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G03F7/70808

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GPHYSICS G03Photography G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES G03F7/00Photomechanical

Current Industry

G03F7/70808Construction details

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Lithography system and method thereof
- Patent number 12,360,464
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Inspection system, lithographic apparatus, and inspection method
- Patent number 12,313,980
- Issue date May 27, 2025
- ASML Netherlands B.V.
- Alexey Olegovich Polyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reaction chamber with stop-gapped vacuum seal
- Patent number 12,242,205
- Issue date Mar 4, 2025
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems for cleaning a portion of a lithography apparatus
- Patent number 12,235,595
- Issue date Feb 25, 2025
- ASML Holding N.V.
- Daniel Paul Rodak
- B08 - CLEANING
Information Patent Grant
Method of forming an enhanced unexposed photoresist layer
- Patent number 12,222,644
- Issue date Feb 11, 2025
- ASM IP Holding B.V.
- Jan Willem Maes
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution plate with UV blocker
- Patent number 12,130,561
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography contamination control
- Patent number 12,055,867
- Issue date Aug 6, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chieh Hsieh
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method for manufacturing a membrane assembly
- Patent number 11,971,656
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Johan Hendrik Klootwijk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Intermediate layer for mechanical interface
- Patent number 11,927,889
- Issue date Mar 12, 2024
- ASML Holding N.V.
- Kushal Sandeep Doshi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,914,308
- Issue date Feb 27, 2024
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for manufacturing damper device, lithographic apparatus, pro...
- Patent number 11,835,106
- Issue date Dec 5, 2023
- ASML Netherlands B.V.
- Derk Ten Hoopen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lift pin assembly and apparatus for treating substrate with the same
- Patent number 11,829,081
- Issue date Nov 28, 2023
- Semes Co., Ltd.
- Wan Ho Do
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Module vessel with scrubber gutters sized to prevent overflow
- Patent number 11,815,821
- Issue date Nov 14, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Kai Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, a lithographic apparatus, a method of usi...
- Patent number 11,809,086
- Issue date Nov 7, 2023
- ASML Netherlands B.V.
- Raphael Nico Johan Stegen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system and method thereof
- Patent number 11,782,350
- Issue date Oct 10, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method using the same
- Patent number 11,740,564
- Issue date Aug 29, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tao-Hsin Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collector flow ring
- Patent number 11,740,565
- Issue date Aug 29, 2023
- ASML Netherlands B.V.
- Taylor John Hartung
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sealing device, component and lithography apparatus
- Patent number 11,740,562
- Issue date Aug 29, 2023
- Carl Zeiss SMT GmbH
- Dieter Bader
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Exposure machine
- Patent number 11,662,667
- Issue date May 30, 2023
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Bo Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography contamination control
- Patent number 11,662,668
- Issue date May 30, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chieh Hsieh
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 11,609,503
- Issue date Mar 21, 2023
- ASML Netherlands B.V.
- Hans Butler
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 11,609,504
- Issue date Mar 21, 2023
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography system and method thereof
- Patent number 11,520,243
- Issue date Dec 6, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd
- Shao-Hua Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Anti-rotation coupling
- Patent number 11,500,297
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- David Bessems
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Gas distribution plate with UV blocker at the center
- Patent number 11,448,977
- Issue date Sep 20, 2022
- Applied Materials, Inc.
- Kartik Ramaswamy
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
EUV chamber apparatus, extreme ultraviolet light generation system,...
- Patent number 11,452,196
- Issue date Sep 20, 2022
- Gigaphoton Inc.
- Kouichiro Kouge
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 11,378,893
- Issue date Jul 5, 2022
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus incorporating a gas lock
- Patent number 11,320,751
- Issue date May 3, 2022
- ASML Netherlands B.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Apparatus for containing a substrate and method of manufacturing th...
- Patent number 11,314,176
- Issue date Apr 26, 2022
- Gudeng Precision Industrial Co., Ltd.
- Chia-Ho Chuang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Carrying device and fixing method of carrying device
- Patent number 11,306,788
- Issue date Apr 19, 2022
- WUHAN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Wei Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PHOTOLITHOGRAPHY SUBSTRATE WITH PURGE FLOW DIRECTION
- Publication number 20250208526
- Publication date Jun 26, 2025
- Entegris, Inc.
- Huaping Wang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SYSTEMS FOR CLEANING A PORTION OF A LITHOGRAPHY APPARATUS
- Publication number 20250181001
- Publication date Jun 5, 2025
- ASML Holding N.V.
- Daniel Paul RODAK
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...
- Publication number 20250180999
- Publication date Jun 5, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Hsieh-Yu WEI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
STORAGE AND TRANSFER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLU...
- Publication number 20250164898
- Publication date May 22, 2025
- Ki Won HAN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE TREATING APPARATUS
- Publication number 20250155817
- Publication date May 15, 2025
- SEMES CO., LTD.
- Ki Sang EUM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS
- Publication number 20250123573
- Publication date Apr 17, 2025
- Samsung Electronics Co., Ltd.
- Sung Yong BAE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, ILLUMINATION SYSTEM, AND CONNECTION SEALING...
- Publication number 20250060682
- Publication date Feb 20, 2025
- ASML NETHERLANDS B.V.
- Armin Bernhard RIDINGER
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS
- Publication number 20250053080
- Publication date Feb 13, 2025
- LAM RESEARCH CORPORATION
- Jeffrey Marks
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
UTILITY STAGE FOR PHOTOLITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20250021024
- Publication date Jan 16, 2025
- ASML NETHERLANDS B.V.
- Keane Michael Levy
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL
- Publication number 20240419090
- Publication date Dec 19, 2024
- Canon Kabushiki Kaisha
- Byung-Jin Choi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20240411235
- Publication date Dec 12, 2024
- Samsung Electronics Co., Ltd.
- Dae Geun YOON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD
- Publication number 20240393704
- Publication date Nov 28, 2024
- Canon Kabushiki Kaisha
- Norihiro SAKURAKAWA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY CONTAMINATION CONTROL
- Publication number 20240361708
- Publication date Oct 31, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chieh HSIEH
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHY APPARATUS
- Publication number 20240353764
- Publication date Oct 24, 2024
- Samsung Electronics Co., Ltd.
- Kyung Chin YI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...
- Publication number 20240345494
- Publication date Oct 17, 2024
- Canon Kabushiki Kaisha
- NAOKI FUNABASHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...
- Publication number 20240310739
- Publication date Sep 19, 2024
- Seoul National University R&DB Foundation
- Kyoungwhan OH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD, OPTICAL SYSTEM, TEST DEVICE AND ARRANGEMENT
- Publication number 20240302453
- Publication date Sep 12, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD
- Publication number 20240280916
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Stefan Krone
- G02 - OPTICS
Information Patent Application
EXPOSURE APPARATUS
- Publication number 20240264541
- Publication date Aug 8, 2024
- CONTEMPORARY AMPEREX TECHNOLOGY CO., LIMITED
- Xiaosong LIU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD...
- Publication number 20240264522
- Publication date Aug 8, 2024
- Samsung Electronics Co., Ltd.
- Yun Song JEONG
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE...
- Publication number 20240248390
- Publication date Jul 25, 2024
- SK enpulse Co., Ltd.
- Tae Wan KIM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS
- Publication number 20240248411
- Publication date Jul 25, 2024
- ASML NETHERLANDS B.V.
- Cornelius Maria ROPS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20240248417
- Publication date Jul 25, 2024
- TOKYO ELECTRON LIMITED
- Yoji SAKATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONNECTION ASSEMBLY
- Publication number 20240196504
- Publication date Jun 13, 2024
- ASML NETHERLANDS B.V.
- Ivo VANDERHALLEN
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY HAVING...
- Publication number 20240168396
- Publication date May 23, 2024
- Carl Zeiss SMT GMBH
- Rodolfo Guglielmi Rabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HOME PORT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME
- Publication number 20240160119
- Publication date May 16, 2024
- SEMES CO., LTD.
- Nam Ki HONG
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD
- Publication number 20240094644
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Makoto OGATA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20240077807
- Publication date Mar 7, 2024
- SCREEN Holdings Co., Ltd.
- Jun KOMORI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...
- Publication number 20240069451
- Publication date Feb 29, 2024
- Samsung Electronics Co., Ltd.
- Sangjine PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FINGERPRINTING AND PROCESS CONTROL OF PHOTOSENSITIVE FILM DEPOSITIO...
- Publication number 20240027916
- Publication date Jan 25, 2024
- Applied Materials, Inc.
- RUIYING HAO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Construction details

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Lithography system and method thereof

Inspection system, lithographic apparatus, and inspection method

Reaction chamber with stop-gapped vacuum seal

Systems for cleaning a portion of a lithography apparatus

Method of forming an enhanced unexposed photoresist layer

Gas distribution plate with UV blocker

Lithography contamination control

Method for manufacturing a membrane assembly

Intermediate layer for mechanical interface

Lithographic apparatus

Method for manufacturing damper device, lithographic apparatus, pro...

Lift pin assembly and apparatus for treating substrate with the same

Module vessel with scrubber gutters sized to prevent overflow

Fluid handling structure, a lithographic apparatus, a method of usi...

Lithography system and method thereof

Lithography apparatus and method using the same

Collector flow ring

Sealing device, component and lithography apparatus

Exposure machine

Lithography contamination control

Lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithography system and method thereof

Anti-rotation coupling

Gas distribution plate with UV blocker at the center

EUV chamber apparatus, extreme ultraviolet light generation system,...

Lithographic apparatus and device manufacturing method involving a...

Apparatus incorporating a gas lock

Apparatus for containing a substrate and method of manufacturing th...

Carrying device and fixing method of carrying device

Patents Applicationslast 30 patents

PHOTOLITHOGRAPHY SUBSTRATE WITH PURGE FLOW DIRECTION

SYSTEMS FOR CLEANING A PORTION OF A LITHOGRAPHY APPARATUS

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE AND APPARATUS FOR MA...

STORAGE AND TRANSFER MODULE AND SUBSTRATE TREATMENT APPARATUS INCLU...

SUBSTRATE TREATING APPARATUS

LITHOGRAPHY APPARATUS

LITHOGRAPHIC APPARATUS, ILLUMINATION SYSTEM, AND CONNECTION SEALING...

VACUUM-INTEGRATED HARDMASK PROCESSES AND APPARATUS

UTILITY STAGE FOR PHOTOLITHOGRAPHIC APPARATUS AND METHOD

REACTION CHAMBER WITH STOP-GAPPED VACUUM SEAL

SEMICONDUCTOR MANUFACTURING APPARATUS

STRUCTURE, EXPOSURE APPARATUS, AND ARTICLE MANUFACTURING METHOD

LITHOGRAPHY CONTAMINATION CONTROL

LITHOGRAPHY APPARATUS

TEMPERATURE ADJUSTMENT APPARATUS, LITHOGRAPHY APPARATUS, AND ARTICL...

SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICOND...

METHOD, OPTICAL SYSTEM, TEST DEVICE AND ARRANGEMENT

OPTICAL SYSTEM, LITHOGRAPHY APPARATUS AND METHOD

EXPOSURE APPARATUS

MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD...

APPARATUS FOR FABRICATING BLANK MASK AND METHOD OF FABRICATING THE...

A FLUID HANDLING SYSTEM, METHOD AND LITHOGRAPHIC APPARATUS

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

CONNECTION ASSEMBLY

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY HAVING...

HOME PORT AND SUBSTRATE TREATMENT APPARATUS INCLUDING THE SAME

SUBSTRATE TREATMENT APPARATUS AND TREATMENT SOLUTION SUPPLY METHOD

SUBSTRATE PROCESSING APPARATUS

SUPERCRITICAL FLUID SUPPLY APPARATUS, SUBSTRATE PROCESSING APPARATU...

FINGERPRINTING AND PROCESS CONTROL OF PHOTOSENSITIVE FILM DEPOSITIO...