TREA

Collimators, shutters, apertures

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Industry

  • CPC
  • H01J37/3447
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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3447Collimators, shutters, apertures
Industries

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    METHOD AND DEVICE FOR PROTECTING OXYGEN-SENSITIVE TARGET MATERIALS...
    • Publication number 20250239442
    • Publication date Jul 24, 2025
    • FHR Anlagenbau GmbH
    • Sven HAEBERLEIN
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHUTTER SYSTEM FOR GAP-FREE SHIELDING OF A COATING SOURCE, AND ASSO...
    • Publication number 20250210332
    • Publication date Jun 26, 2025
    • FHR Anlagenbau GmbH
    • Sven HAEBERLEIN
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING APPARATUS
    • Publication number 20250183020
    • Publication date Jun 5, 2025
    • SAMSUNG DISPLAY CO., LTD.
    • Gi Woon SUNG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SHUTTER DISC FOR A SEMICONDUCTOR PROCESSING TOOL
    • Publication number 20250137114
    • Publication date May 1, 2025
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Yi-Lin WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20240387156
    • Publication date Nov 21, 2024
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROCESS SHUTTER ARRANGEMENT
    • Publication number 20240347326
    • Publication date Oct 17, 2024
    • Evatec AG
    • JÖRG KERSCHBAUMER
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    JET IMPINGEMENT COOLING ASSEMBLY FOR PLASMA WINDOWS POSITIONED IN A...
    • Publication number 20240297017
    • Publication date Sep 5, 2024
    • SHINE Technologies, LLC
    • Preston Barrows
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    PVD SYSTEM AND COLLIMATOR
    • Publication number 20240240306
    • Publication date Jul 18, 2024
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Kuan-Lin Chen
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SOFT MAGNETIC MULTILAYER DESPOSITION APPARATUS, METHODS OF MANUFACT...
    • Publication number 20240186064
    • Publication date Jun 6, 2024
    • Evatec AG
    • Claudiu Valentin FALUB
    • C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
  • Information Patent Application

    DEVICE AND METHOD FOR PLASMA GENERATION IN A WIDE PRESSURE RANGE AN...
    • Publication number 20240177979
    • Publication date May 30, 2024
    • INFICON AG
    • Astrid WALDNER
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    Sputtering Apparatus
    • Publication number 20240162021
    • Publication date May 16, 2024
    • Sumitomo Precision Products Co., Ltd.
    • Yukitaka YAMAGUCHI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHODS AND APPARATUS FOR PHYSICAL VAPOR DEPOSITION (PVD) DIELECTRI...
    • Publication number 20240105433
    • Publication date Mar 28, 2024
    • Applied Materials, Inc.
    • Jothilingam RAMALINGAM
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM DEPOSITION INTO TRENCHES AND VIAS
    • Publication number 20240021421
    • Publication date Jan 18, 2024
    • Ascentool, Inc.
    • George Xinsheng Guo
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    METHODS AND APPARATUS FOR CONTROLLING ION FRACTION IN PHYSICAL VAPO...
    • Publication number 20230402271
    • Publication date Dec 14, 2023
    • Applied Materials, Inc.
    • Xiaodong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
    • Publication number 20230386809
    • Publication date Nov 30, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chia-Hung TSAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    IN SITU AND TUNABLE DEPOSITION OF A FILM
    • Publication number 20230374654
    • Publication date Nov 23, 2023
    • Taiwan Semiconductor Manufacturing Company, Ltd.
    • Chia-Hsi Wang
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SLIT DIAPHRAGM
    • Publication number 20230274922
    • Publication date Aug 31, 2023
    • SINGULUS TECHNOLOGIES AG
    • Peter WEIPERT
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    SYSTEM FOR DEPOSITING PIEZOELECTRIC MATERIALS, METHODS FOR USING TH...
    • Publication number 20230257869
    • Publication date Aug 17, 2023
    • QORVO BIOTECHNOLOGIES, LLC
    • Derya Deniz
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
    • Publication number 20230260770
    • Publication date Aug 17, 2023
    • Taiwan Semiconductor Manufacturing Company Limited
    • Chia-Hung TSAI
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    METHOD OF OPERATING A PVD APPARATUS
    • Publication number 20230212736
    • Publication date Jul 6, 2023
    • SPTS TECHNOLOGIES LIMITED
    • Scott HAYMORE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
    • Publication number 20230187191
    • Publication date Jun 15, 2023
    • Applied Materials, Inc.
    • Kirankumar Neelasandra SAVANDAIAH
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SHUTTER DISK FOR PHYSICAL VAPOR DEPOSITION (PVD) CHAMBER
    • Publication number 20230073011
    • Publication date Mar 9, 2023
    • Zhiyong WANG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
    • Publication number 20220415636
    • Publication date Dec 29, 2022
    • Applied Materials, Inc.
    • Jothilingam Ramalingam
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
    • Publication number 20220415637
    • Publication date Dec 29, 2022
    • Applied Materials, Inc.
    • Jothilingam Ramalingam
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    DEPOSITION SYSTEM AND METHOD
    • Publication number 20220406583
    • Publication date Dec 22, 2022
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Wen-Hao CHENG
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PROTECTIVE SHUTTER FOR CHARGED PARTICLE MICROSCOPE
    • Publication number 20220406562
    • Publication date Dec 22, 2022
    • FEI Company
    • Philip Brundage
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    SPUTTERING TARGET ASSEMBLY TO PREVENT OVERETCH OF BACKING PLATE AND...
    • Publication number 20220351953
    • Publication date Nov 3, 2022
    • Taiwan Semiconductor Manufacturing Company Limited
    • Chen-Fang Chung
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    A MAGNETRON PLASMA SPUTTERING ARRANGEMENT
    • Publication number 20220351952
    • Publication date Nov 3, 2022
    • Danmarks Tekniske Universitet
    • Eugen STAMATE
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    VACUUM PROCESSING APPARATUS
    • Publication number 20220341028
    • Publication date Oct 27, 2022
    • TOKYO ELECTRON LIMITED
    • Kanto NAKAMURA
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHOD...
    • Publication number 20220271726
    • Publication date Aug 25, 2022
    • Qorvo US, Inc.
    • Derya Deniz
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...