Coaxial electrodes

Industry

CPC
C23C16/5093

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/5093Coaxial electrodes

Industries

Patents Grantslast 30 patents

Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 10,957,519
- Issue date Mar 23, 2021
- IonQuest Corp.
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for RF power distribution in a multi-zone electrode array
- Patent number 10,777,385
- Issue date Sep 15, 2020
- Tokyo Electron Limited
- Sergey Voronin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for manufacturing a barrier layer on a flexible s...
- Patent number 10,100,404
- Issue date Oct 16, 2018
- FUJIFILM Manufacturing Europe B.V.
- Serguei Starostine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating containers
- Patent number 10,081,864
- Issue date Sep 25, 2018
- KAIATECH, INC
- Ronald Stevens
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Semiconductor processing with DC assisted RF power for improved con...
- Patent number 10,032,606
- Issue date Jul 24, 2018
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for intraluminal polymer deposition
- Patent number 9,382,623
- Issue date Jul 5, 2016
- Nordson Corporation
- David K. Foote
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Semiconductor processing with DC assisted RF power for improved con...
- Patent number 9,373,517
- Issue date Jun 21, 2016
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Activated gas injector, film deposition apparatus, and film deposit...
- Patent number 9,053,909
- Issue date Jun 9, 2015
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and semiconductor device manufacturing...
- Patent number 9,021,984
- Issue date May 5, 2015
- Tokyo Electron Limited
- Takashi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method thereof
- Patent number 8,262,846
- Issue date Sep 11, 2012
- Sekisui Chemical Co., Ltd.
- Mitsuhide Nogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer forming method, product comprising the layer, optical film, d...
- Patent number 7,462,379
- Issue date Dec 9, 2008
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus and method for plasma treatment
- Patent number 7,462,572
- Issue date Dec 9, 2008
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma-generated coating apparatus for medical devices and a method...
- Patent number 7,441,513
- Issue date Oct 28, 2008
- Advanced Cardiovascular Systems, Inc.
- Shamim M. Malik
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer forming method, product comprising the layer, optical film, d...
- Patent number 7,421,974
- Issue date Sep 9, 2008
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and method thereof
- Patent number 7,332,039
- Issue date Feb 19, 2008
- Sekisui Chemical Co., Ltd.
- Mitsuhide Nogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus and method for plasma treatment
- Patent number 7,307,029
- Issue date Dec 11, 2007
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming ring and method of manufacturing semiconductor device
- Patent number 7,247,888
- Issue date Jul 24, 2007
- Kabushiki Kaisha Toshiba
- Hirotaka Ogihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma treatment apparatus and method for plasma treatment
- Patent number 7,064,089
- Issue date Jun 20, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device producing method and semiconductor device prod...
- Patent number 7,045,447
- Issue date May 16, 2006
- Hitachi Kokusai Electric Inc.
- Unryu Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer forming method, product comprising the layer, optical film, d...
- Patent number 7,044,078
- Issue date May 16, 2006
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas-barrier synthetic resin vessel, device for producing the same,...
- Patent number 6,854,309
- Issue date Feb 15, 2005
- Nissei ASB Machine Co., Ltd.
- Kiyonori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Layer-forming method using plasma state reactive gas
- Patent number 6,835,425
- Issue date Dec 28, 2004
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma deposition device for forming thin film
- Patent number 6,779,482
- Issue date Aug 24, 2004
- Sharp Kabushiki Kaisha
- Osamu Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma process method
- Patent number 6,410,102
- Issue date Jun 25, 2002
- Canon Kabushiki Kaisha
- Junichiro Hashizume
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma immersion ion processor for fabricating semiconductor integr...
- Patent number 6,335,268
- Issue date Jan 1, 2002
- Ball Semiconductor, Inc.
- Ivan Herman Murzin
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method for forming a deposited film by plasma chemical vapor deposi...
- Patent number 6,158,382
- Issue date Dec 12, 2000
- Canon Kabushiki Kaisha
- Yoshio Segi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma immersion ion processor for fabricating semiconductor integr...
- Patent number 6,055,928
- Issue date May 2, 2000
- Ball Semiconductor, Inc.
- Ivan Herman Murzin
- C30 - CRYSTAL GROWTH
Information Patent Grant
VCR head drum coated with diamond-like hard carbon films and the me...
- Patent number 5,938,838
- Issue date Aug 17, 1999
- Korea Institute of Science and Technology
- Kwang-Ryeol Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing method and plasma processing apparatus
- Patent number 5,849,455
- Issue date Dec 15, 1998
- Canon Kabushiki Kaisha
- Shigenori Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for forming an excited gaseous atmosphere lacking...
- Patent number 5,807,614
- Issue date Sep 15, 1998
- L'Air Liquide, Societe Anonyme Pour L'Etude et L'Exploitation des Procedes Ge...
- Thierry Sindzingre
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBE...
- Publication number 20210388498
- Publication date Dec 16, 2021
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- J. Gary Eden
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC COMPONENT AND MANUFACTURING METHOD THEREOF
- Publication number 20170309764
- Publication date Oct 26, 2017
- YOUTEC CO., LTD.
- Yuuji HONDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and Method For Intraluminal Polymer Deposition
- Publication number 20150361558
- Publication date Dec 17, 2015
- Nordson Corporation
- David K. Foote
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING WITH DC ASSISTED RF POWER FOR IMPROVED CON...
- Publication number 20140057447
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Jang-Gyoo Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM DEPOSITION APPARATUS
- Publication number 20130206067
- Publication date Aug 15, 2013
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
POWER LANCE AND PLASMA-ENHANCED COATING WITH HIGH FREQUENCY COUPLING
- Publication number 20130209704
- Publication date Aug 15, 2013
- KRONES AG
- Jochen Krueger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Treating Containers
- Publication number 20120231182
- Publication date Sep 13, 2012
- KAIATECH, INC.
- Ronald Stevens
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
- Publication number 20110240221
- Publication date Oct 6, 2011
- TOKYO ELECTRON LIMITED
- Takashi Yamamoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ACTIVATED GAS INJECTOR, FILM DEPOSITION APPARATUS, AND FILM DEPOSIT...
- Publication number 20100055347
- Publication date Mar 4, 2010
- TOKYO ELECTRON LIMITED
- HITOSHI KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20080295965
- Publication date Dec 4, 2008
- Sekisui Chemical Co., Ltd.
- Mitsuhide NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Layer forming method using plasma discharge
- Publication number 20080268172
- Publication date Oct 30, 2008
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND METHOD THEREOF
- Publication number 20080237186
- Publication date Oct 2, 2008
- Sekisui Chemical Co., Ltd.
- Mitsuhide NOGAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA TREATMENT APPARATUS AND METHOD FOR PLASMA TREATMENT
- Publication number 20080085377
- Publication date Apr 10, 2008
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma processing apparatus and method
- Publication number 20060260748
- Publication date Nov 23, 2006
- Mitsuhide Nogami
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment apparatus and method for plasma treatment
- Publication number 20060189170
- Publication date Aug 24, 2006
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Film forming ring and method of manufacturing semiconductor device
- Publication number 20050191811
- Publication date Sep 1, 2005
- Hirotaka Ogihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Layer forming method, product comprising the layer, optical film, d...
- Publication number 20050181606
- Publication date Aug 18, 2005
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Layer forming method, product comprising the layer, optical film, d...
- Publication number 20050172899
- Publication date Aug 11, 2005
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma treatment apparatus and method for plasma treatment
- Publication number 20040112537
- Publication date Jun 17, 2004
- Semiconductor Energy Laboratory Co., Ltd.
- Shunpei Yamazaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor device producing method and semiconductor device prod...
- Publication number 20030224616
- Publication date Dec 4, 2003
- Unryu Ogawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Layer forming method, product comprising the layer, optical film, d...
- Publication number 20030170472
- Publication date Sep 11, 2003
- Konica Corporation
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gas-barrier synthetic resin vessel, device for producing the same,...
- Publication number 20030110822
- Publication date Jun 19, 2003
- Kiyonori Shimada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for forming thin film, article having thin film, optical fil...
- Publication number 20030082412
- Publication date May 1, 2003
- Kazuhiro Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Plasma deposition device for forming thin film
- Publication number 20020007793
- Publication date Jan 24, 2002
- Osamu Sakai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Coaxial electrodes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Magnetically enhanced high density plasma-chemical vapor deposition...

Method for RF power distribution in a multi-zone electrode array

Method and device for manufacturing a barrier layer on a flexible s...

Method and apparatus for treating containers

Semiconductor processing with DC assisted RF power for improved con...

Apparatus and method for intraluminal polymer deposition

Semiconductor processing with DC assisted RF power for improved con...

Activated gas injector, film deposition apparatus, and film deposit...

Plasma processing apparatus and semiconductor device manufacturing...

Plasma processing apparatus and method thereof

Layer forming method, product comprising the layer, optical film, d...

Plasma treatment apparatus and method for plasma treatment

Plasma-generated coating apparatus for medical devices and a method...

Layer forming method, product comprising the layer, optical film, d...

Plasma processing apparatus and method thereof

Plasma treatment apparatus and method for plasma treatment

Film forming ring and method of manufacturing semiconductor device

Plasma treatment apparatus and method for plasma treatment

Semiconductor device producing method and semiconductor device prod...

Layer forming method, product comprising the layer, optical film, d...

Gas-barrier synthetic resin vessel, device for producing the same,...

Layer-forming method using plasma state reactive gas

Plasma deposition device for forming thin film

Plasma process method

Plasma immersion ion processor for fabricating semiconductor integr...

Method for forming a deposited film by plasma chemical vapor deposi...

Plasma immersion ion processor for fabricating semiconductor integr...

VCR head drum coated with diamond-like hard carbon films and the me...

Plasma processing method and plasma processing apparatus

Method and device for forming an excited gaseous atmosphere lacking...

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBE...

ELECTRONIC COMPONENT AND MANUFACTURING METHOD THEREOF

Apparatus and Method For Intraluminal Polymer Deposition

SEMICONDUCTOR PROCESSING WITH DC ASSISTED RF POWER FOR IMPROVED CON...

FILM DEPOSITION APPARATUS

POWER LANCE AND PLASMA-ENHANCED COATING WITH HIGH FREQUENCY COUPLING

Method and Apparatus for Treating Containers

PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...

ACTIVATED GAS INJECTOR, FILM DEPOSITION APPARATUS, AND FILM DEPOSIT...

PLASMA PROCESSING APPARATUS

Layer forming method using plasma discharge

PLASMA PROCESSING APPARATUS AND METHOD THEREOF

PLASMA TREATMENT APPARATUS AND METHOD FOR PLASMA TREATMENT

Plasma processing apparatus and method

Plasma treatment apparatus and method for plasma treatment

Film forming ring and method of manufacturing semiconductor device

Layer forming method, product comprising the layer, optical film, d...

Layer forming method, product comprising the layer, optical film, d...

Plasma treatment apparatus and method for plasma treatment

Semiconductor device producing method and semiconductor device prod...

Layer forming method, product comprising the layer, optical film, d...

Gas-barrier synthetic resin vessel, device for producing the same,...

Method for forming thin film, article having thin film, optical fil...

Plasma deposition device for forming thin film