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H01L21/6735

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/6735Closed carriers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Humidity control in semiconductor systems
- Patent number 12,148,642
- Issue date Nov 19, 2024
- Brooks Automation (Germany) GmbH
- Lutz Rebstock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod with window
- Patent number 12,140,860
- Issue date Nov 12, 2024
- Entegris, Inc.
- Shawn D. Eggum
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pod and semiconductor device
- Patent number 12,125,726
- Issue date Oct 22, 2024
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Chuang Shan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for containing a reticle in a pod
- Patent number 12,094,743
- Issue date Sep 17, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle pod with antistatic capability
- Patent number 12,087,605
- Issue date Sep 10, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- G08 - SIGNALLING
Information Patent Grant
Autoteach system
- Patent number 12,076,863
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Reticle pod having side containment of reticle
- Patent number 12,062,560
- Issue date Aug 13, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing a substrate detection process
- Patent number 12,020,963
- Issue date Jun 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Min-Cheng Wu
- G01 - MEASURING TESTING
Information Patent Grant
Mapping of a replacement parts storage container
- Patent number 12,014,944
- Issue date Jun 18, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for fabricating a semiconductor device and method for fab...
- Patent number 12,009,238
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Ltd.
- Po-Chien Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quick-detachable valve, substrate container provided with the same,...
- Patent number 12,009,239
- Issue date Jun 11, 2024
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Processing apparatus for electronic component
- Patent number 11,996,314
- Issue date May 28, 2024
- UENO SEIKI CO., LTD.
- Takayuki Masuda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lid opening-and-closing device
- Patent number 11,987,445
- Issue date May 21, 2024
- Murata Machinery, Ltd.
- Akifumi Sakamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate analysis apparatus and substrate analysis method
- Patent number 11,982,705
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Youn Gon Oh
- G01 - MEASURING TESTING
Information Patent Grant
Quick-release valve module, reticle pod provided with quick-release...
- Patent number 11,981,483
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Reticle pod provided with optically identifiable marks and method f...
- Patent number 11,982,937
- Issue date May 14, 2024
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Lid opening-and-closing device
- Patent number 11,961,752
- Issue date Apr 16, 2024
- Murata Machinery, Ltd.
- Ryoma Nunome
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle enclosure for lithography systems
- Patent number 11,940,727
- Issue date Mar 26, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Tsung Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Container for holding and transporting reticles having a transparen...
- Patent number 11,914,287
- Issue date Feb 27, 2024
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chip counter for semiconductor chip-mounted tape reel
- Patent number 11,893,451
- Issue date Feb 6, 2024
- Hyun Su Lee
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Reticle pod with spoiler structure
- Patent number 11,854,847
- Issue date Dec 26, 2023
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle transportation container
- Patent number 11,837,486
- Issue date Dec 5, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Ching Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming dice and structure of die
- Patent number 11,810,804
- Issue date Nov 7, 2023
- Vanguard International Semiconductor Corporation
- Hsiu-Mei Yu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod and wear parts thereof
- Patent number 11,787,621
- Issue date Oct 17, 2023
- Gudeng Precision Industrial Co., Ltd.
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molded substrates
- Patent number 11,784,072
- Issue date Oct 10, 2023
- Hewlett-Packard Development Company, L.P.
- Michael Wayne Cumbie
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle prevention method in reticle pod
- Patent number 11,703,754
- Issue date Jul 18, 2023
- Taiwan Semiconductor Manufacturing Company Ltd.
- Tzu Han Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reticle pod for preventing haze contamination and reticle stocker h...
- Patent number 11,693,307
- Issue date Jul 4, 2023
- XIA TAI XIN SEMICONDUCTOR (QING DAO) LTD.
- Jiyong Yoo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reticle carrier and associated methods
- Patent number 11,687,011
- Issue date Jun 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Hsun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Alignment module with a cleaning chamber
- Patent number 11,637,004
- Issue date Apr 25, 2023
- Applied Materials, Inc.
- Alexander N. Lerner
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Carrier and jig
- Patent number 11,631,607
- Issue date Apr 18, 2023
- Tokyo Electron Limited
- Toshiaki Toyomaki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CALIBRATION SYSTEM
- Publication number 20240416514
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Nicholas Michael Kopec
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20240385511
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER FOR A WAFER
- Publication number 20240347358
- Publication date Oct 17, 2024
- Viavi Solutions Suzhou Co., Ltd.
- Liang ZHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PROCESSING APPARATUS
- Publication number 20240312814
- Publication date Sep 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Min-Cheng WU
- G01 - MEASURING TESTING
Information Patent Application
RETICLE POD WITH BACKSIDE STATIC DISSIPATION
- Publication number 20240312816
- Publication date Sep 19, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE
- Publication number 20240304478
- Publication date Sep 12, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...
- Publication number 20240297057
- Publication date Sep 5, 2024
- Taiwan Semiconductor Manufacturing company Ltd.
- PO-CHIEN HUANG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM
- Publication number 20240242991
- Publication date Jul 18, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20240192588
- Publication date Jun 13, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTAINER FOR NON-RECTANGULAR RETICLE
- Publication number 20240128106
- Publication date Apr 18, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COVER FOR MODULE TRAY AND MODULE TRAY FOR SEMICONDUCTOR DEVICE INCL...
- Publication number 20240128105
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd.
- Taegeon KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULE TRAY FOR SEMICONDUCTOR DEVICE
- Publication number 20240128107
- Publication date Apr 18, 2024
- Samsung Electronics Co., Ltd
- Taegeon KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERIMETER FRAME FOR SPACING RETICLE PODS
- Publication number 20240096670
- Publication date Mar 21, 2024
- Entegris, Inc.
- Brian Wiseman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FRAME CASSETTE WITH INTERNAL COVER CASES
- Publication number 20240087930
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Yuan Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...
- Publication number 20240006210
- Publication date Jan 4, 2024
- BROOKS AUTOMATION (GERMANY) GMBH
- Lutz REBSTOCK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE
- Publication number 20230314931
- Publication date Oct 5, 2023
- ASML Holding N.V.
- Boris KOGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINGULATED DIE SHIPPING TRAY ASSEMBLY
- Publication number 20230290661
- Publication date Sep 14, 2023
- Intel Corporation
- Kyle ARRINGTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE CARRIER AND ASSOCIATED METHODS
- Publication number 20230280664
- Publication date Sep 7, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Hsun CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING APPARATUS FOR ELECTRONIC COMPONENT
- Publication number 20230274971
- Publication date Aug 31, 2023
- UENO SEIKI CO., LTD.
- Takayuki MASUDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230236498
- Publication date Jul 27, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung SHIH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE
- Publication number 20230187246
- Publication date Jun 15, 2023
- Entegris, Inc.
- Russ V. Raschke
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20230187243
- Publication date Jun 15, 2023
- Kokusai Electric Corporation
- Jin SHIBATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER HOLDER
- Publication number 20230163005
- Publication date May 25, 2023
- Disco Corporation
- Yoshihiro OMURO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus for the Temperature Control of a Substrate and Correspond...
- Publication number 20230148124
- Publication date May 11, 2023
- ERS electronic GmbH
- Klaus Reitinger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRANSPORTATION METHOD
- Publication number 20230118479
- Publication date Apr 20, 2023
- HAMAMATSU PHOTONICS K. K.
- Hiroki OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSPORTATION METHOD
- Publication number 20230122733
- Publication date Apr 20, 2023
- HAMAMATSU PHOTONICS K. K.
- Hiroki OYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20230094318
- Publication date Mar 30, 2023
- SCREEN Holdings Co., Ltd.
- Yosuke YASUTAKE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS
- Publication number 20230064383
- Publication date Mar 2, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi-Hung LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE ANALYSIS APPARATUS AND SUBSTRATE ANALYSIS METHOD
- Publication number 20230067060
- Publication date Mar 2, 2023
- Samsung Electronics Co., Ltd.
- Youn Gon OH
- G01 - MEASURING TESTING
Information Patent Application
QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...
- Publication number 20230065892
- Publication date Mar 2, 2023
- GUDENG PRECISION INDUSTRIAL CO., LTD
- Ming-Chien Chiu
- H01 - BASIC ELECTRIC ELEMENTS

Closed carriers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Humidity control in semiconductor systems

Reticle pod with window

Mask pod and semiconductor device

Method for containing a reticle in a pod

Reticle pod with antistatic capability

Autoteach system

Reticle pod having side containment of reticle

Method of performing a substrate detection process

Mapping of a replacement parts storage container

Apparatus for fabricating a semiconductor device and method for fab...

Quick-detachable valve, substrate container provided with the same,...

Processing apparatus for electronic component

Lid opening-and-closing device

Substrate analysis apparatus and substrate analysis method

Quick-release valve module, reticle pod provided with quick-release...

Reticle pod provided with optically identifiable marks and method f...

Lid opening-and-closing device

Reticle enclosure for lithography systems

Container for holding and transporting reticles having a transparen...

Chip counter for semiconductor chip-mounted tape reel

Reticle pod with spoiler structure

Reticle transportation container

Method of forming dice and structure of die

Reticle pod and wear parts thereof

Molded substrates

Particle prevention method in reticle pod

Reticle pod for preventing haze contamination and reticle stocker h...

Reticle carrier and associated methods

Alignment module with a cleaning chamber

Carrier and jig

Patents Applicationslast 30 patents

CALIBRATION SYSTEM

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

COVER FOR A WAFER

METHOD OF OPERATING A PROCESSING APPARATUS

RETICLE POD WITH BACKSIDE STATIC DISSIPATION

METHODS AND SYSTEMS FOR TEMPERATURE CONTROL FOR A SUBSTRATE

APPARATUS FOR FABRICATING A SEMICONDUCTOR DEVICE AND METHOD FOR FAB...

RETICLE POD WITH QUICK-RELEASE SUPPORT MECHANISM

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

CONTAINER FOR NON-RECTANGULAR RETICLE

COVER FOR MODULE TRAY AND MODULE TRAY FOR SEMICONDUCTOR DEVICE INCL...

MODULE TRAY FOR SEMICONDUCTOR DEVICE

PERIMETER FRAME FOR SPACING RETICLE PODS

FRAME CASSETTE WITH INTERNAL COVER CASES

METHOD AND SYSTEM FOR INSPECTION OF AN INNER POD OR AN OUTER POD OF...

POD HANDLING SYSTEMS AND METHODS FOR A LITHOGRAPHIC DEVICE

SINGULATED DIE SHIPPING TRAY ASSEMBLY

RETICLE CARRIER AND ASSOCIATED METHODS

PROCESSING APPARATUS FOR ELECTRONIC COMPONENT

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

RETICLE POD HAVING SIDE CONTAINMENT OF RETICLE

SUBSTRATE PROCESSING APPARATUS, METHOD OF MANUFACTURING SEMICONDUCT...

WAFER HOLDER

Apparatus for the Temperature Control of a Substrate and Correspond...

TRANSPORTATION METHOD

TRANSPORTATION METHOD

SUBSTRATE PROCESSING APPARATUS

RETICLE ENCLOSURE FOR LITHOGRAPHY SYSTEMS

SUBSTRATE ANALYSIS APPARATUS AND SUBSTRATE ANALYSIS METHOD

QUICK-DETACHABLE VALVE, SUBSTRATE CONTAINER PROVIDED WITH THE SAME,...