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Constructional details of particle beam apparatus not otherwise provided for
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Industry
CPC
H01J37/3488
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Parent Industries
H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
Current Industry
H01J37/3488
Constructional details of particle beam apparatus not otherwise provided for
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