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SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
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Publication number 20230386809
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Publication date Nov 30, 2023
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Taiwan Semiconductor Manufacturing Company, Ltd.
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Chia-Hung TSAI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SLIT DIAPHRAGM
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Publication number 20230274922
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Publication date Aug 31, 2023
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SINGULUS TECHNOLOGIES AG
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Peter WEIPERT
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
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Publication number 20230260770
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Publication date Aug 17, 2023
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Taiwan Semiconductor Manufacturing Company Limited
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Chia-Hung TSAI
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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METHOD OF OPERATING A PVD APPARATUS
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Publication number 20230212736
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Publication date Jul 6, 2023
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SPTS TECHNOLOGIES LIMITED
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Scott HAYMORE
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
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Publication number 20220415636
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Publication date Dec 29, 2022
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Applied Materials, Inc.
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Jothilingam Ramalingam
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
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Publication number 20220415637
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Publication date Dec 29, 2022
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Applied Materials, Inc.
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Jothilingam Ramalingam
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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DEPOSITION SYSTEM AND METHOD
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Publication number 20220406583
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Publication date Dec 22, 2022
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Taiwan Semiconductor Manufacturing Co., Ltd.
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Wen-Hao CHENG
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A MAGNETRON PLASMA SPUTTERING ARRANGEMENT
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Publication number 20220351952
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Publication date Nov 3, 2022
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Danmarks Tekniske Universitet
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Eugen STAMATE
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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VACUUM PROCESSING APPARATUS
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Publication number 20220341028
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Publication date Oct 27, 2022
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TOKYO ELECTRON LIMITED
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Kanto NAKAMURA
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SPUTTERING APPARATUS
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Publication number 20210296103
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Publication date Sep 23, 2021
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TOKYO ELECTRON LIMITED
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Shota ISHIBASHI
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H01 - BASIC ELECTRIC ELEMENTS
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SPUTTER DEVICE
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Publication number 20210262080
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Publication date Aug 26, 2021
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TOKYO ELECTRON LIMITED
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Junichi TAKEI
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H01 - BASIC ELECTRIC ELEMENTS
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