Cluster ion sources

Industry

CPC
H01J27/026

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J27/00Ion beam tubes

Current Industry

H01J27/026Cluster ion sources

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods for providing a beam of charged particles
- Patent number 11,501,943
- Issue date Nov 15, 2022
- HIL Applied Medical, Ltd.
- Indranuj Dey
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Foil sheet assemblies for ion implantation
- Patent number 10,418,223
- Issue date Sep 17, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process gas enhancement for beam treatment of a substrate
- Patent number 9,735,019
- Issue date Aug 15, 2017
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of smoothing solid surface with gas cluster ion beam and sol...
- Patent number 9,663,862
- Issue date May 30, 2017
- Japan Aviation Electronics Industry, Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switchable gas cluster and atomic ion gun, and method of surface pr...
- Patent number 9,478,388
- Issue date Oct 25, 2016
- VG Systems Limited
- Bryan Barnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generation in mass spectrometers by cluster bombardment
- Patent number 9,263,223
- Issue date Feb 16, 2016
- Michael Duerr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Water cluster ion beam mass spectrometer apparatus and method
- Patent number 9,147,568
- Issue date Sep 29, 2015
- Ionoptika Limited
- Paul William Miles Blenkinsopp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for growing a thin film using a gas cluster ion beam
- Patent number 9,103,031
- Issue date Aug 11, 2015
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for detecting hydrogen peroxide
- Patent number 8,871,522
- Issue date Oct 28, 2014
- University of Yamanashi
- Kenzo Hiraoka
- G01 - MEASURING TESTING
Information Patent Grant
Gas cluster ion beam system with rapid gas switching apparatus
- Patent number 8,338,806
- Issue date Dec 25, 2012
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for modifying a material layer using gas cluster ion beam pr...
- Patent number 7,982,196
- Issue date Jul 19, 2011
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual mode ion source for ion implantation
- Patent number 7,838,842
- Issue date Nov 23, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual mode ion source for ion implantation
- Patent number 7,834,554
- Issue date Nov 16, 2010
- Semequip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling a gas cluster ion beam formed...
- Patent number 7,825,389
- Issue date Nov 2, 2010
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to improve a copper/dielectric interface in semiconductor de...
- Patent number 7,754,588
- Issue date Jul 13, 2010
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods of forming a gas cluster ion beam using a low...
- Patent number 7,670,964
- Issue date Mar 2, 2010
- Tokyo Electron Limited
- Scott Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometer
- Patent number 7,550,716
- Issue date Jun 23, 2009
- Shimadzu Corporation
- Osamu Furuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for providing a ribbon-shaped gas cluster ion beam
- Patent number 7,547,900
- Issue date Jun 16, 2009
- Varian Semiconductor Equipment Associates, Inc.
- Anthony Renau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for arc suppression in scanned ion beam proces...
- Patent number 7,345,856
- Issue date Mar 18, 2008
- TEL Epion Inc.
- Kenneth P. Regan
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Method and device for cluster fragmentation
- Patent number 7,247,845
- Issue date Jul 24, 2007
- Max-Planck-Gesellschaft zur Forderung der Wissenschaften E.V.
- Christoph Gebhardt
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Ionizer and method for gas-cluster ion-beam formation
- Patent number 7,173,252
- Issue date Feb 6, 2007
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved processing with a gas-cluster ion...
- Patent number 7,060,989
- Issue date Jun 13, 2006
- Epion Corporation
- David R. Swenson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for improved beam stability in high current ga...
- Patent number 7,060,988
- Issue date Jun 13, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detector and method for cluster ion beam diagnostics
- Patent number 6,737,643
- Issue date May 18, 2004
- Epion Corporation
- Richard P. Torti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Helium droplet mass spectrometry (HDMS)
- Patent number 6,660,999
- Issue date Dec 9, 2003
- Pfizer Inc.
- Raymond J. Bemish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas cluster ion beam low mass ion filter
- Patent number 6,635,883
- Issue date Oct 21, 2003
- Epion Corporation
- Richard P. Torti
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Ionizer for gas cluster ion beam formation
- Patent number 6,629,508
- Issue date Oct 7, 2003
- Epion Corporation
- Jerald P. Dykstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mean cluster size determination using water capture
- Patent number 5,767,511
- Issue date Jun 16, 1998
- Raytheon Company
- Michel Macler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster ion synthesis and confinement in hybrid ion trap arrays
- Patent number 5,118,950
- Issue date Jun 2, 1992
- The United States of America as represented by the Secretary of the Air Force
- John T. Bahns
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass separator for ionized cluster beam
- Patent number 4,737,637
- Issue date Apr 12, 1988
- Hughes Aircraft Company
- Wolfgang Knauer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR PROVIDING A BEAM OF CHARGED PARTICLES
- Publication number 20210265125
- Publication date Aug 26, 2021
- Indranuj Dey
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Foil Sheet Assemblies For Ion Implantation
- Publication number 20190304738
- Publication date Oct 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LIQUID DROPLET INJECTING APPARATUS AND ION SOURCE
- Publication number 20160086758
- Publication date Mar 24, 2016
- Canon Kabushiki Kaisha
- Kota Iwasaki
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE
- Publication number 20160071734
- Publication date Mar 10, 2016
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD RELATING TO AN IMPROVED MASS SPECTROMETER
- Publication number 20140319333
- Publication date Oct 30, 2014
- Paul William Miles Blenkinsopp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...
- Publication number 20140295107
- Publication date Oct 2, 2014
- JAPAN AVIATION ELECTRONICS INDUSTRY, LIMITED
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF
- Publication number 20140236286
- Publication date Aug 21, 2014
- Sean R. Kirkpatrick
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SUPERSONIC BEAM APPARATUS AND CLUSTER ION BEAM FORMING METHOD
- Publication number 20140110244
- Publication date Apr 24, 2014
- Canon Kabushiki Kaisha
- Kota Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...
- Publication number 20140106086
- Publication date Apr 17, 2014
- Japan Aviation Electronics Industry, Limited
- Akinobu SATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING APPARATUS AND METHOD FOR PROCESSING METAL FILM
- Publication number 20130306597
- Publication date Nov 21, 2013
- TOKYO ELECTRON LIMITED
- Isao Gunji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION GENERATION IN MASS SPECTROMETERS BY CLUSTER BOMBARDMENT
- Publication number 20130285552
- Publication date Oct 31, 2013
- Bruker Daltonik GmbH
- Michael Duerr
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SWITCHABLE GAS CLUSTER AND ATOMIC ION GUN, AND METHOD OF SURFACE PR...
- Publication number 20130180844
- Publication date Jul 18, 2013
- Bryan Barnard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETECTING HYDROGEN PEROXIDE
- Publication number 20110300636
- Publication date Dec 8, 2011
- UNIVERSITY OF YAMANASHI
- Kenzo HIRAOKA
- G01 - MEASURING TESTING
Information Patent Application
GAS CLUSTER ION BEAM SYSTEM WITH RAPID GAS SWITCHING APPARATUS
- Publication number 20110272594
- Publication date Nov 10, 2011
- TEL Epion Inc.
- Michael Graf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...
- Publication number 20110266466
- Publication date Nov 3, 2011
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...
- Publication number 20100319545
- Publication date Dec 23, 2010
- TOKYO ELECTRON LIMITED
- MASAKI NARUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...
- Publication number 20100243919
- Publication date Sep 30, 2010
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Sol...
- Publication number 20100207041
- Publication date Aug 19, 2010
- Japan Aviatiton Electronics Industry Limited
- Akinobu Sato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND SYSTEM FOR GROWING A THIN FILM USING A GAS CLUSTER ION BEAM
- Publication number 20090317564
- Publication date Dec 24, 2009
- TEL Epion Inc.
- John J. Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF electron source for ionizing gas clusters
- Publication number 20090166555
- Publication date Jul 2, 2009
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for controlling a gas cluster ion beam formed...
- Publication number 20090140165
- Publication date Jun 4, 2009
- TEL Epion Inc.
- John J. Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO IMPROVE A COPPER/DIELECTRIC INTERFACE IN SEMICONDUCTOR DE...
- Publication number 20090087969
- Publication date Apr 2, 2009
- TEL Epion Inc.
- Noel Russell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHODS OF FORMING A GAS CLUSTER ION BEAM USING A LOW...
- Publication number 20080230714
- Publication date Sep 25, 2008
- TOKYO ELECTRON LIMITED
- Scott Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR PROVIDING A RIBBON-SHAPED GAS CLUSTER ION BEAM
- Publication number 20080149826
- Publication date Jun 26, 2008
- Varian Semiconductor Equipment Associates, Inc.
- Anthony RENAU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL MODE ION SOURCE FOR ION IMPLANTATION
- Publication number 20080087219
- Publication date Apr 17, 2008
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual mode ion source for ion implantation
- Publication number 20080042580
- Publication date Feb 21, 2008
- SemEquip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual mode ion source for ion implantation
- Publication number 20070170372
- Publication date Jul 26, 2007
- SemEquip, Inc.
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Mass spectrometer
- Publication number 20070085000
- Publication date Apr 19, 2007
- Shimadzu Corporation
- Osamu Furuhashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual mode ion source for ion implantation
- Publication number 20060097645
- Publication date May 11, 2006
- Thomas N. Horsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ionizer and method for gas-cluster ion-beam formation
- Publication number 20060097185
- Publication date May 11, 2006
- Epion Corporation
- Michael E. Mack
- H01 - BASIC ELECTRIC ELEMENTS

Cluster ion sources

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods for providing a beam of charged particles

Foil sheet assemblies for ion implantation

Process gas enhancement for beam treatment of a substrate

Method of smoothing solid surface with gas cluster ion beam and sol...

Switchable gas cluster and atomic ion gun, and method of surface pr...

Ion generation in mass spectrometers by cluster bombardment

Water cluster ion beam mass spectrometer apparatus and method

Method and system for growing a thin film using a gas cluster ion beam

Method for detecting hydrogen peroxide

Gas cluster ion beam system with rapid gas switching apparatus

Method for modifying a material layer using gas cluster ion beam pr...

Dual mode ion source for ion implantation

Dual mode ion source for ion implantation

Method and apparatus for controlling a gas cluster ion beam formed...

Method to improve a copper/dielectric interface in semiconductor de...

Apparatus and methods of forming a gas cluster ion beam using a low...

Mass spectrometer

Techniques for providing a ribbon-shaped gas cluster ion beam

Method and apparatus for arc suppression in scanned ion beam proces...

Method and device for cluster fragmentation

Ionizer and method for gas-cluster ion-beam formation

Method and apparatus for improved processing with a gas-cluster ion...

Method and apparatus for improved beam stability in high current ga...

Detector and method for cluster ion beam diagnostics

Helium droplet mass spectrometry (HDMS)

Gas cluster ion beam low mass ion filter

Ionizer for gas cluster ion beam formation

Mean cluster size determination using water capture

Cluster ion synthesis and confinement in hybrid ion trap arrays

Mass separator for ionized cluster beam

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR PROVIDING A BEAM OF CHARGED PARTICLES

Foil Sheet Assemblies For Ion Implantation

LIQUID DROPLET INJECTING APPARATUS AND ION SOURCE

PROCESS GAS ENHANCEMENT FOR BEAM TREATMENT OF A SUBSTRATE

APPARATUS AND METHOD RELATING TO AN IMPROVED MASS SPECTROMETER

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...

DRUG DELIVERY SYSTEM AND METHOD OF MANUFACTURING THEREOF

SUPERSONIC BEAM APPARATUS AND CLUSTER ION BEAM FORMING METHOD

METHOD OF SMOOTHING SOLID SURFACE WITH GAS CLUSTER ION BEAM AND SOL...

PROCESSING APPARATUS AND METHOD FOR PROCESSING METAL FILM

ION GENERATION IN MASS SPECTROMETERS BY CLUSTER BOMBARDMENT

SWITCHABLE GAS CLUSTER AND ATOMIC ION GUN, AND METHOD OF SURFACE PR...

METHOD AND APPARATUS FOR DETECTING HYDROGEN PEROXIDE

GAS CLUSTER ION BEAM SYSTEM WITH RAPID GAS SWITCHING APPARATUS

METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...

CHARGED PARTICLE SEPARATION APPARATUS AND CHARGED PARTICLE BOMBARDM...

METHOD FOR MODIFYING A MATERIAL LAYER USING GAS CLUSTER ION BEAM PR...

Method of Smoothing Solid Surface with Gas Cluster Ion Beam and Sol...

METHOD AND SYSTEM FOR GROWING A THIN FILM USING A GAS CLUSTER ION BEAM

RF electron source for ionizing gas clusters

Method and apparatus for controlling a gas cluster ion beam formed...

METHOD TO IMPROVE A COPPER/DIELECTRIC INTERFACE IN SEMICONDUCTOR DE...

APPARATUS AND METHODS OF FORMING A GAS CLUSTER ION BEAM USING A LOW...

TECHNIQUES FOR PROVIDING A RIBBON-SHAPED GAS CLUSTER ION BEAM

DUAL MODE ION SOURCE FOR ION IMPLANTATION

Dual mode ion source for ion implantation

Dual mode ion source for ion implantation

Mass spectrometer

Dual mode ion source for ion implantation

Ionizer and method for gas-cluster ion-beam formation