TREA

Combinations of two or more different dielectric layers having a low dielectric constant

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  • CPC
  • H01L21/76835
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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/76835Combinations of two or more different dielectric layers having a low dielectric constant
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