Claims
- 1. A vapor lubrication station, comprising:one or more cold trans to prevent migration of lubrication molecules that are not deposited onto storage discs during a vapor lubrication process from the vapor lubrication station into adjacent process chambers, said adjacent process chambers used to deposit successive layers onto the storage discs to produce discs, and/or transport chambers used in transporting the storage discs between the process chambers.
- 2. The vapor lubrication station of claim 1, further comprising:one or more entry/exit ports disposed between the vapor lubrication station and/or the adjacent process chambers, wherein the one or more cold traps are disposed around the one or more entry/exit ports, respectively.
- 3. The vapor lubrication station of claim 2, wherein the one or more entry exit ports comprise:gates and/or valves that open and close to receive and output the discs.
- 4. The vapor lubrication station of claim 1, wherein the vapor lubrication station is held under low working pressure in the range of about 5×10−5 to 5×10−9 Torr by means of high performance vacuum pumps.
- 5. The vapor lubrication station of claim 1, wherein the cold traps comprise:cold trapping surfaces to prevent migration of lubrication molecules that are not deposited onto the disc into the adjacent process chambers.
- 6. The vapor lubrication station of claim 5, wherein the cold trapping surfaces are cooled to have a temperature in the range of about −195° C. to 25° C. using refrigerants selected from a group consisting of liquid nitrogen, low-temperature refrigerant, and cold water.
- 7. The vapor lubrication station of claim 5, further comprising:one or more temperature sensors to sense the temperature of the cold trapping surfaces and to output a signal proportional to the sensed temperature; and a control circuitry coupled to the temperature sensors to monitor the temperature of the cold trapping surfaces by receiving the signal from the temperature sensors, and further to automatically shut-off the operation of the vapor lubrication station to prevent accidental migration of lubrication molecules due to a failure in the operation of the cold traps.
RELATED APPLICATION
This application claims the benefit of U.S. Provisional Application Ser. No. 60/197,230 filed Apr. 14, 2000 under 35 U.S.C. 119(e).
US Referenced Citations (27)
Provisional Applications (1)
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Number |
Date |
Country |
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60/197230 |
Apr 2000 |
US |