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Issue date Jul 14, 2020
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Hitachi High-Tech Science Corporation
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Masayuki Iwasa
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Atomic force microscope
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Patent number 5,329,808
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Issue date Jul 19, 1994
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Digital Instruments, Inc.
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Virgil B. Elings
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B82 - NANO-TECHNOLOGY
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Atomic force microscope
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Issue date Aug 24, 1993
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Digital Instruments, Inc.
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Virgil B. Elings
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Atomic force microscope
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Patent number 5,224,376
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Issue date Jul 6, 1993
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Digital Instruments, Inc.
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Virgil B. Elings
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B82 - NANO-TECHNOLOGY