composed of oxides or glassy oxides or oxide based glass

Industry

CPC
H01L21/316

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Parent Industries

HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/316composed of oxides or glassy oxides or oxide based glass

Industries

Patents Grantslast 30 patents

Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 11,935,842
- Issue date Mar 19, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,881,379
- Issue date Jan 23, 2024
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,272
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film deposition apparatus for fine pattern forming
- Patent number 11,404,271
- Issue date Aug 2, 2022
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 11,094,646
- Issue date Aug 17, 2021
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,964,534
- Issue date Mar 30, 2021
- ASM International
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,879,066
- Issue date Dec 29, 2020
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device and manufacturing method of semiconductor device
- Patent number 10,756,098
- Issue date Aug 25, 2020
- Denso Corporation
- Eisuke Banno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method of the same
- Patent number 10,468,531
- Issue date Nov 5, 2019
- Semiconductor Energy Laboratory Co., Ltd.
- Kunio Kimura
- G02 - OPTICS
Information Patent Grant
Enhanced thin film deposition
- Patent number 10,297,444
- Issue date May 21, 2019
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and method of processi...
- Patent number 10,290,494
- Issue date May 14, 2019
- Kokusai Electric Corporation
- Masanao Fukuda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of manufacturing an integrated circuit having stress tuning...
- Patent number 10,269,730
- Issue date Apr 23, 2019
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shin-Puu Jeng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for oxidizing a substrate surface using oxygen
- Patent number 10,256,290
- Issue date Apr 9, 2019
- Comptek Solutions Oy
- Pekka Laukkanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming dielectric films, new precursors and their use in...
- Patent number 10,217,629
- Issue date Feb 26, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,191,378
- Issue date Jan 29, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,176,992
- Issue date Jan 8, 2019
- Tokyo Electron Limited
- Kazuhide Hasebe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of forming controllably conductive oxide
- Patent number 10,147,877
- Issue date Dec 4, 2018
- Cypress Semiconductor Corporation
- Matthew Buynoski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mask pattern forming method, fine pattern forming method, and film...
- Patent number 10,141,187
- Issue date Nov 27, 2018
- Tokyo Electron Limited
- Kazuhide Hasebe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 9,972,583
- Issue date May 15, 2018
- SPTS Technologies Limited
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,251
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device and substrate processi...
- Patent number 9,966,252
- Issue date May 8, 2018
- Hitachi Kokusai Electric Inc.
- Ryota Sasajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electricoacoustic component with structured conductor and dielectri...
- Patent number 9,941,858
- Issue date Apr 10, 2018
- Snaptrack, Inc.
- Werner Ruile
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Vapor deposition of metal oxides, silicates and phosphates, and sil...
- Patent number 9,905,414
- Issue date Feb 27, 2018
- President and Fellows of Harvard College
- Roy Gerald Gordon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Fabrication technique for high frequency, high power group III nitr...
- Patent number 9,882,039
- Issue date Jan 30, 2018
- University of South Carolina
- M. Asif Khan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of vapor deposition with multiple vapor sources
- Patent number 9,873,942
- Issue date Jan 23, 2018
- ASM IP Holding B.V.
- Christophe Pomarede
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for oxidizing a substrate surface using oxygen
- Patent number 9,837,486
- Issue date Dec 5, 2017
- Comptek Solutions Oy
- Pekka Laukkanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Enhanced thin film deposition
- Patent number 9,831,094
- Issue date Nov 28, 2017
- ASM International N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High κ gate stack on III-V compound semiconductors
- Patent number 9,805,949
- Issue date Oct 31, 2017
- GLOBALFOUNDRIES Inc.
- Jean Fompeyrine
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of forming a semiconductor device by thermally treating a c...
- Patent number 9,799,523
- Issue date Oct 24, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hui OuYang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanowire and method of fabricating the same
- Patent number 9,735,235
- Issue date Aug 15, 2017
- United Microelectronics Corp.
- Tsai-Yu Wen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...
- Publication number 20190041756
- Publication date Feb 7, 2019
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENHANCED THIN FILM DEPOSITION
- Publication number 20180130666
- Publication date May 10, 2018
- ASM INTERNATIONAL N.V.
- Antti Rahtu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Materials and Methods of Forming Controlled Void
- Publication number 20140363950
- Publication date Dec 11, 2014
- Raymond Nicholas Vrtis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF SELF-FORMING BARRIER INTEGRATION WITH PORE STUFFED ULK M...
- Publication number 20140353835
- Publication date Dec 4, 2014
- Moosung M. CHAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...
- Publication number 20140349834
- Publication date Nov 27, 2014
- Jun Fujii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...
- Publication number 20140349139
- Publication date Nov 27, 2014
- MITSUBISHI MATERIALS CORPORATION
- Jun Fujii
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
MgO-Based Coating for Electrically Insulating Semiconductive Substr...
- Publication number 20140332935
- Publication date Nov 13, 2014
- Céline BONDOUX
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...
- Publication number 20140327064
- Publication date Nov 6, 2014
- Toshihiro IIZUKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS
- Publication number 20140327065
- Publication date Nov 6, 2014
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SOLID-STATE ELECTRONIC DEVICE
- Publication number 20140319660
- Publication date Oct 30, 2014
- Tatsuya Shimoda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME
- Publication number 20140322920
- Publication date Oct 30, 2014
- Young Soo KWON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...
- Publication number 20140322923
- Publication date Oct 30, 2014
- Leonard Forbes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140318451
- Publication date Oct 30, 2014
- HITACHI KOKUSAI ELECTRIC INC.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electricoacoustic Component with Structured Conductor and Dielectri...
- Publication number 20140312736
- Publication date Oct 23, 2014
- Werner Ruile
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING POROUS STRUCTURE AND METHOD FOR FORMING PA...
- Publication number 20140284306
- Publication date Sep 25, 2014
- Kabushiki Kaisha Toshiba
- Koji Asakawa
- B82 - NANO-TECHNOLOGY
Information Patent Application
CVD PRECURSORS
- Publication number 20140256159
- Publication date Sep 11, 2014
- Dow Corning Corporation
- XIAOBING ZHOU
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPU...
- Publication number 20140256157
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Ikuo SAWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS
- Publication number 20140246784
- Publication date Sep 4, 2014
- Micron Technology, Inc.
- Luan C. Tran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAFE HANDLING OF LOW ENERGY, HIGH DOSE ARSENIC, PHOSPHORUS, AND BOR...
- Publication number 20140248759
- Publication date Sep 4, 2014
- Applied Materials, Inc.
- Majeed A. FOAD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR OPTOELECTRONICS DEVICES
- Publication number 20140217539
- Publication date Aug 7, 2014
- SILECS OY
- Juha T. Rantala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF FORMING A PORUOUS INSULATOR, AND RELATED METHODS OF FORM...
- Publication number 20140206203
- Publication date Jul 24, 2014
- Micron Technology, Inc.
- Warren M. Farnworth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SILICON GERMANIUM AND GERMANIUM MULTIGATE AND NANOWIRE STRUCTURES F...
- Publication number 20140170817
- Publication date Jun 19, 2014
- Been-Yih Jin
- B82 - NANO-TECHNOLOGY
Information Patent Application
CAPACITORS AND METHODS WITH PRASEODYMIUM OXIDE INSULATORS
- Publication number 20140138795
- Publication date May 22, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate Processing Apparatus and Method of Manufacturing Semicond...
- Publication number 20140106573
- Publication date Apr 17, 2014
- Hitachi Kokusai Electric Inc.
- Tadashi TERASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM
- Publication number 20140084355
- Publication date Mar 27, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS
- Publication number 20140065806
- Publication date Mar 6, 2014
- Micron Technology, Inc.
- Kie Y. Ahn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20140065840
- Publication date Mar 6, 2014
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES
- Publication number 20140057455
- Publication date Feb 27, 2014
- Applied Materials, Inc.
- Yoshitaka YOKOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIALS CONTAINING VOIDS WITH VOID SIZE CONTROLLED ON THE NANOMET...
- Publication number 20140050860
- Publication date Feb 20, 2014
- International Business Machines Corporation
- Stephen M. Gates
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING METHOD
- Publication number 20140051263
- Publication date Feb 20, 2014
- TOKYO ELECTRON LIMITED
- Kouji Tanaka
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

composed of oxides or glassy oxides or oxide based glass

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods of manufacturing an integrated circuit having stress tuning...

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Film deposition apparatus for fine pattern forming

Methods of manufacturing an integrated circuit having stress tuning...

Enhanced thin film deposition

Mask pattern forming method, fine pattern forming method, and film...

Semiconductor device and manufacturing method of semiconductor device

Semiconductor device and manufacturing method of the same

Enhanced thin film deposition

Method of manufacturing semiconductor device and method of processi...

Methods of manufacturing an integrated circuit having stress tuning...

Method for oxidizing a substrate surface using oxygen

Method of forming dielectric films, new precursors and their use in...

Mask pattern forming method, fine pattern forming method, and film...

Mask pattern forming method, fine pattern forming method, and film...

Method of forming controllably conductive oxide

Mask pattern forming method, fine pattern forming method, and film...

Durable, heat-resistant multi-layer coatings and coated articles

Method of manufacturing semiconductor device and substrate processi...

Method of manufacturing semiconductor device and substrate processi...

Electricoacoustic component with structured conductor and dielectri...

Vapor deposition of metal oxides, silicates and phosphates, and sil...

Fabrication technique for high frequency, high power group III nitr...

Methods of vapor deposition with multiple vapor sources

Method for oxidizing a substrate surface using oxygen

Enhanced thin film deposition

High κ gate stack on III-V compound semiconductors

Methods of forming a semiconductor device by thermally treating a c...

Nanowire and method of fabricating the same

Patents Applicationslast 30 patents

MASK PATTERN FORMING METHOD, FINE PATTERN FORMING METHOD, AND FILM...

ENHANCED THIN FILM DEPOSITION

Materials and Methods of Forming Controlled Void

METHODS OF SELF-FORMING BARRIER INTEGRATION WITH PORE STUFFED ULK M...

COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...

COMPOSITION FOR FERROELECTRIC THIN FILM FORMATION, METHOD FOR FORMI...

MgO-Based Coating for Electrically Insulating Semiconductive Substr...

METHOD FOR FABRICATING A METAL-INSULATOR-METAL (MIM) CAPACITOR HAVI...

CONDUCTIVE LAYERS FOR HAFNIUM SILICON OXYNITRIDE FILMS

SOLID-STATE ELECTRONIC DEVICE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE SAME

DIELECTRICS CONTAINING AT LEAST ONE OF A REFRACTORY METAL OR A NON-...

SUBSTRATE PROCESSING APPARATUS

Electricoacoustic Component with Structured Conductor and Dielectri...

METHOD FOR MANUFACTURING POROUS STRUCTURE AND METHOD FOR FORMING PA...

CVD PRECURSORS

VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPU...

SEMICONDUCTOR STRUCTURES INCLUDING TIGHT PITCH CONTACTS

SAFE HANDLING OF LOW ENERGY, HIGH DOSE ARSENIC, PHOSPHORUS, AND BOR...

SEMICONDUCTOR OPTOELECTRONICS DEVICES

METHODS OF FORMING A PORUOUS INSULATOR, AND RELATED METHODS OF FORM...

SILICON GERMANIUM AND GERMANIUM MULTIGATE AND NANOWIRE STRUCTURES F...

CAPACITORS AND METHODS WITH PRASEODYMIUM OXIDE INSULATORS

Substrate Processing Apparatus and Method of Manufacturing Semicond...

APPARATUS HAVING A DIELECTRIC CONTAINING SCANDIUM AND GADOLINIUM

ELECTRONIC DEVICES INCLUDING BARIUM STRONTIUM TITANIUM OXIDE FILMS

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

METHOD OF IMPROVING OXIDE GROWTH RATE OF SELECTIVE OXIDATION PROCESSES

MATERIALS CONTAINING VOIDS WITH VOID SIZE CONTROLLED ON THE NANOMET...

FILM FORMING METHOD