Constructional details of particle beam apparatus not otherwise provided for

Industry

CPC
H01J37/3488

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3488Constructional details of particle beam apparatus not otherwise provided for

Industries

Patents Grantslast 30 patents

Information Patent Grant
High power pulse systems for surface processing
- Patent number 11,955,324
- Issue date Apr 9, 2024
- Jefferson Science Associates, LLC
- Hui Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning of sin with CCP plasma or RPS clean
- Patent number 11,915,918
- Issue date Feb 27, 2024
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating device for curved substrate and coating method containing t...
- Patent number 11,881,386
- Issue date Jan 23, 2024
- Innolux Corporation
- Ching-Feng Kuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lattice coat surface enhancement for chamber components
- Patent number 11,739,411
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Lit Ping Lam
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Physical vapor deposition chamber and physical vapor deposition app...
- Patent number 11,732,346
- Issue date Aug 22, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Hongrui Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering method
- Patent number 11,710,624
- Issue date Jul 25, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Bingliang Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing substrate with a transparent conductive fil...
- Patent number 11,674,217
- Issue date Jun 13, 2023
- Ulvac, Inc.
- Junsuke Matsuzaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Isolator ring clamp and physical vapor deposition chamber incorpora...
- Patent number 11,670,493
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Ilya Lavitsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Shield for a substrate processing chamber
- Patent number 11,658,016
- Issue date May 23, 2023
- Applied Materials, Inc.
- Kathleen Scheible
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas injection process kit to eliminate arcing and improve uniform g...
- Patent number 11,600,477
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation device for cutting tool provided with coating film,...
- Patent number 11,512,386
- Issue date Nov 29, 2022
- Mitsubishi Materials Corporation
- Masao Kawamura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Portable plasma device
- Patent number 11,508,559
- Issue date Nov 22, 2022
- FEMTO SCIENCE INC
- Moo Hwan Kim
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Tubular target
- Patent number 11,367,599
- Issue date Jun 21, 2022
- Plansee SE
- Andre Dronhofer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering device
- Patent number 11,328,913
- Issue date May 10, 2022
- Nissin Electric Co., Ltd.
- Shigeaki Kishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering device
- Patent number 11,289,314
- Issue date Mar 29, 2022
- Nissin Electric Co., Ltd.
- Shigeaki Kishida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for depositing material on the surface of a substrate
- Patent number 11,193,201
- Issue date Dec 7, 2021
- Deutsches Elektronen-Synchrotron DESY
- Kai Schlage
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Beam intensity converting film, and method of manufacturing beam in...
- Patent number 11,177,116
- Issue date Nov 16, 2021
- Kaneka Corporation
- Mutsuaki Murakami
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Sputter deposition apparatus including roller assembly and method
- Patent number 11,177,412
- Issue date Nov 16, 2021
- Beijing Apollo Ding Rong Solar Technology Co., Ltd.
- Thomas Heckel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cryogenically cooled rotatable electrostatic chuck
- Patent number 11,149,345
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Shardul Patel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process kit for multi-cathode processing chamber
- Patent number 11,043,364
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- Hanbing Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 10,984,993
- Issue date Apr 20, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Peng Chen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus and physical vapor deposition chamber
- Patent number 10,984,994
- Issue date Apr 20, 2021
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Jun Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation apparatus
- Patent number 10,903,059
- Issue date Jan 26, 2021
- Shibaura Mechatronics Corporation
- Daisuke Ono
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inflatable seal for media cooling
- Patent number 10,892,148
- Issue date Jan 12, 2021
- Seagate Technology LLC
- Samuel Lewis Tanaka
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Grant
Sputtering gap measurement apparatus and magnetron sputtering device
- Patent number 10,886,114
- Issue date Jan 5, 2021
- BOE Technology Group Co., Ltd.
- Yingnan Kang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit and method for processing a substrate
- Patent number 10,886,113
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Thanh X. Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Textured skin for chamber components
- Patent number 10,872,749
- Issue date Dec 22, 2020
- Applied Materials, Inc.
- Gangadhar Sheelavant
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Holding apparatus
- Patent number 10,763,153
- Issue date Sep 1, 2020
- ULVAC, Inc.
- Yukihito Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System architecture for combined static and pass-by processing
- Patent number 10,752,987
- Issue date Aug 25, 2020
- Intevac, Inc.
- Patrick Leahey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition apparatus
- Patent number 10,738,380
- Issue date Aug 11, 2020
- Canon Anelva Corporation
- Naoyuki Nozawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM
- Publication number 20240068089
- Publication date Feb 29, 2024
- SKY TECH INC.
- JING-CHENG LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
- Publication number 20230386809
- Publication date Nov 30, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Hung TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND COVER RING ASSEMBLY
- Publication number 20230323525
- Publication date Oct 12, 2023
- LAPIS SEMICONDUCTOR CO., LTD.
- Masashi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR TOOL FOR COPPER DEPOSITION
- Publication number 20230260770
- Publication date Aug 17, 2023
- Taiwan Semiconductor Manufacturing Company Limited
- Chia-Hung TSAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...
- Publication number 20230187191
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE DRIVEN PLASMA ION SOURCE
- Publication number 20230164903
- Publication date May 25, 2023
- TOFWERK AG
- Martin TANNER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR REMOVING L-FC IN PLASMA ETCHING PROCESS
- Publication number 20230022946
- Publication date Jan 26, 2023
- Daejeon University Industry-University Cooperation Foundation
- Kyong Nam KIM
- B08 - CLEANING
Information Patent Application
THERMAL MANAGEMENT HARDWARE FOR UNIFORM TEMPERATURE CONTROL FOR ENH...
- Publication number 20220415635
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Srinivasa Rao YEDLA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415636
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN
- Publication number 20220415637
- Publication date Dec 29, 2022
- Applied Materials, Inc.
- Jothilingam Ramalingam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHYSICAL VAPOR DEPOSITION CHAMBER AND PHYSICAL VAPOR DEPOSITION APP...
- Publication number 20220380887
- Publication date Dec 1, 2022
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Hongrui GUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER PULSE SYSTEMS FOR SURFACE PROCESSING
- Publication number 20220199381
- Publication date Jun 23, 2022
- Jefferson Science Associates, LLC
- HUI TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DEVICE FOR CURVED SUBSTRATE AND COATING METHOD CONTAINING T...
- Publication number 20220059328
- Publication date Feb 24, 2022
- InnoLux Corporation
- Ching-Feng KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETRON SPUTTERING APPARATUS AND CATHODE DEVICE THEREOF
- Publication number 20210202221
- Publication date Jul 1, 2021
- BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD .
- Zhengan Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTER DEPOSITION APPARATUS INCLUDING ROLLER ASSEMBLY AND METHOD
- Publication number 20200335654
- Publication date Oct 22, 2020
- BEIJING APOLLO DING RONG SOLAR TECHNOLOGY CO., LTD .
- Thomas HECKEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHIELD KIT FOR PROCESS CHAMBER
- Publication number 20200321202
- Publication date Oct 8, 2020
- Applied Materials, Inc.
- William R. JOHANSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MECHANICAL FEEDTHROUGH APPARATUS
- Publication number 20200185188
- Publication date Jun 11, 2020
- Metal Industries Research & Development Centre
- Jyh-Nan Shieh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM SPUTTERING APPARATUS AND ITS VACUUM ATMOSPHERE EXCHANGE DEVICE
- Publication number 20200123648
- Publication date Apr 23, 2020
- Qiuping HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PORTABLE PLASMA DEVICE
- Publication number 20200083023
- Publication date Mar 12, 2020
- FEMTO SCIENCE INC
- MOO HWAN KIM
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SPUTTERING DEVICE
- Publication number 20200027708
- Publication date Jan 23, 2020
- NISSIN ELECTRIC CO., LTD.
- SHIGEAKI KISHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Apparatus For Depositing Material On The Surface Of A Substrate
- Publication number 20190390327
- Publication date Dec 26, 2019
- DEUTSCHES ELEKTRONEN-SYNCHROTRON DESY
- Kai SCHLAGE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION GUARD PLATE AND SPUTTERING DEVICE
- Publication number 20190378701
- Publication date Dec 12, 2019
- ULVAC, Inc.
- Yoshinori Fujii
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHIELD FOR A SUBSTRATE PROCESSING CHAMBER
- Publication number 20190267220
- Publication date Aug 29, 2019
- APPLIED MATERIALS, INC.
- Kathleen Scheible
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HOLDING APPARATUS
- Publication number 20190103301
- Publication date Apr 4, 2019
- Ulvac, Inc.
- Yukihito Tashiro
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM INTENSITY CONVERTING FILM, AND METHOD OF MANUFACTURING BEAM IN...
- Publication number 20190088450
- Publication date Mar 21, 2019
- Kaneka Corporation
- Mutsuaki Murakami
- G02 - OPTICS
Information Patent Application
FILM FORMATION APPARATUS
- Publication number 20190074167
- Publication date Mar 7, 2019
- SHIBAURA MECHATRONICS CORPORATION
- Daisuke ONO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING GAP MEASUREMENT APPARATUS AND MAGNETRON SPUTTERING DEVICE
- Publication number 20190057850
- Publication date Feb 21, 2019
- BOE TECHNOLOGY GROUP CO., LTD.
- Yingnan Kang
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC CHUCKING OF COVER GLASS SUBSTRATES IN A VACUUM COATIN...
- Publication number 20190010603
- Publication date Jan 10, 2019
- Corning Incorporated
- Daniel Robert BOUGHTON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INFLATABLE SEAL FOR MEDIA COOLING
- Publication number 20180350573
- Publication date Dec 6, 2018
- SEAGATE TECHNOLOGY LLC
- Samuel Lewis TANAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER
- Publication number 20180247799
- Publication date Aug 30, 2018
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Jun ZHANG
- H01 - BASIC ELECTRIC ELEMENTS

Constructional details of particle beam apparatus not otherwise provided for

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

High power pulse systems for surface processing

Cleaning of sin with CCP plasma or RPS clean

Coating device for curved substrate and coating method containing t...

Lattice coat surface enhancement for chamber components

Physical vapor deposition chamber and physical vapor deposition app...

Sputtering method

Method of manufacturing substrate with a transparent conductive fil...

Isolator ring clamp and physical vapor deposition chamber incorpora...

Shield for a substrate processing chamber

Gas injection process kit to eliminate arcing and improve uniform g...

Film formation device for cutting tool provided with coating film,...

Portable plasma device

Tubular target

Sputtering device

Sputtering device

Apparatus for depositing material on the surface of a substrate

Beam intensity converting film, and method of manufacturing beam in...

Sputter deposition apparatus including roller assembly and method

Cryogenically cooled rotatable electrostatic chuck

Process kit for multi-cathode processing chamber

Plasma processing apparatus

Deposition apparatus and physical vapor deposition chamber

Film formation apparatus

Inflatable seal for media cooling

Sputtering gap measurement apparatus and magnetron sputtering device

Process kit and method for processing a substrate

Textured skin for chamber components

Holding apparatus

System architecture for combined static and pass-by processing

Deposition apparatus

Patents Applicationslast 30 patents

DEPOSITION EQUIPMENT WITH SHIELDING MECHANISM

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

SUBSTRATE PROCESSING APPARATUS AND COVER RING ASSEMBLY

SEMICONDUCTOR TOOL FOR COPPER DEPOSITION

GAS INJECTION PROCESS KIT TO ELIMINATE ARCING AND IMPROVE UNIFORM G...

MICROWAVE DRIVEN PLASMA ION SOURCE

METHOD AND SYSTEM FOR REMOVING L-FC IN PLASMA ETCHING PROCESS

THERMAL MANAGEMENT HARDWARE FOR UNIFORM TEMPERATURE CONTROL FOR ENH...

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

CLEANING OF SIN WITH CCP PLASMA OR RPS CLEAN

PHYSICAL VAPOR DEPOSITION CHAMBER AND PHYSICAL VAPOR DEPOSITION APP...

HIGH POWER PULSE SYSTEMS FOR SURFACE PROCESSING

COATING DEVICE FOR CURVED SUBSTRATE AND COATING METHOD CONTAINING T...

MAGNETRON SPUTTERING APPARATUS AND CATHODE DEVICE THEREOF

SPUTTER DEPOSITION APPARATUS INCLUDING ROLLER ASSEMBLY AND METHOD

SHIELD KIT FOR PROCESS CHAMBER

MECHANICAL FEEDTHROUGH APPARATUS

VACUUM SPUTTERING APPARATUS AND ITS VACUUM ATMOSPHERE EXCHANGE DEVICE

PORTABLE PLASMA DEVICE

SPUTTERING DEVICE

Apparatus For Depositing Material On The Surface Of A Substrate

DEPOSITION GUARD PLATE AND SPUTTERING DEVICE

SHIELD FOR A SUBSTRATE PROCESSING CHAMBER

HOLDING APPARATUS

BEAM INTENSITY CONVERTING FILM, AND METHOD OF MANUFACTURING BEAM IN...

FILM FORMATION APPARATUS

SPUTTERING GAP MEASUREMENT APPARATUS AND MAGNETRON SPUTTERING DEVICE

ELECTROSTATIC CHUCKING OF COVER GLASS SUBSTRATES IN A VACUUM COATIN...

INFLATABLE SEAL FOR MEDIA COOLING

DEPOSITION APPARATUS AND PHYSICAL VAPOR DEPOSITION CHAMBER