comprising a gas as the active medium

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CPC
H01S3/2366

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Parent Industries

HELECTRICITY H01Electric elements H01SDEVICES USING STIMULATED EMISSION H01S3/00Lasers

Current Industry

H01S3/2366comprising a gas as the active medium

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Laser system and electronic device manufacturing method
- Patent number 12,160,085
- Issue date Dec 3, 2024
- Gigaphoton Inc.
- Taisuke Miura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature control apparatus
- Patent number 12,124,053
- Issue date Oct 22, 2024
- Cymer, LLC
- Eric Anders Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pulse width expansion apparatus and electronic device manufacturing...
- Patent number 12,038,567
- Issue date Jul 16, 2024
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas management system
- Patent number 11,949,202
- Issue date Apr 2, 2024
- Cymer, LLC
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature control apparatus
- Patent number 11,561,407
- Issue date Jan 24, 2023
- Cymer, LLC
- Eric Anders Mason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and extreme ultraviolet light generation system
- Patent number 11,539,180
- Issue date Dec 27, 2022
- Gigaphoton Inc.
- Yoshiaki Kurosawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser system
- Patent number 11,217,962
- Issue date Jan 4, 2022
- Gigaphoton Inc.
- Masaki Arakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arrangement of expanding optical flows for efficient laser extraction
- Patent number 11,165,216
- Issue date Nov 2, 2021
- INNOVEN ENERGY LLC
- Robert O. Hunter
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Gas laser apparatus
- Patent number 11,081,850
- Issue date Aug 3, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Gas laser apparatus
- Patent number 10,971,883
- Issue date Apr 6, 2021
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser device, laser machining apparatus, and method for controlling...
- Patent number 10,965,089
- Issue date Mar 30, 2021
- Mitsubishi Electric Corporation
- Tomohiro Kyoto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,892,594
- Issue date Jan 12, 2021
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature control apparatus
- Patent number 10,845,610
- Issue date Nov 24, 2020
- Cymer, LLC
- Eric Anders Mason
- G02 - OPTICS
Information Patent Grant
Laser device, and extreme ultraviolet light generation system
- Patent number 10,842,008
- Issue date Nov 17, 2020
- Gigaphoton Inc.
- Takashi Suganuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source
- Patent number 10,686,290
- Issue date Jun 16, 2020
- ASML Netherlands B.V.
- Olga Alexandrovna Sytina
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target trajectory metrology in an extreme ultraviolet light source
- Patent number 10,681,796
- Issue date Jun 9, 2020
- ASML Netherlands B.V.
- Michael Leslie Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Target trajectory metrology in an extreme ultraviolet light source
- Patent number 10,681,797
- Issue date Jun 9, 2020
- ASML Netherlands B.V.
- Michael Leslie Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Excimer laser apparatus
- Patent number 10,673,200
- Issue date Jun 2, 2020
- Gigaphoton Inc.
- Yousuke Fujimaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas laser apparatus
- Patent number 10,666,008
- Issue date May 26, 2020
- Gigaphoton Inc.
- Natsushi Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid-state laser device, solid-state laser system, and laser devic...
- Patent number 10,587,089
- Issue date Mar 10, 2020
- Gigaphoton Inc.
- Takashi Onose
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Spectral feature control apparatus
- Patent number 10,416,471
- Issue date Sep 17, 2019
- Cymer, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Rotation and acceleration sensor based on superluminal ring lasers
- Patent number 10,371,523
- Issue date Aug 6, 2019
- Digital Optics Technologies, Inc.
- Selim M. Shahriar
- G01 - MEASURING TESTING
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,306,743
- Issue date May 28, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Solid-state laser system
- Patent number 10,256,594
- Issue date Apr 9, 2019
- Gigaphoton Inc.
- Takashi Onose
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,251,255
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Gas optimization in a gas discharge light source
- Patent number 10,218,147
- Issue date Feb 26, 2019
- Cymer, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and extreme ultraviolet light generation apparatus
- Patent number 10,211,589
- Issue date Feb 19, 2019
- Mitsubishi Electric Corporation
- Kouji Funaoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for direct compression of laser pulses with large temporal r...
- Patent number 10,170,883
- Issue date Jan 1, 2019
- INNOVEN ENERGY LLC
- Robert O. Hunter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser apparatus and extreme ultraviolet light generating apparatus
- Patent number 10,165,665
- Issue date Dec 25, 2018
- Gigaphoton Inc.
- Seiji Nogiwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Light beam measurement device, laser apparatus, and light beam sepa...
- Patent number 10,151,640
- Issue date Dec 11, 2018
- Gigaphoton Inc.
- Masato Moriya
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
SPECTRAL FEATURE CONTROL APPARATUS
- Publication number 20250013066
- Publication date Jan 9, 2025
- CYMER, LLC
- Eric Anders Mason
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE
- Publication number 20240291226
- Publication date Aug 29, 2024
- CYMER, LLC
- Siyu Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET
- Publication number 20240283210
- Publication date Aug 22, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...
- Publication number 20240222927
- Publication date Jul 4, 2024
- CYMER, LLC
- Paul Christopher Melcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTUR...
- Publication number 20220393422
- Publication date Dec 8, 2022
- Gigaphoton Inc.
- Natsuhiko KOUNO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
- Publication number 20220350120
- Publication date Nov 3, 2022
- Gigaphoton Inc.
- Hirotaka MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS
- Publication number 20220255286
- Publication date Aug 11, 2022
- CYMER, LLC
- Yingbo Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTUR...
- Publication number 20220131335
- Publication date Apr 28, 2022
- Gigaphoton Inc.
- Akiyoshi SUZUKI
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...
- Publication number 20210366710
- Publication date Nov 25, 2021
- Gigaphoton Inc.
- Kaname IMOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...
- Publication number 20200388980
- Publication date Dec 10, 2020
- Mitsubishi Electric Corporation
- Tomohiro KYOTO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
GAS MANAGEMENT SYSTEM
- Publication number 20200358240
- Publication date Nov 12, 2020
- Yzzer Roman Gutierrez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS LASER APPARATUS
- Publication number 20200244029
- Publication date Jul 30, 2020
- Gigaphoton Inc.
- Natsushi SUZUKI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Arrangement of Expanding Optical Flows for Efficient Laser Extraction
- Publication number 20200028313
- Publication date Jan 23, 2020
- INNOVEN ENERGY LLC
- Robert O. Hunter
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20190288478
- Publication date Sep 19, 2019
- Gigaphoton Inc.
- Yoshiaki KUROSAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE
- Publication number 20190190229
- Publication date Jun 20, 2019
- CYMER, LLC
- Tanuj Aggarwal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190141826
- Publication date May 9, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190037677
- Publication date Jan 31, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20180110116
- Publication date Apr 19, 2018
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM
- Publication number 20170302050
- Publication date Oct 19, 2017
- Gigaphoton Inc.
- Kouji KAKIZAKI
- G02 - OPTICS
Information Patent Application
Monitoring Laser Beams
- Publication number 20170085054
- Publication date Mar 23, 2017
- TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
- Joachim Schulz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20170019983
- Publication date Jan 19, 2017
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20160336713
- Publication date Nov 17, 2016
- Gigaphoton Inc.
- Seiji NOGIWA
- G02 - OPTICS
Information Patent Application
Optically Pumped Microplasma Lasers
- Publication number 20160301182
- Publication date Oct 13, 2016
- Physical Sciences, Inc.
- W. Terry Rawlins
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
- Publication number 20160285222
- Publication date Sep 29, 2016
- Gigaphoton Inc.
- Takashi SUGANUMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT G...
- Publication number 20150188277
- Publication date Jul 2, 2015
- GIGAPHOTON INC.
- Krzysztof NOWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20150028231
- Publication date Jan 29, 2015
- GIGAPHOTON INC.
- Hakaru MIZOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20140348189
- Publication date Nov 27, 2014
- GIGAPHOTON INC.
- Krzysztof NOWAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER SYSTEM AND LASER LIGHT GENERATION METHOD
- Publication number 20140341239
- Publication date Nov 20, 2014
- GIGAPHOTON INC.
- Masaya YOSHINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CO2 LASER DEVICE AND CO2 LASER PROCESSING DEVICE
- Publication number 20140334514
- Publication date Nov 13, 2014
- MITSUBISHI ELECTRIC CORPORATION
- Yoichi Tanino
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS
- Publication number 20140300950
- Publication date Oct 9, 2014
- Krzysztof NOWAK
- H01 - BASIC ELECTRIC ELEMENTS

comprising a gas as the active medium

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Laser system and electronic device manufacturing method

Spectral feature control apparatus

Pulse width expansion apparatus and electronic device manufacturing...

Gas management system

Spectral feature control apparatus

Laser apparatus and extreme ultraviolet light generation system

Laser system

Arrangement of expanding optical flows for efficient laser extraction

Gas laser apparatus

Gas laser apparatus

Laser device, laser machining apparatus, and method for controlling...

Gas optimization in a gas discharge light source

Spectral feature control apparatus

Laser device, and extreme ultraviolet light generation system

Radiation source

Target trajectory metrology in an extreme ultraviolet light source

Target trajectory metrology in an extreme ultraviolet light source

Excimer laser apparatus

Gas laser apparatus

Solid-state laser device, solid-state laser system, and laser devic...

Spectral feature control apparatus

Rotation and acceleration sensor based on superluminal ring lasers

System and method for generating extreme ultraviolet light

Solid-state laser system

System and method for generating extreme ultraviolet light

Gas optimization in a gas discharge light source

Laser apparatus and extreme ultraviolet light generation apparatus

Method for direct compression of laser pulses with large temporal r...

Laser apparatus and extreme ultraviolet light generating apparatus

Light beam measurement device, laser apparatus, and light beam sepa...

Patents Applicationslast 30 patents

SPECTRAL FEATURE CONTROL APPARATUS

GAS CONTROL APPARATUS FOR GAS DISCHARGE STAGE

PULSED POWER SYSTEMS WITH CONTROLLED REACTOR RESET

ELECTRONIC MODULE FOR A MAGNETIC SWITCHING NETWORK TO PRODUCE A PUL...

LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTUR...

PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...

CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS

LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTUR...

METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...

LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...

GAS MANAGEMENT SYSTEM

GAS LASER APPARATUS

Arrangement of Expanding Optical Flows for Efficient Laser Extraction

LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

LASER SYSTEM

Monitoring Laser Beams

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

LASER APPARATUS

Optically Pumped Microplasma Lasers

LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM

SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT G...

LASER APPARATUS

LASER APPARATUS

LASER SYSTEM AND LASER LIGHT GENERATION METHOD

CO2 LASER DEVICE AND CO2 LASER PROCESSING DEVICE

LASER APPARATUS