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comprising alternated and repeated etching and passivation steps
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Electric elements
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SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
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Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/30655
comprising alternated and repeated etching and passivation steps
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last 30 patents
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Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Methods and devices related to radio frequency devices
Patent number
11,948,802
Issue date
Apr 2, 2024
Infineon Technologies Dresden GmbH & Co. KG
Hans Taddiken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for forming stacked layers and devices formed thereof
Patent number
11,942,363
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Shih-Yao Lin
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Conductive feature with non-uniform critical dimension and method o...
Patent number
11,935,816
Issue date
Mar 19, 2024
NANYA TECHNOLOGY CORPORATION
Shing-Yih Shih
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of manufacturing semiconductor structure and semiconductor s...
Patent number
11,917,806
Issue date
Feb 27, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Xiaoling Wang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method of depositing a pre-etch protective layer
Patent number
11,915,940
Issue date
Feb 27, 2024
Applied Materials, Inc.
Zhi Gang Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Recessed portion in a substrate and method of forming the same
Patent number
11,886,015
Issue date
Jan 30, 2024
Advanced Semiconductor Engineering, Inc.
Shao Hsuan Chuang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Mask-integrated surface protective tape, and method of producing a...
Patent number
11,862,504
Issue date
Jan 2, 2024
Furukawa Electric Co., Ltd.
Akira Akutsu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Manufacturing method for deep trench capacitor with scalloped profile
Patent number
11,854,817
Issue date
Dec 26, 2023
KEY FOUNDRY CO., LTD.
Seung Mo Jo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Methods of forming high aspect ratio features
Patent number
11,854,869
Issue date
Dec 26, 2023
Ken Tokashiki
H01 - BASIC ELECTRIC ELEMENTS
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Alternating etch and passivation process
Patent number
11,848,212
Issue date
Dec 19, 2023
Lam Research Corporation
Seongjun Heo
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma etching techniques
Patent number
11,837,467
Issue date
Dec 5, 2023
Toyko Electron Limited
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Etching method and element chip manufacturing method
Patent number
11,817,323
Issue date
Nov 14, 2023
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shogo Okita
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus
Patent number
11,810,758
Issue date
Nov 7, 2023
Tokyo Electron Limited
Satoshi Itou
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Method of reducing residual contamination in singulated semiconduct...
Patent number
11,784,093
Issue date
Oct 10, 2023
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Gordon M. Grivna
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Plasma processing apparatus and plasma processing method
Patent number
11,776,792
Issue date
Oct 3, 2023
HITACHI HIGH-TECH CORPORATION
Shunsuke Tashiro
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Water soluble organic-inorganic hybrid mask formulations and their...
Patent number
11,764,061
Issue date
Sep 19, 2023
Applied Materials, Inc.
Wenguang Li
H01 - BASIC ELECTRIC ELEMENTS
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Semiconductor device and manufacturing method for semiconductor device
Patent number
11,756,991
Issue date
Sep 12, 2023
Lapis Semiconductor Co., Ltd.
Hiroshi Shibata
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
System and method for removing scalloping and tapering effects in h...
Patent number
11,735,478
Issue date
Aug 22, 2023
Ecole Polytechnique Federale de Lausanne (EPFL)
Simone Frasca
H01 - BASIC ELECTRIC ELEMENTS
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Systems and methods for nitride-containing film removal
Patent number
11,728,177
Issue date
Aug 15, 2023
Applied Materials, Inc.
Baiwei Wang
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Field-effect transistor and method for manufacturing the same
Patent number
11,694,901
Issue date
Jul 4, 2023
SHANGHAI INDUSTRIAL μTECHNOLOGY RESEARCH INSTITUTE
Qiuxia Xu
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Apparatus for processing substrate
Patent number
11,658,036
Issue date
May 23, 2023
Tokyo Electron Limited
Masahiro Tabata
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Method for manufacturing a semiconductor device having an interconn...
Patent number
11,658,069
Issue date
May 23, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Ming-Fa Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Conductive feature with non-uniform critical dimension and method o...
Patent number
11,610,833
Issue date
Mar 21, 2023
NANYA TECHNOLOGY CORPORATION
Shing-Yih Shih
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Atomic layer etching
Patent number
11,574,813
Issue date
Feb 7, 2023
ASM IP Holding B.V.
Charles Dezelah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer etching on microdevices and nanodevices
Patent number
11,565,936
Issue date
Jan 31, 2023
The Regents of the University of Colorado
Steven M. George
B81 - MICRO-STRUCTURAL TECHNOLOGY
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Patent Grant
Plasma processing method and plasma processing apparatus
Patent number
11,557,485
Issue date
Jan 17, 2023
Tokyo Electron Limited
Yoshihide Kihara
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Alternating etch and passivation process
Patent number
11,551,938
Issue date
Jan 10, 2023
Lam Research Corporation
Seongjun Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma etching techniques
Patent number
11,538,690
Issue date
Dec 27, 2022
Tokyo Electron Limited
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cryogenic atomic layer etch with noble gases
Patent number
11,515,166
Issue date
Nov 29, 2022
Applied Materials, Inc.
Alvaro Garcia De Gorordo
B81 - MICRO-STRUCTURAL TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
METHODS AND DEVICES RELATED TO RADIO FREQUENCY DEVICES
Publication number
20240145253
Publication date
May 2, 2024
Infineon Technologies Dresden GmbH & Co., KG
Hans Taddiken
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Polymer Removal via Multiple Flash Steps during Plasma Etch
Publication number
20240136195
Publication date
Apr 25, 2024
TOKYO ELECTRON LIMITED
Alec Dorfner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PACKAGES AND METHODS OF MANUFACTURING THEREOF
Publication number
20240120207
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Lung-Kai Mao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MICROELECTRONIC DEVICES INCLUDING HIGH ASPECT RATIO FEATURES
Publication number
20240120237
Publication date
Apr 11, 2024
Lodestar Licensing Group LLC
Ken Tokashiki
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
MANUFACTURING METHOD OF CHIPS
Publication number
20240112955
Publication date
Apr 4, 2024
Disco Corporation
Yu ZHAO
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ALTERNATING ETCH AND PASSIVATION PROCESS
Publication number
20240087904
Publication date
Mar 14, 2024
LAM RESEARCH CORPORATION
Seongjun Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF REDUCING RESIDUAL CONTAMINATION IN SINGULATED SEMICONDUCT...
Publication number
20230402325
Publication date
Dec 14, 2023
SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
Gordon M. Grivna
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE
Publication number
20230378252
Publication date
Nov 23, 2023
LAPIS SEMICONDUCTOR CO., LTD.
Hiroshi SHIBATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
Publication number
20230343647
Publication date
Oct 26, 2023
Plasma-Therm LLC
Russell Westerman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METAL-BASED LINER PROTECTION FOR HIGH ASPECT RATIO PLASMA ETCH
Publication number
20230298896
Publication date
Sep 21, 2023
LAM RESEARCH CORPORATION
Gregory Clinton Veber
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20230298897
Publication date
Sep 21, 2023
HAMAMATSU PHOTONICS K. K.
Wei DONG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON EXTRACTION TYPE FREE-WHEELING DIODE DEVICE AND PREPARATION...
Publication number
20230290890
Publication date
Sep 14, 2023
JSAB Technologies (Shenzhen) Ltd.
Hao FENG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
ATOMIC LAYER ETCHING
Publication number
20230268187
Publication date
Aug 24, 2023
ASM IP HOLDING B.V.
Charles Dezelah
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ALTERNATING ETCH AND PASSIVATION PROCESS
Publication number
20230197459
Publication date
Jun 22, 2023
LAM RESEARCH CORPORATION
Seongjun Heo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD AND ETCHING APPARATUS
Publication number
20230107264
Publication date
Apr 6, 2023
TOKYO ELECTRON LIMITED
Fumiya TAKATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLEANING METHOD OF ELECTRONIC COMPONENT AND MANUFACTURING METHOD OF...
Publication number
20230102635
Publication date
Mar 30, 2023
Panasonic Intellectual Property Management Co., Ltd.
SHOGO OKITA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHOD FOR PASSIVATION LAYER FORM...
Publication number
20230042277
Publication date
Feb 9, 2023
Taiwan Semiconductor Manufacturing Company Limited
Chia-Pang KUO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND MANUFACTURING METHOD THEREOF
Publication number
20230043874
Publication date
Feb 9, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Peimeng WANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR FABRICATING SEMICONDUCTOR STRUCTURE, AND SEMICONDUCTOR S...
Publication number
20230013953
Publication date
Jan 19, 2023
Changxin Memory Technologies, Inc.
Chih-Wei CHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER
Publication number
20230020438
Publication date
Jan 19, 2023
Plasma-Therm LLC
Linnell Martinez
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
MANUFACTURING METHOD FOR DEEP TRENCH CAPACITOR WITH SCALLOPED PROFILE
Publication number
20230009146
Publication date
Jan 12, 2023
KEY FOUNDRY CO., LTD.
Seung Mo JO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SEMICONDUCTOR...
Publication number
20230010594
Publication date
Jan 12, 2023
CHANGXIN MEMORY TECHNOLOGIES, INC
Luguang WANG
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
STRUCTURE MANUFACTURING METHOD AND STRUCTURE
Publication number
20220415663
Publication date
Dec 29, 2022
FUJIFILM CORPORATION
Tomokazu UMEZAWA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20220406611
Publication date
Dec 22, 2022
KIOXIA Corporation
Atsushi TAKAHASHI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220399212
Publication date
Dec 15, 2022
TOKYO ELECTRON LIMITED
Sho KUMAKURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SEMICONDUCTOR PACKAGE ELECTRICAL CONTACT STRUCTURES AND RELATED MET...
Publication number
20220384204
Publication date
Dec 1, 2022
Semiconductor Components Industries, LLC
Francis J. Carney
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Semiconductor Device and Method
Publication number
20220375793
Publication date
Nov 24, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Ming-Fa Chen
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Plasma Etching Techniques
Publication number
20220351970
Publication date
Nov 3, 2022
TOKYO ELECTRON LIMITED
Pingshan Luan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ETCHING METHOD
Publication number
20220344167
Publication date
Oct 27, 2022
Ulvac, Inc.
Taichi SUZUKI
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Application
METHODS OF FORMING HIGH ASPECT RATIO FEATURES
Publication number
20220344200
Publication date
Oct 27, 2022
Micron Technology, Inc.
Ken Tokashiki
H01 - BASIC ELECTRIC ELEMENTS