containing silicon

Industry

CPC
C23C16/401

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/401containing silicon

Industries

Patents Grantslast 30 patents

Information Patent Grant
Polycrystalline ceramic substrate and method of manufacture
- Patent number 12,224,173
- Issue date Feb 11, 2025
- QROMIS, Inc.
- Vladimir Odnoblyudov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching features using a targeted deposition for selecti...
- Patent number 12,217,955
- Issue date Feb 4, 2025
- Lam Research Corporation
- Wenchi Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High purity polysilocarb derived silicon carbide powder
- Patent number 12,215,031
- Issue date Feb 4, 2025
- Pallidus, Inc.
- Andrew R. Hopkins
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method for depositing film and film deposition system
- Patent number 12,205,817
- Issue date Jan 21, 2025
- Tokyo Electron Limited
- Hitoshi Kato
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 12,198,929
- Issue date Jan 14, 2025
- Kokusai Electric Corporation
- Hiroshi Ashihara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
SiO powder production method and spherical particulate SiO powder
- Patent number 12,195,345
- Issue date Jan 14, 2025
- Osaka Titanium Technologies Co., Ltd.
- Kohki Takeshita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modified stacks for 3D NAND
- Patent number 12,195,846
- Issue date Jan 14, 2025
- Applied Materials, Inc.
- Xinhai Han
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual RF for controllable film deposition
- Patent number 12,191,115
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Venkata Sharat Chandra Parimi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protection method and device for secondary battery, secondary batte...
- Patent number 12,191,458
- Issue date Jan 7, 2025
- CONTEMPORARY AMPEREX TECHNOLOGY (HONG KONG) LIMITED
- Ting Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of depositing silicon oxide films
- Patent number 12,188,121
- Issue date Jan 7, 2025
- ASM Genitech Korea Ltd.
- Tae Ho Yoon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Tin oxide mandrels in patterning
- Patent number 12,183,589
- Issue date Dec 31, 2024
- Lam Research Corporation
- Jengyi Yu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film formation method and film formation device
- Patent number 12,168,825
- Issue date Dec 17, 2024
- Tokyo Electron Limited
- Michitaka Aita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition method and deposition apparatus
- Patent number 12,163,220
- Issue date Dec 10, 2024
- Tokyo Electron Limited
- Yu Komai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ex situ coating of chamber components for semiconductor processing
- Patent number 12,163,219
- Issue date Dec 10, 2024
- Lam Research Corporation
- Damodar Rajaram Shanbhag
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming method for forming self-assembled monolayer on substrate
- Patent number 12,152,304
- Issue date Nov 26, 2024
- Tokyo Electron Limited
- Shuji Azumo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
RF pulsing assisted low-k film deposition with high mechanical stre...
- Patent number 12,125,675
- Issue date Oct 22, 2024
- Applied Materials, Inc.
- Ruitong Xiong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Single precursor low-k film deposition and UV cure for advanced tec...
- Patent number 12,119,223
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Bo Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mask, mask fabrication method, and mask assembly
- Patent number 12,116,660
- Issue date Oct 15, 2024
- Samsung Display Co., Ltd.
- Ji-Hee Son
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Selective silicon deposition
- Patent number 12,106,972
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Yifeng Zhou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 12,104,251
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Tatsuya Yamaguchi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of post-deposition treatment for silicon oxide film
- Patent number 12,100,588
- Issue date Sep 24, 2024
- ASM IP Holding B.V.
- Toshiya Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Switchable delivery for semiconductor processing system
- Patent number 12,094,689
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Sai Susmita Addepalli
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for forming a metal silicate film on a substrate in a react...
- Patent number 12,094,936
- Issue date Sep 17, 2024
- ASM IP Holding B.V.
- Fu Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Silicon oxycarbide-based environmental barrier coating
- Patent number 12,091,756
- Issue date Sep 17, 2024
- RTX Corporation
- Xia Tang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 12,094,708
- Issue date Sep 17, 2024
- Kokusai Electric Corporation
- Yoshitomo Hashimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Structure and manufacturing method of surface acoustic wave filter...
- Patent number 12,088,271
- Issue date Sep 10, 2024
- Shenzhen Newsonic Technologies Co., Ltd.
- Guojun Weng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 12,080,546
- Issue date Sep 3, 2024
- Kokusai Electric Corporation
- Kimihiko Nakatani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and system for forming patterned structures using multiple p...
- Patent number 12,074,022
- Issue date Aug 27, 2024
- ASM IP Holding B.V.
- Naoki Inoue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating of fluid-permeable materials
- Patent number 12,065,730
- Issue date Aug 20, 2024
- Picosun Oy
- Marko Pudas
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...
- Publication number 20250054749
- Publication date Feb 13, 2025
- Applied Materials, Inc.
- Kent Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20250046605
- Publication date Feb 6, 2025
- ASM IP HOLDING B.V.
- Wataru Adachi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD
- Publication number 20250034715
- Publication date Jan 30, 2025
- TOKYO ELECTRON LIMITED
- Shuji AZUMO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphou...
- Publication number 20250018093
- Publication date Jan 16, 2025
- THE TEXAS A&M UNIVERSITY SYSTEM
- Venu Varanasi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP
- Publication number 20250006489
- Publication date Jan 2, 2025
- ASM IP HOLDING B.V.
- Ranjit Borude
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240425972
- Publication date Dec 26, 2024
- Kokusai Electric Corporation
- Tomoya NAGAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240429042
- Publication date Dec 26, 2024
- CXMT Corporation
- Yihang WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...
- Publication number 20240417138
- Publication date Dec 19, 2024
- SiO2 Medical Products, Inc.
- John T. Felts
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...
- Publication number 20240410053
- Publication date Dec 12, 2024
- LAM RESEARCH CORPORATION
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...
- Publication number 20240392434
- Publication date Nov 28, 2024
- VERSUM MATERIALS US, LLC
- JIANHENG LI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION
- Publication number 20240384414
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Tsun Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNETIC BEAD AND MAGNETIC BEAD REAGENT
- Publication number 20240376575
- Publication date Nov 14, 2024
- SEIKO EPSON CORPORATION
- Fumio TAKAGI
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...
- Publication number 20240368766
- Publication date Nov 7, 2024
- ACM RESEARCH (SHANGHAI), INC.
- Hui Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CHEMICAL VAPOR DEPOSITION COATING PROCESS
- Publication number 20240359430
- Publication date Oct 31, 2024
- SILCOTEK CORP.
- Min YUAN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
IN-SITU CORE PROTECTION IN MULTI-PATTERNING
- Publication number 20240355624
- Publication date Oct 24, 2024
- LAM RESEARCH CORPORATION
- Nuoya Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OXIDE FILM REACTION SURFACE CONTROL AGENT, METHOD OF FORMING OXIDE...
- Publication number 20240352583
- Publication date Oct 24, 2024
- Soulbrain Co., LTD
- Seung Hyun LEE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ARTICLE HAVING WATER- AND OIL-REPELLENT SURFACE LAYER
- Publication number 20240343919
- Publication date Oct 17, 2024
- Shin-Etsu Chemical Co., Ltd.
- Takashi UCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ENVIRONMENTAL BARRIER COATING AND METHOD OF APPLYING THE SAME
- Publication number 20240343917
- Publication date Oct 17, 2024
- Raytheon Technologies Corporation
- James T. Beals
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
- Publication number 20240347337
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING AN INSULATING LAYER PATTERN, PRECURSORS USED IN...
- Publication number 20240347462
- Publication date Oct 17, 2024
- DONGJIN SEMICHEM CO., LTD.
- Ha Kyung YUN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...
- Publication number 20240332000
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Akhil Singhal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...
- Publication number 20240332023
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Ying-Bing JIANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF DIELECTRIC MATERIAL UPON...
- Publication number 20240332071
- Publication date Oct 3, 2024
- Intel Corporation
- Alireza Narimannezhad
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULATED ATOMIC LAYER DEPOSITION
- Publication number 20240332007
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Chan Myae Myae Soe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...
- Publication number 20240327976
- Publication date Oct 3, 2024
- Kokusai Electric Corporation
- Kimihiko NAKATANI
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
Additive Manufacturing Powder, Method For Producing Additive Manufa...
- Publication number 20240316630
- Publication date Sep 26, 2024
- SEIKO EPSON CORPORATION
- Yasutaka MATSUMOTO
- B22 - CASTING POWDER METALLURGY
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20240312777
- Publication date Sep 19, 2024
- Kokusai Electric Corporation
- Shingo NOHARA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED...
- Publication number 20240308856
- Publication date Sep 19, 2024
- Entegris, Inc.
- YoonHae Kim
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ANTENNA AND PLASMA PROCESSING APPARATUS
- Publication number 20240304416
- Publication date Sep 12, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi KATO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES
- Publication number 20240287673
- Publication date Aug 29, 2024
- Agilent Technologies, Inc.
- Elizabeth Carr
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

containing silicon

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Polycrystalline ceramic substrate and method of manufacture

Method for etching features using a targeted deposition for selecti...

High purity polysilocarb derived silicon carbide powder

Method for depositing film and film deposition system

Method of manufacturing semiconductor device, substrate processing...

SiO powder production method and spherical particulate SiO powder

Modified stacks for 3D NAND

Dual RF for controllable film deposition

Protection method and device for secondary battery, secondary batte...

Method of depositing silicon oxide films

Tin oxide mandrels in patterning

Film formation method and film formation device

Deposition method and deposition apparatus

Ex situ coating of chamber components for semiconductor processing

Film forming method for forming self-assembled monolayer on substrate

RF pulsing assisted low-k film deposition with high mechanical stre...

Single precursor low-k film deposition and UV cure for advanced tec...

Mask, mask fabrication method, and mask assembly

Selective silicon deposition

Substrate processing method and substrate processing apparatus

Method of post-deposition treatment for silicon oxide film

Switchable delivery for semiconductor processing system

Methods for forming a metal silicate film on a substrate in a react...

Silicon oxycarbide-based environmental barrier coating

Method of processing substrate, substrate processing apparatus, rec...

Structure and manufacturing method of surface acoustic wave filter...

High density plasma enhanced process chamber

Method of processing substrate, method of manufacturing semiconduct...

Method and system for forming patterned structures using multiple p...

Coating of fluid-permeable materials

Patents Applicationslast 30 patents

RF PULSING ASSISTED LOW-K FILM DEPOSITION WITH HIGH MECHANICAL STRE...

SUBSTRATE PROCESSING METHOD

FILM FORMING METHOD

Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphou...

METHODS AND ASSEMBLIES FOR DEPOSITING MATERIAL IN A GAP

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SEMICONDUCTOR STRUCTURE AND METHOD FOR MANUFACTURING SAME

PASSIVATION, pH PROTECTIVE OR LUBRICITY COATING FOR PHARMACEUTICAL...

CONFORMAL SILICON OXIDE DEPOSITION USING AMINOSILANE AND CHLOROSILA...

COMPOSITIONS AND METHODS USING SAME FOR DEPOSITION OF SILICON-CONTA...

DEVICE AND METHODS FOR CHEMICAL VAPOR DEPOSITION

MAGNETIC BEAD AND MAGNETIC BEAD REAGENT

THIN FILM DEPOSITION DEVICE, THIN FILM DEPOSITION METHOD AND THIN F...

THERMAL CHEMICAL VAPOR DEPOSITION COATING PROCESS

IN-SITU CORE PROTECTION IN MULTI-PATTERNING

OXIDE FILM REACTION SURFACE CONTROL AGENT, METHOD OF FORMING OXIDE...

ARTICLE HAVING WATER- AND OIL-REPELLENT SURFACE LAYER

ENVIRONMENTAL BARRIER COATING AND METHOD OF APPLYING THE SAME

LOW-K ALD GAP-FILL METHODS AND MATERIAL

METHOD FOR FORMING AN INSULATING LAYER PATTERN, PRECURSORS USED IN...

DOPED SILICON-CONTAINING MATERIALS WITH INCREASED ELECTRICAL, MECHA...

METHOD OF MAKING SILICIDE IN HIGH-ASPECT RATIO STRUCTURES BY HYBRID...

PLASMA ENHANCED ATOMIC LAYER DEPOSITION OF DIELECTRIC MATERIAL UPON...

MODULATED ATOMIC LAYER DEPOSITION

METHOD OF PROCESSING SUBSTRATE, SUBSTRATE PROCESSING APPARATUS, AND...

Additive Manufacturing Powder, Method For Producing Additive Manufa...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

SILICON PRECURSOR MATERIALS, SILICON-CONTAINING FILMS, AND RELATED...

ANTENNA AND PLASMA PROCESSING APPARATUS

METAL COMPONENTS WITH INERT VAPOR PHASE COATING ON INTERNAL SURFACES