contacting different faces of object

Industry

CPC
G01B9/02021

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Parent Industries

GPHYSICS G01Measuring instruments G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS G01B9/00Instruments as specified in the subgroups and characterised by the use of optical measuring means

Current Industry

G01B9/02021contacting different faces of object

Industries

Patents Grantslast 30 patents

Information Patent Grant
System and method for determining post bonding overlay
- Patent number 11,829,077
- Issue date Nov 28, 2023
- KLA Corporation
- Franz Zach
- G01 - MEASURING TESTING
Information Patent Grant
Chamber for vibrational and environmental isolation of thin wafers
- Patent number 11,555,791
- Issue date Jan 17, 2023
- Corning Incorporated
- John Weston Frankovich
- G01 - MEASURING TESTING
Information Patent Grant
Laser interference device
- Patent number 11,378,386
- Issue date Jul 5, 2022
- Mitutoyo Corporation
- Yuichiro Yokoyama
- G01 - MEASURING TESTING
Information Patent Grant
Optical systems and methods for measuring rotational movement
- Patent number 11,280,603
- Issue date Mar 22, 2022
- OTM TECHNOLOGIES LTD.
- Opher Kinrot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Multi-probe gauge for slab characterization
- Patent number 11,112,234
- Issue date Sep 7, 2021
- APPLEJACK 199 L.P.
- Wojciech J. Walecki
- G01 - MEASURING TESTING
Information Patent Grant
Multi-probe gauge for slab characterization
- Patent number 11,073,372
- Issue date Jul 27, 2021
- APPLEJACK 199 L.P.
- Wojciech J. Walecki
- G01 - MEASURING TESTING
Information Patent Grant
Inspecting a multilayer sample
- Patent number 10,890,434
- Issue date Jan 12, 2021
- APPLEJACK 199 L.P.
- Wojciech Jan Walecki
- G01 - MEASURING TESTING
Information Patent Grant
OCT system
- Patent number 10,863,905
- Issue date Dec 15, 2020
- OptoMedical Technologies GmbH
- Marc Krug
- G01 - MEASURING TESTING
Information Patent Grant
Wear amount measuring apparatus and method, temperature measuring a...
- Patent number 10,746,531
- Issue date Aug 18, 2020
- Tokyo Electron Limited
- Tatsuo Matsudo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam laser coordinate measuring system
- Patent number 10,704,887
- Issue date Jul 7, 2020
- X Development LLC
- Michael Beardsworth
- G01 - MEASURING TESTING
Information Patent Grant
Shape measuring apparatus and shape measuring method using matched...
- Patent number 10,663,288
- Issue date May 26, 2020
- Kobelco Research Institute, Inc.
- Kazuhiko Tahara
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Inspecting a multilayer sample
- Patent number 10,655,949
- Issue date May 19, 2020
- APPLEJACK 199 L.P.
- Wojciech Jan Walecki
- G01 - MEASURING TESTING
Information Patent Grant
Optical measuring device and method
- Patent number 10,571,249
- Issue date Feb 25, 2020
- PRECITEC OPTRONIK GMBH
- Philipp Nimtsch
- G01 - MEASURING TESTING
Information Patent Grant
Multi-probe gauge for slab characterization
- Patent number 10,551,163
- Issue date Feb 4, 2020
- APPLEJACK 199 L.P.
- Wojciech J. Walecki
- G01 - MEASURING TESTING
Information Patent Grant
Three-dimensional shape measuring apparatus using diffraction grating
- Patent number 10,533,844
- Issue date Jan 14, 2020
- Koh Young Technology Inc.
- Jang Il Ser
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for detecting surface topography
- Patent number 10,456,029
- Issue date Oct 29, 2019
- ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.
- Yoel Arieli
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Measurement apparatus and method that measure shape of surface whil...
- Patent number 10,260,867
- Issue date Apr 16, 2019
- Canon Kabushiki Kaisha
- Takahiro Yamamoto
- G01 - MEASURING TESTING
Information Patent Grant
Overlay and semiconductor process control using a wafer geometry me...
- Patent number 10,249,523
- Issue date Apr 2, 2019
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G01 - MEASURING TESTING
Information Patent Grant
Noise reduction techniques, fractional bi-spectrum and fractional c...
- Patent number 10,203,195
- Issue date Feb 12, 2019
- University of North Carolina at Charlotte
- Faramarz Farahi
- G01 - MEASURING TESTING
Information Patent Grant
Wear amount measuring apparatus and method, temperature measuring a...
- Patent number 10,184,786
- Issue date Jan 22, 2019
- Tokyo Electron Limited
- Tatsuo Matsudo
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring thickness
- Patent number 10,088,297
- Issue date Oct 2, 2018
- Samsung Electronics Co., Ltd.
- Sung Yoon Ryu
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for determining in-plane distortions in a substrate
- Patent number 10,024,654
- Issue date Jul 17, 2018
- KLA-Tencor Corporation
- Mark D. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for measuring biofilm thickness and topology
- Patent number 10,005,999
- Issue date Jun 26, 2018
- Battelle Memorial Institute
- Curtis J. Larimer
- C12 - BIOCHEMISTRY BEER SPIRITS WINE VINEGAR MICROBIOLOGY ENZYMOLOGY MUTATION...
Information Patent Grant
Bore testing device
- Patent number 9,983,149
- Issue date May 29, 2018
- JENOPTIK Industrial Metrology Germany GmbH
- Michael Rudolf
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Temperature measuring method, substrate processing system and compo...
- Patent number 9,952,032
- Issue date Apr 24, 2018
- Tokyo Electron Limited
- Chishio Koshimizu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three-DOF heterodyne grating interferometer displacement measuremen...
- Patent number 9,903,704
- Issue date Feb 27, 2018
- Tsinghua University
- Yu Zhu
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus to fold optics in tools for measuring shape an...
- Patent number 9,903,708
- Issue date Feb 27, 2018
- KLA-Tencor Corporation
- Chunhai Wang
- G02 - OPTICS
Information Patent Grant
Method and apparatus for optically checking by interferometry the t...
- Patent number 9,879,978
- Issue date Jan 30, 2018
- Marposs Societa′ per Azioni
- Stefano Pareschi
- B24 - GRINDING POLISHING
Information Patent Grant
Laser heterodyne interferometric straightness measurement apparatus...
- Patent number 9,863,753
- Issue date Jan 9, 2018
- Zhejiang Sci-Tech University
- Benyong Chen
- G01 - MEASURING TESTING
Information Patent Grant
System and method for performing tear film structure measurement
- Patent number 9,833,139
- Issue date Dec 5, 2017
- ADOM, Advanced Optical Technologies Ltd.
- Yoel Arieli
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY
- Publication number 20240094642
- Publication date Mar 21, 2024
- KLA Corporation
- Franz Zach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFEROMETERS HAVING AN AMPLIFIED PIEZOELECTRIC ACTUATOR AND SYST...
- Publication number 20230378889
- Publication date Nov 23, 2023
- N-Sense, Inc.
- David Laird
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY
- Publication number 20220187718
- Publication date Jun 16, 2022
- KLA Corporation
- Franz Zach
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MULTI-PROBE GAUGE FOR SLAB CHARACTERIZATION
- Publication number 20200149867
- Publication date May 14, 2020
- Applejack 199 L.P.
- Wojciech J. WALECKI
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL SYSTEMS AND METHODS FOR MEASURING ROTATIONAL MOVEMENT
- Publication number 20200149864
- Publication date May 14, 2020
- OTM TECHNOLOGIES LTD.
- Opher Kinrot
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
MULTI-PROBE GAUGE FOR SLAB CHARACTERIZATION
- Publication number 20200149866
- Publication date May 14, 2020
- Applejack 199 L.P.
- Wojciech J. WALECKI
- G01 - MEASURING TESTING
Information Patent Application
OCT System
- Publication number 20200129067
- Publication date Apr 30, 2020
- OptoMedical Technologies GmbH
- Marc Krug
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD
- Publication number 20190293407
- Publication date Sep 26, 2019
- KOBELCO RESEARCH INSTITUTE, INC.
- Kazuhiko TAHARA
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
MULTI-PROBE GAUGE FOR SLAB CHARACTERIZATION
- Publication number 20190277622
- Publication date Sep 12, 2019
- Applejack 199 L.P.
- Wojciech J. WALECKI
- G01 - MEASURING TESTING
Information Patent Application
WEAR AMOUNT MEASURING APPARATUS AND METHOD, TEMPERATURE MEASURING A...
- Publication number 20190137260
- Publication date May 9, 2019
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- G01 - MEASURING TESTING
Information Patent Application
DEVICE AND METHOD FOR MEASURING HEIGHT IN THE PRESENCE OF THIN LAYERS
- Publication number 20180364028
- Publication date Dec 20, 2018
- UNITY SEMICONDUCTOR
- Jean-Philippe PIEL
- G01 - MEASURING TESTING
Information Patent Application
THREE-DIMENSIONAL SHAPE MEASURING APPARATUS USING DIFFRACTION GRATING
- Publication number 20180283852
- Publication date Oct 4, 2018
- KOH YOUNG TECHNOLOGY INC.
- Jang Il SER
- G01 - MEASURING TESTING
Information Patent Application
TEMPERATURE MEASURING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPO...
- Publication number 20180231369
- Publication date Aug 16, 2018
- TOKYO ELECTRON LIMITED
- Chishio KOSHIMIZU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NOISE REDUCTION TECHNIQUES, FRACTIONAL BI-SPECTRUM AND FRACTIONAL C...
- Publication number 20180128591
- Publication date May 10, 2018
- University of North Carolina at Charlotte
- Faramarz FARAHI
- G01 - MEASURING TESTING
Information Patent Application
Apparatus and Method for Detecting Surface Topography
- Publication number 20180070813
- Publication date Mar 15, 2018
- ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.
- Yoel Arieli
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR PERFORMING TEAR FILM STRUCTURE MEASUREMENT
- Publication number 20170332897
- Publication date Nov 23, 2017
- ADOM, ADVANCED OPTICAL TECHNOLOGIES LTD.
- Yoel Arieli
- G02 - OPTICS
Information Patent Application
Overlay and Semiconductor Process Control Using a Wafer Geometry Me...
- Publication number 20160372353
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G01 - MEASURING TESTING
Information Patent Application
Grazing and Normal Incidence Interferometer Having Common Reference...
- Publication number 20140333937
- Publication date Nov 13, 2014
- Dieter Mueller
- G01 - MEASURING TESTING
Information Patent Application
Interferometric Gravimeter Apparatus and Method
- Publication number 20140318239
- Publication date Oct 30, 2014
- MICRO-G LACOSTE, INC.
- Timothy M. Niebauer
- G01 - MEASURING TESTING
Information Patent Application
Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...
- Publication number 20140313516
- Publication date Oct 23, 2014
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Wafer Shape and Thickness Measurement System Utilizing Shearing Int...
- Publication number 20140293291
- Publication date Oct 2, 2014
- KLA-Tencor Corporation
- Shouhong Tang
- G01 - MEASURING TESTING
Information Patent Application
Interferometric Gradiometer Apparatus and Method
- Publication number 20140224012
- Publication date Aug 14, 2014
- MICRO-G LACOSTE, INC.
- Fred J. Klopping
- G01 - MEASURING TESTING
Information Patent Application
SIMULTANEOUS REFRACTIVE INDEX AND THICKNESS MEASUREMENTS WITH A MON...
- Publication number 20140168637
- Publication date Jun 19, 2014
- University of Florida Research Foundation, Inc.
- Xiaoke Wan
- G01 - MEASURING TESTING
Information Patent Application
EXTENDED RANGE IMAGING
- Publication number 20140160430
- Publication date Jun 12, 2014
- Optovue, Inc.
- Tony H. KO
- G01 - MEASURING TESTING
Information Patent Application
FOUR-AXIS FOUR-SUBDIVIDING INTERFEROMETER
- Publication number 20140160489
- Publication date Jun 12, 2014
- SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
- Zhaogu Cheng
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...
- Publication number 20140029016
- Publication date Jan 30, 2014
- KLA-Tencor Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
DUAL FOCUSING OPTICAL COHERENCE IMAGING SYSTEM
- Publication number 20130301006
- Publication date Nov 14, 2013
- Korea University Research and Business Foundation
- Beop Min Kim
- G01 - MEASURING TESTING
Information Patent Application
OVERLAY AND SEMICONDUCTOR PROCESS CONTROL USING A WAFER GEOMETRY ME...
- Publication number 20130089935
- Publication date Apr 11, 2013
- KLA-Tencor Corporation
- Pradeep Vukkadala
- G01 - MEASURING TESTING
Information Patent Application
TWO-DIMENSION PRECISION TRANSFER EQUIPMENT, THREE-DIMENSION PRECISI...
- Publication number 20130069294
- Publication date Mar 21, 2013
- MITUTOYO CORPORATION
- Hisayoshi Sakai
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFEC...
- Publication number 20120307255
- Publication date Dec 6, 2012
- Chang Seok KIM
- G01 - MEASURING TESTING

contacting different faces of object

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

System and method for determining post bonding overlay

Chamber for vibrational and environmental isolation of thin wafers

Laser interference device

Optical systems and methods for measuring rotational movement

Multi-probe gauge for slab characterization

Multi-probe gauge for slab characterization

Inspecting a multilayer sample

OCT system

Wear amount measuring apparatus and method, temperature measuring a...

Multi-beam laser coordinate measuring system

Shape measuring apparatus and shape measuring method using matched...

Inspecting a multilayer sample

Optical measuring device and method

Multi-probe gauge for slab characterization

Three-dimensional shape measuring apparatus using diffraction grating

Apparatus and method for detecting surface topography

Measurement apparatus and method that measure shape of surface whil...

Overlay and semiconductor process control using a wafer geometry me...

Noise reduction techniques, fractional bi-spectrum and fractional c...

Wear amount measuring apparatus and method, temperature measuring a...

Apparatus and method for measuring thickness

Method and system for determining in-plane distortions in a substrate

Method and apparatus for measuring biofilm thickness and topology

Bore testing device

Temperature measuring method, substrate processing system and compo...

Three-DOF heterodyne grating interferometer displacement measuremen...

Method and apparatus to fold optics in tools for measuring shape an...

Method and apparatus for optically checking by interferometry the t...

Laser heterodyne interferometric straightness measurement apparatus...

System and method for performing tear film structure measurement

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY

INTERFEROMETERS HAVING AN AMPLIFIED PIEZOELECTRIC ACTUATOR AND SYST...

SYSTEM AND METHOD FOR DETERMINING POST BONDING OVERLAY

MULTI-PROBE GAUGE FOR SLAB CHARACTERIZATION

OPTICAL SYSTEMS AND METHODS FOR MEASURING ROTATIONAL MOVEMENT

MULTI-PROBE GAUGE FOR SLAB CHARACTERIZATION

OCT System

SHAPE MEASURING APPARATUS AND SHAPE MEASURING METHOD

MULTI-PROBE GAUGE FOR SLAB CHARACTERIZATION

WEAR AMOUNT MEASURING APPARATUS AND METHOD, TEMPERATURE MEASURING A...

DEVICE AND METHOD FOR MEASURING HEIGHT IN THE PRESENCE OF THIN LAYERS

THREE-DIMENSIONAL SHAPE MEASURING APPARATUS USING DIFFRACTION GRATING

TEMPERATURE MEASURING METHOD, SUBSTRATE PROCESSING SYSTEM AND COMPO...

NOISE REDUCTION TECHNIQUES, FRACTIONAL BI-SPECTRUM AND FRACTIONAL C...

Apparatus and Method for Detecting Surface Topography

SYSTEM AND METHOD FOR PERFORMING TEAR FILM STRUCTURE MEASUREMENT

Overlay and Semiconductor Process Control Using a Wafer Geometry Me...

Grazing and Normal Incidence Interferometer Having Common Reference...

Interferometric Gravimeter Apparatus and Method

Reducing Registration Error of Front and Back Wafer Surfaces Utiliz...

Wafer Shape and Thickness Measurement System Utilizing Shearing Int...

Interferometric Gradiometer Apparatus and Method

SIMULTANEOUS REFRACTIVE INDEX AND THICKNESS MEASUREMENTS WITH A MON...

EXTENDED RANGE IMAGING

FOUR-AXIS FOUR-SUBDIVIDING INTERFEROMETER

METHOD AND APPARATUS TO FOLD OPTICS IN TOOLS FOR MEASURING SHAPE AN...

DUAL FOCUSING OPTICAL COHERENCE IMAGING SYSTEM

OVERLAY AND SEMICONDUCTOR PROCESS CONTROL USING A WAFER GEOMETRY ME...

TWO-DIMENSION PRECISION TRANSFER EQUIPMENT, THREE-DIMENSION PRECISI...

OPTICAL INTERFEROMETER SYSTEM WITH DAMPED VIBRATION AND NOISE EFFEC...