Composition uniformity or desired gradient

Industry

CPC
H01J37/3473

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3473Composition uniformity or desired gradient

Industries

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus, film deposition method, and control device
- Patent number 10,636,634
- Issue date Apr 28, 2020
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functionally graded material by in-situ gradient alloy sputter depo...
- Patent number 10,597,772
- Issue date Mar 24, 2020
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing a multilayer coating and device for carrying o...
- Patent number 10,418,231
- Issue date Sep 17, 2019
- Leybold Optics GmbH
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Counter based time compensation to reduce process shifting in react...
- Patent number 10,400,327
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Mohammad Kamruzzaman Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silver copper indium gallium selenide reactive sputtering method an...
- Patent number 10,156,009
- Issue date Dec 18, 2018
- Beijing Apollo Ding Rong Solar Technology Co., Ltd.
- Rouin Farshchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering apparatus, film deposition method, and control device
- Patent number 9,991,102
- Issue date Jun 5, 2018
- Canon Anelva Corporation
- Koji Tsunekawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functionally graded material by in-situ gradient alloy sputter depo...
- Patent number 9,963,778
- Issue date May 8, 2018
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetron-sputtering coating system and method, and display substrate
- Patent number 9,934,948
- Issue date Apr 3, 2018
- BOE Technology Group Co., Ltd.
- Xiaokun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for pretreating and coating bodies
- Patent number 9,812,299
- Issue date Nov 7, 2017
- CemeCon AG
- Rainer Cremer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Functionally graded material by in-situ gradient alloy sputter depo...
- Patent number 9,758,861
- Issue date Sep 12, 2017
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Single-process-chamber deposition system
- Patent number 7,588,669
- Issue date Sep 15, 2009
- Ascentool, Inc.
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Run-to-run control method for automated control of metal deposition...
- Patent number 7,324,865
- Issue date Jan 29, 2008
- Advanced Micro Devices, Inc.
- Thomas Sonderman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic thin film disks with a nonuniform composition
- Patent number 6,979,388
- Issue date Dec 27, 2005
- Hitachi Global Storage Technologies Netherlands, B.V.
- Ernesto E. Marinero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetic thin film disks with a nonuniform composition
- Patent number 6,709,774
- Issue date Mar 23, 2004
- International Business Machines Corporation
- Ernesto E. Marinero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method
- Patent number 5,660,694
- Issue date Aug 26, 1997
- Ohmi; Tadahiro
- Tadahiro Ohmi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming a functional deposited film by bias sputtering p...
- Patent number 5,510,011
- Issue date Apr 23, 1996
- Canon Kabushiki Kaisha
- Nobuyuki Okamura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming thin oxide film
- Patent number 5,225,393
- Issue date Jul 6, 1993
- International Superconductivity Technology Center
- Norio Homma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for forming thin oxide film
- Patent number 5,106,821
- Issue date Apr 21, 1992
- International Superconductivity Technology Center
- Norio Homma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target for sputtering
- Patent number 4,610,774
- Issue date Sep 9, 1986
- Hitachi, Ltd.
- Masao Sakata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Plasma Etching with Metal Sputtering
- Publication number 20240249927
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Minjoon Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
- Publication number 20180254172
- Publication date Sep 6, 2018
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Functionally Graded Material By In-Situ Gradient Alloy Sputter Depo...
- Publication number 20180187301
- Publication date Jul 5, 2018
- International Business Machines Corporation
- Hans-Juergen Eickelmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF SOLID STATE ELECTROLYTE ON ELECTRODE LAYERS IN ELECTR...
- Publication number 20160343552
- Publication date Nov 24, 2016
- Applied Materials, Inc.
- Lizhong SUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING A DIELECTRIC AND/OR BARRIER LAYER OR MULTILAYE...
- Publication number 20150325418
- Publication date Nov 12, 2015
- Abengoa Solar New Technologies, S.A.
- Jorge GIL ROSTRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING A SUBSTRATE AND COATER
- Publication number 20150214018
- Publication date Jul 30, 2015
- Applied Materials, Inc.
- Evelyn Scheer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for Producing a Multilayer Coating and Device for Carrying O...
- Publication number 20150162173
- Publication date Jun 11, 2015
- LEYBOLD OPTICS GMBH
- Michael Scherer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sputtering Apparatus and Method of Manufacturing Display Substrate...
- Publication number 20140151216
- Publication date Jun 5, 2014
- SAMSUNG DISPLAY CO., LTD.
- Sang-Woo Sohn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
- Publication number 20130284590
- Publication date Oct 31, 2013
- Applied Materials, Inc.
- Marcus Bender
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE
- Publication number 20130105298
- Publication date May 2, 2013
- Canon ANELVA Corporation
- Koji TSUNEKAWA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR THE MULTI-LAYER AND MULTI-COMPONENT COATIN...
- Publication number 20120282478
- Publication date Nov 8, 2012
- INSTITUTO TECNOLOGICO Y DE ESTUDIOS SUPERIORES DE MONTERREY
- Joaquín Oseguera Peña
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL
- Publication number 20120080309
- Publication date Apr 5, 2012
- Applied Materials, Inc.
- Marcus BENDER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PRETREATING AND COATING BODIES
- Publication number 20110180389
- Publication date Jul 28, 2011
- Rainer Cremer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus
- Publication number 20090260975
- Publication date Oct 22, 2009
- Mervyn Howard Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Single-process-chamber deposition system
- Publication number 20070017799
- Publication date Jan 25, 2007
- George Xinsheng Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method for producing a multilayer coating and device for carrying o...
- Publication number 20060151312
- Publication date Jul 13, 2006
- Michael Scherer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus
- Publication number 20050115823
- Publication date Jun 2, 2005
- Mervyn Howard Davis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetic thin film disks with a nonuniform composition
- Publication number 20040146748
- Publication date Jul 29, 2004
- Ernesto E. Marinero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetic thin film disks with a nonuniform composition
- Publication number 20030053271
- Publication date Mar 20, 2003
- Ernesto E. Marinero
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Composition uniformity or desired gradient

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sputtering apparatus, film deposition method, and control device

Functionally graded material by in-situ gradient alloy sputter depo...

Method for producing a multilayer coating and device for carrying o...

Counter based time compensation to reduce process shifting in react...

Silver copper indium gallium selenide reactive sputtering method an...

Sputtering apparatus, film deposition method, and control device

Functionally graded material by in-situ gradient alloy sputter depo...

Magnetron-sputtering coating system and method, and display substrate

Apparatus and method for pretreating and coating bodies

Functionally graded material by in-situ gradient alloy sputter depo...

Single-process-chamber deposition system

Run-to-run control method for automated control of metal deposition...

Magnetic thin film disks with a nonuniform composition

Magnetic thin film disks with a nonuniform composition

Film forming method

Method for forming a functional deposited film by bias sputtering p...

Process for forming thin oxide film

Process for forming thin oxide film

Target for sputtering

Patents Applicationslast 30 patents

Plasma Etching with Metal Sputtering

SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE

Functionally Graded Material By In-Situ Gradient Alloy Sputter Depo...

DEPOSITION OF SOLID STATE ELECTROLYTE ON ELECTRODE LAYERS IN ELECTR...

METHOD FOR PRODUCING A DIELECTRIC AND/OR BARRIER LAYER OR MULTILAYE...

METHOD FOR COATING A SUBSTRATE AND COATER

Method for Producing a Multilayer Coating and Device for Carrying O...

Sputtering Apparatus and Method of Manufacturing Display Substrate...

SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL

SPUTTERING APPARATUS, FILM DEPOSITION METHOD, AND CONTROL DEVICE

METHOD AND APPARATUS FOR THE MULTI-LAYER AND MULTI-COMPONENT COATIN...

SYSTEMS AND METHODS FOR FORMING A LAYER OF SPUTTERED MATERIAL

APPARATUS AND METHOD FOR PRETREATING AND COATING BODIES

Apparatus

Single-process-chamber deposition system

Method for producing a multilayer coating and device for carrying o...

Apparatus

Magnetic thin film disks with a nonuniform composition

Magnetic thin film disks with a nonuniform composition