Combined electrostatic-electromagnetic means

Industry

CPC
H01J2237/1508

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1508Combined electrostatic-electromagnetic means

Industries

Patents Grantslast 30 patents

Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,282,675
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Beam bender
- Patent number 11,011,342
- Issue date May 18, 2021
- Ebara Corporation
- Takeshi Murakami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 10,892,138
- Issue date Jan 12, 2021
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning transmission electron microscope
- Patent number 10,636,622
- Issue date Apr 28, 2020
- Tescan Orsay Holding, A.S.
- Petras Stanislav
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring spherical and chromatic aberrations in cathode lens elect...
- Patent number 10,593,510
- Issue date Mar 17, 2020
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Signal separator for a multi-beam charged particle inspection appar...
- Patent number 10,504,687
- Issue date Dec 10, 2019
- Technische Universiteit Delft
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,424,459
- Issue date Sep 24, 2019
- Hitachi High-Technologies Corporation
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of reducing coma and chromatic aberration in a charged parti...
- Patent number 10,297,418
- Issue date May 21, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Measuring spherical and chromatic aberrations in cathode lens elect...
- Patent number 10,283,315
- Issue date May 7, 2019
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for aberration correction in an electron beam system
- Patent number 10,090,131
- Issue date Oct 2, 2018
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for GHz rate high duty cycle pulsing and manipulation of...
- Patent number 9,697,982
- Issue date Jul 4, 2017
- Euclid Techlabs, LLC
- Sergey V Baryshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing and/or for observing an object, and particle...
- Patent number 9,685,300
- Issue date Jun 20, 2017
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Swing objective lens
- Patent number 9,583,306
- Issue date Feb 28, 2017
- Hermes Microvision Inc.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, charged particle gun, and charged particle beam appar...
- Patent number 9,570,268
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hybrid scanning for ion implantation
- Patent number 9,443,698
- Issue date Sep 13, 2016
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reflection electron beam projection lithography using an ExB separator
- Patent number 9,355,818
- Issue date May 31, 2016
- KLA-Tencor Corporation
- Paul F. Petric
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-beam scanning electron beam device and methods of using the same
- Patent number 9,153,413
- Issue date Oct 6, 2015
- Applied Materials Israel, Ltd.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,729,491
- Issue date May 20, 2014
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 8,648,300
- Issue date Feb 11, 2014
- Hitachi High-Technologies Corporation
- Miki Isawa
- G01 - MEASURING TESTING
Information Patent Grant
Monochromator for charged particle beam apparatus
- Patent number 8,592,761
- Issue date Nov 26, 2013
- Hermes Microvision Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Achromatic beam deflector, achromatic beam separator, charged parti...
- Patent number 8,373,136
- Issue date Feb 12, 2013
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Gerald Schoenecker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 8,153,969
- Issue date Apr 10, 2012
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Electromagnet with active field containment
- Patent number 7,800,082
- Issue date Sep 21, 2010
- Varian Semiconductor Equipment Associates, Inc.
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection method and inspection system using charged particle beam
- Patent number 7,462,828
- Issue date Dec 9, 2008
- Hitachi High-Technologies Corporation
- Atsuko Fukada
- G01 - MEASURING TESTING
Information Patent Grant
Electric-magnetic field-generating element and assembling method fo...
- Patent number 7,429,740
- Issue date Sep 30, 2008
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Carlo Salvesen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and electron beam inspection system
- Patent number 7,394,066
- Issue date Jul 1, 2008
- Hitachi High-Technologies Corporation
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Large-field scanning of charged particles
- Patent number 7,394,069
- Issue date Jul 1, 2008
- KLA-Tencor Technologies Corporation
- Kirk J. Bertsche
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam apparatus and a device manufacturing method using the...
- Patent number 7,385,197
- Issue date Jun 10, 2008
- Ebara Corporation
- Mamoru Nakasuji
- G01 - MEASURING TESTING
Information Patent Grant
Method and fine-control collimator for accurate collimation and pre...
- Patent number 7,105,839
- Issue date Sep 12, 2006
- Nicholas R. White
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...
- Publication number 20240079200
- Publication date Mar 7, 2024
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY...
- Publication number 20240055219
- Publication date Feb 15, 2024
- ASML NETHERLANDS B.V.
- Mans Johan Bertil OSTERBERG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20220319808
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
SYSTEM AND METHOD FOR ALIGNMENT OF SECONDARY BEAMS IN MULTI-BEAM IN...
- Publication number 20220189726
- Publication date Jun 16, 2022
- ASML NETHERLANDS B.V.
- Qingpo XI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20210151291
- Publication date May 20, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
BEAM BENDER
- Publication number 20190378677
- Publication date Dec 12, 2019
- EBARA CORPORATION
- Takeshi Murakami
- G01 - MEASURING TESTING
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20190279844
- Publication date Sep 12, 2019
- ASML Netherlands B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
MEASURING SPHERICAL AND CHROMATIC ABERRATIONS IN CATHODE LENS ELECT...
- Publication number 20190206655
- Publication date Jul 4, 2019
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEASURING SPHERICAL AND CHROMATIC ABERRATIONS IN CATHODE LENS ELECT...
- Publication number 20180337017
- Publication date Nov 22, 2018
- International Business Machines Corporation
- Rudolf M. Tromp
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Aberration Correction in an Electron Beam System
- Publication number 20180158644
- Publication date Jun 7, 2018
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20170271121
- Publication date Sep 21, 2017
- Hitachi High-Technologies Corporation
- Wen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR GHz RATE HIGH DUTY CYCLE PULSING AND MANIPULATION OF...
- Publication number 20160293377
- Publication date Oct 6, 2016
- Euclid TechLabs, LLC
- Sergey V. Baryshev
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PROCESSING AND/OR FOR OBSERVING AN OBJECT, AND PARTICLE...
- Publication number 20160181058
- Publication date Jun 23, 2016
- CARL ZEISS MICROSCOPY GMBH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Swing Objective Lens
- Publication number 20160172150
- Publication date Jun 16, 2016
- HERMES MICROVISION INC.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM APPAR...
- Publication number 20160104597
- Publication date Apr 14, 2016
- Hitachi High-Technologies Corporation
- Yuta IMAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20140175303
- Publication date Jun 26, 2014
- NuFlare Technology, Inc.
- Takanao TOUYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140021366
- Publication date Jan 23, 2014
- Hitachi High-Technologies Corporation
- Hideto Dohi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20140014836
- Publication date Jan 16, 2014
- Hitachi High-Technologies Corporation
- Miki ISAWA
- G01 - MEASURING TESTING
Information Patent Application
Monochromator for Charged Particle Beam Apparatus
- Publication number 20120318978
- Publication date Dec 20, 2012
- HERMES MICROVISION INC.
- WEIMING REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reflection Electron Beam Projection Lithography Using an ExB Separator
- Publication number 20110291021
- Publication date Dec 1, 2011
- Paul F. PETRIC
- B82 - NANO-TECHNOLOGY
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20110163229
- Publication date Jul 7, 2011
- APPLIED MATERIALS ISRAEL, LTD.
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICL...
- Publication number 20110139978
- Publication date Jun 16, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Jürgen FROSIEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTI...
- Publication number 20110089322
- Publication date Apr 21, 2011
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Gerald SCHOENECKER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH THROUGHPUT SEM TOOL
- Publication number 20100320382
- Publication date Dec 23, 2010
- APPLIED MATERIALS ISRAEL, LTD.
- Gilad Almogy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HYBRID SCANNING FOR ION IMPLANTATION
- Publication number 20100084576
- Publication date Apr 8, 2010
- Axcelis Technologies,Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM
- Publication number 20090184255
- Publication date Jul 23, 2009
- Hitachi High-Technologies Corporation
- Atsuko FUKADA
- G01 - MEASURING TESTING
Information Patent Application
Electron Microscope And Electron Beam Inspection System
- Publication number 20080265161
- Publication date Oct 30, 2008
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNET WITH ACTIVE FIELD CONTAINMENT
- Publication number 20070187619
- Publication date Aug 16, 2007
- Peter L. Kellerman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope and electron bean inspection system.
- Publication number 20070181808
- Publication date Aug 9, 2007
- Hisaya Murakoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electric-magnetic field-generating element and assembling method fo...
- Publication number 20070023673
- Publication date Feb 1, 2007
- ICT. INTEGRATED CIRCUIT TESTING GESELLSCHAFT FUR HALBLEITERPRUFTECHNIK MBH
- Carlo Salvesen
- H01 - BASIC ELECTRIC ELEMENTS

Combined electrostatic-electromagnetic means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Multi-beam inspection apparatus with improved detection performance...

Multi-beam inspection apparatus with improved detection performance...

Beam bender

Multi-beam inspection apparatus with improved detection performance...

Scanning transmission electron microscope

Measuring spherical and chromatic aberrations in cathode lens elect...

Signal separator for a multi-beam charged particle inspection appar...

Charged particle beam device

Method of reducing coma and chromatic aberration in a charged parti...

Measuring spherical and chromatic aberrations in cathode lens elect...

Method and system for aberration correction in an electron beam system

Apparatus for GHz rate high duty cycle pulsing and manipulation of...

Method for processing and/or for observing an object, and particle...

Swing objective lens

Electron gun, charged particle gun, and charged particle beam appar...

Hybrid scanning for ion implantation

Reflection electron beam projection lithography using an ExB separator

Multi-beam scanning electron beam device and methods of using the same

Charged particle beam apparatus

Charged particle beam apparatus

Monochromator for charged particle beam apparatus

Achromatic beam deflector, achromatic beam separator, charged parti...

Inspection method and inspection system using charged particle beam

Electromagnet with active field containment

Inspection method and inspection system using charged particle beam

Electric-magnetic field-generating element and assembling method fo...

Electron microscope and electron beam inspection system

Large-field scanning of charged particles

Electron beam apparatus and a device manufacturing method using the...

Method and fine-control collimator for accurate collimation and pre...

Patents Applicationslast 30 patents

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...

ELECTRON OPTICAL COLUMN AND METHOD FOR DIRECTING A BEAM OF PRIMARY...

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

SYSTEM AND METHOD FOR ALIGNMENT OF SECONDARY BEAMS IN MULTI-BEAM IN...

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

BEAM BENDER

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

MEASURING SPHERICAL AND CHROMATIC ABERRATIONS IN CATHODE LENS ELECT...

MEASURING SPHERICAL AND CHROMATIC ABERRATIONS IN CATHODE LENS ELECT...

Method and System for Aberration Correction in an Electron Beam System

Charged Particle Beam Device

APPARATUS FOR GHz RATE HIGH DUTY CYCLE PULSING AND MANIPULATION OF...

METHOD FOR PROCESSING AND/OR FOR OBSERVING AN OBJECT, AND PARTICLE...

Swing Objective Lens

ELECTRON GUN, CHARGED PARTICLE GUN, AND CHARGED PARTICLE BEAM APPAR...

CHARGED PARTICLE BEAM WRITING APPARATUS

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM APPARATUS

Monochromator for Charged Particle Beam Apparatus

Reflection Electron Beam Projection Lithography Using an ExB Separator

HIGH THROUGHPUT SEM TOOL

CHARGED PARTICLE BEAM DEVICE, METHOD OF OPERATING A CHARGED PARTICL...

ACHROMATIC BEAM DEFLECTOR, ACHROMATIC BEAM SEPARATOR, CHARGED PARTI...

HIGH THROUGHPUT SEM TOOL

HYBRID SCANNING FOR ION IMPLANTATION

INSPECTION METHOD AND INSPECTION SYSTEM USING CHARGED PARTICLE BEAM

Electron Microscope And Electron Beam Inspection System

ELECTROMAGNET WITH ACTIVE FIELD CONTAINMENT

Electron microscope and electron bean inspection system.

Electric-magnetic field-generating element and assembling method fo...