date
Jan 6, 2022
Taiyo Nippon Sanso Corporation
Akira YAMAGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD, PROCESSING CONTAINER CLEANING METHOD, AN...
Publication number
20220001426
Publication date
Jan 6, 2022
TOKYO ELECTRON LIMITED
Kyoko IKEDA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD OF MANUFACTURING S...
Publication number
20210398825
Publication date
Dec 23, 2021
Toshiba Memory Corporation
Tomohiko SUGITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
POST-CMP CLEANING COMPOSITION FOR GERMANIUM- CONTAINING SUBSTRATE
Publication number
20210371774
Publication date
Dec 2, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Ji CUI
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD FOR MANUFACTURING...
Publication number
20210335622
Publication date
Oct 28, 2021
HITACHI HIGH-TECH CORPORATION
Yoshihide Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS FOR CLEANING SEMICONDUCTOR SUBSTRATES
Publication number
20210138513
Publication date
May 13, 2021
ACM Research (Shanghai) Inc.
Hui Wang
B08 - CLEANING
Information
Patent Application
CLEANING AGENT COMPOSITION FOR SUBSTRATE FOR SEMICONDUCTOR DEVICE
Publication number
20210130739
Publication date
May 6, 2021
KAO CORPORATION
Daisuke KAYAKUBO
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND APPARATUS CLEANING METHOD
Publication number
20210114057
Publication date
Apr 22, 2021
TOKYO ELECTRON LIMITED
Hidemasa Aratake
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CLEANING METHOD OF GLASS SUBSTRATE, MANUFACTURING METHOD OF SEMICON...
Publication number
20210090879
Publication date
Mar 25, 2021
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
Shunpei YAMAZAKI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Acoustic Measurement of Fabrication Equipment Clearance
Publication number
20210072196
Publication date
Mar 11, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Jun-Hao Deng
B08 - CLEANING
Information
Patent Application
APPARATUS FOR PROCESSING SUBSTRATE AND METHOD OF CLEANING SAME
Publication number
20210074557
Publication date
Mar 11, 2021
SEMES CO., LTD.
Jintack YU
B08 - CLEANING
Information
Patent Application
METHOD TO CLEAN SNO2 FILM FROM CHAMBER
Publication number
20210057208
Publication date
Feb 25, 2021
LAM RESEARCH CORPORATION
Akhil Singhal
H01 - BASIC ELECTRIC ELEMENTS