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comprising a gas as the active medium
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H01S3/2366
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ELECTRICITY
H01
Electric elements
H01S
DEVICES USING STIMULATED EMISSION
H01S3/00
Lasers
Current Industry
H01S3/2366
comprising a gas as the active medium
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Patents Grants
last 30 patents
Information
Patent Grant
Gas management system
Patent number
11,949,202
Issue date
Apr 2, 2024
Cymer, LLC
Yzzer Roman Gutierrez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spectral feature control apparatus
Patent number
11,561,407
Issue date
Jan 24, 2023
Cymer, LLC
Eric Anders Mason
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
11,539,180
Issue date
Dec 27, 2022
Gigaphoton Inc.
Yoshiaki Kurosawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system
Patent number
11,217,962
Issue date
Jan 4, 2022
Gigaphoton Inc.
Masaki Arakawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangement of expanding optical flows for efficient laser extraction
Patent number
11,165,216
Issue date
Nov 2, 2021
INNOVEN ENERGY LLC
Robert O. Hunter
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Gas laser apparatus
Patent number
11,081,850
Issue date
Aug 3, 2021
Gigaphoton Inc.
Natsushi Suzuki
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Gas laser apparatus
Patent number
10,971,883
Issue date
Apr 6, 2021
Gigaphoton Inc.
Natsushi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser device, laser machining apparatus, and method for controlling...
Patent number
10,965,089
Issue date
Mar 30, 2021
Mitsubishi Electric Corporation
Tomohiro Kyoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas optimization in a gas discharge light source
Patent number
10,892,594
Issue date
Jan 12, 2021
Cymer, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spectral feature control apparatus
Patent number
10,845,610
Issue date
Nov 24, 2020
Cymer, LLC
Eric Anders Mason
G02 - OPTICS
Information
Patent Grant
Laser device, and extreme ultraviolet light generation system
Patent number
10,842,008
Issue date
Nov 17, 2020
Gigaphoton Inc.
Takashi Suganuma
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source
Patent number
10,686,290
Issue date
Jun 16, 2020
ASML Netherlands B.V.
Olga Alexandrovna Sytina
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Target trajectory metrology in an extreme ultraviolet light source
Patent number
10,681,796
Issue date
Jun 9, 2020
ASML Netherlands B.V.
Michael Leslie Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Target trajectory metrology in an extreme ultraviolet light source
Patent number
10,681,797
Issue date
Jun 9, 2020
ASML Netherlands B.V.
Michael Leslie Price
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Excimer laser apparatus
Patent number
10,673,200
Issue date
Jun 2, 2020
Gigaphoton Inc.
Yousuke Fujimaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas laser apparatus
Patent number
10,666,008
Issue date
May 26, 2020
Gigaphoton Inc.
Natsushi Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solid-state laser device, solid-state laser system, and laser devic...
Patent number
10,587,089
Issue date
Mar 10, 2020
Gigaphoton Inc.
Takashi Onose
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Spectral feature control apparatus
Patent number
10,416,471
Issue date
Sep 17, 2019
Cymer, LLC
Eric Anders Mason
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Rotation and acceleration sensor based on superluminal ring lasers
Patent number
10,371,523
Issue date
Aug 6, 2019
Digital Optics Technologies, Inc.
Selim M. Shahriar
G01 - MEASURING TESTING
Information
Patent Grant
System and method for generating extreme ultraviolet light
Patent number
10,306,743
Issue date
May 28, 2019
Gigaphoton Inc.
Tsukasa Hori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Solid-state laser system
Patent number
10,256,594
Issue date
Apr 9, 2019
Gigaphoton Inc.
Takashi Onose
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
System and method for generating extreme ultraviolet light
Patent number
10,251,255
Issue date
Apr 2, 2019
Gigaphoton Inc.
Tsukasa Hori
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Gas optimization in a gas discharge light source
Patent number
10,218,147
Issue date
Feb 26, 2019
Cymer, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation apparatus
Patent number
10,211,589
Issue date
Feb 19, 2019
Mitsubishi Electric Corporation
Kouji Funaoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for direct compression of laser pulses with large temporal r...
Patent number
10,170,883
Issue date
Jan 1, 2019
INNOVEN ENERGY LLC
Robert O. Hunter
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generating apparatus
Patent number
10,165,665
Issue date
Dec 25, 2018
Gigaphoton Inc.
Seiji Nogiwa
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Light beam measurement device, laser apparatus, and light beam sepa...
Patent number
10,151,640
Issue date
Dec 11, 2018
Gigaphoton Inc.
Masato Moriya
G02 - OPTICS
Information
Patent Grant
System and method for generating extreme ultraviolet light
Patent number
10,117,317
Issue date
Oct 30, 2018
Gigaphoton Inc.
Tsukasa Hori
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Monitoring laser beams
Patent number
10,044,167
Issue date
Aug 7, 2018
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system
Patent number
9,966,721
Issue date
May 8, 2018
Gigaphoton Inc.
Kouji Kakizaki
G02 - OPTICS
Patents Applications
last 30 patents
Information
Patent Application
LIGHT TRANSMISSION UNIT, LASER APPARATUS, AND METHOD FOR MANUFACTUR...
Publication number
20220393422
Publication date
Dec 8, 2022
Gigaphoton Inc.
Natsuhiko KOUNO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PULSE WIDTH EXPANSION APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20220350120
Publication date
Nov 3, 2022
Gigaphoton Inc.
Hirotaka MIYAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONTROL SYSTEM FOR A PLURALITY OF DEEP ULTRAVIOLET OPTICAL OSCILLATORS
Publication number
20220255286
Publication date
Aug 11, 2022
CYMER, LLC
Yingbo Zhao
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LASER APPARATUS, LASER PROCESSING SYSTEM, AND METHOD FOR MANUFACTUR...
Publication number
20220131335
Publication date
Apr 28, 2022
Gigaphoton Inc.
Akiyoshi SUZUKI
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR CRYSTALLINE THIN FILM AND LA...
Publication number
20210366710
Publication date
Nov 25, 2021
Gigaphoton Inc.
Kaname IMOKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE, LASER MACHINING APPARATUS, AND METHOD FOR CONTROLLING...
Publication number
20200388980
Publication date
Dec 10, 2020
Mitsubishi Electric Corporation
Tomohiro KYOTO
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
GAS MANAGEMENT SYSTEM
Publication number
20200358240
Publication date
Nov 12, 2020
Yzzer Roman Gutierrez
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER APPARATUS
Publication number
20200244029
Publication date
Jul 30, 2020
Gigaphoton Inc.
Natsushi SUZUKI
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Arrangement of Expanding Optical Flows for Efficient Laser Extraction
Publication number
20200028313
Publication date
Jan 23, 2020
INNOVEN ENERGY LLC
Robert O. Hunter
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
Publication number
20190288478
Publication date
Sep 19, 2019
Gigaphoton Inc.
Yoshiaki KUROSAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS OPTIMIZATION IN A GAS DISCHARGE LIGHT SOURCE
Publication number
20190190229
Publication date
Jun 20, 2019
CYMER, LLC
Tanuj Aggarwal
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Publication number
20190141826
Publication date
May 9, 2019
GIGAPHOTON INC.
Tsukasa HORI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Publication number
20190037677
Publication date
Jan 31, 2019
GIGAPHOTON INC.
Tsukasa HORI
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Publication number
20180110116
Publication date
Apr 19, 2018
GIGAPHOTON INC.
Tsukasa HORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SYSTEM
Publication number
20170302050
Publication date
Oct 19, 2017
Gigaphoton Inc.
Kouji KAKIZAKI
G02 - OPTICS
Information
Patent Application
Monitoring Laser Beams
Publication number
20170085054
Publication date
Mar 23, 2017
TRUMPF Lasersystems for Semiconductor Manufacturing GmbH
Joachim Schulz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
Publication number
20170019983
Publication date
Jan 19, 2017
GIGAPHOTON INC.
Tsukasa HORI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS
Publication number
20160336713
Publication date
Nov 17, 2016
Gigaphoton Inc.
Seiji NOGIWA
G02 - OPTICS
Information
Patent Application
Optically Pumped Microplasma Lasers
Publication number
20160301182
Publication date
Oct 13, 2016
Physical Sciences, Inc.
W. Terry Rawlins
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
Publication number
20160285222
Publication date
Sep 29, 2016
Gigaphoton Inc.
Takashi SUGANUMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SLAB AMPLIFIER, AND LASER APPARATUS AND EXTREME ULTRAVIOLET LIGHT G...
Publication number
20150188277
Publication date
Jul 2, 2015
GIGAPHOTON INC.
Krzysztof NOWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS
Publication number
20150028231
Publication date
Jan 29, 2015
GIGAPHOTON INC.
Hakaru MIZOGUCHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER APPARATUS
Publication number
20140348189
Publication date
Nov 27, 2014
GIGAPHOTON INC.
Krzysztof NOWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SYSTEM AND LASER LIGHT GENERATION METHOD
Publication number
20140341239
Publication date
Nov 20, 2014
GIGAPHOTON INC.
Masaya YOSHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CO2 LASER DEVICE AND CO2 LASER PROCESSING DEVICE
Publication number
20140334514
Publication date
Nov 13, 2014
MITSUBISHI ELECTRIC CORPORATION
Yoichi Tanino
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER APPARATUS
Publication number
20140300950
Publication date
Oct 9, 2014
Krzysztof NOWAK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Seed Laser Mode Stabilization
Publication number
20140072006
Publication date
Mar 13, 2014
Cymer, Inc.
Richard L. Sandstrom
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Intracavity Loss Element for Power Amplifier
Publication number
20140028988
Publication date
Jan 30, 2014
Robert J. Rafac
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
REGENERATIVE AMPLIFIER, LASER APPARATUS, AND EXTREME ULTRAVIOLET LI...
Publication number
20130315272
Publication date
Nov 28, 2013
GIGAPHOTON INC.
Krzysztof NOWAK
B82 - NANO-TECHNOLOGY
Information
Patent Application
LASER APPARATUS
Publication number
20130114215
Publication date
May 9, 2013
GIGAPHOTON INC.
Yasufumi Kawasuji
G02 - OPTICS