Cold traps

Industry

CPC
Y10S55/15

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YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S55/00Gas separation

Current Industry

Y10S55/15Cold traps

Industries

Patents Grantslast 30 patents

Information Patent Grant
Particle trap for a plasma source
- Patent number 7,914,603
- Issue date Mar 29, 2011
- MKS Instruments, Inc.
- Ali Shajii
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Trap device
- Patent number 7,867,312
- Issue date Jan 11, 2011
- Edwards Limited
- David Engerran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supply system for semiconductor manufacturing apparatus
- Patent number 7,862,638
- Issue date Jan 4, 2011
- Tokyo Electron Limited
- Shuji Moriya
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collecting unit for semiconductor process
- Patent number 7,727,296
- Issue date Jun 1, 2010
- Tokyo Electron Limited
- Yukio Tojo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Process byproduct trap and system including same
- Patent number 7,329,292
- Issue date Feb 12, 2008
- Micron Technology, Inc.
- Allen P. Mardian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for safe membrane operation
- Patent number 7,329,306
- Issue date Feb 12, 2008
- UOP LLC
- David R. Koch
- C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information Patent Grant
Trap apparatus
- Patent number 7,217,306
- Issue date May 15, 2007
- Ebara Corporation
- Norihiko Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process byproduct trap, methods of use, and system including same
- Patent number 7,044,997
- Issue date May 16, 2006
- Micron Technology, Inc.
- Allen P. Mardian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Processing system, evacuating system for processing system, low-pre...
- Patent number 6,966,936
- Issue date Nov 22, 2005
- Tokyo Electron Limited
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap for CVD furnace
- Patent number 6,908,499
- Issue date Jun 21, 2005
- Taiwan Semiconductor Manufacturing Co., Ltd
- Leon Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust gas filtration device and auxiliary filtration device
- Patent number 6,835,221
- Issue date Dec 28, 2004
- Anelva Corporation
- Toshihiro Rikyuu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold traps for vapor lubrication processes
- Patent number 6,830,600
- Issue date Dec 14, 2004
- Seagate Technology LLC
- Paul Stephen McLeod
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trap apparatus
- Patent number 6,763,700
- Issue date Jul 20, 2004
- Ebara Corporation
- Norihiko Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for decreasing water vapor in compressed gas
- Patent number 6,758,883
- Issue date Jul 6, 2004
- George William Doak
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for collecting reversely subliming substance and apparatus t...
- Patent number 6,638,345
- Issue date Oct 28, 2003
- Nippon Shokubai Co., Ltd.
- Tsukasa Takahashi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Apparatus for condensing and collecting hot gases
- Patent number 6,572,686
- Issue date Jun 3, 2003
- The United States of America as represented by the United States Department o...
- John L. Biernat
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Trap apparatus
- Patent number 6,553,811
- Issue date Apr 29, 2003
- Ebara Corporation
- Norihiko Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Exhaust gas filtration device, auxiliary filtration device and trap...
- Patent number 6,547,844
- Issue date Apr 15, 2003
- Anelva Corporation
- Toshihiro Rikyuu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap assembly
- Patent number 6,517,592
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Trap apparatus and method for condensable by-products of deposition...
- Patent number 6,488,745
- Issue date Dec 3, 2002
- MKS Instruments, Inc.
- Youfan Gu
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Adjustable cold trap with different stages
- Patent number 6,319,299
- Issue date Nov 20, 2001
- Vanguard International Semiconductor Corporation
- Shih-Min Shih
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Device for the deposition of substances
- Patent number 6,258,153
- Issue date Jul 10, 2001
- Siemens Aktiengesellschaft
- Frank Hintermaier
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap equipped with curvilinear cooling plate
- Patent number 6,241,793
- Issue date Jun 5, 2001
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jui-Hsiung Lee
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Integrated temperature controlled exhaust and cold trap assembly
- Patent number 6,206,971
- Issue date Mar 27, 2001
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Temperature-gradient type multistage condenser
- Patent number 5,885,313
- Issue date Mar 23, 1999
- Shionogi & Co., Ltd.
- Joji Okamoto
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Fluid cooled trap
- Patent number 5,820,641
- Issue date Oct 13, 1998
- MKS Instruments, Inc.
- Youfan Gu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Installation to regenerate cold traps loaded with the hydride and o...
- Patent number 5,149,493
- Issue date Sep 22, 1992
- Commissariat a l'Energie Atomique
- Christian Latge
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Natural gas treating system including mercury trap
- Patent number 4,982,050
- Issue date Jan 1, 1991
- Mobil Oil Corporation
- Douglas J. Gammie
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Adsorption filter with high air permeability
- Patent number 4,981,501
- Issue date Jan 1, 1991
- Hasso von Blucher
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Adsorption filter with high air permeability
- Patent number 4,906,263
- Issue date Mar 6, 1990
- Hasso von Blucher
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

Patents Applicationslast 30 patents

Information Patent Application
PARTICLE TRAP FOR A PLASMA SOURCE
- Publication number 20090320677
- Publication date Dec 31, 2009
- MKS Instruments, Inc.
- Ali Shajii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Trap device
- Publication number 20090078123
- Publication date Mar 26, 2009
- David Engerran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20080251018
- Publication date Oct 16, 2008
- TOKYO ELECTRON LIMITED
- Shuji MORIYA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Collecting unit for semiconductor process
- Publication number 20080104935
- Publication date May 8, 2008
- Yukio Tojo
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Process byproduct trap, methods of use, and system including same
- Publication number 20060101993
- Publication date May 18, 2006
- Allen P. Mardian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Process byproduct trap, method of use, and system including same
- Publication number 20050061150
- Publication date Mar 24, 2005
- Allen P. Mardian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Trap apparatus
- Publication number 20040200214
- Publication date Oct 14, 2004
- Norihiko Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Cold trap for CVD furnace
- Publication number 20040069224
- Publication date Apr 15, 2004
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Leon Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus and method for decreasing water vapor in compressed gas
- Publication number 20040055466
- Publication date Mar 25, 2004
- George William Doak
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Trap apparatus
- Publication number 20030172713
- Publication date Sep 18, 2003
- Norihiko Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust gas filtration device and auxiliary filtration device
- Publication number 20030101699
- Publication date Jun 5, 2003
- Toshihiro Rikyuu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Processing system, evacuating system for processing system, low-pre...
- Publication number 20030037730
- Publication date Feb 27, 2003
- TOKYO ELECTRON LIMITED
- Hideaki Yamasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TRAP APPARATUS AND METHOD FOR CONDENSABLE BY-PRODUCTS OF DEPOSITION...
- Publication number 20020134244
- Publication date Sep 26, 2002
- MKS Instruments, Inc.
- Youfan Gu
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Trap apparatus
- Publication number 20020056311
- Publication date May 16, 2002
- Norihiko Nomura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for collecting reversely subliming substance and apparatus t...
- Publication number 20020053288
- Publication date May 9, 2002
- Tsukasa Takahashi
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
Cold traps for vapor lubrication processes
- Publication number 20020006467
- Publication date Jan 17, 2002
- Michael Joseph Stirniman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Gate valve for an integrated temperature controlled exhaust and col...
- Publication number 20010050053
- Publication date Dec 13, 2001
- APPLIED MATERIALS, INC.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Integrated temperature controlled exhaust and cold trap assembly
- Publication number 20010004879
- Publication date Jun 28, 2001
- APPLIED MATERIALS, INC.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Exhaust gas filtration device, auxiliary filtration device and trap...
- Publication number 20010003892
- Publication date Jun 21, 2001
- ANELVA CORPORATION
- Toshihiro Rikyuu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle trap for a plasma source

Trap device

Gas supply system for semiconductor manufacturing apparatus

Collecting unit for semiconductor process

Process byproduct trap and system including same

Process for safe membrane operation

Trap apparatus

Process byproduct trap, methods of use, and system including same

Processing system, evacuating system for processing system, low-pre...

Cold trap for CVD furnace

Exhaust gas filtration device and auxiliary filtration device

Cold traps for vapor lubrication processes

Trap apparatus

Apparatus and method for decreasing water vapor in compressed gas

Method for collecting reversely subliming substance and apparatus t...

Apparatus for condensing and collecting hot gases

Trap apparatus

Exhaust gas filtration device, auxiliary filtration device and trap...

Cold trap assembly

Trap apparatus and method for condensable by-products of deposition...

Adjustable cold trap with different stages

Device for the deposition of substances

Cold trap equipped with curvilinear cooling plate

Integrated temperature controlled exhaust and cold trap assembly

Temperature-gradient type multistage condenser

Fluid cooled trap

Installation to regenerate cold traps loaded with the hydride and o...

Natural gas treating system including mercury trap

Adsorption filter with high air permeability

Adsorption filter with high air permeability

Patents Applicationslast 30 patents

PARTICLE TRAP FOR A PLASMA SOURCE

Trap device

GAS SUPPLY SYSTEM FOR SEMICONDUCTOR MANUFACTURING APPARATUS

Collecting unit for semiconductor process

Process byproduct trap, methods of use, and system including same

Process byproduct trap, method of use, and system including same

Trap apparatus

Cold trap for CVD furnace

Apparatus and method for decreasing water vapor in compressed gas

Trap apparatus

Exhaust gas filtration device and auxiliary filtration device

Processing system, evacuating system for processing system, low-pre...

TRAP APPARATUS AND METHOD FOR CONDENSABLE BY-PRODUCTS OF DEPOSITION...

Trap apparatus

Method for collecting reversely subliming substance and apparatus t...

Cold traps for vapor lubrication processes

Gate valve for an integrated temperature controlled exhaust and col...

Integrated temperature controlled exhaust and cold trap assembly

Exhaust gas filtration device, auxiliary filtration device and trap...