Membership
Tour
Register
Log in
comprising inorganic layers
Follow
Industry
CPC
H01L21/033
This industry / category may be too specific. Please go to a parent level for more data
Parent Industries
H
ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Current Industry
H01L21/033
comprising inorganic layers
Industries
Overview
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor structure and manufacturing method thereof
Patent number
11,972,953
Issue date
Apr 30, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Zhen Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
1D vertical edge blocking (VEB) via and plug
Patent number
11,972,979
Issue date
Apr 30, 2024
Intel Corporation
Leonard P. Guler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Three-dimensional memory devices and fabricating methods thereof
Patent number
11,974,431
Issue date
Apr 30, 2024
Yangtze Memory Technologies Co., Ltd.
Zhong Zhang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sequential infiltration synthesis apparatus
Patent number
11,970,766
Issue date
Apr 30, 2024
ASM IP Holding B.V.
Ivo Johannes Raaijmakers
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor device structure having air gap and method for formin...
Patent number
11,972,975
Issue date
Apr 30, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multiple-stack three-dimensional memory device and fabrication meth...
Patent number
11,968,832
Issue date
Apr 23, 2024
Yangtze Memory Technologies Co., Ltd.
Jun Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Boron concentration tunability in boron-silicon films
Patent number
11,961,739
Issue date
Apr 16, 2024
Applied Materials, Inc.
Yi Yang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Via for semiconductor device connection and methods of forming the...
Patent number
11,961,800
Issue date
Apr 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chen-Hua Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing method and substrate processing apparatus
Patent number
11,961,746
Issue date
Apr 16, 2024
Tokyo Electron Limited
Sho Kumakura
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual metal silicide structures for advanced integrated circuit stru...
Patent number
11,961,767
Issue date
Apr 16, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and apparatus for coating photo resist over a substrate
Patent number
11,955,335
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Tung-Hung Feng
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Directional deposition for semiconductor fabrication
Patent number
11,955,338
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Shih-Chun Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Dual metal gate structure having portions of metal gate layers in c...
Patent number
11,955,532
Issue date
Apr 9, 2024
Intel Corporation
Jeffrey S. Leib
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Heterogeneous metal line compositions for advanced integrated circu...
Patent number
11,955,534
Issue date
Apr 9, 2024
Intel Corporation
Andrew W. Yeoh
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Two-stage bake photoresist with releasable quencher
Patent number
11,955,343
Issue date
Apr 9, 2024
Intel Corporation
Robert L. Bristol
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
11,955,337
Issue date
Apr 9, 2024
Tokyo Electron Limited
Toru Hisamatsu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of manufacturing a semiconductor device
Patent number
11,955,336
Issue date
Apr 9, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Jing Hong Huang
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for forming hardmask formation by hybrid materials in semico...
Patent number
11,948,843
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chung-Ting Ko
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Trench contact structures for advanced integrated circuit structure...
Patent number
11,948,997
Issue date
Apr 2, 2024
Intel Corporation
Subhash M. Joshi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method
Patent number
11,948,798
Issue date
Apr 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method of fabricating the same
Patent number
11,948,844
Issue date
Apr 2, 2024
Samsung Electronics Co., Ltd.
Yong-Ho Jeon
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for forming semiconductor device with helmet structure betwe...
Patent number
11,942,476
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for manufacturing semiconductor structure and semiconductor...
Patent number
11,942,522
Issue date
Mar 26, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Yexiao Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor devices and pattern formation...
Patent number
11,942,322
Issue date
Mar 26, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
An-Ren Zi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Boron nitride for mask patterning
Patent number
11,935,751
Issue date
Mar 19, 2024
Applied Materials, Inc.
Siyu Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Pitch reduction technology using alternating spacer depositions dur...
Patent number
11,935,756
Issue date
Mar 19, 2024
Baosuo Zhou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for producing semiconductor device
Patent number
11,935,750
Issue date
Mar 19, 2024
Kioxia Corporation
Kei Watanabe
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor patterning and resulting structures
Patent number
11,929,254
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Chun-Ming Lung
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of high-density pattern forming
Patent number
11,929,255
Issue date
Mar 12, 2024
CHANGXIN MEMORY TECHNOLOGIES, INC.
Chen En Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and method for forming the same
Patent number
11,929,424
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Yi-Chen Lo
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PATTERNING UNDERLYING STRUCTURE
Publication number
20240145244
Publication date
May 2, 2024
Powerchip Semiconductor Manufacturing Corporation
Yun-An Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ALUMINUM OXIDE CARBON HYBRID HARDMASKS AND METHODS FOR MAKING THE SAME
Publication number
20240145245
Publication date
May 2, 2024
Applied Materials, Inc.
Yung-chen LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ANTI-DISHING STRUCTURE FOR EMBEDDED MEMORY
Publication number
20240147718
Publication date
May 2, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Meng-Han Lin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING MEMORY DEVICE USING SELF-ALIGNED DOUBLE PAT...
Publication number
20240136185
Publication date
Apr 25, 2024
NANYA TECHNOLOGY CORPORATION
Chih-Ching LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING MEMORY DEVICE USING SELF-ALIGNED DOUBLE PAT...
Publication number
20240136186
Publication date
Apr 25, 2024
NANYA TECHNOLOGY CORPORATION
Chih-Ching LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND SEMICONDUCTOR MANUFACTURING METHOD THEREOF
Publication number
20240136199
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yung-Chi LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR FORMING AND USING MASK
Publication number
20240136184
Publication date
Apr 25, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Ching-Yu Chang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240128082
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Inoue NAOKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
Publication number
20240128092
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Yuta NAKANE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH PATTERNS HAVING COPLANAR BOTTOM...
Publication number
20240128084
Publication date
Apr 18, 2024
NANYA TECHNOLOGY CORPORATION
LIANG-PIN CHOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE STRUCTURE WITH PATTERNS HAVING COPLANAR BOTTOM...
Publication number
20240128083
Publication date
Apr 18, 2024
NANYA TECHNOLOGY CORPORATION
LIANG-PIN Chou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVCE
Publication number
20240128126
Publication date
Apr 18, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Shu-Uei Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240120199
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
So Young LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF CORRECTING OVERLAY, METHOD OF CONTROLLING SEMICONDUCTOR P...
Publication number
20240118627
Publication date
Apr 11, 2024
Samsung Electronics Co., Ltd.
Jeongjin Lee
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240120329
Publication date
Apr 11, 2024
Fujian Jinhua Integrated Circuit Co., Ltd.
Yifei Yan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND STRUCTURE OF CUT END WITH SELF-ALIGNED DOUBLE PATTERNING
Publication number
20240120200
Publication date
Apr 11, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Hsi-Wen Tien
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VARIABLE SELECTIVE ETCHING TECHNOLOGY FOR THICK SOI DEVICES
Publication number
20240112914
Publication date
Apr 4, 2024
University of Electronic Science and Technology of China
Bo ZHANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240112950
Publication date
Apr 4, 2024
NANYA TECHNOLOGY CORPORATION
Chia Che CHIANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FABRICATING SEMICONDUCTOR DEVICE
Publication number
20240112915
Publication date
Apr 4, 2024
Samsung Electronics Co., Ltd.
Janghoon Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Mask for X-Ray Lithography and Metrology
Publication number
20240112913
Publication date
Apr 4, 2024
Anne Sakdinawat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME
Publication number
20240105751
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Chung-Lei Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRENCH PLUG HARDMASK FOR ADVANCED INTEGRATED CIRCUIT STRUCTURE FABR...
Publication number
20240105520
Publication date
Mar 28, 2024
Intel Corporation
Anthony ST. AMOUR
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTEGRATED CIRCUITS WITH FINFET GATE STRUCTURES
Publication number
20240105719
Publication date
Mar 28, 2024
Taiwan Semiconductor Manufacturing Co., LTD
Kuo-Cheng Ching
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Etching Composition And Method For EUV Mask Protective Structure
Publication number
20240103377
Publication date
Mar 28, 2024
VERSUM MATERIALS US, LLC
CHAO-HSIANG CHEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
Publication number
20240105443
Publication date
Mar 28, 2024
Kokusai Electric Corporation
Kimihiko NAKATANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
Publication number
20240096595
Publication date
Mar 21, 2024
TOKYO ELECTRON LIMITED
Kazuhide HASEBE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SELF ALIGNED PATTERN FORMATION POST SPACER ETCHBACK IN TIGHT PITCH...
Publication number
20240096627
Publication date
Mar 21, 2024
TESSERA LLC
Sean D. Burns
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PHOTO MASK AND LITHOGRAPHY METHOD USING THE SAME
Publication number
20240096628
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Bao-Chin LI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE
Publication number
20240096626
Publication date
Mar 21, 2024
KIOXIA Corporation
Toshiyuki SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
Publication number
20240085812
Publication date
Mar 14, 2024
Samsung Electronics Co., Ltd.
Kyuhee Han
H01 - BASIC ELECTRIC ELEMENTS